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16 条记录 (耗时 0.021 秒)

    Method for fabricating a magnetic transducer using a slurry with spherical particles for CMP-assisted photoresist lift-off
    1.
    发明授权
    Method for fabricating a magnetic transducer using a slurry with spherical particles for CMP-assisted photoresist lift-off 失效
    使用具有用于CMP辅助光致抗蚀剂剥离的球形颗粒的浆料制造磁换能器的方法

    公开(公告)号：US07094130B2

    公开(公告)日：2006-08-22

    申请号：US11222611

    申请日：2005-09-09

    申请人： Marie-Claire Cyrille ,  Frederick Hayes Dill ,  Jui-Lung Li

    发明人： Marie-Claire Cyrille ,  Frederick Hayes Dill ,  Jui-Lung Li

    IPC分类号： B24B1/00

    CPC分类号： B82Y25/00 ,  B82Y40/00 ,  H01F41/308 ,  Y10T29/49032

    摘要： A method is described which uses a CMP slurry with an abrasive of spherical particles to lift-off photoresist used in the patterning of the sensor for a magnetic transducer. The spherical particles, preferably less than 0.015 microns, are preferably silica, alumina, titania or zirconia with colloidal silica being preferred. An alternative method of fabricating a CPP sensor structure according to the invention deposits a dielectric or CMP resistant metal over the hard bias structure. The CMP-resistant metal is preferably selected from the group consisting of rhodium, chromium, vanadium and platinum. A CMP resistant mask deposited over the dielectric or CMP-resistant metal can include an optional adhesion layer such as tantalum followed by a DLC layer. The CMP-assisted lift-off of the photoresist and the excess materials is executed at this point. The photoresist used to protect the selected area of the sensor structure is lifted-off using the slurry.

    摘要翻译： 描述了一种方法，其使用具有球形颗粒磨料的CMP浆料来剥离用于磁传感器的传感器的图案化中使用的光致抗蚀剂。 优选小于0.015微米的球形颗粒优选是二氧化硅，氧化铝，二氧化钛或具有胶体二氧化硅的氧化锆。 根据本发明制备CPP传感器结构的替代方法是在硬偏压结构上沉积电介质或耐CMP的金属。 耐CMP的金属优选选自铑，铬，钒和铂。 沉积在电介质或耐CMP金属上的CMP抗蚀掩模可以包括任选的粘合层，例如钽，然后是DLC层。 此时执行CMP辅助的光致抗蚀剂和多余材料的剥离。 用于保护传感器结构的选定区域的光致抗蚀剂使用浆料被剥离。

    Magnetic tunnel junction magnetoresistive sensor with in-stack biasing
    3.
    发明授权
    Magnetic tunnel junction magnetoresistive sensor with in-stack biasing 失效
    具有堆叠偏置的磁隧道结磁阻传感器

    公开(公告)号：US6023395A

    公开(公告)日：2000-02-08

    申请号：US87334

    申请日：1998-05-29

    申请人： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Tsann Lin ,  Stuart Stephen Papworth Parkin ,  Ching Hwa Tsang

    发明人： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Tsann Lin ,  Stuart Stephen Papworth Parkin ,  Ching Hwa Tsang

    IPC分类号： G01R33/09 ,  G11B5/39

    CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G01R33/093 ,  G01R33/098 ,  G11B5/3903 ,  G11B2005/3996

    摘要： A magnetic tunnel junction (MTJ) magnetoresistive (MR) read head has one fixed ferromagnetic layer and one sensing ferromagnetic layer on opposite sides of the tunnel barrier layer, and with a biasing ferromagnetic layer in the MTJ stack of layers that is magnetostatically coupled with the sensing ferromagnetic layer to provide either longitudinal bias or transverse bias or a combination of longitudinal and transverse bias fields to the sensing ferromagnetic layer. The magnetic tunnel junction in the MTJ MR head is formed on an electrical lead on a substrate and is made up of a stack of layers. The layers in the stack are an antiferromagnetic layer, a fixed ferromagnetic layer exchange biased with the antiferromagnetic layer so that its magnetic moment cannot rotate in the presence of an applied magnetic field, an insulating tunnel barrier layer in contact with the fixed ferromagnetic layer, a sensing ferromagnetic layer in contact with the tunnel barrier layer and whose magnetic moment is free to rotate in the presence of an applied magnetic field, a biasing ferromagnetic layer that has its magnetic moment aligned generally within the plane of the device and a nonmagnetic electrically conductive spacer layer separating the biasing ferromagnetic layer from the other layers in the stack. The self field or demagnetizing field from the biasing ferromagnetic layer magnetostatically couples with the edges of the sensing ferromagnetic layer to stabilize its magnetic moment, and, to linearize the output of the device. The electrically conductive spacer layer prevents direct ferromagnetic coupling between the biasing ferromagnetic layer and the other layers in the stack and allows sense current to flow perpendicularly through the layers in the MTJ stack.

    摘要翻译： 磁隧道结（MTJ）磁阻（MR）读头在隧道势垒层的相对侧上具有一个固定的铁磁层和一个感测铁磁层，并且在与静电耦合的MTJ堆叠层中具有偏置铁磁层 感测铁磁层以向感测铁磁层提供纵向偏置或横向偏置或纵向和横向偏置场的组合。 MTJ MR头中的磁性隧道结形成在基板上的电引线上，并且由一叠层组成。 堆叠中的层是反铁磁层，固定的铁磁层与反铁磁层交替偏置，使得其在施加的磁场存在的情况下不能旋转，与固定铁磁层接触的绝缘隧道势垒层， 感测与隧道势垒层接触的铁磁层，并且其磁矩在施加的磁场存在的情况下自由旋转，偏磁铁磁层的磁矩大致在器件的平面内，非磁性导电间隔物 将偏置铁磁层与堆叠中的其它层分离。 来自偏置铁磁层的自场或去磁场与感测铁磁层的边缘静磁耦合以稳定其磁矩，并且使器件的输出线性化。 导电间隔层防止偏置铁磁层与堆叠中的其他层之间的直接铁磁耦合，并且允许感测电流垂直地流过MTJ堆叠中的层。

    Shielded magnetic tunnel junction magnetoresistive read head
    4.
    发明授权
    Shielded magnetic tunnel junction magnetoresistive read head 失效
    屏蔽磁隧道结磁阻读头

    公开(公告)号：US5898548A

    公开(公告)日：1999-04-27

    申请号：US957787

    申请日：1997-10-24

    申请人： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Stuart Stephen Papworth Parkin ,  Ching Hwa Tsang

    发明人： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Stuart Stephen Papworth Parkin ,  Ching Hwa Tsang

    IPC分类号： G11B5/39 ,  G11B5/33 ,  H01F10/16 ,  H01F10/32 ,  H01L43/08

    CPC分类号： G11B5/332 ,  G11B5/33 ,  G11B5/3909 ,  G11B5/3912

    摘要： A magnetic tunnel junction (MTJ) magnetoresistive read head for a magnetic recording system has the MTJ device located between two spaced-apart magnetic shields. The magnetic shields, which allow the head to detect individual magnetic transitions from the magnetic recording medium without interference from neighboring transitions, also function as electrical leads for connection of the head to sense circuitry. Electrically conductive spacer layers are located at the top and bottom of the MTJ device and connect the MTJ device to the shields. The thickness of the spacer layers is selected to optimize the spacing between the shields, which is a parameter that controls the linear resolution of the data that can be read from the magnetic recording medium. To reduce the likelihood of electrical shorting between the shields if the shield-to-shield spacing is too small, each of the shields can have a pedestal region with the MTJ device located between the two pedestals, so that the shield-to-shield spacing outside the pedestal regions is greater than in the pedestal regions.

    摘要翻译： 用于磁记录系统的磁性隧道结（MTJ）磁阻读取头具有位于两个间隔开的磁屏蔽之间的MTJ器件。 允许头部从磁记录介质检测各个磁转变而不受相邻转变的干扰的磁屏蔽也用作用于将头连接到感测电路的电引线。 导电间隔层位于MTJ设备的顶部和底部，并将MTJ设备连接到屏蔽。 选择间隔层的厚度以优化屏蔽之间的间隔，这是控制可从磁记录介质读取的数据的线性分辨率的参数。 为了减少屏蔽间隔太小的屏蔽之间的电气短路的可能性，每个屏蔽件可以具有基座区域，MTJ装置位于两个基座之间，使得屏蔽与屏蔽间隔 在基座区域外部大于基座区域。

    Method of making a read sensor while protecting it from electrostatic discharge (ESD) damage
    6.
    发明授权
    Method of making a read sensor while protecting it from electrostatic discharge (ESD) damage 失效
    制造读取传感器同时防止静电放电（ESD）损坏的方法

    公开(公告)号：US07291279B2

    公开(公告)日：2007-11-06

    申请号：US10835807

    申请日：2004-04-30

    申请人： Frederick Hayes Dill ,  Meng Ding ,  Kuok San Ho ,  Jordan Asher Katine ,  Scott Arthur MacDonald ,  Huey-Ming Tzeng

    发明人： Frederick Hayes Dill ,  Meng Ding ,  Kuok San Ho ,  Jordan Asher Katine ,  Scott Arthur MacDonald ,  Huey-Ming Tzeng

    IPC分类号： B44C1/22 ,  H01L21/00 ,  G11B5/33 ,  G11B5/127

    CPC分类号： G11B5/3906 ,  G11B5/3163 ,  G11B5/40 ,  Y10T29/49021 ,  Y10T29/49043 ,  Y10T29/49048

    摘要： A method of making a read sensor while protecting it from electrostatic discharge (ESD) damage involves forming a severable shunt during the formation of the read sensor. The method may include forming a resist layer over a plurality of read sensor layers; performing lithography with use of a mask to form the resist layer into a patterned resist which exposes left and right side regions over the read sensor layers as well as a shunt region; etching, with the patterned resist in place, to remove materials in the left and right side regions and in the shunt region; and depositing, with the patterned resist in place, left and right hard bias and lead layers in the left and right side regions, respectively, and in the shunt region for forming a severable shunt which electrically couples the left and right hard bias and lead layers together for ESD protection.

    摘要翻译： 制造读取传感器同时防止静电放电（ESD）损坏的方法包括在形成读取的传感器期间形成可分离的分流。 该方法可以包括在多个读取传感器层上形成抗蚀剂层; 使用掩模执行光刻以将抗蚀剂层形成图案化的抗蚀剂，其在读取的传感器层以及分流区域上暴露左侧区域和右侧区域; 蚀刻，图案化抗蚀剂就位，以去除左右侧区域和分流区域中的材料; 并且分别在左侧区域和右侧区域以及分流区域中分别将图案化的抗蚀剂沉积在左侧和右侧的硬偏压和引线层，以形成可分离的分流器，其将左右硬偏压和引线层电耦合 一起为ESD保护。

    Magnetic head having write head with helical coil and method for fabrication thereof
    8.
    发明授权
    Magnetic head having write head with helical coil and method for fabrication thereof 失效
    具有带螺旋线圈的写头的磁头及其制造方法

    公开(公告)号：US07116516B2

    公开(公告)日：2006-10-03

    申请号：US10611090

    申请日：2003-06-30

    申请人： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

    发明人： Frederick Hayes Dill ,  Robert Edward Fontana, Jr. ,  Richard Hsiao ,  Hugo Alberto Emilio Santini

    IPC分类号： G11B5/127

    CPC分类号： G11B5/313 ,  G11B5/012 ,  G11B5/127 ,  G11B5/17 ,  G11B5/3163 ,  Y10T29/49046

    摘要： The present invention is a magnetic head having a helical induction coil and includes hard disk drive devices that utilize the magnetic head. The helical coil is fabricated around a magnetic pole yoke in a series of process steps that include a reactive ion etch (RIE) process step which is utilized to simultaneously form vertical interconnect vias and upper helical coil member trenches. Thereafter, in a single fabrication step, such as by electroplating, the vertical interconnect lines and the upper helical coil traces are created in a single fabrication step, such that they are integrally formed. The vertical interconnect lines provide an electrical connection between outer ends of previously formed lower helical coil traces and outer ends of the integrally formed upper helical coil traces, such that a helical coil is fabricated. In the preferred embodiment, the helical coil is composed of copper.

    摘要翻译： 本发明是一种具有螺旋感应线圈的磁头，并且包括利用磁头的硬盘驱动装置。 在包括反应离子蚀刻（RIE）工艺步骤的一系列工艺步骤中围绕磁极轭制造螺旋线圈，其用于同时形成垂直互连通孔和上部螺旋线圈构件沟槽。 此后，在单个制造步骤中，例如通过电镀，在单个制造步骤中产生垂直互连线和上部螺旋线圈迹线，使得它们整体形成。 垂直互连线在先前形成的下螺旋线圈迹线的外端和整体形成的上螺旋线圈迹线的外端之间提供电连接，从而制造螺旋线圈。 在优选实施例中，螺旋线圈由铜构成。

    Combination inductive write head and magnetoresistive (MR) read head with improved topography
    9.
    发明授权
    Combination inductive write head and magnetoresistive (MR) read head with improved topography 有权
    组合感应写磁头和磁阻（MR）读头，具有改进的形貌

    公开(公告)号：US06324036B1

    公开(公告)日：2001-11-27

    申请号：US09320480

    申请日：1999-05-26

    申请人： Frederick Hayes Dill, Jr. ,  Robert E. Fontana, Jr. ,  Eric James Lee

    发明人： Frederick Hayes Dill, Jr. ,  Robert E. Fontana, Jr. ,  Eric James Lee

    IPC分类号： G11B5147

    CPC分类号： B82Y25/00 ,  B82Y10/00 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3967 ,  G11B2005/3996

    摘要： An apparatus and method of making is disclosed for a combination read/write head having improved topography. The disclosed read/write head combines a magnetoresistive (MR) read head with an inductive magnetic write head. The head is planarized at a second shield layer with a planarization layer such that pads and leads connecting the pads to the MR sensor and coil are on a planar surface of the planaritzation layer. This planarization layer allows first and second shield layers to be optimized for the MR sensor to be used and also separates the pads and leads from the substrate. The combination head has first and second shield layers formed on a substrate, the shield layers being separated by a read gap. A magnetoresistive (MR) sensor and MR leads are located in the read gap. The planarization layer is then formed on the substrate, surrounding the first and second shield layers creating a planar surface that is coplanar with a top surface of the second shield layer. A write gap layer is fabricated along with a pole piece. The pole piece being separated by the write gap layer at the ABS and connected to the second shield layer at a back gap that is recessed in the head from the ABS. An insulation layer and coil layer embedded in the insulation layer with the insulation layer and the coil layer being located between the second shield layer and the pole piece. Pads and leads are formed on the planarization layer, with the leads electrically connected to the MR sensor and the coil.

    摘要翻译： 公开了一种具有改进的形貌的组合读/写头的制造装置和方法。 所公开的读/写头将磁阻（MR）读头与感应磁写头相结合。 头部在具有平坦化层的第二屏蔽层处被平坦化，使得将焊盘连接到MR传感器和线圈的焊盘和引线位于平面化层的平面表面上。 该平坦化层允许为要使用的MR传感器优化第一和第二屏蔽层，并且还将衬垫和引线与衬底分离。 组合头具有形成在基板上的第一和第二屏蔽层，屏蔽层被读取间隙分开。 磁阻（MR）传感器和MR引线位于读取间隙中。 然后在衬底上形成平坦化层，围绕第一和第二屏蔽层，形成与第二屏蔽层的顶表面共平面的平坦表面。 写间隙层与极片一起制造。 该极片在ABS处由写入间隙层分开，并且在与ABS相对的头部凹陷的后部间隙处连接到第二屏蔽层。 绝缘层和线圈层嵌入绝缘层中，绝缘层和线圈层位于第二屏蔽层和极片之间。 在平坦化层上形成垫和引线，引线电连接到MR传感器和线圈。