公开(公告)号：US10600612B2

公开(公告)日：2020-03-24

申请号：US15936140

申请日：2018-03-26

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Toshiyuki Iwahori

IPC: H01J37/09 ,  H01J37/08 ,  H01J37/20 ,  H01J37/26

Abstract: A charged particle beam apparatus includes a sample chamber; a sample stage; an electron beam column irradiating a sample S using an electron beam; and a focused ion beam column irradiating the sample S using a focused ion beam. The apparatus includes an electrode member displaceable between an insertion position between a beam emitting end portion of the electron beam column and the sample stage and a withdrawal position distant from the insertion position, the electrode member being provided with an electrode penetrating hole passing the electron beam therethrough. The apparatus includes a driving unit displacing the electrode member; a power source applying a negative voltage to the electrode member; and an insulation member electrically insulating the sample chamber the driving unit from the electrode member.

公开(公告)号：US10510508B2

公开(公告)日：2019-12-17

申请号：US15936074

申请日：2018-03-26

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Toshiyuki Iwahori

IPC: H01J37/04 ,  H01J37/244 ,  H01J37/20 ,  H01J37/22 ,  H01J37/09

Abstract: A charged particle beam apparatus includes a sample chamber; a sample stage; an electron beam column for irradiating a sample with an electron beam; and a focused ion beam column for irradiating the sample with a focused ion beam. The apparatus includes a displacement member having an open/close portion displaceable between an insertion position between a beam emitting end portion of the electron beam column and the sample stage, and a withdrawal position away from the insertion position, and a contact portion provided at a contact position capable of contacting the sample before the beam emitting end portion during operation of the sample stage. A driving unit displaces the displacement member, and a conduction sensor detects whether the sample is in contact with the contact portion.

公开(公告)号：US09885639B2

公开(公告)日：2018-02-06

申请号：US15005109

申请日：2016-01-25

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Masakatsu Hasuda ,  Toshiyuki Iwahori

IPC: H01J37/18 ,  G01N1/14 ,  H01J37/20

CPC classification number: G01N1/14 ,  H01J37/20 ,  H01J2237/202 ,  H01J2237/31745

Abstract: A sample carrying device includes a sample carrying rod that carries a sample in the left-right direction in a sample compartment and a preparatory sample compartment, a support body that supports the sample carrying rod, a case that supports the support body such that the support body can rotate around a rotational axis perpendicular to the left-right direction, and an Q-ring disposed between the support body and the case for sealing the sample compartment and the preparatory sample compartment. The sample carrying rod can be switched between a use state where it can carry a sample and a stowed state where it has been moved in the up-down direction from the use state by rotation of the support body. The sample carrying device can easily stow a sample carrying rod in a small space.

公开(公告)号：US11538656B2

公开(公告)日：2022-12-27

申请号：US17028461

申请日：2020-09-22

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Toshiyuki Iwahori

IPC: H01J37/20

Abstract: A sample holder (19) includes a base portion (41), a sample carrying portion (42), a rotation guide portion (43), a cooling stage (46), a connection member (47), a first support portion, and a fixing guide portion (48). The base portion (41) is configured to be fixed to a stage (12), which is configured to be driven to rotate by a stage driving mechanism (13). The rotation guide portion (43) is configured to guide synchronous rotation of the base portion (41) and the sample carrying portion (42). The cooling stage (46) is configured to cool a sample (S). The connection member (47) is configured to be connected to the cooling stage (46). The first support portion is configured to support the base portion (41), which is configured to be driven to rotate by the stage (12).

公开(公告)号：US10529533B2

公开(公告)日：2020-01-07

申请号：US15936155

申请日：2018-03-26

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Toshiyuki Iwahori

IPC: H01J37/20 ,  H01J37/26

Abstract: A sample holder, a member mounting device, and a charged particle beam apparatus are able to secure a compatible configuration for the transfer of a sample between different-type charged particle beam apparatuses without an increase in equipment costs. The charged particle beam apparatus includes a holder unit for removably fastening a sample holder for receiving a sample, and a sample stage unit for loading the holder unit in a sample chamber. The sample holder includes a sample holding member for receiving a sample, a support section for supporting the sample holding member, and a clip disposed on the support section at a position where the sample holding member is disposed.

公开(公告)号：US20170062174A1

公开(公告)日：2017-03-02

申请号：US15252403

申请日：2016-08-31

Applicant: Hitachi High-Tech Science Corporation

Inventor： Toshiyuki Iwahori ,  Masakatsu Hasuda

IPC: H01J37/18 ,  H01J37/285 ,  H01J37/20

CPC classification number: H01J37/185 ,  H01J37/20 ,  H01J37/285 ,  H01J2237/2002 ,  H01J2237/2004 ,  H01J2237/2006 ,  H01J2237/31749

Abstract: Provided is a transport device in which a reduction in the size and a reduction in the cost of the entire device are possible. A transport unit which is interposed between a sub-chamber and a first treatment chamber is provided with: a transport bar which transports a sample along a right-left direction in a preliminary sample chamber; a support which supports the transport bar; a case which supports the support so as to be rotatable around a rotation axis intersecting the right-left direction; and a second O-ring which seals an inside of the case. The preliminary sample chamber and a first treatment space can communicate with each other through the inside of the case. The transport bar is made so as to be able to transition between a first state where the transport bar can transport the sample between the preliminary sample chamber and the inside of the case, and a second state where the transport bar can transport the sample between the first treatment space and the inside of the case, by rotation of the support with respect to the case.

Abstract translation: 提供了可以减小整体装置的尺寸和降低成本的运送装置。 插入在副室和第一处理室之间的输送单元设置有：在预备样品室中沿左右方向输送样品的输送条; 支持运输栏; 支撑支撑件以能够围绕与左右方向相交的旋转轴线旋转的壳体; 以及密封壳体内部的第二O形环。 预备样品室和第一处理空间可以通过壳体内部彼此连通。 输送条被制成能够在输送条可以在预备样品室和壳体内部之间输送样品的第一状态和第二状态之间转移，其中输送条可以将样品在 第一处理空间和壳体的内部，通过支撑件相对于壳体的旋转。

公开(公告)号：US10056227B2

公开(公告)日：2018-08-21

申请号：US15461404

申请日：2017-03-16

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Tsuyoshi Oonishi ,  Toshiyuki Iwahori

IPC: G01N23/00 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/305

CPC classification number: H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/3056 ,  H01J2237/20207 ,  H01J2237/20214 ,  H01J2237/20235 ,  H01J2237/2802 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A focused ion beam apparatus includes a sample tray on which a sample is placed, and a focused ion beam column for irradiating the sample with a focused ion beam to obtain a micro sample-piece. A sample chamber contains therein the sample tray and the focused ion beam column. A side-entry-type carrier is inserted into and removed from the sample chamber, with a front end side of the carrier holding the sample-piece. A sample-piece moving unit moves the sample-piece between the sample tray and the carrier. The sample tray is movable along at least x, y, and z axes, and an end of the sample tray is provided with a carrier engagement part releasably engageable with the carrier so that movement of the sample tray is accompanied by corresponding movement of the carrier.

公开(公告)号：US09947506B2

公开(公告)日：2018-04-17

申请号：US15467126

申请日：2017-03-23

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Toshiyuki Iwahori ,  Tsuyoshi Oonishi

IPC: H01J37/00 ,  H01J37/20 ,  H01J37/26

CPC classification number: H01J37/20 ,  H01J37/26 ,  H01J2237/08 ,  H01J2237/206 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: Shaft members which respectively protrude toward at least one beam member and the other beam member in a z-axis direction are formed in a mesh support member. A through hole for penetrating a space between a shaft end surface and an opening portion in the z-axis direction and introducing a focused ion beam toward a fine sample piece is formed in at least one shaft member.