Drum sputtering device
    3.
    发明授权

    公开(公告)号:US09920419B2

    公开(公告)日:2018-03-20

    申请号:US14424123

    申请日:2013-08-21

    摘要: A drum sputtering device that can uniformly deposit target atoms on all over particles is provided. The drum sputtering device includes a vacuum container 2 that contains particles, a tubular drum 10 that is arranged inside the vacuum container 2 and at least one end face 10c of which is open, and a sputtering target 16 that is arranged inside the drum 10. With a supporting arm 11, a drive motor 12 for rotation, a drive motor 13 for swing, a first gear member 14, and a second gear member 15, the drum can be rotated around the axis of the drum 10 and the drum 10 can be swung so that one end portion 10e and the other end portion 10f in the axial direction of the drum 10 are relatively vertically switched.

    DEVICE FOR SIMULTANEOUSLY PRODCING CARBON NANOTUBES AND HYDROGEN
    9.
    发明申请
    DEVICE FOR SIMULTANEOUSLY PRODCING CARBON NANOTUBES AND HYDROGEN 审中-公开
    用于同时制备碳纳米管和氢的装置

    公开(公告)号:US20160002033A1

    公开(公告)日:2016-01-07

    申请号:US14744307

    申请日:2015-06-19

    IPC分类号: C01B3/26 B01J19/24 C01B31/02

    摘要: A method for simultaneously producing carbon nanotubes and hydrogen according to the present invention is a method for simultaneously producing carbon nanotubes and hydrogen, in which using a carbon source containing carbon atoms and hydrogen atoms and being decomposed in a heated state, and a catalyst for producing carbon nanotubes and H2 from the carbon source, the above carbon nanotubes are synthesized on a support in a heated state, placed in a reactor, and simultaneously, the above H2 is synthesized from the above carbon source, the method comprising a synthesis step of flowing a source gas comprising the above carbon source over the above support, on which the above catalyst is supported, to synthesize the above carbon nanotubes on the above support and simultaneously synthesize the above H2 in a gas flow.

    摘要翻译: 根据本发明的同时生产碳纳米管和氢的方法是同时生产碳纳米管和氢的方法,其中使用含有碳原子和氢原子并在加热状态下分解的碳源和生产催化剂 碳纳米管和来自碳源的H 2,将上述碳纳米管在加热状态的载体上合成,放置在反应器中,同时由上述碳源合成上述H 2,该方法包括流动的合成步骤 在上述载体上包含上述碳源的源气体,在其上负载上述催化剂,以在上述载体上合成上述碳纳米管,同时在气流中合成上述H 2。

    DRUM SPUTTERING DEVICE
    10.
    发明申请
    DRUM SPUTTERING DEVICE 有权
    鼓式喷射装置

    公开(公告)号:US20150307983A1

    公开(公告)日:2015-10-29

    申请号:US14424123

    申请日:2013-08-21

    IPC分类号: C23C14/22 C23C14/50 C23C14/34

    摘要: A drum sputtering device that can uniformly deposit target atoms on all over particles is provided. The drum sputtering device includes a vacuum container 2 that contains particles, a tubular drum 10 that is arranged inside the vacuum container 2 and at least one end face 10c of which is open, and a sputtering target 16 that is arranged inside the drum 10. With a supporting arm 11, a drive motor 12 for rotation, a drive motor 13 for swing, a first gear member 14, and a second gear member 15, the drum can be rotated around the axis of the drum 10 and the drum 10 can be swung so that one end portion 10e and the other end portion 10f in the axial direction of the drum 10 are relatively vertically switched.

    摘要翻译: 提供了能够均匀地沉积在所有颗粒上的靶原子的鼓式溅射装置。 鼓式溅射装置包括容纳有颗粒的真空容器2,设置在真空容器2内部并且其至少一个端面10c开口的管状鼓10和布置在滚筒10内部的溅射靶16。 通过支撑臂11,用于旋转的驱动马达12,用于摆动的驱动马达13,第一齿轮构件14和第二齿轮构件15,滚筒可绕滚筒10的轴线旋转,滚筒10可以 使滚筒10的轴向上的一个端部10e和另一个端部10f相对垂直地切换。