公开(公告)号：US20160251538A1

公开(公告)日：2016-09-01

申请号：US15052923

申请日：2016-02-25

申请人： Dow Global Technologies LLC ,  Rohm and Haas Electronic Materials LLC ,  THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

发明人： Phillip D. Hustad ,  Peter Trefonas, III ,  Valeriy V. Ginzburg ,  Bongkeun Kim ,  Glenn H. Fredrickson

IPC分类号： C09D153/00 ,  C09D7/12 ,  C09D5/00

CPC分类号： C09D153/00 ,  C08F293/005 ,  C08F297/026 ,  C08F2438/01 ,  C08G2261/418 ,  C08L53/00 ,  C09D5/00 ,  C09D7/65

摘要： Disclosed herein is a composition comprising a block copolymer; where the block copolymer comprises a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other and the block copolymer forms a phase separated structure; an additive polymer; where the additive polymer comprises a bottlebrush polymer; and where the bottlebrush polymer comprises a polymer that is chemically and structurally the same as one of the polymers in the block copolymer or where the bottlebrush polymer comprises a polymer that has a preferential interaction with one of the blocks of the block copolymers; and a solvent.

摘要翻译： 本文公开了包含嵌段共聚物的组合物; 其中所述嵌段共聚物包含第一聚合物和第二聚合物; 其中嵌段共聚物的第一聚合物和第二聚合物彼此不同，并且嵌段共聚物形成相分离结构; 添加剂聚合物; 其中所述添加剂聚合物包含瓶刷聚合物; 并且其中瓶刷聚合物包含与嵌段共聚物中的一种聚合物化学和结构相同的聚合物，或者其中瓶刷聚合物包含与嵌段共聚物嵌段之一具有优先相互作用的聚合物; 和溶剂。

公开(公告)号：US09772554B2

公开(公告)日：2017-09-26

申请号：US15052922

申请日：2016-02-25

申请人： Dow Global Technologies LLC ,  Rohm and Haas Electronic Materials LLC ,  THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

发明人： Phillip D. Hustad ,  Peter Trefonas, III ,  Valeriy V. Ginzburg ,  Bongkeun Kim ,  Glenn H. Fredrickson

IPC分类号： G03F7/004 ,  G03F7/40 ,  G03F7/16 ,  H01L21/027 ,  C09D153/00 ,  C09D5/00 ,  C09D7/12 ,  G03F7/20 ,  G03F7/00 ,  H01L21/3065 ,  H01L21/02 ,  B82Y40/00 ,  B82Y10/00 ,  C08F293/00 ,  C08F299/00 ,  C08L53/00

CPC分类号： G03F7/165 ,  B82Y10/00 ,  B82Y40/00 ,  C08F293/005 ,  C08F299/00 ,  C08F2438/01 ,  C08L53/00 ,  C09D5/00 ,  C09D153/00 ,  G03F7/0002 ,  G03F7/0035 ,  G03F7/2022 ,  G03F7/2059 ,  G03F7/40 ,  H01L21/02112 ,  H01L21/0271 ,  H01L21/0274 ,  H01L21/3065 ,  C08L51/06

摘要： Disclosed herein is a pattern forming method comprising providing a substrate devoid of a layer of a brush polymer; disposing upon the substrate a composition comprising a block copolymer comprising a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other; and an additive polymer where the additive polymer comprises a bottlebrush polymer; where the bottlebrush polymer comprises a polymeric chain backbone and a grafted polymer that are bonded to each other; and where the bottlebrush polymer comprises a polymer that is chemically and structurally the same as one of the polymers in the block copolymer or where the bottlebrush polymer comprises a polymer that has a preferential interaction with one of the blocks of the block copolymers; and a solvent; and annealing the composition to facilitate domain separation between the first polymer and the second polymer.

公开(公告)号：US09840637B2

公开(公告)日：2017-12-12

申请号：US15052923

申请日：2016-02-25

申请人： Dow Global Technologies LLC ,  Rohm and Haas Electronic Materials LLC ,  THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

发明人： Phillip D. Hustad ,  Peter Trefonas, III ,  Valeriy V. Ginzburg ,  Bongkeun Kim ,  Glenn H. Fredrickson

IPC分类号： C08L53/00 ,  C09D153/00 ,  C09D5/00 ,  C09D7/12 ,  C08F293/00 ,  C08F297/02

CPC分类号： C09D153/00 ,  C08F293/005 ,  C08F297/026 ,  C08F2438/01 ,  C08G2261/418 ,  C08L53/00 ,  C09D5/00 ,  C09D7/65

摘要： Disclosed herein is a composition comprising a block copolymer; where the block copolymer comprises a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other and the block copolymer forms a phase separated structure; an additive polymer; where the additive polymer comprises a bottlebrush polymer; and where the bottlebrush polymer comprises a polymer that is chemically and structurally the same as one of the polymers in the block copolymer or where the bottlebrush polymer comprises a polymer that has a preferential interaction with one of the blocks of the block copolymers; and a solvent.

公开(公告)号：US10351727B2

公开(公告)日：2019-07-16

申请号：US15052927

申请日：2016-02-25

申请人： Dow Global Technologies LLC ,  Rohm and Haas Electronic Materials LLC ,  THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

发明人： Phillip D. Hustad ,  Peter Trefonas, III ,  Valeriy V. Ginzburg ,  Bongkeun Kim ,  Glenn H. Fredrickson

IPC分类号： B05D3/02 ,  C09D153/00 ,  G03F7/00

摘要： Disclosed herein is a pattern forming method comprising disposing upon a substrate a composition comprising a block copolymer; where the block copolymer comprises a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other and the block copolymer forms a phase separated structure; an additive polymer; where the additive polymer comprises a bottlebrush polymer; and where the bottlebrush polymer comprises a polymer that has a lower or a higher surface energy than the block copolymer; and a solvent; and annealing the composition to facilitate domain separation between the first polymer and the second polymer of the block copolymer to form a morphology of periodic domains formed from the first polymer and the second polymer; where a longitudinal axis of the periodic domains are parallel to the substrate.

公开(公告)号：US09765214B2

公开(公告)日：2017-09-19

申请号：US15052925

申请日：2016-02-25

申请人： Dow Global Technologies LLC ,  Rohm and Haas Electronic Materials LLC ,  THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

发明人： Phillip D. Hustad ,  Peter Trefonas, III ,  Valeriy V. Ginzburg ,  Bongkeun Kim ,  Glenn H. Fredrickson

IPC分类号： C08L51/00 ,  C08L53/00 ,  B82Y40/00 ,  B82Y30/00

CPC分类号： C08L53/00 ,  B82Y30/00 ,  B82Y40/00 ,  C08G2261/126 ,  C08G2261/136 ,  C08G2261/1426 ,  C08G2261/146 ,  C08G2261/3324 ,  C08G2261/354 ,  C08G2261/418 ,  C08L51/003 ,  C08L83/10 ,  C08L65/00

摘要： Disclosed herein is a composition comprising a block copolymer; where the block copolymer comprises a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other and the block copolymer forms a phase separated structure; an additive polymer; where the additive polymer comprises a bottle brush polymer; where the bottle brush polymer comprises a homopolymer that is the chemically and structurally the same as one of the polymers in the block copolymer or where the additive polymer comprises a graft copolymer that has a preferential interaction with one of the blocks of the block copolymers; and a solvent.

公开(公告)号：US20160254141A1

公开(公告)日：2016-09-01

申请号：US15052922

申请日：2016-02-25

申请人： Dow Global Technologies LLC ,  Rohm and Haas Electronic Materials LLC ,  THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

发明人： Phillip D. Hustad ,  Peter Trefonas, III ,  Valeriy V. Ginzburg ,  Bongkeun Kim ,  Glenn H. Fredrickson

IPC分类号： H01L21/027 ,  H01L21/02 ,  C09D7/12 ,  C09D153/00 ,  C09D5/00

CPC分类号： G03F7/165 ,  B82Y10/00 ,  B82Y40/00 ,  C08F293/005 ,  C08F299/00 ,  C08F2438/01 ,  C08L53/00 ,  C09D5/00 ,  C09D153/00 ,  G03F7/0002 ,  G03F7/0035 ,  G03F7/2022 ,  G03F7/2059 ,  G03F7/40 ,  H01L21/02112 ,  H01L21/0271 ,  H01L21/0274 ,  H01L21/3065 ,  C08L51/06

摘要： Disclosed herein is a pattern forming method comprising providing a substrate devoid of a layer of a brush polymer; disposing upon the substrate a composition comprising a block copolymer comprising a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other; and an additive polymer where the additive polymer comprises a bottlebrush polymer; where the bottlebrush polymer comprises a polymeric chain backbone and a grafted polymer that are bonded to each other; and where the bottlebrush polymer comprises a polymer that is chemically and structurally the same as one of the polymers in the block copolymer or where the bottlebrush polymer comprises a polymer that has a preferential interaction with one of the blocks of the block copolymers; and a solvent; and annealing the composition to facilitate domain separation between the first polymer and the second polymer.

摘要翻译： 本文公开了一种图案形成方法，包括提供没有刷聚合物层的基底; 将包含第一聚合物和第二聚合物的嵌段共聚物的组合物置于基材上; 其中所述嵌段共聚物的第一聚合物和第二聚合物彼此不同; 和添加剂聚合物，其中所述添加剂聚合物包含瓶刷聚合物; 其中瓶刷聚合物包含彼此结合的聚合物链主链和接枝聚合物; 并且其中瓶刷聚合物包含与嵌段共聚物中的一种聚合物化学和结构相同的聚合物，或者其中瓶刷聚合物包含与嵌段共聚物嵌段之一具有优先相互作用的聚合物; 和溶剂; 并且对组合物退火以促进第一聚合物和第二聚合物之间的区域分离。

公开(公告)号：US20160251539A1

公开(公告)日：2016-09-01

申请号：US15052927

申请日：2016-02-25

申请人： Dow Global Technologies LLC ,  Rohm and Haas Electronic Materials LLC ,  THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

发明人： Phillip D. Hustad ,  Peter Trefonas, III ,  Valeriy V. Ginzburg ,  Bongkeun Kim ,  Glenn H. Fredrickson

IPC分类号： C09D153/00 ,  B05D3/02

CPC分类号： C09D153/00 ,  G03F7/0002

摘要： Disclosed herein is a pattern forming method comprising disposing upon a substrate a composition comprising a block copolymer; where the block copolymer comprises a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other and the block copolymer forms a phase separated structure; an additive polymer; where the additive polymer comprises a bottlebrush polymer; and where the bottlebrush polymer comprises a polymer that has a lower or a higher surface energy than the block copolymer; and a solvent; and annealing the composition to facilitate domain separation between the first polymer and the second polymer of the block copolymer to form a morphology of periodic domains formed from the first polymer and the second polymer; where a longitudinal axis of the periodic domains are parallel to the substrate.

摘要翻译： 本文公开了一种图案形成方法，包括在基底上设置包含嵌段共聚物的组合物; 其中所述嵌段共聚物包含第一聚合物和第二聚合物; 其中嵌段共聚物的第一聚合物和第二聚合物彼此不同，并且嵌段共聚物形成相分离结构; 添加剂聚合物; 其中所述添加剂聚合物包含瓶刷聚合物; 并且其中所述瓶刷聚合物包含具有比所述嵌段共聚物更低或更高表面能的聚合物; 和溶剂; 并且对所述组合物退火以促进所述第一聚合物和所述嵌段共聚物的第二聚合物之间的区域分离，以形成由所述第一聚合物和所述第二聚合物形成的周期性畴的形态; 其中周期性畴的纵轴平行于衬底。

公开(公告)号：US20160251508A1

公开(公告)日：2016-09-01

申请号：US15052925

申请日：2016-02-25

申请人： Dow Global Technologies LLC ,  Rohm and Haas Electronic Materials LLC ,  THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

发明人： Phillip D. Hustad ,  Peter Trefonas, III ,  Valeriy V. Ginzburg ,  Bongkeun Kim ,  Glenn H. Fredrickson

IPC分类号： C08L53/00

CPC分类号： C08L53/00 ,  B82Y30/00 ,  B82Y40/00 ,  C08G2261/126 ,  C08G2261/136 ,  C08G2261/1426 ,  C08G2261/146 ,  C08G2261/3324 ,  C08G2261/354 ,  C08G2261/418 ,  C08L51/003 ,  C08L83/10 ,  C08L65/00

摘要： Disclosed herein is a composition comprising a block copolymer; where the block copolymer comprises a first polymer and a second polymer; where the first polymer and the second polymer of the block copolymer are different from each other and the block copolymer forms a phase separated structure; an additive polymer; where the additive polymer comprises a bottle brush polymer; where the bottle brush polymer comprises a homopolymer that is the chemically and structurally the same as one of the polymers in the block copolymer or where the additive polymer comprises a graft copolymer that has a preferential interaction with one of the blocks of the block copolymers; and a solvent.

摘要翻译： 本文公开了包含嵌段共聚物的组合物; 其中所述嵌段共聚物包含第一聚合物和第二聚合物; 其中嵌段共聚物的第一聚合物和第二聚合物彼此不同，并且嵌段共聚物形成相分离结构; 添加剂聚合物; 其中所述添加剂聚合物包含瓶刷聚合物; 其中瓶刷聚合物包含与嵌段共聚物中的一种聚合物化学和结构相同的均聚物，或者其中添加剂聚合物包含与嵌段共聚物嵌段之一具有优先相互作用的接枝共聚物; 和溶剂。