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公开(公告)号:US11380703B2
公开(公告)日:2022-07-05
申请号:US17087683
申请日:2020-11-03
发明人: Xinshu Cai , Yongshun Sun , Lanxiang Wang , Eng Huat Toh , Shyue Seng Tan
IPC分类号: H01L27/1156 , H01L29/06
摘要: A memory structure may be provided, including a substrate, and a first well region, a second well region, and a third well region arranged within the substrate, where the first well region and the third well region may have a first conductivity type, and the second well region may have a second conductivity type different from the first conductivity type, and where the second well region may be arranged laterally between the first well region and the third well region. The memory structure may further include a first gate structure and a second gate structure arranged over the second well region. The first gate structure may extend over the third well region and the second gate structure may extend over the first well region.
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公开(公告)号:US11158643B2
公开(公告)日:2021-10-26
申请号:US16695725
申请日:2019-11-26
IPC分类号: H01L27/11519 , H01L27/11521
摘要: Structures for a non-volatile memory bit cell and methods of forming a structure for a non-volatile memory bit cell. A field-effect transistor has a channel region and a first gate electrode positioned over the channel region. A capacitor includes a second gate electrode that is coupled to the first gate electrode to define a floating gate. The first gate electrode has a non-rectangular shape.
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公开(公告)号:US20180082999A1
公开(公告)日:2018-03-22
申请号:US15268836
申请日:2016-09-19
发明人: Xinshu Cai , Fan Zhang , Danny Pak-Chum Shum
IPC分类号: H01L27/088 , H01L29/06 , H01L23/528 , H01L21/8234
CPC分类号: H01L27/088 , H01L21/28273 , H01L21/762 , H01L21/823437 , H01L21/823456 , H01L21/823462 , H01L21/823475 , H01L21/823481 , H01L23/5283 , H01L27/11524 , H01L27/11546 , H01L29/0649 , H01L29/42324 , H01L29/42364 , H01L29/513
摘要: Methods of fabricating integrated circuits and integrated circuits fabricated by those methods are provided. In an exemplary embodiment, a method includes providing a substrate having a first and second device wells, a gate dielectric overlying the first and second device wells, a first gate electrode layer overlying the gate dielectric, and a shallow trench isolation structure between the first and second device wells. An insulating dielectric layer is formed only partially overlying the first gate electrode layer. A second gate electrode material is deposited overlying at least the insulating dielectric layer to form a second gate electrode layer. The layers are patterned to form a second gate structure overlying the second device well. A contact is formed on the second gate electrode layer of the second gate structure with the contact overlying dielectric material of at least one of the insulating dielectric layer or the shallow trench isolation structure.
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公开(公告)号:US11641739B2
公开(公告)日:2023-05-02
申请号:US16889726
申请日:2020-06-01
发明人: Yongshun Sun , Eng Huat Toh , Shyue Seng Tan , Xinshu Cai , Lanxiang Wang
IPC分类号: H01L27/11558 , H01L27/11539 , H01L29/66
摘要: A memory device is provided. The memory device includes an active region in a substrate, an electrically-isolated electrode, and a dielectric layer. The electrically-isolated electrode is disposed over the active region. The dielectric layer is disposed between the electrically-isolated electrode and the active region and has a first dielectric portion having a first thickness and a second dielectric portion having a second thickness.
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公开(公告)号:US20230129914A1
公开(公告)日:2023-04-27
申请号:US17509611
申请日:2021-10-25
发明人: Xinshu Cai , Shyue Seng Tan , Vibhor Jain , John J. Pekarik , Kien Seen Daniel Chong , Yung Fu Chong , Judson R. Holt , Qizhi Liu , Kenneth J. Stein
IPC分类号: H01L29/737 , H01L29/10 , H01L29/45 , H01L29/66
摘要: The present disclosure relates to semiconductor structures and, more particularly, to transistor with wrap-around extrinsic base and methods of manufacture. The structure includes: a substrate; a collector region within the substrate; an emitter region over the substrate and which comprises silicon based material; an intrinsic base; and an extrinsic base overlapping the emitter region and the intrinsic base; an extrinsic base overlapping the emitter region and the intrinsic base; and an inverted “T” shaped spacer which separates the emitter region from the extrinsic base and the collector region from the emitter region.
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公开(公告)号:US11164881B2
公开(公告)日:2021-11-02
申请号:US16127262
申请日:2018-09-11
发明人: Xinshu Cai , Shyue Seng Tan , Danny Pak-Chum Shum
IPC分类号: H01L27/11524 , H01L29/788 , G11C11/56 , G11C16/04
摘要: In a non-limiting embodiment, a memory array is provided having a transistor device. The transistor device includes transistor device first, second and third doped regions in a substrate. The transistor device further includes a first transistor device select gate over a region between the transistor device first doped region and the transistor device second doped region, and a second transistor device select gate over a region between the transistor device first doped region and the transistor device third doped region. The transistor device further includes a transistor device dielectric barrier extending between the first transistor device select gate and the second transistor device select gate. A width of the dielectric barrier compared to a width of the first transistor device select gate and/or the second transistor device select gate may have a ratio ranging from 0.33:1 to 5:1.
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公开(公告)号:US20210159234A1
公开(公告)日:2021-05-27
申请号:US16695725
申请日:2019-11-26
IPC分类号: H01L27/11519 , H01L27/11521
摘要: Structures for a non-volatile memory bit cell and methods of forming a structure for a non-volatile memory bit cell. A field-effect transistor has a channel region and a first gate electrode positioned over the channel region. A capacitor includes a second gate electrode that is coupled to the first gate electrode to define a floating gate. The first gate electrode has a non-rectangular shape.
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公开(公告)号:US10020372B1
公开(公告)日:2018-07-10
申请号:US15496752
申请日:2017-04-25
发明人: Khee Yong Lim , Kian Ming Tan , Fangxin Deng , Zhiqiang Teo , Xinshu Cai , Elgin Kiok Boone Quek , Fan Zhang
IPC分类号: H01L27/115 , H01L29/788 , H01L27/11573 , H01L21/28 , H01L29/51 , H01L29/423 , H01L29/66 , H01L27/11521 , H01L27/11548 , H01L27/11526 , H01L21/768 , H01L21/265 , H01L21/02 , H01L21/3213 , H01L23/528 , H01L23/535 , H01L23/532 , H01L29/06
CPC分类号: H01L29/42328 , H01L21/02236 , H01L21/26513 , H01L21/32136 , H01L21/32139 , H01L21/76816 , H01L21/76895 , H01L23/528 , H01L23/53271 , H01L23/535 , H01L27/11521 , H01L27/11526 , H01L27/11531 , H01L27/11548 , H01L29/0649 , H01L29/40114 , H01L29/66825 , H01L29/7883
摘要: A method of forming a thick EG polysilicon over the FG and resulting device are provided. Embodiments include forming a CG on a substrate; forming an STI between a logic region and the CG; forming a polysilicon EG through the CG and CG HM; forming a polysilicon structure over the logic and STI; forming and overfilling with polysilicon a WL trench through the CG and CG HM, between the EG and STI; forming a buffer oxide in the polysilicon structure over the logic region and part of the STI; recessing the buffer oxide and etching back the polysilicon overfill down the CG HM; forming a second buffer oxide over the EG and logic region; recessing the WL polysilicon; removing the first and second buffer oxides; forming a mask with an opening over a center of the WL, the STI, and a majority of the logic region; and removing exposed polysilicon.
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公开(公告)号:US20230127768A1
公开(公告)日:2023-04-27
申请号:US17509604
申请日:2021-10-25
发明人: Xinshu Cai , Shyue Seng Tan , Vibhor Jain , John J. Pekarik , Kien Seen Daniel Chong , Yung Fu Chong , Judson R. Holt , Qizhi Liu , Kenneth J. Stein
IPC分类号: H01L29/737 , H01L29/10 , H01L29/45 , H01L29/66
摘要: The present disclosure relates to semiconductor structures and, more particularly, to transistor with wrap-around extrinsic base and methods of manufacture. The structure includes: a substrate; a collector region within the substrate; an emitter region over the substrate and which comprises mono-crystal silicon based material; an intrinsic base under the emitter region and comprising semiconductor material; and an extrinsic base surrounding the emitter and over the intrinsic base.
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公开(公告)号:US11450677B2
公开(公告)日:2022-09-20
申请号:US17093602
申请日:2020-11-09
发明人: Lanxiang Wang , Shyue Seng Tan , Xinshu Cai , Eng Huat Toh , Yongshun Sun
IPC分类号: H01L27/11521 , H01L27/11558 , H01L27/11519
摘要: A nonvolatile memory device may be provided. The nonvolatile memory device comprises an active region, an n-well region and an isolation region separating the active region and the n-well region. A floating gate may be provided. The floating gate may be arranged over a portion of the active region and over a first portion of the n-well region. A first doped region in the active region may be laterally displaced from the floating gate on a first side and a second doped region in the active region may be laterally displaced from the floating gate on a second side opposite to the first side. A contact may be arranged over the n-well region, whereby the contact may be laterally displaced from a first corner of the floating gate over the first portion of the n-well region. A silicide exclusion layer may be arranged at least partially over the floating gate.
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