公开(公告)号：US07135123B1

公开(公告)日：2006-11-14

申请号：US10758146

申请日：2004-01-14

申请人： Mark Alan Thompson ,  Erwan Le Roy ,  Theodore Lundquist ,  William B. Thompson ,  Catherine Kardach

发明人： Mark Alan Thompson ,  Erwan Le Roy ,  Theodore Lundquist ,  William B. Thompson ,  Catherine Kardach

IPC分类号： G01L21/30 ,  H01L21/00

CPC分类号： G01R31/2898 ,  G01R31/307 ,  H01L21/3043 ,  H01L23/544 ,  H01L2924/0002 ,  H01L2924/00

摘要： The backside navigation method of the present invention includes milling a fiducial opening through the substrate of an integrated circuit. The milling process is stopped when the fiducial opening reaches the bottom of a trench isolation structure. The trench isolation structure delineated by the fiducial opening may be imaged and registered to a computer aided design layout image to achieve sub-micron navigation resolution.

摘要翻译： 本发明的背面导航方法包括通过集成电路的基板铣削基准开口。 当基准开口到达沟槽隔离结构的底部时，铣削过程停止。 由基准开口划定的沟槽隔离结构可以被成像并记录到计算机辅助设计布局图像中以实现亚微米导航分辨率。

公开(公告)号：US06958248B1

公开(公告)日：2005-10-25

申请号：US10789336

申请日：2004-02-27

申请人： Erwan Le Roy ,  William B. Thompson

发明人： Erwan Le Roy ,  William B. Thompson

IPC分类号： G01R31/26 ,  H01J37/305 ,  H01L21/316 ,  H01L21/66

CPC分类号： H01L21/31608 ,  G01N23/2251 ,  G01R31/307 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/30466 ,  H01J2237/3174 ,  H01J2237/31749 ,  H01L21/02164 ,  H01L21/02214 ,  H01L21/02348 ,  H01L22/12 ,  H01L22/26 ,  H01L22/34 ,  H01L2924/0002 ,  Y10T29/41 ,  H01L2924/00

摘要： A method and system for registering a CAD layout to a Focused Ion Beam image for through-the substrate probing, without using an optical image and without requiring biasing, includes an improved method of trench endpointing during the FIB milling operation with a low beam energy. The method further includes removal of Ga at the trench floor using XeF2, as well as the deposition of an insulating layer onto the trench floor.

摘要翻译： 用于将聚焦离子束图像注册到聚焦离子束图像以用于通过基板探测而不使用光学图像并且不需要偏置的方法和系统包括在具有低光束能量的FIB铣削操作期间的沟槽终点的改进方法。 该方法还包括使用XeF 2在沟槽底板处移除Ga以及在沟槽底板上沉积绝缘层。

公开(公告)号：US07488937B2

公开(公告)日：2009-02-10

申请号：US11252139

申请日：2005-10-17

申请人： Erwan Le Roy ,  William B. Thompson

发明人： Erwan Le Roy ,  William B. Thompson

IPC分类号： H01L21/00

CPC分类号： H01L21/31608 ,  G01N23/2251 ,  G01R31/307 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/30466 ,  H01J2237/3174 ,  H01J2237/31749 ,  H01L21/02164 ,  H01L21/02214 ,  H01L21/02348 ,  H01L22/12 ,  H01L22/26 ,  H01L22/34 ,  H01L2924/0002 ,  Y10T29/41 ,  H01L2924/00

摘要： A method and system for registering a CAD layout to a Focused Ion Beam image for through-the substrate probing, without using an optical image and without requiring biasing, includes an improved method of trench endpointing during the FIB milling operation with a low beam energy. The method further includes removal of Ga at the trench floor using XeF2, as well as the deposition of an insulating layer onto the trench floor.

摘要翻译： 用于将聚焦离子束图像注册到聚焦离子束图像以用于通过基板探测而不使用光学图像并且不需要偏置的方法和系统包括在具有低光束能量的FIB铣削操作期间的沟槽终点的改进方法。 该方法还包括使用XeF2在沟槽底板处去除Ga，以及在沟槽地板上沉积绝缘层。

公开(公告)号：US07115426B2

公开(公告)日：2006-10-03

申请号：US11031423

申请日：2005-01-07

申请人： Erwan Le Roy ,  Patricia Le Coupanec ,  Theodore R. Lundquist ,  William B. Thompson ,  Mark A. Thompson ,  Lokesh Johri

发明人： Erwan Le Roy ,  Patricia Le Coupanec ,  Theodore R. Lundquist ,  William B. Thompson ,  Mark A. Thompson ,  Lokesh Johri

IPC分类号： H01L21/66

CPC分类号： H01L22/12

摘要： A method for utilizing interference fringe patterns generated when milling a trench through a semiconductor substrate by a method such as FIB milling, to determine and optimize the thickness uniformity of the trench bottom. The interference fringes may be mapped and the mapping used to direct the FIB milling to those regions which are thicker to correct observed non-uniformities in the trench floor thickness by varying the pixel dwell time across the milled area. The interference fringe mapping may be used to develop computerized contour lines to automate the pixel dwell time variations as described above, for correcting non-uniformities in the trench floor thickness. The method may be applied to applications other than trench formation for backside editing, such as monitoring progress in forming a milled object.

公开(公告)号：US3946761A

公开(公告)日：1976-03-30

申请号：US482442

申请日：1974-06-24

申请人： William B. Thompson ,  James T. Conklin

发明人： William B. Thompson ,  James T. Conklin

IPC分类号： F16L55/1645 ,  F16L55/16

CPC分类号： F16L55/16455

摘要： A packer apparatus for the internal sealing of pipe leaks having a cylindrical structure and a single sleeve located on the exterior of the cylinder. The single sleeve has a pair of inflatable chambers connected together in spaced relationship to each other and air hoses connect through the cylinder to each of the inflatable chambers for inflating and deflating the chambers remotely with air pressure. Chemical lines are connected through the cylinder and through the sleeve between the inflatable chambers. The cylindrical structure is made of two or more segments and is collapsible for reducing the size of the packer. The single sleeve is made of rubber reinforced with tire chord and is held to the cylinder only by the connections with the chemical and air lines.

公开(公告)号：US20100136255A1

公开(公告)日：2010-06-03

申请号：US12625912

申请日：2009-11-25

申请人： John A. Notte, IV ,  Lawrence Scipioni ,  Billy W. Ward ,  William B. Thompson

发明人： John A. Notte, IV ,  Lawrence Scipioni ,  Billy W. Ward ,  William B. Thompson

IPC分类号： B05D3/06 ,  G21K5/00

CPC分类号： G01N1/42 ,  C23C14/06 ,  C23C14/5833 ,  H01J37/3056 ,  H01J2237/0807 ,  H01J2237/2001 ,  H01J2237/2002 ,  H01J2237/31732 ,  H01J2237/3174 ,  H01J2237/31745

摘要： Charged particle sources, systems and methods are disclosed.

摘要翻译： 公开了带电粒子源，系统和方法。

公开(公告)号：US08601986B2

公开(公告)日：2013-12-10

申请号：US13050256

申请日：2011-03-17

申请人： Donald R. Faulkner ,  William B. Thompson ,  Patrick E. Keister ,  Eric C. Martin ,  Charles W. Murray

发明人： Donald R. Faulkner ,  William B. Thompson ,  Patrick E. Keister ,  Eric C. Martin ,  Charles W. Murray

IPC分类号： F01P3/00 ,  F01P3/22

CPC分类号： F01P3/12 ,  F01P7/165 ,  F01P2060/02 ,  F02B29/0406

摘要： A system and method for cooling an internal combustion engine. In one embodiment of the invention a cooling system for an internal combustion engine is disclosed, comprising an engine; an intercooler for receiving combustion air from a turbocharger, the intercooler comprising an air-to-liquid heat exchanger for exchanging heat between the combustion air and a liquid coolant; an intercooler radiator; at least one engine coolant radiator; an expansion tank; an oil cooler; and at least one pump, wherein the dedicated fan is controlled by a temperature switch or controller and wherein the at least one engine coolant radiator and the intercooler radiator are located on opposite sides of the engine.

摘要翻译： 一种用于冷却内燃机的系统和方法。 在本发明的一个实施例中，公开了一种用于内燃机的冷却系统，其包括发动机; 用于从涡轮增压器接收燃烧空气的中间冷却器，所述中间冷却器包括用于在所述燃烧空气和液体冷却剂之间交换热量的空气 - 液体热交换器; 中冷器散热器; 至少一个发动机冷却剂散热器; 膨胀罐 油冷却器 以及至少一个泵，其中所述专用风扇由温度开关或控制器控制，并且其中所述至少一个发动机冷却剂散热器和所述中间冷却器散热器位于所述发动机的相对侧上。

公开(公告)号：US20110121176A1

公开(公告)日：2011-05-26

申请号：US12997686

申请日：2009-05-26

申请人： Sybren Sijbrandij ,  John A. Notte, IV ,  William B. Thompson

发明人： Sybren Sijbrandij ,  John A. Notte, IV ,  William B. Thompson

IPC分类号： G01N23/225

CPC分类号： G01N23/2251 ,  G01N23/2208 ,  G01N23/2258 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0807 ,  H01J2237/2441 ,  H01J2237/2444 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24585 ,  H01J2237/24592 ,  H01J2237/2803 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： The disclosure relates to sample inspection using an ion-beam microscope. In some embodiments, the disclosure involves the use of multiple detectors, each of which provides different information about a sample.

摘要翻译： 本公开涉及使用离子束显微镜的样品检查。 在一些实施例中，本公开涉及多个检测器的使用，每个检测器提供关于样品的不同信息。

公开(公告)号：US4608513A

公开(公告)日：1986-08-26

申请号：US650014

申请日：1984-09-13

申请人： William B. Thompson

发明人： William B. Thompson

IPC分类号： H01J27/14

CPC分类号： H01J27/14

摘要： A Freeman type electron bombardment ion source includes dual filament electrodes positioned in an arc chamber having a slit for extraction of an ion beam. The filament electrodes are symmetrically positioned with respect to the extraction slit. The filament electrode currents are equal in magnitude and oppositely directed. As a result, lateral magnetic fields in the region of the extraction slit are substantially eliminated.

摘要翻译： Freeman型电子轰击离子源包括位于具有用于提取离子束的狭缝的电弧室中的双丝电极。 灯丝电极相对于提取狭缝对称地定位。 灯丝电极电流的大小和反向相等。 结果，基本上消除了提取狭缝区域中的横向磁场。

公开(公告)号：US08669525B2

公开(公告)日：2014-03-11

申请号：US12997686

申请日：2009-05-26

申请人： Sybren Sijbrandij ,  John Notte, IV ,  William B. Thompson

发明人： Sybren Sijbrandij ,  John Notte, IV ,  William B. Thompson

IPC分类号： H01J37/26

CPC分类号： G01N23/2251 ,  G01N23/2208 ,  G01N23/2258 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/0807 ,  H01J2237/2441 ,  H01J2237/2444 ,  H01J2237/2445 ,  H01J2237/24475 ,  H01J2237/24485 ,  H01J2237/2449 ,  H01J2237/24585 ,  H01J2237/24592 ,  H01J2237/2803 ,  H01L22/12 ,  H01L2924/0002 ,  H01L2924/00

摘要： The disclosure relates to sample inspection using an ion-beam microscope. In some embodiments, the disclosure involves the use of multiple detectors, each of which provides different information about a sample.

摘要翻译： 本公开涉及使用离子束显微镜的样品检查。 在一些实施例中，本公开涉及多个检测器的使用，每个检测器提供关于样品的不同信息。