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公开(公告)号：US11101315B2
公开(公告)日：2021-08-24
申请号：US15782114
申请日：2017-10-12
IPC分类号： H01L27/144 , H01L27/146 , G01T1/24 , G01N23/046 , G01T1/29 , H01L31/0224 , H01L31/115
摘要： Each semiconductor chip of a detector comprises a semiconductor substrate having a plurality of photodetector units, an insulating layer formed on a front face of the semiconductor substrate, a common electrode arranged on the insulating layer, a readout line for electrically connecting a quenching resistance of each photodetector unit and the common electrode to each other, and a through electrode extending from the common electrode to a rear face of the semiconductor substrate through a through hole of the semiconductor substrate.
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公开(公告)号：US08791538B2
公开(公告)日：2014-07-29
申请号：US13655907
申请日：2012-10-19
IPC分类号： H01L31/107 , H01L31/00
CPC分类号： H01L27/14643 , H01L27/1443 , H01L27/1446 , H01L27/14605 , H01L27/14607 , H01L27/14609 , H01L27/14636 , H01L28/24 , H01L31/02027 , H01L31/022416 , H01L31/022466 , H01L31/107
摘要： A light receiving region includes a plurality of light detecting sections 10. The light detecting sections 10 has a second contact electrode 4A. The second contact electrode 4A is arranged at a position overlapping a first contact electrode 3A, so as to contact the first contact electrode. Further, a resistive layer 4B is continued to the second contact electrode 4A.
摘要翻译： 光接收区域包括多个光检测部分10.光检测部分10具有第二接触电极4A。 第二接触电极4A配置在与第一接触电极3A重叠的位置，以与第一接触电极接触。 此外，电阻层4B继续到第二接触电极4A。
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公开(公告)号：US10944016B2
公开(公告)日：2021-03-09
申请号：US16308116
申请日：2017-05-30
发明人： Ryutaro Tsuchiya , Terumasa Nagano , Yuta Tsuji , Go Kawai , Yuki Okuwa
IPC分类号： H01L31/0216 , G01J1/42 , G01J1/02 , H01L27/146 , G01J1/04 , G01J1/44 , H01L23/00 , H01L25/04 , H01L31/02 , H01L31/0203 , H01L31/107 , H01L25/16 , H01L31/0232
摘要： An optical detection unit includes a first wiring substrate that has a first main surface, a plurality of optical detection chips that each have a light receiving surface and a rear surface on a side opposite to the light receiving surface and are two-dimensionally arranged on the first main surface, a first bump electrode that electrically connects the optical detection chip to the first wiring substrate, a light transmitting portion that is provided on the light receiving surface, and a light shielding portion that has light reflection properties or light absorption properties. The optical detection chip includes a Geiger-mode APD and is mounted on the first wiring substrate by the first bump electrode in a state in which the rear surface faces the first main surface.
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公开(公告)号：US09385155B2
公开(公告)日：2016-07-05
申请号：US14314616
申请日：2014-06-25
IPC分类号： H01L31/00 , H01L27/146 , H01L27/144
CPC分类号： H01L27/14643 , H01L27/1443 , H01L27/1446 , H01L27/14605 , H01L27/14607 , H01L27/14609 , H01L27/14636 , H01L28/24 , H01L31/02027 , H01L31/022416 , H01L31/022466 , H01L31/107
摘要： A light receiving region includes a plurality of light detecting sections 10. The light detecting sections 10 has a second contact electrode 4A. The second contact electrode 4A is arranged at a position overlapping a first contact electrode 3A, so as to contact the first contact electrode. Further, a resistive layer 4B is continued to the second contact electrode 4A.
摘要翻译： 光接收区域包括多个光检测部分10.光检测部分10具有第二接触电极4A。 第二接触电极4A配置在与第一接触电极3A重叠的位置，以与第一接触电极接触。 此外，电阻层4B继续到第二接触电极4A。
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公开(公告)号：US12046612B2
公开(公告)日：2024-07-23
申请号：US17260324
申请日：2019-06-10
发明人： Ryutaro Tsuchiya , Terumasa Nagano , Takashi Baba
IPC分类号： H01L27/146 , H04N25/766 , G01S7/497 , G01S17/89 , H01L31/107
CPC分类号： H01L27/14623 , H01L27/1463 , H01L27/14636 , H01L27/14643 , H01L27/14685 , H04N25/766 , G01S7/497 , G01S17/89 , H01L31/107
摘要： A semiconductor substrate has a first main surface and a second main surface that oppose each other and a plurality of cells that are arrayed two-dimensionally in a matrix. Each cell includes at least one avalanche photodiode arranged to operate in a Geiger mode. A trench penetrating through the semiconductor substrate is formed in the semiconductor substrate to surround each cell when viewed in a direction orthogonal to the first main surface. A light-shielding member optically separates mutually adjacent cells of the plurality of cells. The light-shielding member includes a first portion extending in a thickness direction of the semiconductor substrate between an opening end of the trench at the first main surface and an opening end of the trench at the second main surface and a second portion projecting out from the second main surface. The insulating film includes a portion that covers the second portion.
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公开(公告)号：US12021100B2
公开(公告)日：2024-06-25
申请号：US17258947
申请日：2019-06-06
IPC分类号： H04N25/766 , G01S7/497 , G01S17/89 , H01L27/146 , H01L31/107
CPC分类号： H01L27/14623 , H01L27/1463 , H01L27/14636 , H01L27/14643 , H01L27/14685 , H04N25/766 , G01S7/497 , G01S17/89 , H01L31/107
摘要： Each of a plurality of cells includes at least one avalanche photodiode. A light projecting unit is arranged to project light having a cross-sectional shape whose longitudinal direction corresponds to a first direction. The light projecting unit is arranged to scan the light along a second direction intersecting the first direction such that the reflected light is incident on, among N cell groups each of which includes M cells aligned in a row direction, each cell group or each plurality of cell groups. A controller is arranged to apply, in accordance with the incidence of the reflected light, a bias voltage that makes the avalanche photodiode operate in a Geiger mode to each cell group or each plurality of cell groups, and is arranged to read signals from cells included in the cell group or the plurality of cell groups to which the bias voltage has been applied.
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7.发明公开公开(公告)号：US20240304644A1
公开(公告)日：2024-09-12
申请号：US18668750
申请日：2024-05-20
IPC分类号： H01L27/146 , G01S7/497 , G01S17/89 , H01L31/107 , H04N25/766
CPC分类号： H01L27/14623 , H01L27/1463 , H01L27/14636 , H01L27/14643 , H01L27/14685 , H04N25/766 , G01S7/497 , G01S17/89 , H01L31/107
摘要： Each of a plurality of cells includes at least one avalanche photodiode. A light projecting unit is arranged to project light having a cross-sectional shape whose longitudinal direction corresponds to a first direction. The light projecting unit is arranged to scan the light along a second direction intersecting the first direction such that the reflected light is incident on, among N cell groups each of which includes M cells aligned in a row direction, each cell group or each plurality of cell groups. A controller is arranged to apply, in accordance with the incidence of the reflected light, a bias voltage that makes the avalanche photodiode operate in a Geiger mode to each cell group or each plurality of cell groups, and is arranged to read signals from cells included in the cell group or the plurality of cell groups to which the bias voltage has been applied.
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公开(公告)号：US10224361B2
公开(公告)日：2019-03-05
申请号：US15179066
申请日：2016-06-10
IPC分类号： H01L29/76 , H01L27/146 , H01L27/144 , H01L31/0224 , H01L49/02 , H01L31/02 , H01L31/107
摘要： A light receiving region includes a plurality of light detecting sections 10. The light detecting sections 10 has a second contact electrode 4A. The second contact electrode 4A is arranged at a position overlapping a first contact electrode 3A, so as to contact the first contact electrode. Further, a resistive layer 4B is continued to the second contact electrode 4A.
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公开(公告)号：US10192923B2
公开(公告)日：2019-01-29
申请号：US15178861
申请日：2016-06-10
IPC分类号： H01L31/107 , H01L27/146 , H01L27/144 , H01L31/0224 , H01L49/02 , H01L31/02
摘要： A light receiving region includes a plurality of light detecting sections 10. The light detecting sections 10 has a second contact electrode 4A. The second contact electrode 4A is arranged at a position overlapping a first contact electrode 3A, so as to contact the first contact electrode. Further, a resistive layer 4B is continued to the second contact electrode 4A.
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10.发明授权公开(公告)号：US09825083B2
公开(公告)日：2017-11-21
申请号：US15104359
申请日：2014-12-16
发明人： Terumasa Nagano , Kenichi Sato , Ryutaro Tsuchiya
IPC分类号： H01L27/146 , H01L27/144 , H01L31/107 , H01L31/115
CPC分类号： H01L27/14663 , H01L27/1446 , H01L27/14603 , H01L27/14609 , H01L27/14636 , H01L27/14658 , H01L27/14676 , H01L31/1075 , H01L31/115
摘要： Disclosed is an optical detector in which a boundary line BY defining an edge of a semiconductor region 14 is covered with signal read wiring E3 and a capacitor is configured between the semiconductor region 14 and the signal read wiring E3. High frequency components peak components of a carrier are quickly extracted to the outside via the capacitor, but the signal read wiring E3 covers the boundary line BY so that a semiconductor potential in the vicinity of the boundary line is stabilized and an output signal is stabilized.
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