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    Lithographic apparatus and device manufacturing method utilizing placement of a patterning device at a pupil plane
    5.
    发明授权
    Lithographic apparatus and device manufacturing method utilizing placement of a patterning device at a pupil plane 有权
    利用在瞳平面上放置图案形成装置的光刻设备和装置制造方法

    公开(公告)号：US07423732B2

    公开(公告)日：2008-09-09

    申请号：US11194576

    申请日：2005-08-02

    申请人： Matthew Lipson ,  Azat M. Latypov

    发明人： Matthew Lipson ,  Azat M. Latypov

    IPC分类号： G03B27/58 ,  G03B27/42

    CPC分类号： G03F7/70291 ,  G03F7/70283

    摘要： A lithography system comprises an illumination system that supplies radiation and a projection system comprising an optical system and a patterning device located at a pupil plane. The patterning device patterns the radiation and the optical system projects the patterned radiation onto a target portion of a substrate. In one example, an additional patterning device is located at an object plane of the lithography system and patterns the radiation before the patterning device at the pupil plane.

    摘要翻译： 光刻系统包括提供辐射的照明系统和包括位于光瞳面的光学系统和图案形成装置的投影系统。 图案形成装置对辐射进行图案化，光学系统将图案化的辐射投影到基板的目标部分上。 在一个示例中，附加图案形成装置位于光刻系统的物平面处，并且在图案形成装置之前在光瞳面上对辐射进行图案化。

    Side seal for wet lens elements
    7.
    发明授权
    Side seal for wet lens elements 有权
    湿透镜元件侧封

    公开(公告)号：US07781029B2

    公开(公告)日：2010-08-24

    申请号：US11473068

    申请日：2006-06-23

    申请人： Matthew Lipson ,  Taras Shvets ,  Richard Bruls

    发明人： Matthew Lipson ,  Taras Shvets ,  Richard Bruls

    IPC分类号： B05D3/00

    CPC分类号： G03F7/70341 ,  G02B1/105 ,  G02B1/14 ,  G02B5/003 ,  G02B7/025 ,  Y10T156/10

    摘要： A method for protecting a wet lens element from liquid degradation is provided. The method includes applying a thin coating of an organoxy-metallic compound to the side portions of a wet lens element to leave behind an optically inert, light absorbing metal oxide film. A liquid shield coating is applied on top of the metal oxide coating. The two coating layers protect the wet lens element from liquid degradation when the side portion of the wet lens element is submerged into a liquid. In an embodiment, the wet lens element is an immersion lithography wet lens element and the liquid is an immersion lithography liquid.

    摘要翻译： 提供了一种用于保护湿透镜元件免于液体劣化的方法。 所述方法包括将有机氧化金属化合物的薄涂层施加到湿透镜元件的侧部以留下光学惰性的光吸收金属氧化物膜。 将液体屏蔽涂层施加在金属氧化物涂层的顶部。 当湿透镜元件的侧部被浸入液体中时，两个涂层保护湿透镜元件免于液体劣化。 在一个实施例中，湿透镜元件是浸没光刻湿透镜元件，液体是浸没式光刻液。

    TWO-PHOTON OR HIGHER-ORDER ABSORBING OPTICAL MATERIALS FOR GENERATION OF REACTIVE SPECIES
    8.
    发明申请
    TWO-PHOTON OR HIGHER-ORDER ABSORBING OPTICAL MATERIALS FOR GENERATION OF REACTIVE SPECIES 有权
    用于生成反应物种的双光子或更高级吸收光学材料

    公开(公告)号：US20080283804A1

    公开(公告)日：2008-11-20

    申请号：US11768898

    申请日：2007-06-26

    申请人： Brian Cumpston ,  Matthew Lipson ,  Seth R. Marder ,  Joseph W. Perry

    发明人： Brian Cumpston ,  Matthew Lipson ,  Seth R. Marder ,  Joseph W. Perry

    IPC分类号： G11B7/24

    CPC分类号： F21V9/00 ,  B33Y70/00 ,  B82Y10/00 ,  C07C215/70 ,  C07C217/76 ,  C07C219/32 ,  C07C225/22 ,  C07C2603/18 ,  G11B7/245 ,  G11B7/247 ,  G11B7/25

    摘要： Disclosed are highly efficient multiphoton absorbing compounds and methods of their use. The compounds generally include a bridge of pi-conjugated bonds connecting electron donating groups or electron accepting groups. The bridge may be substituted with a variety of substituents as well. Solubility, lipophilicity, absorption maxima and other characteristics of the compounds may be tailored by changing the electron donating groups or electron accepting groups, the substituents attached to or the length of the pi-conjugated bridge. Numerous photophysical and photochemical methods are enabled by converting these compounds to electronically excited states upon simultaneous absorption of at least two photons of radiation. The compounds have large two-photon or higher-order absorptivities such that upon absorption, one or more Lewis acidic species, Lewis basic species, radical species or ionic species are formed.

    摘要翻译： 公开了高效多光子吸收化合物及其使用方法。 化合物通常包括连接供电子基团或电子接受基团的π-共轭键桥。 桥也可以被各种取代基取代。 化合物的溶解性，亲油性，吸收最大值和其它特征可以通过改变给电子基团或电子接受基团，连接在该取代基上的取代基或π-共轭桥的长度来调整。 通过在同时吸收至少两个光子的光子时将这些化合物转化为电子激发态，能够实现许多光物理和光化学方法。 该化合物具有大的双光子或更高级的吸光度，使得在吸收时，形成一种或多种路易斯酸性物质，路易斯碱性物质，自由基物质或离子物质。

    Two-photon or higher-order absorbing optical materials for generation of reactive species
    9.
    发明授权
    Two-photon or higher-order absorbing optical materials for generation of reactive species 有权
    用于产生反应物种的双光子或高阶吸收光学材料

    公开(公告)号：US07235194B2

    公开(公告)日：2007-06-26

    申请号：US10442431

    申请日：2003-05-20

    申请人： Brian Cumpston ,  Matthew Lipson ,  Seth R Marder ,  Joseph W Perry

    发明人： Brian Cumpston ,  Matthew Lipson ,  Seth R Marder ,  Joseph W Perry

    IPC分类号： C07C211/00 ,  C09K11/07 ,  G02B5/20

    CPC分类号： F21V9/00 ,  B33Y70/00 ,  B82Y10/00 ,  C07C215/70 ,  C07C217/76 ,  C07C219/32 ,  C07C225/22 ,  C07C2603/18 ,  G11B7/245 ,  G11B7/247 ,  G11B7/25

    摘要： Disclosed are highly efficient multiphoton absorbing compounds and methods of their use. The compounds generally include a bridge of pi-conjugated bonds connecting electron donating groups or electron accepting groups. The bridge may be substituted with a variety of substituents as well. Solubility, lipophilicity, absorption maxima and other characteristics of the compounds may be tailored by changing the electron donating groups or electron accepting groups, the substituents attached to or the length of the pi-conjugated bridge. Numerous photophysical and photochemical methods are enabled by converting these compounds to electronically excited states upon simultaneous absorption of at least two photons of radiation. The compounds have large two-photon or higher-order absorptivities such that upon absorption, one or more Lewis acidic species, Lewis basic species, radical species or ionic species are formed.

    摘要翻译： 公开了高效多光子吸收化合物及其使用方法。 化合物通常包括连接供电子基团或电子接受基团的π-共轭键桥。 桥也可以被各种取代基取代。 化合物的溶解性，亲油性，吸收最大值和其它特征可以通过改变给电子基团或电子接受基团，连接在该取代基上的取代基或π-共轭桥的长度来调整。 通过在同时吸收至少两个光子的光子时将这些化合物转化为电子激发态，能够实现许多光物理和光化学方法。 该化合物具有大的双光子或更高级的吸光度，使得在吸收时，形成一种或多种路易斯酸性物质，路易斯碱性物质，自由基物质或离子物质。

    Two-photon or higher-order absorbing optical materials for generation of reactive species
    10.
    发明授权
    Two-photon or higher-order absorbing optical materials for generation of reactive species 有权
    用于产生反应物种的双光子或高阶吸收光学材料

    公开(公告)号：US06608228B1

    公开(公告)日：2003-08-19

    申请号：US09292652

    申请日：1999-04-15

    申请人： Brian Cumpston ,  Matthew Lipson ,  Seth R. Marder ,  Joseph W. Perry

    发明人： Brian Cumpston ,  Matthew Lipson ,  Seth R. Marder ,  Joseph W. Perry

    IPC分类号： C07C24406

    CPC分类号： F21V9/00 ,  B33Y70/00 ,  B82Y10/00 ,  C07C215/70 ,  C07C217/76 ,  C07C219/32 ,  C07C225/22 ,  C07C2603/18 ,  G11B7/245 ,  G11B7/247 ,  G11B7/25

    摘要： Disclosed are highly efficient multiphoton absorbing compounds and methods of their use. The compounds generally include a bridge of pi-conjugated bonds connecting electron donating groups or electron accepting groups. The bridge may be substituted with a variety of substituents as well. Solubility, lipophilicity, absorption maxima and other characteristics of the compounds may be tailored by changing the electron donating groups or electron accepting groups, the substituents attached to or the length of the pi-conjugated bridge. Numerous photophysical and photochemical methods are enabled by converting these compounds to electronically excited states upon simultaneous absorption of at least two photons of radiation. The compounds have large two-photon or higher-order absorptivities such that upon absorption, one or more Lewis acidic species, Lewis basic species, radical species or ionic species are formed.

    摘要翻译： 公开了高效多光子吸收化合物及其使用方法。 化合物通常包括连接供电子基团或电子接受基团的π-共轭键桥。 桥也可以被各种取代基取代。 化合物的溶解性，亲油性，吸收最大值和其它特征可以通过改变给电子基团或电子接受基团，连接在该取代基上的取代基或π-共轭桥的长度来调整。 通过在同时吸收至少两个光子的光子时将这些化合物转化为电子激发态，能够实现许多光物理和光化学方法。 该化合物具有大的双光子或更高级的吸光度，使得在吸收时，形成一种或多种路易斯酸性物质，路易斯碱性物质，自由基物质或离子物质。