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    Magnetic head having write head with helical coil and method for fabrication thereof
    2.
    发明授权
    Magnetic head having write head with helical coil and method for fabrication thereof 失效
    具有带螺旋线圈的写头的磁头及其制造方法

    公开(公告)号：US07116516B2

    公开(公告)日：2006-10-03

    申请号：US10611090

    申请日：2003-06-30

    申请人： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

    发明人： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

    IPC分类号： G11B5/127

    CPC分类号： G11B5/313 ,  G11B5/012 ,  G11B5/127 ,  G11B5/17 ,  G11B5/3163 ,  Y10T29/49046

    摘要： The present invention is a magnetic head having a helical induction coil and includes hard disk drive devices that utilize the magnetic head. The helical coil is fabricated around a magnetic pole yoke in a series of process steps that include a reactive ion etch (RIE) process step which is utilized to simultaneously form vertical interconnect vias and upper helical coil member trenches. Thereafter, in a single fabrication step, such as by electroplating, the vertical interconnect lines and the upper helical coil traces are created in a single fabrication step, such that they are integrally formed. The vertical interconnect lines provide an electrical connection between outer ends of previously formed lower helical coil traces and outer ends of the integrally formed upper helical coil traces, such that a helical coil is fabricated. In the preferred embodiment, the helical coil is composed of copper.

    摘要翻译： 本发明是一种具有螺旋感应线圈的磁头，并且包括利用磁头的硬盘驱动装置。 在包括反应离子蚀刻（RIE）工艺步骤的一系列工艺步骤中围绕磁极轭制造螺旋线圈，其用于同时形成垂直互连通孔和上部螺旋线圈构件沟槽。 此后，在单个制造步骤中，例如通过电镀，在单个制造步骤中产生垂直互连线和上部螺旋线圈迹线，使得它们整体形成。 垂直互连线在先前形成的下螺旋线圈迹线的外端和整体形成的上螺旋线圈迹线的外端之间提供电连接，从而制造螺旋线圈。 在优选实施例中，螺旋线圈由铜构成。

    Planar stitched write head having write coil insulated with inorganic insulation
    3.
    发明授权
    Planar stitched write head having write coil insulated with inorganic insulation 失效
    平面针迹写头，具有用无机绝缘绝缘的写线圈

    公开(公告)号：US06377423B2

    公开(公告)日：2002-04-23

    申请号：US09761034

    申请日：2001-01-16

    申请人： Frederick Hayes Dill, Jr. ,  Robert E. Fontana ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

    发明人： Frederick Hayes Dill, Jr. ,  Robert E. Fontana ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

    IPC分类号： G11B5147

    CPC分类号： G11B5/313 ,  B82Y10/00 ,  G11B5/3967 ,  Y10T29/49044

    摘要： A write head has a second pole tip layer, a coil layer and a write coil insulation layer that are planarized at their top surfaces. A thin top insulation layer insulates the top of the coil layer from a yoke portion of the second pole piece which is connected to the second pole tip layer in the pole tip region and connected to a first pole piece layer in a back gap region. In a preferred embodiment the write gap layer extends throughout the yoke region and provides the only insulation between the first pole piece layer and the coil layer. Further, it is preferred that the write coil insulation layer be an inorganic material such as silicon dioxide (SiO2). Several embodiments of the write head are provided along with novel methods of making.

    摘要翻译： 写头具有在其顶表面处被平坦化的第二极尖端层，线圈层和写入线圈绝缘层。 薄顶部绝缘层将线圈层的顶部与第二极靴的轭部绝缘，该轭部与极尖端区域中的第二极尖端层连接并连接到后隙区域中的第一极靴层。 在优选实施例中，写间隙层延伸贯穿磁轭区域，并且在第一极片层和线圈层之间提供唯一的绝缘。 此外，写入线圈绝缘层优选为二氧化硅（SiO 2）等无机材料。 提供写头的几个实施例以及新颖的制作方法。

    Planar stitched write head having write coil insulated with inorganic insulation
    4.
    发明授权
    Planar stitched write head having write coil insulated with inorganic insulation 失效
    平面针迹写头，具有用无机绝缘绝缘的写线圈

    公开(公告)号：US06226149B1

    公开(公告)日：2001-05-01

    申请号：US09212119

    申请日：1998-12-15

    申请人： Frederick Hayes Dill, Jr. ,  Robert E. Fontana ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

    发明人： Frederick Hayes Dill, Jr. ,  Robert E. Fontana ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

    IPC分类号： G11B5147

    CPC分类号： G11B5/313 ,  B82Y10/00 ,  G11B5/3967 ,  Y10T29/49044

    摘要： A write head has a second pole tip layer, a coil layer and a write coil insulation layer that are planarized at their top surfaces. A thin top insulation layer insulates the top of the coil layer from a yoke portion of the second pole piece which is connected to the second pole tip layer in the pole tip region and connected to a first pole piece layer in a back gap region. In a preferred embodiment the write gap layer extends throughout the yoke region and provides the only insulation between the first pole piece layer and the coil layer. Further, it is preferred that the write coil insulation layer be an inorganic material such as silicon dioxide (SiO2). Several embodiments of the write head are provided along with novel methods of making.

    摘要翻译： 写头具有在其顶表面处被平坦化的第二极尖端层，线圈层和写入线圈绝缘层。 薄顶部绝缘层将线圈层的顶部与第二极靴的轭部绝缘，该轭部与极尖端区域中的第二极尖端层连接并连接到后隙区域中的第一极靴层。 在优选实施例中，写间隙层延伸贯穿磁轭区域，并且在第一极片层和线圈层之间提供唯一的绝缘。 此外，写入线圈绝缘层优选为二氧化硅（SiO 2）等无机材料。 提供写头的几个实施例以及新颖的制作方法。

    Magnetic head with lower coil traces connected to integrally formed vertical interconnects and upper coil traces through plural insulating layer arrangement
    6.
    发明授权
    Magnetic head with lower coil traces connected to integrally formed vertical interconnects and upper coil traces through plural insulating layer arrangement 失效
    具有连接到整体形成的垂直互连的下线圈迹线和通过多个绝缘层布置的上线圈迹线的磁头

    公开(公告)号：US06819527B1

    公开(公告)日：2004-11-16

    申请号：US09535089

    申请日：2000-03-23

    申请人： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

    发明人： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

    IPC分类号： G11B517

    CPC分类号： G11B5/313 ,  G11B5/012 ,  G11B5/127 ,  G11B5/17 ,  G11B5/3163 ,  Y10T29/49046

    摘要： A magnetic head having a helical induction coil. The helical coil is fabricated around a magnetic pole yoke in a series of process steps that include a reactive ion etch (RIE) process step which is utilized to simultaneously form vertical interconnect vias and upper helical coil member trenches. Thereafter, in a single fabrication step, such as by electroplating, the vertical interconnect lines and the upper helical coil traces are created in a single fabrication step, such that they are integrally formed. The vertical interconnect lines provide an electrical connection between outer ends of previously formed lower helical coil traces and outer ends of the integrally formed upper helical coil traces, such that a helical coil is fabricated. In the preferred embodiment, the helical coil is composed of copper.

    摘要翻译： 具有螺旋感应线圈的磁头。 在包括反应离子蚀刻（RIE）工艺步骤的一系列工艺步骤中围绕磁极轭制造螺旋线圈，其用于同时形成垂直互连通孔和上部螺旋线圈构件沟槽。 此后，在单个制造步骤中，例如通过电镀，在单个制造步骤中产生垂直互连线和上部螺旋线圈迹线，使得它们整体形成。 垂直互连线在先前形成的下螺旋线圈迹线的外端和整体形成的上螺旋线圈迹线的外端之间提供电连接，从而制造螺旋线圈。 在优选实施例中，螺旋线圈由铜构成。

    Methods for forming a reed sensor
    7.
    发明授权
    Methods for forming a reed sensor 有权
    形成簧片传感器的方法

    公开(公告)号：US07380331B2

    公开(公告)日：2008-06-03

    申请号：US11132689

    申请日：2005-05-18

    申请人： Hugo Alberto Emilio Santini

    发明人： Hugo Alberto Emilio Santini

    IPC分类号： G11B5/187 ,  C23C14/04

    CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G01R33/093 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/332 ,  G11B5/3903 ,  G11B5/3912 ,  G11B5/3932 ,  G11B5/398 ,  G11B2005/3996 ,  Y10T29/49032 ,  Y10T29/49041 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49155

    摘要： A method comprises depositing first and second lead layers in end regions which surround a central region; and forming a read sensor in the central region such that a first edge of the read sensor is disposed above an edge of the first lead layer and a second edge of the read sensor is disposed above an edge of the second lead layer. In one approach, first and second bias layers are deposited in end regions over the first and the second lead layers. The read sensor is formed in the central region such that the first edge of the read sensor is disposed above an edge of the first bias layer and the second edge of the read sensor is disposed above an edge of the second bias layer. Third and fourth bias layers are deposited adjacent the read sensor. Methods taking different approaches are also presented.

    摘要翻译： 一种方法包括在围绕中心区域的端部区域中沉积第一和第二引线层; 以及在所述中央区域中形成读取传感器，使得所述读取传感器的第一边缘设置在所述第一引线层的边缘上方，并且所述读取传感器的第二边缘设置在所述第二引线层的边缘的上方。 在一种方法中，第一和第二偏压层沉积在第一和第二引线层上的端部区域中。 读取传感器形成在中央区域，使得读取传感器的第一边缘设置在第一偏置层的边缘上方，并且读取传感器的第二边缘设置在第二偏置层的边缘上方。 第三和第四偏置层沉积在读取传感器附近。 还提出了采取不同方法的方法。

    Method and device for determining in-process characteristics of fabricated magnetic heads
    9.
    发明授权
    Method and device for determining in-process characteristics of fabricated magnetic heads 失效
    用于确定制造磁头的工艺特性的方法和装置

    公开(公告)号：US06779249B2

    公开(公告)日：2004-08-24

    申请号：US09815906

    申请日：2001-03-23

    申请人： Hugo Alberto Emilio Santini

    发明人： Hugo Alberto Emilio Santini

    IPC分类号： G11B5127

    CPC分类号： G11B5/3173 ,  G11B5/3163 ,  G11B5/3166 ,  G11B5/455 ,  Y10T29/49032 ,  Y10T29/49036 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046

    摘要： A method for determining a characteristic of a magnetic head during its fabrication process on the surface of a wafer substrate. The method involves the fabrication of a test magnetic pole artifact in a field area of the substrate surface adjacent to the actual magnetic pole that is being fabricated. A test pole structure is fabricated simultaneously with, and utilizing the same fabrication conditions and parameters as, the actual pole such that the test pole is nearly identical to the actual pole. During a field etch step undertaken in the fabrication of the actual pole, portions of the test pole structure are removed, leaving a test pole artifact on the wafer surface. The test pole artifact can thus be easily measured as an accurate indication of characteristics of the actual magnetic pole that are difficult to measure directly, thereby saving time and expense in the magnetic head fabrication process. This method is particularly suited to determining the width of the base of the P2 pole tip of a magnetic head, where measurement of the base of the actual magnetic head pole tip is made difficult by the presence of the pole tip, and where the test artifact is easily measured because the test pole tip structure has been etched away, leaving only the artifact for measurement.

    摘要翻译： 一种用于在其制造工艺中在晶片衬底的表面上确定磁头的特性的方法。 该方法涉及在正在制造的实际磁极附近的衬底表面的场区域中制造测试磁极伪影。 测试极结构与实际极同时制造并利用与实际极相同的制造条件和参数，使得测试极几乎与实际极相同。 在实际极的制造中进行的场蚀刻步骤期间，测试极结构的部分被去除，在晶片表面上留下测试极伪影。 因此，测试极赝像可以容易地测量为难以直接测量的实际磁极的特性的精确指示，从而节省了磁头制造过程中的时间和费用。 该方法特别适用于确定磁头的P2极尖的基部的宽度，其中通过极尖的存在使实际磁头极尖的基极测量变得困难，并且其中测试伪影 容易测量，因为测试极端部结构已被蚀刻掉，仅留下测量的伪影。

    Method of making a write head with self-aligned pedestal shaped pole tips that are separated by a zero throat height defining layer
    10.
    发明授权
    Method of making a write head with self-aligned pedestal shaped pole tips that are separated by a zero throat height defining layer 失效
    制作具有自动对准基座形极头的写头的方法，其由零喉部高度限定层分开

    公开(公告)号：US06557242B1

    公开(公告)日：2003-05-06

    申请号：US09472409

    申请日：1999-12-27

    申请人： Hugo Alberto Emilio Santini

    发明人： Hugo Alberto Emilio Santini

    IPC分类号： G11B5127

    CPC分类号： G11B5/3116 ,  G11B5/012 ,  G11B5/313 ,  G11B5/3163 ,  G11B5/3967 ,  Y10T29/49032 ,  Y10T29/49034 ,  Y10T29/49039 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49052 ,  Y10T29/49067

    摘要： A merged magnetic head has a top first pole tip layer and a bottom second pole tip layer which are located entirely between an air bearing surface and a coil layer. A write gap layer separates the pole tip layers from one another at the ABS. A zero throat height (ZTH) defining layer is located adjacent the top gap layer between the pole tip layers and is recessed from the ABS so as to further separate the pole tip layers from one another at a location recessed from the ABS so as to define the zero throat height of the write head where the first and second pole pieces first commence to separate from one another after the ABS. A method of construction, which may be substantially a dry process or substantially a wet process, employs ion milling to form the shapes of the pole tip layers while protecting a bottom first pole piece layer from thinning except for notching of the bottom first pole piece layer adjacent side walls of the top first pole tip layer, the protection being provided by the ZTH defining layer in field regions of the head.

    摘要翻译： 合并磁头具有顶部的第一极尖端层和底部第二极尖端层，其完全位于空气轴承表面和线圈层之间。 写入间隙层在ABS处将极尖层彼此分离。 零喉部高度（ZTH）限定层位于极尖顶层之间的顶部间隙层附近并且从ABS凹入，以便在与ABS凹陷的位置处将极尖层彼此分离，以便限定 写入头的零喉部高度，其中第一和第二极片首先在ABS之后开始彼此分离。 基本上是干法或基本上湿法的构造方法采用离子铣削以形成极尖层的形状，同时保护底部第一极片层免于变薄，除了底部第一极片层的切口 顶部第一极尖端层的相邻侧壁，保护由头部的场区域中的ZTH限定层提供。