LIGHT GUIDE, ELECTRON RAY DETECTOR, AND CHARGED PARTICLE DEVICE

    公开(公告)号:US20250079118A1

    公开(公告)日:2025-03-06

    申请号:US18272618

    申请日:2021-11-25

    Abstract: There are provided a light guide, an electron ray detector, and a charged particle device that can improve light guiding efficiency of light generated in response to incidence of a detection ray. The electron ray detector includes: a light guide member extending in one direction; a first fluorescent substance layer provided on one end portion side of the light guide member and generating primary fluorescent light in response to incidence of a detection ray; a second fluorescent substance layer extending from one end to the other end of the light guide member and generating secondary fluorescent light in response to incidence of the primary fluorescent light; and a detection unit provided on the other end portion side of the light guide member and optically coupled to the light guide member.

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