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公开(公告)号：US06251562B1
公开(公告)日：2001-06-26
申请号：US09219586
申请日：1998-12-23
申请人： Gregory Breyta , Thomas Carl Clarke , Daniel Joseph Dawson , Ronald P. Esch , Alfred Floyd Renaldo
发明人： Gregory Breyta , Thomas Carl Clarke , Daniel Joseph Dawson , Ronald P. Esch , Alfred Floyd Renaldo
IPC分类号： G03C1825
CPC分类号： C08F212/14 , G03F7/091 , Y10S430/11
摘要： An antireflective composition includes a polyphenolic polymer which has a first repeating unit and a second repeating unit of the formula: wherein each of R1, R2, R3, R4, and R5 is individually a hydroxy group, hydrogen or an azo dye and only one of R1, R2, R3, R4, and R5 is a hydroxy group.
摘要翻译： 抗反射组合物包括具有下式的第一重复单元和第二重复单元的多酚聚合物：其中R 1，R 2，R 3，R 4和R 5各自独立地为羟基，氢或偶氮染料，并且仅一个 R1，R2，R3，R4和R5是羟基。
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2.发明申请公开(公告)号：US20090177017A1
公开(公告)日：2009-07-09
申请号：US12402680
申请日：2009-03-12
CPC分类号： C07C69/653 , C07C31/42 , C07C35/48 , C07C35/52 , C07C69/65 , C07C2601/04 , C07C2601/08 , C07C2602/42
摘要： The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
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3.发明申请公开(公告)号：US20090036717A1
公开(公告)日：2009-02-05
申请号：US12253039
申请日：2008-10-16
IPC分类号： C07C33/42
CPC分类号： C07C33/44 , C07C33/423 , C07C69/653 , C07C69/753 , C07C2601/10 , C07C2601/16 , C07C2602/42
摘要： The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
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4.发明授权Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use 失效含氟链烷醇的烯烃单体的前体，以及相关的合成和使用方法公开(公告)号：US07442828B2
公开(公告)日：2008-10-28
申请号：US11844806
申请日：2007-08-24
IPC分类号： C07C69/013 , C07C35/14
CPC分类号： C07C69/653 , C07C31/42 , C07C35/48 , C07C35/52 , C07C69/65 , C07C2601/04 , C07C2601/08 , C07C2602/42
摘要： The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
摘要翻译： 本发明提供氟链烷醇取代的α，β-不饱和酯的烯烃氟烷醇和氟化多元醇前体。 氟烷醇取代的α，β-不饱和酯是可以容易地聚合以提供用于平版印刷光刻胶组合物的氟代烷醇取代的聚合物的烯烃。 还提供了用于合成烯烃氟烷醇和氟化多元醇前体的方法。
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5.发明授权Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use 有权含氟链烷醇的烯烃单体的前体，以及相关的合成和使用方法公开(公告)号：US07767866B2
公开(公告)日：2010-08-03
申请号：US12402680
申请日：2009-03-12
CPC分类号： C07C69/653 , C07C31/42 , C07C35/48 , C07C35/52 , C07C69/65 , C07C2601/04 , C07C2601/08 , C07C2602/42
摘要： The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
摘要翻译： 本发明提供了烯烃氟烷醇和含氟烷醇取代的α，β-不饱和酯的氟化多元醇前体。 氟烷醇取代的α，β-不饱和酯是可以容易地聚合以提供可用于平版光刻胶组合物中的氟烷醇取代的聚合物的烯烃。 还提供了用于合成烯烃氟烷醇和氟化多元醇前体的方法。
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6.发明申请Precursors to Fluoroalkanol-Containing Olefin Monomers, and Associated Methods of Synthesis and Use 失效含氟链烷醇的烯烃单体的前体及其合成和使用的相关方法公开(公告)号：US20090054700A1
公开(公告)日：2009-02-26
申请号：US12253083
申请日：2008-10-16
IPC分类号： C07C33/42
CPC分类号： C07C33/44 , C07C33/423 , C07C69/653 , C07C69/753 , C07C2601/10 , C07C2601/16 , C07C2602/42
摘要： The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
摘要翻译： 本发明提供氟链烷醇取代的α，β-不饱和酯的烯烃氟烷醇和氟化多元醇前体。 氟烷醇取代的α，β-不饱和酯是可以容易地聚合以提供用于平版印刷光刻胶组合物的氟代烷醇取代的聚合物的烯烃。 还提供了用于合成烯烃氟烷醇和氟化多元醇前体的方法。
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7.发明授权Precursors to fluoroalkanol-containing olefin monomers, and associated methods of synthesis and use 失效含氟链烷醇的烯烃单体的前体，以及相关的合成和使用方法公开(公告)号：US08716534B2
公开(公告)日：2014-05-06
申请号：US12253039
申请日：2008-10-16
CPC分类号： C07C33/44 , C07C33/423 , C07C69/653 , C07C69/753 , C07C2601/10 , C07C2601/16 , C07C2602/42
摘要： The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
摘要翻译： 本发明提供了烯烃氟烷醇和含氟烷醇取代的α，β-不饱和酯的氟化多元醇前体。 氟烷醇取代的α，β-不饱和酯是可以容易地聚合以提供可用于平版光刻胶组合物中的氟烷醇取代的聚合物的烯烃。 还提供了用于合成烯烃氟烷醇和氟化多元醇前体的方法。
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公开(公告)号：US07354692B2
公开(公告)日：2008-04-08
申请号：US11125971
申请日：2005-05-09
CPC分类号： G03F7/0392 , G03F7/001 , G03F7/031 , G03F7/2004 , Y10S430/115 , Y10S430/127
摘要： A class of lithographic photoresist combinations is disclosed which is suitable for use with visible light and does not require a post-exposure bake step. The disclosed photoresists are preferably chemical amplification photoresists and contain a photosensitizer having the structure of formula (I): where Ar1 and Ar2 are independently selected from monocyclic aryl and monocyclic heteroaryl, R1 and R2 may be the same or different, and have the structure —X—R3 where X is O or S and R3 is C1-C6 hydrocarbyl or heteroatom-containing C1-C6 hydrocarbyl, and R4 and R5 are independently selected from the group consisting of hydrogen and —X—R3, or, if ortho to each other, may be taken together to form a five- or six-membered aromatic ring, with the proviso that any heteroatom contained within Ar1, Ar2, or R3 is O or S. The use of the disclosed photoresists, particularly for the manufacture of holographic diffraction gratings, is also disclosed.
摘要翻译： 公开了一类光刻抗蚀剂组合物，其适用于可见光并且不需要曝光后烘烤步骤。 所公开的光致抗蚀剂优选是化学放大光致抗蚀剂，并含有具有式（I）结构的光敏剂：其中Ar 1和Ar 2独立地选自单环芳基和单环杂芳基 R 1和R 2可以相同或不同，并且具有结构-XR 3，其中X是O或S，R“ SUP> 3是C 1 -C 6烃基或含杂原子的C 1 -C 6 N >烃基，R 4和R 5独立地选自氢和-XR 3 O 3，或者如果各自的邻位 另一个可以一起形成五元或六元芳环，条件是含有Ar 1，Ar 2或R 0的任何杂原子 > 3 是O或S.还公开了所公开的光致抗蚀剂的使用，特别是用于制造全息衍射光栅。
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9.发明授权Precursors to fluoroalkanol-containing olefin monomers and associated methods of synthesis and use 有权含氟链烷醇的烯烃单体的前体和相关的合成和使用方法公开(公告)号：US07297811B2
公开(公告)日：2007-11-20
申请号：US10729453
申请日：2003-12-04
IPC分类号： C07C69/13 , C07C69/62 , C07C69/65 , C07C69/003
CPC分类号： C07C69/653 , C07C31/42 , C07C35/48 , C07C35/52 , C07C69/65 , C07C2601/04 , C07C2601/08 , C07C2602/42
摘要： The invention provides alkene fluoroalkanol and fluorinated polyol precursors to fluoroalkanol-substituted α,β-unsaturated esters. The fluoroalkanol-substituted α,β-unsaturated esters are olefins that can be readily polymerized to provide fluoroalkanol-substituted polymers useful in lithographic photoresist compositions. Also provided are methods for synthesizing the alkene fluoroalkanol and fluorinated polyol precursors.
摘要翻译： 本发明提供氟链烷醇取代的α，β-不饱和酯的烯烃氟烷醇和氟化多元醇前体。 氟烷醇取代的α，β-不饱和酯是可以容易地聚合以提供用于平版印刷光刻胶组合物的氟代烷醇取代的聚合物的烯烃。 还提供了用于合成烯烃氟烷醇和氟化多元醇前体的方法。
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公开(公告)号：US6153696A
公开(公告)日：2000-11-28
申请号：US59861
申请日：1993-05-10
申请人： Gregory Breyta , Daniel Joseph Dawson , Moahmoud Mostafa Khojasteh , Ranee Wai-Ling Kwong , Elwood Herbert Macy , David Paul Merritt , Wayne Martin Moreau , Stanley Eugene Perreault , Harbans Singh Sachdev , Robert Lavin Wood , Hiroshi Ito
发明人： Gregory Breyta , Daniel Joseph Dawson , Moahmoud Mostafa Khojasteh , Ranee Wai-Ling Kwong , Elwood Herbert Macy , David Paul Merritt , Wayne Martin Moreau , Stanley Eugene Perreault , Harbans Singh Sachdev , Robert Lavin Wood , Hiroshi Ito
摘要： A process for the stoichiometric carbonation of a hydroxyaromatic material is provided which comprises the steps of (a) mixing together in a reaction vessel (1) a hydroxyaromatic material, (2) a sufficient amount of a dialkyl dicarbonate to give the desired degree of substitution, (3) a catalytic amount of an unhindered tertiary amine, and (4) a solvent, (b) stirring the reaction mixture, (c) precipitating the alkyl carbonate of the hydroxyaromatic material, and (d) recovering the alkyl carbonate of the hydroxyaromatic material.
摘要翻译： 提供了一种用于羟基芳族化合物的化学计量碳酸化的方法，其包括以下步骤：（a）在反应容器（1）中将羟基芳族化合物混合在一起，（2）足够量的二碳酸二烷基酯以产生所需的取代度 ，（3）催化量的不受阻碍的叔胺，和（4）溶剂，（b）搅拌反应混合物，（c）沉淀羟基芳族物质的碳酸烷基酯，和（d）回收碳酸烷基酯 羟基芳族化合物。
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