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公开(公告)号:US11972931B2
公开(公告)日:2024-04-30
申请号:US17129753
申请日:2020-12-21
发明人: Akio Suzuki , Toru Fujita , Akinori Asai , Yusei Nagata , Shinichi Ohba , Matthew Partlow , Ron Collins , Stephen F. Horne , Laura Owens
IPC分类号: H01J37/32 , H01J37/075 , H05H1/00 , C23C16/455
CPC分类号: H01J37/32513 , H01J37/075 , H01J37/32009 , H05H1/00 , H05H1/01 , C23C16/45544
摘要: A light emitting sealed body includes a housing which stores a discharge gas in an internal space and is provided with a first window portion to which first light is incident and a second window portion from which second light is emitted. The housing includes at least one flow path which is partitioned from the internal space and extends toward at least one of the first window portion and the second window portion.
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公开(公告)号:US20230420242A1
公开(公告)日:2023-12-28
申请号:US18465022
申请日:2023-09-11
发明人: Matthew Partlow , Donald K. Smith , Matthew Besen , Akinori Asai
IPC分类号: H01J61/54 , H01S3/1115 , H01S3/094 , H01J65/00 , H01S3/091 , H01S3/16 , H01S3/06 , H01J61/16 , H01J65/04
CPC分类号: H01J61/54 , H01S3/1115 , H01S3/094038 , H01J65/00 , H01S3/0912 , H01S3/1623 , H01S3/1643 , H01S3/0602 , H01S3/0621 , H01J61/16 , H01J65/04 , H01S3/1305
摘要: An electrodeless laser-driven light source includes a laser that generates a CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal receives the pump light generated by the pump laser and generates pulsed laser light at an output in response to the generated pump light. A first optical element projects the pulsed laser light along a first axis to a breakdown region in a gas-filled bulb comprising an ionizing gas. A second optical element projects the CW sustaining light along a second axis to a CW plasma region in the gas-filled bulb comprising the ionizing gas. A detector detects plasma light generated by a CW plasma and generates a detection signal at an output. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.
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公开(公告)号:US11587781B2
公开(公告)日:2023-02-21
申请号:US17328433
申请日:2021-05-24
发明人: Matthew Partlow , Donald Smith , Matthew Besen , Akinori Asai
IPC分类号: H01J65/00 , H01J61/54 , H01S3/1115 , H01S3/094 , H01S3/091 , H01S3/16 , H01S3/06 , H01J61/16 , H01J65/04 , H01S3/13
摘要: An electrodeless laser-driven light source includes a laser that generates a CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal receives the pump light generated by the pump laser and generates pulsed laser light at an output in response to the generated pump light. A first optical element projects the pulsed laser light along a first axis to a breakdown region in a gas-filled bulb comprising an ionizing gas. A second optical element projects the CW sustaining light along a second axis to a CW plasma region in the gas-filled bulb comprising the ionizing gas. A detector detects plasma light generated by a CW plasma and generates a detection signal at an output. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.
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公开(公告)号:US11784037B2
公开(公告)日:2023-10-10
申请号:US18161282
申请日:2023-01-30
发明人: Matthew Partlow , Donald Smith , Matthew Besen , Akinori Asai
IPC分类号: H01J65/00 , H01J61/54 , H01S3/1115 , H01S3/094 , H01S3/091 , H01S3/16 , H01S3/06 , H01J61/16 , H01J65/04 , H01S3/13
CPC分类号: H01J61/54 , H01J61/16 , H01J65/00 , H01J65/04 , H01S3/0602 , H01S3/0621 , H01S3/0912 , H01S3/094038 , H01S3/1115 , H01S3/1623 , H01S3/1643 , H01S3/1305
摘要: An electrodeless laser-driven light source includes a laser source that generates CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal is positioned to receive the pump light and generates pulsed laser light in response to the generated pump light that propagates to a breakdown region in a gas filled bulb comprising an ionizing gas. A detector detects plasma light generated by a CW plasma located at least partly in a CW plasma region in the gas filled bulb comprising the ionizing gas and generates a detection signal. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.
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公开(公告)号:US20220199372A1
公开(公告)日:2022-06-23
申请号:US17129753
申请日:2020-12-21
发明人: Akio Suzuki , Toru Fujita , Akinori Asai , Yusei Nagata , Shinichi Ohba , Mathew Partlow , Ron Collins , Stephen F. Horne , Laura Owens
IPC分类号: H01J37/32 , H01J37/075
摘要: A light emitting sealed body includes a housing which stores a discharge gas in an internal space and is provided with a first window portion to which first light is incident and a second window portion from which second light is emitted. The housing includes at least one flow path which is partitioned from the internal space and extends toward at least one of the first window portion and the second window portion.
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公开(公告)号:US10032622B2
公开(公告)日:2018-07-24
申请号:US15712284
申请日:2017-09-22
发明人: Akinori Asai , Kenshi Fukumitsu
IPC分类号: H01J65/04 , H01J61/073 , G03F7/20
摘要: In a light source device, a control unit causes an energy density of a laser light in a lighting start region RS when a laser support light is maintained to be lower than an energy density of the laser light in the lighting start region RS when the laser support light is put on. For this reason, when the laser support light is maintained, a laser light L is radiated to the lighting start region RS at an energy density of a degree where sputtering does not occur. Therefore, in the light source device, because sputtering in a light emission sealing body can be suppressed, a sufficiently long life can be realized.
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公开(公告)号:US20240242941A1
公开(公告)日:2024-07-18
申请号:US18618264
申请日:2024-03-27
发明人: Akio Suzuki , Toru Fujita , Akinori Asai , Yusei Nagata , Shinichi Ohba , Matthew Partlow , Ron Collins , Stephen F. Horne , Laura Owens
IPC分类号: H01J37/32 , H01J37/075 , H05H1/00 , C23C16/455
CPC分类号: H01J37/32513 , H01J37/075 , H01J37/32009 , H05H1/00 , H05H1/01 , C23C16/45544
摘要: A light emitting sealed body includes a housing which stores a discharge gas and is provided with a first opening to which first light is incident and a second opening from which second light is emitted, a first window portion which includes a first window member allowing the first light to be transmitted therethrough and hermetically seals the first opening, and a second window portion which includes a second window member allowing the second light to be transmitted therethrough and hermetically seals the second opening. Each of the first window member and the second window member is hermetically fixed to the housing by a joining material. A protection layer which covers the joining material is provided at at least one of a first joining position between the first window member and the housing and a second joining position between the second window member and the housing.
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公开(公告)号:US20240097394A1
公开(公告)日:2024-03-21
申请号:US18520272
申请日:2023-11-27
发明人: Akio Suzuki , Toru Fujita , Akinori Asai , Yusei Nagata , Shinichi Ohba , Takayuki Ohshiro , Matthew Partlow , Ron Collins , Stephen F. Horne , Laura Owens
CPC分类号: H01S3/034 , H01S3/038 , H01S3/0385 , H01S3/09716
摘要: A light emitting sealed body includes: a housing which stores a discharge gas and is provided with a first opening to which first light is incident along a first optical axis and a second opening from which second light is emitted along a second optical axis; a first window portion which hermetically seals the first opening; and a second window portion which hermetically seals the second opening. The housing is formed of a light shielding material which does not transmit the first light and the second light. An internal space is defined by the housing, the first window portion, and the second window portion and the internal space is filled with the discharge gas. The first opening and the second opening are disposed so that the first optical axis and the second optical axis intersect each other.
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公开(公告)号:US20230319959A1
公开(公告)日:2023-10-05
申请号:US17707109
申请日:2022-03-29
发明人: Matthew Partlow , Donald Smith , Matthew Besen , Akinori Asai
CPC分类号: H05B41/30 , H01S3/0602 , G02B27/141 , H01S3/1115 , H01S3/1623 , H01S3/1643 , H01J65/00 , H01J61/16
摘要: An electrodeless laser-driven light source includes a laser source that generates a CW sustaining light and a pump laser that generates a pump. An optical beam combiner combines the CW sustaining light and the pump such that the CW sustaining light and the pump propagate co-linearly. A Q-switched laser crystal generates pulsed light in response to the pump. A gas-filled bulb is configured such that the pulsed light ignites a pulse plasma in a breakdown region of the gas bulb and the sustaining light sustains a CW plasma in a CW plasma region of the gas bulb, thereby emitting a high brightness light from the gas bulb, where the gas-filled bulb is positioned between the output of the pump laser and the pump input of the Q-switched laser crystal such that the CW plasma absorbs the pump light quenching the pulsed light generated by the Q-switched laser crystal.
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公开(公告)号:US11682548B2
公开(公告)日:2023-06-20
申请号:US17956130
申请日:2022-09-29
发明人: Akio Suzuki , Toru Fujita , Shinichi Ohba , Akinori Asai , Tomoya Nakazawa , Taiga Morimoto
CPC分类号: H01J61/35 , H01J61/302 , H01J65/04
摘要: A light emitting sealed body includes: a housing containing light-emitting gas in an internal space, on which laser light for maintaining a plasma generated in the light-emitting gas is incident; and a charging pipe including a first end portion and a second end portion and connected to the internal space at the first end portion. The second end portion of the charging pipe is sealed by being crushed. The second end portion of the charging pipe is covered with a covering member consists of an inorganic material. The covering member is covered with a cap member consists of a metal material.
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