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公开(公告)号:US20100120335A1
公开(公告)日:2010-05-13
申请号:US12267389
申请日:2008-11-07
申请人: Haoquan Fang , Ivelin Angelov , Brian Severson , Benjamin A. Bonner , Serge Kosche , Patrick J. Lord , Brian J. Brown
发明人: Haoquan Fang , Ivelin Angelov , Brian Severson , Benjamin A. Bonner , Serge Kosche , Patrick J. Lord , Brian J. Brown
CPC分类号: B24B37/32
摘要: The partial contact wafer retaining ring apparatus is disclosed. For example, one disclosed embodiment provides a wafer retaining ring comprising a ring for retaining the wafer, the ring having an inner diameter surface configured to restrict lateral wafer motion, and at least one interface surface configured to interface with a polishing surface. The interface surface comprises a recessed section adjacent to the ring inner diameter, configured to preclude contact between the recessed section and the polishing surface.
摘要翻译: 公开了部分接触晶片保持环装置。 例如,一个公开的实施例提供了一种晶片保持环,其包括用于保持晶片的环,该环具有被配置为限制横向晶片运动的内径表面以及被配置为与抛光表面相接合的至少一个界面。 界面表面包括与环内径相邻的凹陷部分,其构造成防止凹部与抛光表面之间的接触。
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公开(公告)号:US06855043B1
公开(公告)日:2005-02-15
申请号:US09611247
申请日:2000-07-07
申请人: Jianshe Tang , Brian J. Brown , Charles C. Garretson , Benjamin A. Bonner , Thomas H. Osterheld , Fred C. Redeker
发明人: Jianshe Tang , Brian J. Brown , Charles C. Garretson , Benjamin A. Bonner , Thomas H. Osterheld , Fred C. Redeker
IPC分类号: B24B37/30 , B24B37/32 , H01L21/304 , B24B47/02
摘要: A carrier head for a chemical mechanical polishing apparatus includes a flexible membrane that applies a load to a substrate and a retaining ring. The friction coefficient of the lower surface of the flexible membrane is increased to prevent contact between the substrate and the retaining ring, thereby preventing slurry compaction and buildup and substrate deformation caused by such contact.
摘要翻译: 用于化学机械抛光装置的载体头包括向基材和保持环施加载荷的柔性膜。 增加柔性膜的下表面的摩擦系数,以防止基板与保持环之间的接触,从而防止由此引起的浆料压实和堆积以及基板变形。
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公开(公告)号:US06251001B1
公开(公告)日:2001-06-26
申请号:US09307674
申请日:1999-05-10
申请人: Jay D. Pinson , Brian J. Brown , Thomas H. Osterheld , Benjamin A. Bonner , Doyle E. Bennett , Nitin Shah , Paul Flores
发明人: Jay D. Pinson , Brian J. Brown , Thomas H. Osterheld , Benjamin A. Bonner , Doyle E. Bennett , Nitin Shah , Paul Flores
IPC分类号: B24B5502
摘要: Systems and methods for polishing a substrate with reduced contamination are described. Moist air is directed to one or more surfaces in proximity to the polishing surface and exposed to airborne slurry particles generated during polishing. By maintaining the atmosphere in the vicinity of the exposed surfaces at an elevated relative humidity level, airborne slurry particles adhering to the exposed surfaces remain in suspension and, therefore, may be easily cleaned, e.g., during a high pressure rinse cycle. This feature reduces the likelihood that slurry particles will accumulate on exposed surfaces of the polishing apparatus and flake off while a substrate is being polished, reducing the likelihood of substrate defects caused by such slurry contamination.
摘要翻译: 描述了用于抛光具有降低的污染物的基底的系统和方法。 潮湿空气被引导到靠近抛光表面的一个或多个表面,并暴露于在抛光期间产生的空气中的浆料颗粒。 通过在升高的相对湿度水平下保持暴露表面附近的气氛,附着在暴露表面上的气载浆料颗粒保持悬浮状态,因此可以容易地例如在高压冲洗循环中清洁。 该特征降低了浆料颗粒在抛光装置的暴露表面上积聚的可能性,并且在抛光衬底时剥落,从而降低了由这种浆料污染引起的衬底缺陷的可能性。
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公开(公告)号:US07731746B2
公开(公告)日:2010-06-08
申请号:US12025382
申请日:2008-02-04
IPC分类号: A61F2/06
CPC分类号: A61F2/915 , A61F2/91 , A61F2002/91533 , A61F2002/91541 , A61F2002/91583
摘要: A radially expandable stent comprising a plurality of spaced band-like elements and intersecting links is disclosed. The band-like elements have a generally serpentine configuration to provide continuous waves of generally sinusoidal character to each band-like element. The waves are characterized by a plurality of peaks and troughs taking a generally longitudinal direction along the cylinder such that the waves in the band-like elements open as the stent is expanded from a first diameter to a second diameter. The intersecting links are substantially U-shaped and terminate in first and second shanks. The first shank of a link emanates from a region between a peak and trough on a band-like element and the second shank of the link emanates from a region between a peak and trough on an adjacent band-like element.
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公开(公告)号:US20080071346A1
公开(公告)日:2008-03-20
申请号:US11768304
申请日:2007-06-26
申请人: Brian J. Brown
发明人: Brian J. Brown
IPC分类号: A61F2/06
CPC分类号: A61F2/92 , A61F2/852 , A61F2/88 , A61F2/91 , A61F2/915 , A61F2002/91525 , A61F2002/91541 , A61F2002/9155 , A61F2002/91575 , A61F2210/0076 , A61F2230/0054
摘要: A rolled sheet multilayer stent having an unrolled state, an outer surface layer, and an inner surface layer and comprising a first sheet and a second sheet. The first and second sheets each have a first edge and at least one cell design comprising a plurality of struts which form a plurality of cells. When the rolled sheet multilayer stent is in an unrolled state, the first and second sheets lay on top of one another so that the first edge of the first sheet and the first edge of the second sheet form a first edge of the rolled sheet multilayer stent. When the rolled sheet multilayer stent is in a rolled state, the first edge of the first sheet is opposite from the second edge of the first sheet and the first edge of the second sheet is opposite from the second edge of the second sheet. The first sheet has a first circumferential length and the second sheet has a second circumferential length where the first circumferential length is greater than the second circumferential length.
摘要翻译: 一种具有展开状态的卷材多层支架,外表面层和内表面层,并且包括第一片和第二片。 第一和第二片各自具有第一边缘和包括形成多个单元的多个支柱的至少一个单元设计。 当轧制板多层支架处于展开状态时,第一和第二板相互叠置,使得第一板的第一边缘和第二板的第一边缘形成轧制板多层支架的第一边缘 。 当轧制板多层支架处于轧制状态时,第一板的第一边缘与第一板的第二边缘相反,并且第二板的第一边缘与第二板的第二边缘相反。 第一片具有第一圆周长度,第二片具有第二圆周长度,其中第一圆周长度大于第二圆周长度。
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公开(公告)号:US07229470B2
公开(公告)日:2007-06-12
申请号:US10160531
申请日:2002-05-31
申请人: Brian J. Brown , Timothy J. Ley
发明人: Brian J. Brown , Timothy J. Ley
IPC分类号: A61F2/06
CPC分类号: A61F2/915 , A61F2/89 , A61F2/90 , A61F2002/3011 , A61F2002/30324 , A61F2002/30329 , A61F2002/826 , A61F2002/91533 , A61F2002/9155 , A61F2002/91591 , A61F2220/0025 , A61F2230/0002 , A61F2250/0036
摘要: A flexible tubular stent including loosely interlocked annular elements without intersections or cross-over points.
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公开(公告)号:US07226514B2
公开(公告)日:2007-06-05
申请号:US10309832
申请日:2002-12-04
申请人: Anwar Husain , Brian J. Brown , David G. Andeen , Svetlana Sherman , John M. White , Michael Sugarman , Makoto Inagawa , Manoocher Birang
发明人: Anwar Husain , Brian J. Brown , David G. Andeen , Svetlana Sherman , John M. White , Michael Sugarman , Makoto Inagawa , Manoocher Birang
IPC分类号: B08B3/02
CPC分类号: H01L21/67028 , Y10S134/902
摘要: An inventive vertical spin-dryer is provided. The inventive spin-dryer may have a shield system positioned to receive fluid displaced from a substrate vertically positioned within the spin-dryer. The shield system may have one or more shields positioned to at least partially reflect fluid therefrom as the fluid impacts the shield. The one or more shields are angled to encourage the flow of fluid therealong, and are preferably hydrophilic to prevent droplets from forming. Preferably the shield system has three shields positioned in a horizontally and vertically staggered manner so that fluid is transferred from a substrate facing surface of a first shield to the top or non-substrate-facing surface of an adjacent shield, etc. A pressure gradient may be applied across the interior of the spin-dryer to create an air flow which encourages fluid to travel along the shield system in a desired direction. A sensor adapted to facilitate desired flywheel position, an openable gripper having a remote actuator, a radiused gripper and a source of inert drying gas are also provided in individual embodiments.
摘要翻译: 提供了一种创造性的垂直旋转干燥器。 本发明的旋转干燥器可以具有屏蔽系统,其被定位成接收从垂直定位在旋转干燥器内的衬底移位的流体。 屏蔽系统可以具有一个或多个屏蔽件,其定位成当流体冲击屏蔽时至少部分地反射流体。 一个或多个屏蔽件成角度以促使其流体流动,并且优选是亲水的以防止液滴形成。 优选地,屏蔽系统具有以水平和垂直交错方式定位的三个屏蔽件,使得流体从第一屏蔽件的面向基板的表面转移到相邻屏蔽件的顶部或非基板面向表面等。压力梯度可以 施加在旋转干燥器的内部以产生鼓风流体沿着屏蔽系统沿所需方向行进的空气流。 在各个实施例中还提供了适于促进期望的飞轮位置的传感器,具有远程致动器的可打开夹具,圆角夹持器和惰性干燥气体源。
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公开(公告)号:US06965511B2
公开(公告)日:2005-11-15
申请号:US09975292
申请日:2001-10-10
申请人: Michael L Rudd , Jerlyn R Culp , Michelle R. Lehmeier , Brian J. Brown , James C Albritton-McDonald
发明人: Michael L Rudd , Jerlyn R Culp , Michelle R. Lehmeier , Brian J. Brown , James C Albritton-McDonald
CPC分类号: G06F3/0202 , G06F3/0238
摘要: The present disclosure relates to a system and method for personalizing an electrical device. In one arrangement, the system comprises an electrical device having a plurality of button openings that are adapted to receive buttons that control operation of the electrical device, and a plurality of removable buttons that can be interchangeably disposed within the button openings of the electrical device, the buttons being provided with a variety of discrete features so as to be selectable by a user for provision on the electrical device in an arrangement chosen by the user to personalize the device as desired by the user. In one arrangement, the method comprises the steps of receiving selection of a particular device functionality to be associated with a particular encoded button, and assigning the selected device functionality to the encoded button such that when the encoded button is disposed within a button opening of the electrical device and depressed, the selected functionality will be performed by the electrical device.
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公开(公告)号:US06912126B2
公开(公告)日:2005-06-28
申请号:US10649059
申请日:2003-08-27
申请人: Michael L Rudd , Jerlyn R Culp , Michelle R. Lehmeier , Brian J. Brown , James C Albritton-McDonald
发明人: Michael L Rudd , Jerlyn R Culp , Michelle R. Lehmeier , Brian J. Brown , James C Albritton-McDonald
CPC分类号: G06F3/0202 , G06F3/0238
摘要: The present disclosure relates to a system and method for personalizing an electrical device. In one arrangement, the system comprises an electrical device having a plurality of button openings that are adapted to receive buttons that control operation of the electrical device, and a plurality of removable buttons that can be interchangeably disposed within the button openings of the electrical device, the buttons being provided with a variety of discrete features so as to be selectable by a user for provision on the electrical device in an arrangement chosen by the user to personalize the device as desired by the user. In one arrangement, the method comprises the steps of receiving selection of a particular device functionality to be associated with a particular encoded button, and assigning the selected device functionality to the encoded button such that when the encoded button is disposed within a button opening of the electrical device and depressed, the selected functionality will be performed by the electrical device.
摘要翻译: 本公开涉及一种用于个性化电气设备的系统和方法。 在一种布置中,该系统包括具有适于接收控制电气设备的操作的按钮的多个按钮开口的电气设备,以及可互换地设置在电气设备的按钮开口内的多个可拆卸按钮, 按钮被提供有各种离散的特征,以便用户可以选择以在用户根据使用者的需要个性化设备所选择的布置在电气设备上。 在一种布置中,该方法包括以下步骤:接收与特定编码按钮相关联的特定设备功能的选择,以及将所选择的设备功能分配给编码按钮,使得当编码按钮被布置在 电气设备和按下,所选择的功能将由电气设备执行。
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公开(公告)号:US06818014B2
公开(公告)日:2004-11-16
申请号:US08511076
申请日:1995-08-03
申请人: Brian J. Brown , Michael L. Davis
发明人: Brian J. Brown , Michael L. Davis
IPC分类号: A61F206
CPC分类号: A61F2/915 , A61F2/91 , A61F2002/91525 , A61F2002/91533 , A61F2002/91541 , A61F2002/91558 , A61F2210/0019 , A61F2230/0054 , A61F2250/0018
摘要: Segmented articulatable stent of open structure comprised of end-connected struts making up the segments with angular interconnects between segments.
摘要翻译: 开放式结构的可分段可伸缩支架由构成段之间的角度互连的端部连接的支柱构成。
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