Waveform measurement device and pulsed-light-generating device

    公开(公告)号:US10001412B2

    公开(公告)日:2018-06-19

    申请号:US15303900

    申请日:2015-04-08

    CPC classification number: G01J11/00 G01J9/00 G02B5/32 G02F2203/56

    Abstract: A waveform measurement device includes an input spectrum acquisition unit for acquiring an input intensity spectrum being an intensity spectrum of pulsed light, an optical element inputting the pulsed light and outputting light having an intensity spectrum corresponding to a phase spectrum of the pulsed light, an output spectrum acquisition unit for acquiring an output intensity spectrum being an intensity spectrum of the light output from the optical element, and a phase spectrum determination unit for determining the phase spectrum of the pulsed light by comparing an output intensity spectrum calculated when the pulsed light having an input intensity spectrum and a virtual phase spectrum is assumed to be input to the optical element with the output intensity spectrum acquired in the output spectrum acquisition unit. The phase spectrum determination unit sets the virtual phase spectrum by deforming the control phase spectrum.

    Optical module and light exposure device

    公开(公告)号:US09784980B2

    公开(公告)日:2017-10-10

    申请号:US14782015

    申请日:2014-03-25

    Abstract: An optical module (1A) includes a polarization beam splitter (10A), polarization elements (20 and 40) having nonreciprocal optical activity and respectively arranged on an optical path of a first polarization component (L2) transmitted through a light splitting surface (11) in irradiation light (L1) and an optical path of a second polarization component (L4) reflected in the light splitting surface (11), a first reflective SLM (30) that modulates and reflects a first polarization component (L2) passing through the first polarization element (20), and a second reflective SLM (50) that modulates and reflects the second polarization component (L4) passing through the second polarization element (40). First modulation light (L3) passing through the polarization element (20) again and then reflected by the light splitting surface (11) and second modulation light (L5) passing through the polarization element (40) again and then transmitted through the light splitting surface (11) are combined with each other.

    Data creation apparatus, light control apparatus, data creation method, and data creation program

    公开(公告)号:US12204182B2

    公开(公告)日:2025-01-21

    申请号:US18229909

    申请日:2023-08-03

    Abstract: An iterative Fourier transform unit of a modulation pattern calculation apparatus performs a Fourier transform on a waveform function including an intensity spectrum function and a phase spectrum function, performs a replacement of a temporal intensity waveform function based on a desired waveform after the Fourier transform, and then performs an inverse Fourier transform. The iterative Fourier transform unit performs the replacement using a result of multiplying a function representing the desired waveform by a coefficient. The coefficient has a value with which a difference between the function after the multiplication of the coefficient and the temporal intensity waveform function after the Fourier transform is smaller than a difference before the multiplication, and a ratio of the difference is smaller when an intensity is higher at each time of the function before the multiplication.

    Data creation apparatus, light control apparatus, data creation method, and data creation program

    公开(公告)号:US11762225B2

    公开(公告)日:2023-09-19

    申请号:US16732590

    申请日:2020-01-02

    CPC classification number: G02F1/0121 G06F17/148 G02F2201/305

    Abstract: An iterative Fourier transform unit of a modulation pattern calculation apparatus performs a Fourier transform on a waveform function including an intensity spectrum function and a phase spectrum function, performs a replacement of a temporal intensity waveform function based on a desired waveform after the Fourier transform, and then performs an inverse Fourier transform. The iterative Fourier transform unit performs the replacement using a result of multiplying a function representing the desired waveform by a coefficient. The coefficient has a value with which a difference between the function after the multiplication of the coefficient and the temporal intensity waveform function after the Fourier transform is smaller than a difference before the multiplication, and a ratio of the difference is smaller when an intensity is higher at each time of the function before the multiplication.

    Imaging system and imaging method

    公开(公告)号:US11079618B2

    公开(公告)日:2021-08-03

    申请号:US16089400

    申请日:2017-03-15

    Abstract: An imaging system includes a light source for outputting initial pulsed light, a polarization control unit for rotating a polarization plane of the initial pulsed light, an optical pulse shaping unit for inputting the initial pulsed light with the rotated polarization plane, and outputting first pulsed light Lp1 having a first polarization direction and second pulsed light Lp2 having a second polarization direction different from the first polarization direction with a time, an irradiation optical system for irradiating an imaging object with the pulsed light Lp1 and the pulsed light Lp2, a light separation element for separating the pulsed light Lp1 and the pulsed light Lp2 reflected by or transmitted through the imaging object on the basis of the polarization directions, an imaging unit for imaging the pulsed light Lp1, and an imaging unit for imaging the pulsed light Lp2.

    Data generating device, light control device, data generating method, and computer-readable recording medium

    公开(公告)号:US11022938B2

    公开(公告)日:2021-06-01

    申请号:US16270968

    申请日:2019-02-08

    Abstract: A data generating device sets an initial candidate solution of an intensity spectrum function, a phase spectrum function, and an initial temperature and a cooling rate, generates a neighborhood solution, transforms a first waveform function of a frequency domain including the neighborhood solution and the phase spectrum function into a second waveform function of a time domain including a time-intensity waveform function and a time-phase waveform function and calculates an evaluation value representing a degree of difference between the time-intensity waveform function and the desired time-intensity waveform, sets the neighborhood solution as an n-th candidate solution for a certain probability, and lowers the temperature on the basis of the cooling rate. A decrease in the temperature acts in a direction in which the probability P is lowered when the evaluation value of the neighborhood solution is worse than the evaluation value of the candidate solution.

    Control apparatus and control method for spatial light modulator

    公开(公告)号:US09995923B2

    公开(公告)日:2018-06-12

    申请号:US15164052

    申请日:2016-05-25

    CPC classification number: G02B21/365 G02B21/06 G02F1/0121

    Abstract: A control apparatus includes a lens, an SLM presenting a modulation pattern on a modulation plane and outputting modulated light L2 for forming light spots P1 and P2 on a pupil plane of the lens, an imaging device imaging a fringe pattern image formed on a focal plane of the lens and generating image data Da indicating the fringe pattern image, a calculation unit calculating at least one kind of parameter among an intensity amplitude, a phase shift amount, and an intensity average from the image data Da, an analysis unit obtaining a deviation in relative positions of an optical axis of the lens and a reference coordinate of the modulation plane based on the parameter, and a changing unit changing an origin position of the reference coordinate so that the deviation in the relative positions is decreased.

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