BULK ACOUSTIC WAVE RESONATOR STRUCTURE, A MANUFACTURING METHOD THEREOF, AND A DUPLEXER USING THE SAME
    8.
    发明申请
    BULK ACOUSTIC WAVE RESONATOR STRUCTURE, A MANUFACTURING METHOD THEREOF, AND A DUPLEXER USING THE SAME 有权
    大容量声波谐振器结构及其制造方法,以及使用其的双工器

    公开(公告)号:US20120049976A1

    公开(公告)日:2012-03-01

    申请号:US13088905

    申请日:2011-04-18

    IPC分类号: H03H9/70 H03H3/02 H01L41/047

    摘要: A Bulk Acoustic Wave Resonator (BAWR), a method of manufacturing of the BAWR, and duplexer including the BAWR are provided. The BAWR may include a first substrate including a via hole formed in a predetermined area of a bottom surface of the first substrate. A first air cavity may be formed above the first substrate, and a first lamination resonating portion may be laminated above the first air cavity in sequence of a lower electrode, a piezoelectric layer, and an upper electrode. A second air cavity may be formed above the first substrate, and a second lamination resonating portion may be laminated above the second air cavity in sequence of the lower electrode, the piezoelectric layer, and the upper electrode. The first lamination resonating portion and the second lamination resonating portion may be connected via either the lower electrode or the upper electrode. A first electrode portion may include a third air cavity formed on a bottom surface of either the lower electrode or the upper electrode connecting between the first lamination resonating portion and the second lamination resonating portion.

    摘要翻译: 提供了一种体声波谐振器(BAWR),一种制造BAWR的方法,以及包括BAWR的双工器。 BAWR可以包括第一基板,其包括形成在第一基板的底表面的预定区域中的通孔。 可以在第一基板上形成第一空气腔,并且第一层叠谐振部分可以按照下电极,压电层和上电极的顺序层叠在第一空气腔的上方。 可以在第一基板的上方形成第二空气腔,并且第二层压谐振部分可以按照下电极,压电层和上电极的顺序层叠在第二空气腔的上方。 第一层叠谐振部分和第二层叠谐振部分可以通过下电极或上电极连接。 第一电极部分可以包括形成在第一层压谐振部分和第二层压谐振部分之间的下电极或上电极的底表面上的第三空腔。

    Bulk acoustic wave resonator structure, a manufacturing method thereof, and a duplexer using the same
    10.
    发明授权
    Bulk acoustic wave resonator structure, a manufacturing method thereof, and a duplexer using the same 有权
    体声波谐振器结构,其制造方法以及使用其的双工器

    公开(公告)号:US08648671B2

    公开(公告)日:2014-02-11

    申请号:US13088905

    申请日:2011-04-18

    IPC分类号: H03H9/70 H03H9/13 H03H9/54

    摘要: A Bulk Acoustic Wave Resonator (BAWR), a method of manufacturing of the BAWR, and duplexer including the BAWR are provided. The BAWR may include a first substrate including a via hole formed in a predetermined area of a bottom surface of the first substrate. A first air cavity may be formed above the first substrate, and a first lamination resonating portion may be laminated above the first air cavity in sequence of a lower electrode, a piezoelectric layer, and an upper electrode. A second air cavity may be formed above the first substrate, and a second lamination resonating portion may be laminated above the second air cavity in sequence of the lower electrode, the piezoelectric layer, and the upper electrode. The first lamination resonating portion and the second lamination resonating portion may be connected via either the lower electrode or the upper electrode. A first electrode portion may include a third air cavity formed on a bottom surface of either the lower electrode or the upper electrode connecting between the first lamination resonating portion and the second lamination resonating portion.

    摘要翻译: 提供了一种体声波谐振器(BAWR),一种制造BAWR的方法,以及包括BAWR的双工器。 BAWR可以包括第一基板,其包括形成在第一基板的底表面的预定区域中的通孔。 可以在第一基板上形成第一空气腔,并且第一层叠谐振部分可以按照下电极,压电层和上电极的顺序层叠在第一空气腔的上方。 可以在第一基板的上方形成第二空气腔,并且第二层压谐振部分可以按照下电极,压电层和上电极的顺序层叠在第二空气腔的上方。 第一层叠谐振部分和第二层叠谐振部分可以通过下电极或上电极连接。 第一电极部分可以包括形成在第一层压谐振部分和第二层压谐振部分之间的下电极或上电极的底表面上的第三空腔。