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1.发明授权Method for designing laser-light-shaping optical component, method for producing laser-light-shaping optical component, and laser-light-shaping optical system 有权激光成形光学部件的设计方法，激光成形光学部件的制造方法以及激光成形光学系统公开(公告)号：US09373927B2
公开(公告)日：2016-06-21
申请号：US14371476
申请日：2012-10-12
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Haruyasu Ito , Takashi Yasuda
CPC classification number: H01S3/10 , B23K26/0608 , B23K26/0648 , B29D11/00019 , G01B11/24 , G01J1/4257 , G02B13/18 , G02B27/0927 , G02B27/0955 , H01S3/005 , H01S2301/206
Abstract: A method for designing an optical component for shaping laser light according to one embodiment of this invention measures the intensity distribution of an incident laser light, obtains the shapes in the short and long axial directions of a pair of aspheric lenses for each of the short and long axial directions of the incident laser light from the measured intensity distribution of the incident laser light and a desired intensity distribution, performs approximation of a high-order polynomial of the shapes in the short and long axial directions of the pair of aspheric lenses, corrects the high-order polynomials for the short or long axial directions using a correction factor, and obtains the shapes of the pair of aspheric lenses on the basis of the corrected high-order polynomials.
Abstract translation: 根据本发明的一个实施例的用于设计用于成形激光的光学部件的方法测量入射激光的强度分布，获得一对非球面透镜的短轴和长轴方向上的形状， 来自所测入射激光的强度分布的入射激光的长轴方向和期望的强度分布，对近似于非球面透镜对的短轴方向和长轴方向的高次多项式进行近似，校正 使用校正因子对于短轴或长轴方向的高次多项式，并且基于校正的高次多项式来获得一对非球面透镜的形状。
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2.发明授权Aberration-correcting method, laser processing method using said aberration-correcting method, laser irradiation method using said aberration-correcting method, aberration-correcting device and aberration-correcting program 有权畸变校正方法，使用所述像差校正方法的激光加工方法，使用所述像差校正方法的激光照射方法，像差校正装置和像差校正程序公开(公告)号：US09488831B2
公开(公告)日：2016-11-08
申请号：US15073924
申请日：2016-03-18
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Haruyasu Ito , Naoya Matsumoto , Takashi Inoue
CPC classification number: G02B27/0025 , B23K26/00 , B23K26/03 , B23K26/032 , B23K26/06 , B23K26/064 , B23K26/36 , B23K26/364 , B23K26/38 , B23K26/40 , B23K26/53 , B23K26/57 , B23K2101/40 , B23K2103/50 , G02B5/1876 , G02B5/32 , G02B21/0032 , G02B21/02 , G02B21/06 , G02B21/361 , G02B27/0068 , G02F1/01 , G02F2203/18
Abstract: In an aberration-correcting method according to an embodiment of the present invention, in an aberration-correcting method for a laser irradiation device 1 which focuses a laser beam on the inside of a transparent medium 60, aberration of a laser beam is corrected so that a focal point of the laser beam is positioned within a range of aberration occurring inside the medium. This aberration range is not less than n×d and not more than n×d+Δs from an incidence plane of the medium 60, provided that the refractive index of the medium 60 is defined as n, a depth from an incidence plane of the medium 60 to the focus of the lens 50 is defined as d, and aberration caused by the medium 60 is defined as Δs.
Abstract translation: 在根据本发明实施例的像差校正方法中，在将激光束聚焦在透明介质60的内部的激光照射装置1的像差校正方法中，校正激光束的像差，使得 激光束的焦点位于介质内发生的像差范围内。 该像差范围不小于介质60的入射面的n×d且不大于n×d +Δs，条件是介质60的折射率被定义为n，从 将透镜50的焦点的介质60定义为d，将由介质60引起的像差定义为Δs。
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公开(公告)号：US10324285B2
公开(公告)日：2019-06-18
申请号：US15290233
申请日：2016-10-11
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Haruyasu Ito , Naoya Matsumoto , Takashi Inoue
IPC: B23K26/03 , G02B21/00 , G02B5/18 , B23K26/00 , B23K26/06 , B23K26/36 , B23K26/38 , B23K26/40 , B23K26/53 , B23K26/57 , G02B21/02 , G02B21/06 , G02B21/36 , G02B27/00 , B23K26/064 , B23K26/364 , G02B5/32 , G02F1/01 , B23K101/40 , B23K103/00
Abstract: In an aberration-correcting method according to an embodiment of the present invention, in an aberration-correcting method for a laser irradiation device 1 which focuses a laser beam on the inside of a transparent medium 60, aberration of a laser beam is corrected so that a focal point of the laser beam is positioned within a range of aberration occurring inside the medium. This aberration range is not less than n×d and not more than n×d+Δs from an incidence plane of the medium 60, provided that the refractive index of the medium 60 is defined as n, a depth from an incidence plane of the medium 60 to the focus of the lens 50 is defined as d, and aberration caused by the medium 60 is defined as Δs.
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4.发明申请METHOD FOR DESIGNING LASER-LIGHT-SHAPING OPTICAL COMPONENT, METHOD FOR PRODUCING LASER-LIGHT-SHAPING OPTICAL COMPONENT, AND LASER-LIGHT-SHAPING OPTICAL SYSTEM 有权用于设计激光光学组件的方法，用于制造激光光学组件的方法和激光光学光学系统公开(公告)号：US20140348190A1
公开(公告)日：2014-11-27
申请号：US14371476
申请日：2012-10-12
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Haruyasu Ito , Takashi Yasuda
CPC classification number: H01S3/10 , B23K26/0608 , B23K26/0648 , B29D11/00019 , G01B11/24 , G01J1/4257 , G02B13/18 , G02B27/0927 , G02B27/0955 , H01S3/005 , H01S2301/206
Abstract: A method for designing an optical component for shaping laser light according to one embodiment of this invention measures the intensity distribution of an incident laser light, obtains the shapes in the short and long axial directions of a pair of aspheric lenses for each of the short and long axial directions of the incident laser light from the measured intensity distribution of the incident laser light and a desired intensity distribution, performs approximation of a high-order polynomial of the shapes in the short and long axial directions of the pair of aspheric lenses, corrects the high-order polynomials for the short or long axial directions using a correction factor, and obtains the shapes of the pair of aspheric lenses on the basis of the corrected high-order polynomials.
Abstract translation: 根据本发明的一个实施例的用于设计用于成形激光的光学部件的方法测量入射激光的强度分布，获得一对非球面透镜的短轴和长轴方向上的形状， 来自所测入射激光的强度分布的入射激光的长轴方向和期望的强度分布，对近似于非球面透镜对的短轴方向和长轴方向的高次多项式进行近似，校正 使用校正因子对于短轴或长轴方向的高次多项式，并且基于校正的高次多项式来获得一对非球面透镜的形状。
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Patent Agency Ranking
公开(公告)号：US10378964B2
公开(公告)日：2019-08-13
申请号：US16088875
申请日：2017-03-15
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Koji Takahashi , Haruyasu Ito , Koyo Watanabe
Abstract: In a waveform measurement method, first, initial pulsed light is spatially dispersed for respective wavelengths. Next, the initial pulsed light is input to a polarization dependent type SLM in a state where a polarization plane is inclined with respect to a modulation axis direction, and a phase spectrum of a first polarization component of the initial pulsed light along the modulation axis direction is modulated, to cause a time difference between first pulsed light Lp1 including the first polarization component and second pulsed light Lp2 including a second polarization component orthogonal to the first polarization component. After combining the wavelength components, an object is irradiated with the pulsed light Lp1 and the pulsed light Lp2, and light generated in the object is detected. The above detection operation is performed while changing the time difference, and a temporal waveform of the pulsed light Lp1 is obtained.
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公开(公告)号：US10337928B2
公开(公告)日：2019-07-02
申请号：US15754377
申请日：2016-08-24
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Haruyasu Ito , Yasunori Igasaki , Junji Okuma
Abstract: An autocorrelation measurement device includes a first reflection member, a second reflection member, a focusing unit, a nonlinear optical crystal, a detection unit, a filter, an aperture, a delay adjusting unit, and an analysis unit. Incident pulsed light is transmitted through the second reflection member and incident on the first reflection member. First pulsed light reflected on a first reflection surface of the first reflection member and a second reflection surface of the second reflection member and second pulsed light reflected on a second reflection surface of the first reflection member and a first reflection surface of the second reflection member are incident on the nonlinear optical crystal via the focusing unit. Second harmonic light generated in the nonlinear optical crystal is detected by the detection unit.
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7.发明授权Aberration-correcting method, laser processing method using said aberration-correcting method, laser irradiation method using said aberration-correction method, aberration-correction device and aberration-correcting program 有权畸变校正方法，使用所述像差校正方法的激光加工方法，使用所述像差校正方法的激光照射方法，像差校正装置和像差校正程序公开(公告)号：US09415461B2
公开(公告)日：2016-08-16
申请号：US13963299
申请日：2013-08-09
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Haruyasu Ito , Naoya Matsumoto , Takashi Inoue
IPC: B23K26/06 , B23K26/364 , H01L21/78 , G02F1/01 , B23K26/00 , B23K26/36 , B23K26/03 , B23K26/38 , G02B27/00 , B23K26/40 , G02B5/32
CPC classification number: G02B27/0025 , B23K26/00 , B23K26/03 , B23K26/032 , B23K26/06 , B23K26/064 , B23K26/36 , B23K26/364 , B23K26/38 , B23K26/40 , B23K26/53 , B23K26/57 , B23K2101/40 , B23K2103/50 , G02B5/1876 , G02B5/32 , G02B21/0032 , G02B21/02 , G02B21/06 , G02B21/361 , G02B27/0068 , G02F1/01 , G02F2203/18
Abstract: In an aberration-correcting method according to an embodiment of the present invention, in an aberration-correcting method for a laser irradiation device 1 which focuses a laser beam on the inside of a transparent medium 60, aberration of a laser beam is corrected so that a focal point of the laser beam is positioned within a range of aberration occurring inside the medium. This aberration range is not less than n×d and not more than n×d+Δs from an incidence plane of the medium 60, provided that the refractive index of the medium 60 is defined as n, a depth from an incidence plane of the medium 60 to the focus of the lens 50 is defined as d, and aberration caused by the medium 60 is defined as Δs.
Abstract translation: 在根据本发明实施例的像差校正方法中，在将激光束聚焦在透明介质60的内部的激光照射装置1的像差校正方法中，校正激光束的像差，使得 激光束的焦点位于介质内发生的像差范围内。 该像差范围不小于介质60的入射面的n×d且不大于n×d +Δs，条件是介质60的折射率被定义为n，从 将透镜50的焦点的介质60定义为d，将由介质60引起的像差定义为Δs。
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8.发明授权公开(公告)号：US08575514B2
公开(公告)日：2013-11-05
申请号：US13678006
申请日：2012-11-15
Applicant: Hamamatsu Photonics K.K.
Inventor： Naoya Matsumoto , Takashi Inoue , Norihiro Fukuchi , Haruyasu Ito , Yuu Takiguchi
CPC classification number: B23K26/00 , B23K26/06 , B23K26/0624 , B23K26/064 , B23K26/0661 , B23K26/067 , B23K26/355 , G03H1/2294 , G03H2001/0094 , G03H2225/32
Abstract: A light irradiation device and method for irradiating converged light with an object include a light source configured to output a light, a phase-modulating spatial light modulator, a controller, and a converging optical system. The phase-modulating spatial light modulator is configured to input the light outputted from the light source and to display a hologram modulating a phase of the light at each of a plurality of pixels arranged two-dimensionally, and outputs the phase-modulated light. The controller is configured to cause the spatial light modulator to display a hologram such that the light outputted from the spatial light modulator is converged at a plurality of converging positions. The controller causes the spatial light modulator to display a first hologram and performs a feedback of the first hologram so as to modify the first hologram. The modifying of the first hologram is performed by measuring intensity of the light converged.
Abstract translation: 用于对物体照射会聚光的光照射装置和方法包括配置为输出光的光源，相位调制用空间光调制器，控制器和会聚光学系统。 相位调制空间光调制器被配置为输入从光源输出的光并且显示调制在二维排列的多个像素中的每一个处的光的相位的全息图，并输出相位调制光。 控制器被配置为使得空间光调制器显示全息图，使得从空间光调制器输出的光会聚在多个会聚位置。 控制器使得空间光调制器显示第一全息图并且执行第一全息图的反馈，以便修改第一全息图。 通过测量聚光的强度来进行第一全息图的修改。
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公开(公告)号：US11079618B2
公开(公告)日：2021-08-03
申请号：US16089400
申请日：2017-03-15
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Koyo Watanabe , Koji Takahashi , Takashi Inoue , Haruyasu Ito
Abstract: An imaging system includes a light source for outputting initial pulsed light, a polarization control unit for rotating a polarization plane of the initial pulsed light, an optical pulse shaping unit for inputting the initial pulsed light with the rotated polarization plane, and outputting first pulsed light Lp1 having a first polarization direction and second pulsed light Lp2 having a second polarization direction different from the first polarization direction with a time, an irradiation optical system for irradiating an imaging object with the pulsed light Lp1 and the pulsed light Lp2, a light separation element for separating the pulsed light Lp1 and the pulsed light Lp2 reflected by or transmitted through the imaging object on the basis of the polarization directions, an imaging unit for imaging the pulsed light Lp1, and an imaging unit for imaging the pulsed light Lp2.
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