公开(公告)号：US07294894B2

公开(公告)日：2007-11-13

申请号：US10483011

申请日：2002-07-04

申请人： Frank Fischer ,  Peter Hein ,  Eckhard Graf

发明人： Frank Fischer ,  Peter Hein ,  Eckhard Graf

IPC分类号： H01L29/84

CPC分类号： B81B7/0064 ,  B81B2201/0235 ,  B81C1/00269 ,  B81C2203/0118 ,  B81C2203/019 ,  B81C2203/031

摘要： A micromechanical cap structure and a corresponding manufacturing method are described. The micromechanical cap structure includes a first wafer with a micromechanical functional structure, and a second wafer to form a cap over the micromechanical functional structure. The first and second wafers have in their interior a support structure with a metal-semiconductor contact, and in their edge zone a bonding structure. The edge zone of the second wafer, when in the capped state, is arched in relation to the interior of the second wafer.

摘要翻译： 描述了微机械帽结构和相应的制造方法。 微机械帽结构包括具有微机械功能结构的第一晶片和在微机械功能结构上形成盖的第二晶片。 第一和第二晶片在其内部具有金属 - 半导体接触的支撑结构，并且在其边缘区域具有接合结构。 当处于封盖状态时，第二晶片的边缘区域相对于第二晶片的内部是拱形的。

公开(公告)号：US07153718B2

公开(公告)日：2006-12-26

申请号：US10829872

申请日：2004-04-21

申请人： Frank Fischer ,  Peter Hein ,  Eckhard Graf

发明人： Frank Fischer ,  Peter Hein ,  Eckhard Graf

IPC分类号： H01L21/00

CPC分类号： B81C1/00333 ,  B81B7/0006 ,  B81B7/007 ,  B81B2201/0235 ,  B81C2203/0118 ,  B81C2203/019

摘要： A micromechanical component having a substrate beneath at least one structured layer, in the structured layer at least one functional structure being formed, a cap which covers the functional structure, between the cap and the functional structure at least one cavity being formed, and a connecting layer which connects the cap to structured layer, as well as a method for producing the micromechanical component. To obtain a compact and robust component, the connecting layer is formed from an anodically bondable glass, i.e. a bond glass, which has a thickness in the range of 300 nm to 100 μm, which may in particular be in the range of 300 nm to 50 μm.

公开(公告)号：US20050045973A1

公开(公告)日：2005-03-03

申请号：US10483011

申请日：2002-07-04

申请人： Frank Fischer ,  Peter Hein ,  Eckhard Graf

发明人： Frank Fischer ,  Peter Hein ,  Eckhard Graf

IPC分类号： B81B1/00 ,  B81B7/00 ,  H01L27/14

CPC分类号： B81B7/0064 ,  B81B2201/0235 ,  B81C1/00269 ,  B81C2203/0118 ,  B81C2203/019 ,  B81C2203/031

摘要： A micromechanical cap structure and a corresponding manufacturing method are described. The micromechanical cap structure includes a first wafer with a micromechanical functional structure, and a second wafer to form a cap over the micromechanical functional structure. The first and second wafers have in their interior a support structure with a metal-semiconductor contact, and in their edge zone a bonding structure. The edge zone of the second wafer, when in the capped state, is arched in relation to the interior of the second wafer.

摘要翻译： 描述了微机械帽结构和相应的制造方法。 微机械帽结构包括具有微机械功能结构的第一晶片和在微机械功能结构上形成盖的第二晶片。 第一和第二晶片在其内部具有金属 - 半导体接触的支撑结构，并且在其边缘区域具有接合结构。 当处于封盖状态时，第二晶片的边缘区域相对于第二晶片的内部是拱形的。

公开(公告)号：US06951824B2

公开(公告)日：2005-10-04

申请号：US10203729

申请日：2000-12-28

申请人： Frank Fischer ,  Peter Hein ,  Eckhard Graf

发明人： Frank Fischer ,  Peter Hein ,  Eckhard Graf

IPC分类号： B81B3/00 ,  B81C1/00 ,  B81C3/00 ,  G01P15/08 ,  G01P15/125 ,  H01L29/84 ,  H01L21/302

CPC分类号： B81C1/00801 ,  B81B2203/0136 ,  B81B2203/0315 ,  B81C2201/0109 ,  B81C2201/053 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0814

摘要： A method for manufacturing a micromechanical component, that has at least one hollow space and a functional element that is provided at least partially in the hollow space and/or a functional layer that is provided at least partially therein, and a micromechanical component that is manufactured in accordance with the method, are described. To reduce manufacturing costs, the functional element and/or the functional layer is provided with a first protective layer at least in an area that directly or indirectly borders on a first sacrificial layer, which temporarily occupies the space of the hollow space that is subsequently formed in one or a plurality of etching steps, the material of the first protective layer being selected such that at least one etching process and/or etching medium, which etches or dissolves the first sacrificial layer, either does not substantially attack the first protective layer or does so only at a reduced etching rate in comparison to the first sacrificial layer.

摘要翻译： 一种用于制造微机械部件的方法，所述微机械部件具有至少一个中空空间和至少部分地设置在中空空间中的功能元件和/或至少部分地设置在其中的功能层，以及制造的微机械部件 按照该方法进行说明。 为了降低制造成本，功能元件和/或功能层至少在直接或间接地接合在第一牺牲层上的区域中提供第一保护层，该第一牺牲层临时占据随后形成的中空空间的空间 在一个或多个蚀刻步骤中，选择第一保护层的材料使得蚀刻或溶解第一牺牲层的至少一个蚀刻工艺和/或蚀刻介质基本上不会侵蚀第一保护层或 与第一牺牲层相比，仅以降低的蚀刻速率进行。

公开(公告)号：US06876048B2

公开(公告)日：2005-04-05

申请号：US10066851

申请日：2002-02-04

申请人： Frank Fischer ,  Peter Hein ,  Eckhard Graf

发明人： Frank Fischer ,  Peter Hein ,  Eckhard Graf

IPC分类号： B81C99/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C3/00 ,  H01L27/14 ,  H01L29/82 ,  H01L29/84

CPC分类号： B81C1/00333 ,  B81B7/0006 ,  B81B7/007 ,  B81B2201/0235 ,  B81C2203/0118 ,  B81C2203/019

摘要： A micromechanical component having a substrate beneath at least one structured layer, in the structured layer at least one functional structure being formed, a cap which covers the functional structure, between the cap and the functional structure at least one cavity being formed, and a connecting layer which connects the cap to structured layer, as well as a method for producing the micromechanical component. To obtain a compact and robust component, the connecting layer is formed from an anodically bondable glass, i.e. a bond glass, which has a thickness in the range of 300 nm to 100 μm, which may in particular be in the range of 300 nm to 50 μm.

摘要翻译： 一种微机械部件，其具有在至少一个结构化层下面的衬底，在所述结构化层中形成至少一个功能结构，覆盖所述功能结构的帽，所述帽与所述功能结构之间形成有至少一个腔，以及连接 将盖连接到结构化层的层，以及用于制造微机械部件的方法。 为了获得紧凑且坚固的部件，连接层由可阳极结合的玻璃（即，粘合玻璃）形成，该玻璃具有在300nm至100μm的范围内的厚度，其可以特别地在300nm至 妈妈妈妈

公开(公告)号：US07202544B2

公开(公告)日：2007-04-10

申请号：US10470956

申请日：2002-01-25

申请人： Detlef Gruen ,  Frank Fischer ,  Henrik Siegle ,  Peter Hein

发明人： Detlef Gruen ,  Frank Fischer ,  Henrik Siegle ,  Peter Hein

IPC分类号： H01L31/00

CPC分类号： B82Y25/00 ,  G01R33/093

摘要： The present invention relates to a method for producing a GMR structure in which a metallic multiple layer is applied onto a carrier and in which the metallic multiple layer is patterned to produce the GMR structure, the carrier having a structure before the metallic multiple layer is applied and the patterning of the metallic multiple layer is performed by CMP. The present invention also relates to a GMR structure having a carrier and a patterned metallic multiple layer positioned on the carrier, the patterned metallic multiple layer being situated in one or more depressions of the carrier. In addition, the present invention relates to a use of GMR structures.

摘要翻译： 本发明涉及一种制造GMR结构的方法，其中将金属多层施加到载体上并且金属多层被图案化以产生GMR结构，载体具有在施加金属多层之前的结构 并且通过CMP进行金属多层的图案化。 本发明还涉及具有载体和位于载体上的图案化金属多层的GMR结构，图案化的金属多层位于载体的一个或多个凹陷中。 另外，本发明涉及GMR结构的用途。

公开(公告)号：US06739193B2

公开(公告)日：2004-05-25

申请号：US10169511

申请日：2002-10-28

申请人： Jochen Franz ,  Matthias Illing ,  Frank Henning ,  Frank Fischer ,  Peter Hein

发明人： Jochen Franz ,  Matthias Illing ,  Frank Henning ,  Frank Fischer ,  Peter Hein

IPC分类号： G01P1508

CPC分类号： G01C19/5755 ,  G01P15/0802 ,  G01P15/125 ,  G01P2015/0831

摘要： A micromechanical structure and a corresponding manufacturing method. The structure includes a substrate, which includes an anchoring device, and a centrifugal mass, which is connected to the anchoring device via a flexible spring device, so that the centrifugal mass is elastically deflectable from its rest position. The centrifugal mass includes clearances and is configured to be deflectable by etching a sacrificial layer underneath it. The sacrificial layer is present in a first area located underneath the centrifugal mass with a first etchable thickness, and in a second area located underneath the centrifugal mass with a second etchable thickness, the second thickness is greater than the first thickness. The centrifugal mass is structured in the first area so that in etching only a maximum of two etching fronts may come together in order to limit the etching residue deposits.

摘要翻译： 微机械结构和相应的制造方法。 该结构包括一个包括一个锚定装置的基片和一个通过柔性弹簧装置连接到锚固装置的离心质量块，使得离心质量块从其静止位置弹性偏转。 离心质量包括间隙，并且被配置为通过蚀刻其下方的牺牲层而可偏转。 牺牲层存在于位于离心质量下方的第一区域中，具有第一可蚀刻厚度，并且在位于离心质量下方的第二区域中具有第二可蚀刻厚度，第二厚度大于第一厚度。 离心质量体在第一区域中构成，使得在蚀刻中只有最多两个蚀刻前沿可以聚在一起，以便限制蚀刻残渣沉积物。

公开(公告)号：US08860239B2

公开(公告)日：2014-10-14

申请号：US13496988

申请日：2010-08-30

申请人： Peter Hein

发明人： Peter Hein

IPC分类号： F03D9/00 ,  H02K21/44 ,  H02K7/18

CPC分类号： H02K21/44 ,  H02K7/1838

摘要： A wind or water energy installation for generating electrical energy, an installation having at least one propeller and at least one generator including at least one rotor, at least one stator and at least one magnetic circuit generating a magnetic flux. The at least one magnetic circuit has at least one magnet on the stator side and at least one coil on the stator side, through which at least part of the magnetic flux of the stator-side magnet flows, and the magnetic circuit is closed by the rotor which has a magnetic resistance (Rm) dependent on its respective rotational angle, on its surface facing the stator, such that the size of the magnetic flux in the at least one stator-side coil depends on the respective rotational angle of the rotor and changes when the rotor rotates.

摘要翻译： 一种用于产生电能的风能或水能装置，具有至少一个螺旋桨的装置和至少一个包括至少一个转子，至少一个定子和至少一个产生磁通量的磁路的发电机的装置。 所述至少一个磁路在定子侧具有至少一个磁体和定子侧上的至少一个线圈，定子侧磁体的至少一部分磁通量通过该磁体流过，并且磁路由 转子，其在其面向定子的表面上具有取决于其相应旋转角度的磁阻（Rm），使得至少一个定子侧线圈中的磁通量的大小取决于转子的相应旋转角度， 当转子旋转时发生变化。

公开(公告)号：US20120175884A1

公开(公告)日：2012-07-12

申请号：US13496988

申请日：2010-08-30

申请人： Peter Hein

发明人： Peter Hein

IPC分类号： F03D9/00

CPC分类号： H02K21/44 ,  H02K7/1838

摘要： A wind or water energy installation for generating electrical energy, an installation having at least one propeller and at least one generator including at least one rotor, at least one stator and at least one magnetic circuit generating a magnetic flux. The at least one magnetic circuit has at least one magnet on the stator side and at least one coil on the stator side, through which at least part of the magnetic flux of the stator-side magnet flows, and the magnetic circuit is closed by the rotor which has a magnetic resistance (Rm) dependent on its respective rotational angle, on its surface facing the stator, such that the size of the magnetic flux in the at least one stator-side coil depends on the respective rotational angle of the rotor and changes when the rotor rotates.

摘要翻译： 一种用于产生电能的风能或水能装置，具有至少一个螺旋桨的装置和至少一个包括至少一个转子，至少一个定子和至少一个产生磁通量的磁路的发电机的装置。 所述至少一个磁路在定子侧具有至少一个磁体和定子侧上的至少一个线圈，定子侧磁体的至少一部分磁通量通过该磁体流过，并且磁路由 转子，其在其面向定子的表面上具有取决于其相应旋转角度的磁阻（Rm），使得至少一个定子侧线圈中的磁通量的大小取决于转子的相应旋转角度， 当转子旋转时发生变化。

公开(公告)号：US20120127745A1

公开(公告)日：2012-05-24

申请号：US13302740

申请日：2011-11-22

申请人： Gregor Serve ,  Peter Hein

发明人： Gregor Serve ,  Peter Hein

IPC分类号： B60R1/12 ,  B29C45/16

CPC分类号： B60R1/06 ,  B29C45/1679 ,  B60R1/1207

摘要： A covering (16) for an exterior rear view mirror assembly for motor vehicles includes a plurality of covering parts (17, 18, 19, 20) defining a contact point (24) between each of the plurality of covering parts (17, 18, 19, 20). At least one of the covering parts (17, 18, 19, 20) is provided in a two-component or multi-component injection molding procedure. A coating (25) of plastic forms an outer layer, which covers the covering parts (17, 18, 19, 20). The coating (25), being a light-resistant and transparent plastic, forms a high-gloss surface. One of the covering parts (17, 18, 19, 20) is void of the coating (25) at the contact point (24).

摘要翻译： 用于机动车辆的外部后视镜组件的覆盖物（16）包括多个覆盖部分（17,18,19,20），其在多个覆盖部分（17,18）之间限定接触点（24） 19，20）。 覆盖部分（17,18,19,20）中的至少一个以双组分或多组分注射成型方法提供。 塑料的涂层（25）形成覆盖覆盖部分（17,18,19,20）的外层。 作为耐光透明塑料的涂层（25）形成高光泽表面。 覆盖部分（17,18,19,20）中的一个在接触点（24）处没有涂层（25）。