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1.发明授权公开(公告)号：US07248434B2
公开(公告)日：2007-07-24
申请号：US10798163
申请日：2004-03-10
IPC分类号： G11B5/147
CPC分类号： G11B5/3116 , G11B5/1278 , G11B5/3163 , G11B5/3967 , Y10T29/49032
摘要： A method for manufacturing a pole tip structure for a magnetic head is provided. An etch stop layer is initially deposited after which a transfer layer is deposited. Further deposited is at least one masking layer. Reactive ion etching is then performed to define a trench in at least the transfer layer. A pole tip layer is then deposited in the trench to define a pole tip structure flanked at least in part by the transfer layer. A surface of the transfer layer or etch stop layer then remains in co-planar relationship with a surface of the pole tip structure.
摘要翻译： 提供一种用于制造用于磁头的极尖结构的方法。 最初沉积蚀刻停止层，之后沉积转移层。 进一步沉积的是至少一个掩模层。 然后执行反应离子蚀刻以在至少转移层中限定沟槽。 然后将极尖层沉积在沟槽中以限定至少部分地由转移层侧面的极尖结构。 然后转印层或蚀刻停止层的表面与极尖结构的表面保持共面关系。
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2.发明授权Method and apparatus using a pre-patterned seed layer for providing an aligned coil for an inductive head structure 失效使用预图案种子层的方法和装置，用于提供用于感应头部结构的对准线圈公开(公告)号：US07117583B2
公开(公告)日：2006-10-10
申请号：US10101196
申请日：2002-03-18
CPC分类号： G11B5/486 , G11B5/17 , G11B5/313 , G11B5/3163 , G11B5/3967 , H01F17/0006 , H01F41/043 , H01F41/046 , Y10T29/4902 , Y10T29/4906 , Y10T29/49062 , Y10T29/49064 , Y10T29/49073
摘要： A method and apparatus using a pre-patterned seed layer for providing an aligned coil for an inductive head structure. The method uses an aligned process where the base plate imprint is fabricated on an electrically insulating layer and the reversed image is fabricated and etched into the coil insulation material, e.g., hard bake photoresist to alleviate the problems associated with complete ion removal of the seed layer between high aspect ratio coils. The method would also not be prone to plating non-uniformities (voids), and would not be subject to seed layer undercutting in a wet etch step process.
摘要翻译： 一种使用预先图案化种子层来提供用于感应头部结构的对准线圈的方法和装置。 该方法使用对准的工艺，其中基板印版制造在电绝缘层上，并且反转的图像被制造并蚀刻到线圈绝缘材料中，例如硬烘烤光致抗蚀剂以减轻与种子层的完全离子去除相关的问题 在高纵横比线圈之间。 该方法也不易于电镀不均匀（空隙），并且在湿法蚀刻步骤中不会经受种子层底切。
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3.发明授权High aspect ratio co-planar structure fabrication consisting of different materials 有权高纵横比共面结构制造由不同材料组成公开(公告)号：US07280313B2
公开(公告)日：2007-10-09
申请号：US10837386
申请日：2004-04-30
CPC分类号： G11B5/3163 , Y10T29/49052 , Y10T29/4906 , Y10T29/49064
摘要： A a method for fabricating a structure, such as a magnetic head, having two coplanar metallic features of different compositions, both deposited on their own seed layers. The features may be made tall relative to their widths (ie. have a high aspect ratio), and are also very closely spaced. Only a single high-definition, critically aligned photolithographic procedure is used to create the critical structures, avoiding any problem with aligning features produced by multiple procedures. The method is applied to the production of the write structure of a magnetic read/write head, where a portion of the pole structure and the inductive coils are fabricated in the same plane with a close spacing and both having a vertical aspect ratio of more than about 2:1.
摘要翻译： 一种用于制造具有不同组成的两个共面金属特征的结构（例如磁头）的方法，两者都沉积在它们自己的种子层上。 特征可以相对于它们的宽度（即，具有高纵横比）而高，并且也非常紧密地间隔开。 仅使用单一的高清晰度，严格对准的光刻过程来创建关键结构，避免了由多个过程产生的对准特征的任何问题。 该方法被应用于磁读/写头的写结构的制造，其中极结构和感应线圈的一部分以相近的间距制造在相同的平面中，并且两者的垂直纵横比大于 约2：1。
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4.发明授权Method of fabricating electronic component using resist structure with no undercut 有权使用没有底切的抗蚀剂结构制造电子元件的方法公开(公告)号：US07323112B2
公开(公告)日：2008-01-29
申请号：US10652053
申请日：2003-08-29
申请人： Amanda Baer , Marie-Claire Cyrille , Frederick Hayes Dill , Wipul Pemsiri Jayaekara , Jui-Lung Li , Hugo Alberto Emilio Santini , Benjamin Lu Chen Wang
发明人： Amanda Baer , Marie-Claire Cyrille , Frederick Hayes Dill , Wipul Pemsiri Jayaekara , Jui-Lung Li , Hugo Alberto Emilio Santini , Benjamin Lu Chen Wang
IPC分类号： B44C1/22
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3116 , G11B5/3163 , G11B5/3903 , G11B5/3909 , G11B5/3967 , G11B2005/3996 , H01J2237/3114
摘要： A method for milling a structure. A single- or multi-layer resist having no undercut is added to a surface of a structure to be milled, the surface to be milled defining a plane. A milling process, such as ion milling, is performed. The milling process includes milling the structure at high incidence and milling the structure at razing incidence. The milling process can be performed only once, or repeated multiple times. High incidence can be defined as about 65 to about 90 degrees from the plane of the surface being milled. Razing incidence can be defined as about 0 to about 30 degrees from the plane of the surface being milled.
摘要翻译： 一种铣削结构的方法。 将未切割的单层或多层抗蚀剂加入要研磨的结构的表面，待研磨的表面限定一个平面。 进行铣削加工，例如离子铣削。 铣削过程包括以高发射率铣削结构并铣削结构。 铣削加工只能执行一次，或重复多次。 可以将高入射率定义为从被研磨表面的平面约65度至约90度。 闪电发生率可以定义为距被研磨表面的平面约0至约30度。
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5.发明授权Magnetic head having write head with helical coil and method for fabrication thereof 失效具有带螺旋线圈的写头的磁头及其制造方法公开(公告)号：US07116516B2
公开(公告)日：2006-10-03
申请号：US10611090
申请日：2003-06-30
申请人： Frederick Hayes Dill , Robert Edward Fontana, Jr. , Richard Hsiao , Hugo Alberto Emilio Santini
发明人： Frederick Hayes Dill , Robert Edward Fontana, Jr. , Richard Hsiao , Hugo Alberto Emilio Santini
IPC分类号： G11B5/127
CPC分类号： G11B5/313 , G11B5/012 , G11B5/127 , G11B5/17 , G11B5/3163 , Y10T29/49046
摘要： The present invention is a magnetic head having a helical induction coil and includes hard disk drive devices that utilize the magnetic head. The helical coil is fabricated around a magnetic pole yoke in a series of process steps that include a reactive ion etch (RIE) process step which is utilized to simultaneously form vertical interconnect vias and upper helical coil member trenches. Thereafter, in a single fabrication step, such as by electroplating, the vertical interconnect lines and the upper helical coil traces are created in a single fabrication step, such that they are integrally formed. The vertical interconnect lines provide an electrical connection between outer ends of previously formed lower helical coil traces and outer ends of the integrally formed upper helical coil traces, such that a helical coil is fabricated. In the preferred embodiment, the helical coil is composed of copper.
摘要翻译： 本发明是一种具有螺旋感应线圈的磁头，并且包括利用磁头的硬盘驱动装置。 在包括反应离子蚀刻（RIE）工艺步骤的一系列工艺步骤中围绕磁极轭制造螺旋线圈，其用于同时形成垂直互连通孔和上部螺旋线圈构件沟槽。 此后，在单个制造步骤中，例如通过电镀，在单个制造步骤中产生垂直互连线和上部螺旋线圈迹线，使得它们整体形成。 垂直互连线在先前形成的下螺旋线圈迹线的外端和整体形成的上螺旋线圈迹线的外端之间提供电连接，从而制造螺旋线圈。 在优选实施例中，螺旋线圈由铜构成。
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6.发明授权Planar stitched write head having write coil insulated with inorganic insulation 失效平面针迹写头，具有用无机绝缘绝缘的写线圈公开(公告)号：US06377423B2
公开(公告)日：2002-04-23
申请号：US09761034
申请日：2001-01-16
IPC分类号： G11B5147
CPC分类号： G11B5/313 , B82Y10/00 , G11B5/3967 , Y10T29/49044
摘要： A write head has a second pole tip layer, a coil layer and a write coil insulation layer that are planarized at their top surfaces. A thin top insulation layer insulates the top of the coil layer from a yoke portion of the second pole piece which is connected to the second pole tip layer in the pole tip region and connected to a first pole piece layer in a back gap region. In a preferred embodiment the write gap layer extends throughout the yoke region and provides the only insulation between the first pole piece layer and the coil layer. Further, it is preferred that the write coil insulation layer be an inorganic material such as silicon dioxide (SiO2). Several embodiments of the write head are provided along with novel methods of making.
摘要翻译： 写头具有在其顶表面处被平坦化的第二极尖端层，线圈层和写入线圈绝缘层。 薄顶部绝缘层将线圈层的顶部与第二极靴的轭部绝缘，该轭部与极尖端区域中的第二极尖端层连接并连接到后隙区域中的第一极靴层。 在优选实施例中，写间隙层延伸贯穿磁轭区域，并且在第一极片层和线圈层之间提供唯一的绝缘。 此外，写入线圈绝缘层优选为二氧化硅（SiO 2）等无机材料。 提供写头的几个实施例以及新颖的制作方法。
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7.发明授权Planar stitched write head having write coil insulated with inorganic insulation 失效平面针迹写头，具有用无机绝缘绝缘的写线圈公开(公告)号：US06226149B1
公开(公告)日：2001-05-01
申请号：US09212119
申请日：1998-12-15
IPC分类号： G11B5147
CPC分类号： G11B5/313 , B82Y10/00 , G11B5/3967 , Y10T29/49044
摘要： A write head has a second pole tip layer, a coil layer and a write coil insulation layer that are planarized at their top surfaces. A thin top insulation layer insulates the top of the coil layer from a yoke portion of the second pole piece which is connected to the second pole tip layer in the pole tip region and connected to a first pole piece layer in a back gap region. In a preferred embodiment the write gap layer extends throughout the yoke region and provides the only insulation between the first pole piece layer and the coil layer. Further, it is preferred that the write coil insulation layer be an inorganic material such as silicon dioxide (SiO2). Several embodiments of the write head are provided along with novel methods of making.
摘要翻译： 写头具有在其顶表面处被平坦化的第二极尖端层，线圈层和写入线圈绝缘层。 薄顶部绝缘层将线圈层的顶部与第二极靴的轭部绝缘，该轭部与极尖端区域中的第二极尖端层连接并连接到后隙区域中的第一极靴层。 在优选实施例中，写间隙层延伸贯穿磁轭区域，并且在第一极片层和线圈层之间提供唯一的绝缘。 此外，写入线圈绝缘层优选为二氧化硅（SiO 2）等无机材料。 提供写头的几个实施例以及新颖的制作方法。
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8.发明授权Magnetic head with lower coil traces connected to integrally formed vertical interconnects and upper coil traces through plural insulating layer arrangement 失效具有连接到整体形成的垂直互连的下线圈迹线和通过多个绝缘层布置的上线圈迹线的磁头公开(公告)号：US06819527B1
公开(公告)日：2004-11-16
申请号：US09535089
申请日：2000-03-23
申请人： Frederick Hayes Dill , Robert Edward Fontana, Jr. , Richard Hsiao , Hugo Alberto Emilio Santini
发明人： Frederick Hayes Dill , Robert Edward Fontana, Jr. , Richard Hsiao , Hugo Alberto Emilio Santini
IPC分类号： G11B517
CPC分类号： G11B5/313 , G11B5/012 , G11B5/127 , G11B5/17 , G11B5/3163 , Y10T29/49046
摘要： A magnetic head having a helical induction coil. The helical coil is fabricated around a magnetic pole yoke in a series of process steps that include a reactive ion etch (RIE) process step which is utilized to simultaneously form vertical interconnect vias and upper helical coil member trenches. Thereafter, in a single fabrication step, such as by electroplating, the vertical interconnect lines and the upper helical coil traces are created in a single fabrication step, such that they are integrally formed. The vertical interconnect lines provide an electrical connection between outer ends of previously formed lower helical coil traces and outer ends of the integrally formed upper helical coil traces, such that a helical coil is fabricated. In the preferred embodiment, the helical coil is composed of copper.
摘要翻译： 具有螺旋感应线圈的磁头。 在包括反应离子蚀刻（RIE）工艺步骤的一系列工艺步骤中围绕磁极轭制造螺旋线圈，其用于同时形成垂直互连通孔和上部螺旋线圈构件沟槽。 此后，在单个制造步骤中，例如通过电镀，在单个制造步骤中产生垂直互连线和上部螺旋线圈迹线，使得它们整体形成。 垂直互连线在先前形成的下螺旋线圈迹线的外端和整体形成的上螺旋线圈迹线的外端之间提供电连接，从而制造螺旋线圈。 在优选实施例中，螺旋线圈由铜构成。
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9.发明授权公开(公告)号：US06940693B2
公开(公告)日：2005-09-06
申请号：US10675065
申请日：2003-09-29
CPC分类号： G11B5/3116
摘要： An embodiment of a magnetic head of the present invention includes a media heating device that is fabricated within the magnetic head structure following the fabrication of the read head element of the magnetic head. The media heating device is preferably fabricated between the first and second magnetic pole layers and close to the ABS surface of the head. The heating device includes electrical leads and an electrically resistive heating element that is preferably comprised of TaSiN, NiCr or NiFe, and in the present invention one or both of the magnetic poles are utilized as an electrical lead of the heating device. The heating device serves to heat the magnetic media immediately prior to the passage of the magnetic media beneath the pole tip, which lowers the localized coercivity of the media and facilitates the writing of data to the media by the write head element of the magnetic head.
摘要翻译： 本发明的磁头的一个实施例包括在制造磁头读头元件之后制造在磁头结构内的介质加热装置。 介质加热装置优选地制造在第一和第二磁极层之间并且靠近头部的ABS表面。 加热装置包括电引线和优选由TaSiN，NiCr或NiFe组成的电阻加热元件，并且在本发明中，一个或两个磁极用作加热装置的电引线。 加热装置用于在磁性介质在磁极尖端之下通过之前立即加热磁性介质，这降低了介质的局部矫顽力，并且便于通过磁头的写头元件将数据写入介质。
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公开(公告)号：US07268973B2
公开(公告)日：2007-09-11
申请号：US10627396
申请日：2003-07-24
IPC分类号： G11B5/147
CPC分类号： G11B5/012 , G11B5/02 , G11B5/1278 , G11B5/332 , G11B2005/0002 , G11B2005/0005 , G11B2005/001 , G11B2005/0021
摘要： A perpendicular magnetic head including a media heating element that is fabricated within the magnetic head structure. The heating element is preferably fabricated above the first magnetic pole layer close to the ABS surface of the head. In one embodiment, following the fabrication of the heating element, a second magnetic pole probe layer that includes the second magnetic pole tip is fabricated. In an alternative head embodiment, a second magnetic pole shaping layer is fabricated upon the heating element, followed by the fabrication of the probe layer that includes the second magnetic pole tip. The heating element is an electrically resistive heating element that is preferably comprised of NiCr or NiFe.
摘要翻译： 包括在磁头结构内制造的介质加热元件的垂直磁头。 加热元件优选制造在靠近头部的ABS表面的第一磁极层的上方。 在一个实施例中，在加热元件的制造之后，制造包括第二磁极尖端的第二磁极探针层。 在替代的头部实施例中，在加热元件上制造第二磁极成形层，随后制造包括第二磁极尖端的探针层。 加热元件是优选由NiCr或NiFe组成的电阻加热元件。
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