公开(公告)号：US20150104620A1

公开(公告)日：2015-04-16

申请号：US14577101

申请日：2014-12-19

申请人： EBARA CORPORATION

发明人： Tamami TAKAHASHI ,  Masaya SEKI ,  Hiroaki KUSA ,  Kenji YAMAGUCHI ,  Masayuki NAKANISHI

IPC分类号： B24B21/00 ,  B24B9/06

CPC分类号： B24B21/002 ,  B24B9/065 ,  B24B21/004 ,  B24B21/008 ,  B24B21/20 ,  B24B27/0076 ,  B24B37/042 ,  B24B37/30 ,  B24B41/068 ,  B24B49/00 ,  Y10T428/24777

摘要： A polishing apparatus polishes a periphery of a substrate. This polishing apparatus includes a rotary holding mechanism configured to hold the substrate horizontally and rotate the substrate, plural polishing head assemblies provided around the substrate, plural tape supplying and recovering mechanisms configured to supply polishing tapes to the plural polishing head assemblies and recover the polishing tapes from the plural polishing head assemblies, and plural moving mechanisms configured to move the plural polishing head assemblies in radial directions of the substrate held by the rotary holding mechanism. The tape supplying and recovering mechanisms are located outwardly of the plural polishing head assemblies in the radial directions of the substrate, and the tape supplying and recovering mechanisms are fixed in position.

摘要翻译： 抛光装置抛光基板的周边。 该抛光装置包括：旋转保持机构，被配置为水平地保持基板并旋转基板;设置在基板周围的多个抛光头组件;多个胶带供给和恢复机构，被配置为向多个抛光头组件提供研磨带，并回收抛光带 以及多个移动机构，其构造成沿着由旋转保持机构保持的基板的径向方向移动多个研磨头组件。 胶带供给和回收机构在基板的径向方向上位于多个研磨头组件的外侧，并且胶带供给和回收机构被固定就位。

公开(公告)号：US20150101752A1

公开(公告)日：2015-04-16

申请号：US14579292

申请日：2014-12-22

申请人： EBARA CORPORATION

发明人： Mitsuo TADA ,  Yasunari SUTO ,  Hirofumi ICHIHARA ,  Kenya ITO ,  Tamami TAKAHASHI

IPC分类号： H01L21/67 ,  G01N29/44

CPC分类号： H01L21/67242 ,  B24B9/065 ,  B24B49/12 ,  G01N21/9501 ,  G01N29/44 ,  H01L21/67023 ,  H01L21/67075

摘要： A projecting/receiving unit (52) projects a laser light to a peripheral portion (30) and receives the reflected light while a liquid is being fed to a substrate (14) and is flowing on the peripheral portion (30). A signal processing controller (54) processes the electric signal of the reflected light to decide the state of the peripheral portion (30). The state of the peripheral portion being polished is monitored. Moreover, the polish end point is detected. A transmission wave other than the laser light may also be used. The peripheral portion (30) may also be enclosed by a passage forming member thereby to form a passage properly. The peripheral portion can be properly measured even in the situation where the liquid is flowing on the substrate peripheral portion.

摘要翻译： 投射/接收单元（52）将激光投射到周边部分（30）并且在液体被供给到基板（14）的同时接收反射光并在周边部分（30）上流动。 信号处理控制器（54）处理反射光的电信号以决定周边部分（30）的状态。 监视被抛光的周边部分的状态。 此外，检测到抛光终点。 也可以使用激光以外的透射波。 周边部分（30）也可以由通道形成部件包围，从而适当地形成通道。 即使在液体在基板周边部分上流动的情况下，也可以适当地测量周边部分。

公开(公告)号：US20190022587A1

公开(公告)日：2019-01-24

申请号：US16138232

申请日：2018-09-21

申请人： EBARA CORPORATION

发明人： Akira GOTO ,  Tamami TAKAHASHI ,  Motohiko NOHMI ,  Masanori GOTO

IPC分类号： B01D61/06 ,  B01D63/12 ,  B01D61/02 ,  B01D61/58

摘要： A seawater desalination system for desalinating seawater by removing salinity from the seawater and an energy recovery apparatus which is preferably used in the seawater desalination system. The energy recovery apparatus includes a cylindrical chamber being installed such that a longitudinal direction of the chamber is placed in a vertical direction, a concentrated seawater port for supplying and discharging the concentrated seawater, a seawater port for supplying and discharging the seawater, a flow resistor provided at a concentrated seawater port side in the chamber, and a flow resistor provided at a seawater port side in the chamber. Each of the flow resistor provided at the concentrated seawater port side and the seawater port side comprises at least one perforated circular plate, and each perforated circular plate has a plurality of holes formed in an outer circumferential area outside a circle having a predetermined diameter on the perforated circular plate.

公开(公告)号：US20170252700A1

公开(公告)日：2017-09-07

申请号：US15504230

申请日：2015-08-28

申请人： EBARA CORPORATION

发明人： Akira GOTO ,  Tamami TAKAHASHI ,  Motohiko NOHMI ,  Masanori GOTO

IPC分类号： B01D61/58 ,  B01D63/12 ,  C02F1/44 ,  B01D61/02

CPC分类号： B01D61/06 ,  B01D61/02 ,  B01D61/025 ,  B01D61/08 ,  B01D61/58 ,  C02F1/44 ,  C02F1/441 ,  C02F2103/08 ,  C02F2303/10 ,  Y02A20/131 ,  Y02W10/30

摘要： The present invention relates to a seawater desalination system for desalinating seawater by removing salinity from the seawater and an energy recovery apparatus which is preferably used in the seawater desalination system. The energy recovery apparatus includes a cylindrical chamber (CH) being installed such that a longitudinal direction of the chamber is placed in a vertical direction, a concentrated seawater port (P1) for supplying and discharging the concentrated seawater, a seawater port (P2) for supplying and discharging the seawater, a flow resistor (23) provided at a concentrated seawater port (P1) side in the chamber (CH), and a flow resistor (23) provided at a seawater port (P2) side in the chamber (CH). Each of the flow resistor (23) provided at the concentrated seawater port (P1) side and the seawater port (P2) side comprises at least one perforated circular plate, and each perforated circular plate has a plurality of holes formed in an outer circumferential area outside a circle having a predetermined diameter on the perforated circular plate.

公开(公告)号：US20170216989A1

公开(公告)日：2017-08-03

申请号：US15485446

申请日：2017-04-12

申请人： EBARA CORPORATION

发明人： Kazuaki MAEDA ,  Tamami TAKAHASHI ,  Masaya SEKI ,  Hiroaki KUSA

IPC分类号： B24B21/00 ,  B24B41/06 ,  B24B21/06 ,  B24B9/06 ,  B24B21/08

CPC分类号： B24B21/002 ,  B24B9/065 ,  B24B21/004 ,  B24B21/06 ,  B24B21/08 ,  B24B37/04 ,  B24B41/06

摘要： A polishing apparatus polishes a periphery of a substrate by bringing a polishing tool into sliding contact with the substrate. The polishing apparatus includes a substrate-holding mechanism configured to hold a substrate and rotate the substrate, a polishing mechanism configured to press a polishing tool against a periphery of the substrate so as to polish the periphery, and a periphery-supporting mechanism configured to support the periphery of the substrate by a fluid. The periphery-supporting mechanism is configured to support a surface of the substrate from an opposite side or the same side of the periphery of the substrate.

公开(公告)号：US20160051933A1

公开(公告)日：2016-02-25

申请号：US14781375

申请日：2014-03-28

申请人： EBARA CORPORATION

发明人： Tamami TAKAHASHI ,  Masanori GOTO ,  Kazuaki MAEDA

IPC分类号： B01D61/06 ,  B01D61/02 ,  C02F1/44

CPC分类号： B01D61/06 ,  B01D61/025 ,  B01D61/10 ,  B01D2313/08 ,  B01D2313/246 ,  C02F1/441 ,  C02F2103/08 ,  C02F2303/10 ,  F15D1/025 ,  G01F1/42 ,  Y02A20/131 ,  Y02W10/30

摘要： An energy recovery apparatus used in the seawater desalination system includes a cylindrical chamber (CH) having a space for containing concentrated seawater and seawater therein and being installed such that a longitudinal direction of the chamber is placed in a vertical direction, a concentrated seawater port (P1) provided at the lower part of the chamber (CH) for supplying and discharging the concentrated seawater, a seawater port (P2) provided at the upper part of the chamber (CH) for supplying and discharging the seawater, a flow resistor (23) provided at a concentrated seawater port side in the chamber, and a flow resistor (23) provided at a seawater port side in the chamber. A circular plate (30) having a hole at the center thereof is provided between the concentrated seawater port (P1) and the flow resistor (23), or between the seawater port (P2) and the flow resistor (23).

摘要翻译： 在海水淡化系统中使用的能量回收装置包括具有容纳浓缩海水和海水的空间的圆筒形室（CH），并且被安装成使得室的纵向方向沿垂直方向放置，集中的海水口 设置在用于供应和排出浓缩海水的腔室（CH）下部的P1），设置在用于供给和排出海水的腔室（CH）上部的海水​​口（P2），流阻器 ）设置在所述室中的浓缩海水口侧，以及设置在所述室中的海水口侧的流阻器（23）。 在集中的海水口（P1）和流阻器（23）之间，或者在海水口（P2）和流阻器（23）之间设置有在其中心具有孔的圆板（30）。

公开(公告)号：US20140021122A1

公开(公告)日：2014-01-23

申请号：US14027448

申请日：2013-09-16

申请人： EBARA CORPORATION

发明人： Tamami TAKAHASHI ,  Masao SHINODA ,  Masato EGUCHI ,  Masanori GOTO

IPC分类号： B01D61/06

CPC分类号： B01D61/06 ,  B01D61/025 ,  B01D61/08 ,  B01D61/10 ,  B01D63/02 ,  B01D2313/246 ,  C02F1/441 ,  C02F2201/004 ,  C02F2303/10 ,  Y02A20/131 ,  Y02W10/30

摘要： A seawater desalination system produces fresh water from seawater by passing the seawater pressurized by a pump through a reverse-osmosis membrane-separation apparatus to separate the seawater into fresh water and concentrated seawater. An energy exchange chamber is provided for utilizing pressure energy of the concentrated seawater discharged from the reverse-osmosis membrane-separation apparatus as energy for pressurizing part of the seawater. The energy exchange chamber includes a concentrated seawater port for introducing and discharging the concentrated seawater, a seawater port for introducing and discharging the seawater, and a plurality of partitioned fluid passages provided in the chamber to allow the concentrated seawater port and the seawater port to communicate with each other.

摘要翻译： 海水淡化系统通过将泵加压的海水通过反渗透膜分离装置从海水中产生淡水，将海水分离成淡水和浓缩海水。 提供了一种能量交换室，用于利用从反渗透膜分离装置排出的浓缩海水的压力作为用于对部分海水加压的能量。 能量交换室包括用于引入和排出浓缩海水的集中海水口，用于引入和排出海水的海水口，以及设置在室中的多个分隔流体通道，以允许浓缩的海水口和海水口连通 与彼此。

公开(公告)号：US20170072528A1

公开(公告)日：2017-03-16

申请号：US15341534

申请日：2016-11-02

申请人： EBARA CORPORATION

发明人： Tamami TAKAHASHI ,  Masaya SEKI ,  Hiroaki KUSA ,  Kenji YAMAGUCHI ,  Masayuki NAKANISHI

IPC分类号： B24B21/00 ,  B24B49/00 ,  B24B27/00 ,  B24B41/06 ,  B24B9/06 ,  B24B21/20

CPC分类号： B24B21/002 ,  B24B9/065 ,  B24B21/004 ,  B24B21/008 ,  B24B21/20 ,  B24B27/0076 ,  B24B37/042 ,  B24B37/30 ,  B24B41/068 ,  B24B49/00 ,  Y10T428/24777

摘要： A polishing apparatus polishes a periphery of a substrate. This polishing apparatus includes a rotary holding mechanism configured to hold the substrate horizontally and rotate the substrate, plural polishing head assemblies provided around the substrate, plural tape supplying and recovering mechanisms configured to supply polishing tapes to the plural polishing head assemblies and recover the polishing tapes from the plural polishing head assemblies, and plural moving mechanisms configured to move the plural polishing head assemblies in radial directions of the substrate held by the rotary holding mechanism. The tape supplying and recovering mechanisms are located outwardly of the plural polishing head assemblies in the radial directions of the substrate, and the tape supplying and recovering mechanisms are fixed in position.

摘要翻译： 抛光装置抛光基板的周边。 该抛光装置包括：旋转保持机构，被配置为水平地保持基板并旋转基板;设置在基板周围的多个抛光头组件;多个胶带供给和恢复机构，被配置为向多个抛光头组件提供研磨带，并回收抛光带 以及多个移动机构，其构造成沿着由旋转保持机构保持的基板的径向方向移动多个研磨头组件。 胶带供给和回收机构在基板的径向方向上位于多个研磨头组件的外侧，并且胶带供给和回收机构被固定就位。

公开(公告)号：US20130233785A1

公开(公告)日：2013-09-12

申请号：US13786647

申请日：2013-03-06

申请人： EBARA CORPORATION

发明人： Tamami TAKAHASHI ,  Masanori GOTO ,  Kazuaki MAEDA

IPC分类号： F03B17/00 ,  C02F1/44

CPC分类号： F03B17/00 ,  B01D61/06 ,  B01D2313/246 ,  C02F1/441 ,  C02F2103/08 ,  C02F2303/10 ,  F03B13/00 ,  F05B2220/62 ,  Y02A20/131 ,  Y02W10/30

摘要： An energy recovery apparatus exchanges pressure energy between concentrated seawater discharged from a reverse-osmosis membrane-separation apparatus and a part of seawater to be treated by the reverse-osmosis membrane-separation apparatus in a seawater desalination system for producing fresh water from the seawater. The energy recovery apparatus includes two perforated plates provided at a concentrated seawater port side in a chamber, and two perforated plates provided at a seawater port side in the chamber. The two perforated plates comprises a first perforated plate and a second perforated plate. The first perforated plate and the second perforated plate at the concentrated seawater port side and the seawater port side are arranged to meet certain requirements including one of an open area ratio of the first perforated plate, an open area ratio of the second perforated plate, and a distance between the first perforated plate and the second perforated plate.

摘要翻译： 一种能量回收装置，在从海水中生成淡水的海水淡化系统中，通过反渗透膜分离装置将从反渗透膜分离装置排出的浓缩海水与一部分待处理海水的压力能量进行交换。 能量回收装置包括设置在室中的集中海水口侧的两个多孔板，以及设置在室中的海水口侧的两个多孔板。 两个多孔板包括第一多孔板和第二多孔板。 在集中海水口侧和海水口侧的第一多孔板和第二多孔板被设置成满足一定要求，包括第一多孔板的开口面积比，第二多孔板的开口面积比，以及 第一多孔板和第二多孔板之间的距离。

公开(公告)号：US20180257035A1

公开(公告)日：2018-09-13

申请号：US15977109

申请日：2018-05-11

申请人： EBARA CORPORATION

发明人： Akira GOTO ,  Tamami TAKAHASHI ,  Motohiko NOHMI ,  Masanori GOTO

IPC分类号： B01D61/06 ,  B01D61/02 ,  B01D61/58

CPC分类号： B01D61/06 ,  B01D61/02 ,  B01D61/025 ,  B01D61/08 ,  B01D61/58 ,  B01D63/12 ,  C02F1/44 ,  C02F1/441 ,  C02F2103/08 ,  C02F2303/10 ,  Y02A20/131 ,  Y02W10/30

摘要： The present invention relates to a seawater desalination system for desalinating seawater by removing salinity from the seawater and an energy recovery apparatus which is preferably used in the seawater desalination system. The energy recovery apparatus includes a cylindrical chamber (CH) being installed such that a longitudinal direction of the chamber is placed in a vertical direction, a concentrated seawater port (P1) for supplying and discharging the concentrated seawater, a seawater port (P2) for supplying and discharging the seawater, a flow resistor (23) provided at a concentrated seawater port (P1) side in the chamber (CH), and a flow resistor (23) provided at a seawater port (P2) side in the chamber (CH). Each of the flow resistor (23) provided at the concentrated seawater port (P1) side and the seawater port (P2) side comprises at least one perforated circular plate, and each perforated circular plate has a plurality of holes formed in an outer circumferential area outside a circle having a predetermined diameter on the perforated circular plate.