Method of forming a micro-structure

    公开(公告)号:US10927472B2

    公开(公告)日:2021-02-23

    申请号:US16212435

    申请日:2018-12-06

    Abstract: A method of forming a micro-structure involves forming a multi-layered structure including i) an oxidizable material layer on a substrate and ii) another oxidizable material layer on the oxidizable material layer. The oxidizable material layer is formed of an oxidizable material having an expansion coefficient, during oxidation, that is more than 1. The method further involves forming a template, including a plurality of pores, from the other oxidizable material layer, and growing a nano-pillar inside each pore. The nano-pillar has a predefined length that terminates at an end. A portion of the template is selectively removed to form a substantially even plane that is oriented in a position opposed to the substrate. A material is deposited on at least a portion of the plane to form a film layer thereon, and the remaining portion of the template is selectively removed to expose the nano-pillars.

    FORMATION OF CAPPED NANO-PILLARS
    8.
    发明申请
    FORMATION OF CAPPED NANO-PILLARS 审中-公开
    填充纳米柱的形成

    公开(公告)号:US20160319445A1

    公开(公告)日:2016-11-03

    申请号:US15203825

    申请日:2016-07-07

    Abstract: A method of forming capped nano-pillars on a substrate includes forming a template on the substrate, the template defining nano-pores having a first width. The nano-pores are partially filled to define nano-pillar stem portions of a first thickness corresponding to the first width. The nano-pores are re-shaped to define re-shaped nano-pore sections having a second width different than the first width. The re-shaped nano-pore sections are at least partially filled to define nano-pillar cap portions of a second thickness corresponding to the second width. The method further includes removing the template.

    Abstract translation: 在衬底上形成封盖纳米柱的方法包括在衬底上形成模板,该模板限定具有第一宽度的纳米孔。 纳米孔被部分填充以限定对应于第一宽度的第一厚度的纳米柱茎部分。 重新形成纳米孔以形成具有不同于第一宽度的第二宽度的重新形状的纳米孔部分。 重新形成的纳米孔部分至少部分地被填充以限定对应于第二宽度的第二厚度的纳米柱帽部分。 该方法还包括移除模板。

    METHOD OF FORMING A MICRO-STRUCTURE
    10.
    发明申请

    公开(公告)号:US20190106802A1

    公开(公告)日:2019-04-11

    申请号:US16212435

    申请日:2018-12-06

    Abstract: A method of forming a micro-structure involves forming a multi-layered structure including i) an oxidizable material layer on a substrate and ii) another oxidizable material layer on the oxidizable material layer. The oxidizable material layer is formed of an oxidizable material having an expansion coefficient, during oxidation, that is more than 1. The method further involves forming a template, including a plurality of pores, from the other oxidizable material layer, and growing a nano-pillar inside each pore. The nano-pillar has a predefined length that terminates at an end. A portion of the template is selectively removed to form a substantially even plane that is oriented in a position opposed to the substrate. A material is deposited on at least a portion of the plane to form a film layer thereon, and the remaining portion of the template is selectively removed to expose the nano-pillars.

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