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    CRYOGENIC CLEANING DEVICE
    1.
    发明申请
    CRYOGENIC CLEANING DEVICE 有权

    公开(公告)号：US20250108317A1

    公开(公告)日：2025-04-03

    申请号：US18480458

    申请日：2023-10-03

    Applicant: FEI Company

    Inventor： Jan Lásko ,  Libor Novák ,  Kamil Bencko

    IPC: B01D8/00 ,  F04B37/08

    Abstract: Cryogenic cleaning devices comprise a body and an attachment element for attaching the body to a vacuum chamber to provide a fluid path between the body and the vacuum chamber. A surface is configured to accumulate gas molecules received into the body via the fluid path by condensing and/or adsorbing the gas molecules on the surface when cooled and a single-stage refrigeration system is configured to cool the surface. A pump is configured to pump out the accumulated gas molecules during baking of and a valve is moveable between a first position in which the fluid path is open to allow the gas molecules to be evacuated from the vacuum chamber into the body, and a second position in which the fluid path is closed to prevent the gas molecules from being received into the body.

    INERT GAS SAMPLE TRANSFER FOR BEAM SYSTEMS
    4.
    发明公开
    INERT GAS SAMPLE TRANSFER FOR BEAM SYSTEMS 审中-公开

    公开(公告)号：US20230245850A1

    公开(公告)日：2023-08-03

    申请号：US17589791

    申请日：2022-01-31

    Applicant: FEI Company

    Inventor： Libor Novák ,  Petr Glajc ,  Marek Uncovský

    IPC: H01J37/20

    CPC classification number: H01J37/20 ,  H01J2237/2007 ,  H01J2237/20278

    Abstract: Various approaches are provided for transferring samples within an inert gas environment to and from a beam system. In one example, a sample transfer capsule includes a container configured to store a sample during transport, wherein the container is adjustable between a closed configuration and an open configuration, an inert gas storage chamber coupled to the container and configured to store an inert gas, and a valve coupled to the inert gas storage chamber and the container and configured to selectively allow the inert gas to flow from the inert gas storage chamber to the container when the container is in the closed configuration. In this way, samples may be maintained in an inert gas environment during transport and while beam system vacuum chambers are vented, thereby reducing exposure of the samples and subsequently reducing the rate of a chemical reaction, such as oxidation or nitridation, of the samples.

    Inert gas sample transfer for beam systems
    6.
    发明授权
    Inert gas sample transfer for beam systems 有权

    公开(公告)号：US12183539B2

    公开(公告)日：2024-12-31

    申请号：US17589791

    申请日：2022-01-31

    Applicant: FEI Company

    Inventor： Libor Novák ,  Petr Glajc ,  Marek Uncovský

    IPC: H01J37/20

    Abstract: Various approaches are provided for transferring samples within an inert gas environment to and from a beam system. In one example, a sample transfer capsule includes a container configured to store a sample during transport, wherein the container is adjustable between a closed configuration and an open configuration, an inert gas storage chamber coupled to the container and configured to store an inert gas, and a valve coupled to the inert gas storage chamber and the container and configured to selectively allow the inert gas to flow from the inert gas storage chamber to the container when the container is in the closed configuration. In this way, samples may be maintained in an inert gas environment during transport and while beam system vacuum chambers are vented, thereby reducing exposure of the samples and subsequently reducing the rate of a chemical reaction, such as oxidation or nitridation, of the samples.

    CHARGED PARTICLE SENSORS INCLUDING WIDE BANDGAP MATERIALS
    7.
    发明公开
    CHARGED PARTICLE SENSORS INCLUDING WIDE BANDGAP MATERIALS 审中-公开

    公开(公告)号：US20240194442A1

    公开(公告)日：2024-06-13

    申请号：US18065438

    申请日：2022-12-13

    Applicant: FEI Company

    Inventor： Branislav Straka ,  Jan Lásko ,  Libor Novák ,  Vojtêch Mahel ,  Radek Smolka ,  Petr Glajc

    IPC: H01J37/28 ,  H01J37/141 ,  H01J37/244 ,  H01J37/26

    CPC classification number: H01J37/28 ,  H01J37/141 ,  H01J37/244 ,  H01J37/265 ,  H01J2237/24475

    Abstract: Charged particle microscopy systems, sensors, and techniques are provided. A charged particle sensor can include a housing, configured to be incorporated into a scanning electron microscope (SEM). The charged particle sensor can include a detector cell, mechanically coupled with the housing. The detector cell can include an acceptor layer including a semiconducting material characterized by a bandgap equal to or greater than about 2.0 eV. The acceptor layer can define a first surface and a second surface opposing the first surface. The detector cell can include a first conducting layer disposed on the first surface, a second conducting layer disposed on the second surface, a first contact, electrically coupled with the first conducting layer, and a second contact, electrically coupled with the second conducting layer.

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