公开(公告)号：US09551696B2

公开(公告)日：2017-01-24

申请号：US14311380

申请日：2014-06-23

Applicant: GLOBALFOUNDRIES INC.

Inventor： Mark S. Chace ,  Martin Glodde ,  Margaret C. Lawson ,  Janine L. Protzman ,  Qin Yuan

IPC: B08B7/04 ,  G01N21/00 ,  G03F7/42 ,  G01N33/44 ,  G03F7/20 ,  B08B7/00

CPC classification number: G01N33/44 ,  B08B7/00 ,  B08B7/0035 ,  B08B7/04 ,  G01N1/44 ,  G03F7/70916

Abstract: A method of testing the cleanability of polymerized sublimate outgassed from a lithography material during a thermal heating process including; placing a wafer on a wafer hotplate inside a chamber with the wafer being covered by a lithography material; placing a target, having a starting composition, above the wafer in the chamber; heating the wafer using the wafer hotplate in an attempt to outgas a sublimate, where the sublimate condenses on the target; forming a polymerized sublimate on the target; and applying organic solvents to the target to determine the cleanability of the polymerized sublimate.

Abstract translation: 一种在热加热过程中测试从光刻材料脱气的聚合升华物的可清洁性的方法，包括： 将晶片放置在室内的晶片加热板上，晶片被光刻材料覆盖; 将具有起始组成的靶放置在所述腔中的所述晶片之上; 使用晶片加热板加热晶片以试图排出升华，其中升华在目标上冷凝; 在目标上形成聚合的升华; 并向目标物施加有机溶剂以确定聚合的升华物的可清洁性。

公开(公告)号：US20170154763A1

公开(公告)日：2017-06-01

申请号：US14954053

申请日：2015-11-30

Applicant: GLOBALFOUNDRIES INC.

Inventor： Qin Yuan ,  Mark S. Chace ,  Steven E. Molis ,  Janine L. Protzman

IPC: H01J49/04 ,  H01J49/00 ,  H01J49/24 ,  H01J49/16

CPC classification number: H01J49/0463 ,  H01J49/0404

Abstract: A mass spectrometer system includes a chamber configured to receive a sample; a gas source coupled to the chamber for delivering a gas across the sample; and a desorption energy source configured to desorb a contaminant from a test area of the sample. The system may also include a mass spectrometer including a vacuum source, an ion source, a mass analyzer and a detector, and a capillary transfer line operatively coupled to the chamber and the mass spectrometer and configured to deliver desorbed volatiles of the contaminant from the test area to the mass spectrometer, the capillary transfer line having an intake proximal the test area. A method of identifying a contaminant is also disclosed.

公开(公告)号：US09604316B2

公开(公告)日：2017-03-28

申请号：US14493818

申请日：2014-09-23

Applicant: GLOBALFOUNDRIES INC.

Inventor： Charles L. Arvin ,  Mark S. Chace ,  Qin Yuan ,  Nitin Jadhav ,  Janine L. Protzman

IPC: B23K31/00 ,  B23K31/02 ,  B23K35/26 ,  B23K35/36 ,  B23K35/02 ,  B23K1/20 ,  C23C18/48 ,  H05K3/34

CPC classification number: B23K35/262 ,  B23K1/20 ,  B23K35/0222 ,  B23K35/3612 ,  C23C18/48 ,  H05K3/3473 ,  H05K2203/044

Abstract: A tin-based solder melt or aqueous tin plating bath composition comprising a source of tin and a stabilizing additive of chemical structure: wherein R1, R2, R3, R4, R5, R6, R7, R8, R9, and R10 are independently selected from hydrogen atom, hydrocarbon groups R having at least one and up to twelve carbon atoms, groups OR′ wherein R′ is selected from hydrogen atom and hydrocarbon groups R, and halogen atoms, and wherein any two, three, or four of R1, R2, R3, R4, and R5 or any two, three, or four of R6, R7, R8, R9, and R10 are optionally interconnected to form a fused ring system; R11 and R12 are independently selected from hydrogen atom and hydrocarbon groups R; and r is either 0 or 1. Methods for coating and/or bonding metal substrates by use of the above-described solder compositions are also described.