-
1.发明授权Lock in thermal laser stimulation through one side of the device while acquiring lock-in thermal emission images on the opposite side 有权通过设备的一侧锁定热激光刺激，同时在相对侧获取锁定热发射图像公开(公告)号：US09025020B2
公开(公告)日：2015-05-05
申请号：US13280260
申请日：2011-10-24
CPC分类号： G06T7/0008 , G01J5/0096 , G01J2005/0077 , G01N25/72 , G01R31/311 , G01R35/005 , G06T7/001 , G06T2207/10048 , G06T2207/30148 , H04N5/33
摘要： Controlled amount of heat is injected into a stacked die using a light beam, and the propagated heat is measuring with LIT camera from the other side of the die. The thermal image obtained can be characterized so that it can be used to calibrate the phase shift from a given stack layer, or can be used to identify defects in the stacked die. The process can be repeated for each die in the stack to generate a reference for future testing. The thermal image can be investigated to detect faults, such as voids in vias, e.g., TSV.
摘要翻译： 使用光束将控制的热量注入到堆叠的管芯中，并且利用LIT照相机从模具的另一侧测量传播的热量。 获得的热图像可以被表征，使得其可以用于校准来自给定堆叠层的相移，或者可以用于识别堆叠管芯中的缺陷。 堆叠中的每个管芯可以重复该过程，以生成未来测试的参考。 可以研究热图像以检测故障，例如通孔中的空隙，例如TSV。
-
公开(公告)号：US08294976B1
公开(公告)日：2012-10-23
申请号：US12415937
申请日：2009-03-31
IPC分类号： G02B26/00
CPC分类号： B81B3/0008 , B81B2201/016 , H01G5/16 , H01H59/0009 , H01H2059/0018
摘要： An electrostatically actuatable micro electromechanical device is provided with enhanced reliability and lifetime. The electrostatically actuatable micro electromechanical device comprises: a substrate, a first conductor fixed to the top layer of the substrate, forming a fixed electrode, a second conductor fixed to the top layer of the substrate, and a substrate area. The second conductor is electrically isolated from the first conductor and comprises a moveable portion, suspended at a predetermined distance above the first conductor, the moveable portion forming a moveable electrode which approaches the fixed electrode upon applying an actuation voltage between the first and second conductors. The selected substrate surface area is defined as the orthogonal projection of the moveable portion on the substrate between the first and second conductors. In the substrate surface area at least one recess is provided in at least the top layer of the substrate.
摘要翻译： 提供了一种可静电驱动的微机电装置，具有更高的可靠性和寿命。 静电致动微机电装置包括：基板，固定到基板的顶层的第一导体，形成固定电极，固定到基板的顶层的第二导体和基板区域。 所述第二导体与所述第一导体电隔离并且包括悬挂在所述第一导体上方预定距离处的可移动部分，所述可移动部分形成在所述第一和第二导体之间施加致动电压时接近所述固定电极的可移动电极。 所选择的基板表面积被定义为在第一和第二导体之间的基板上的可移动部分的正交投影。 在基板表面区域中，至少一个凹部设置在基板的至少顶层中。
-
公开(公告)号：US20070040281A1
公开(公告)日：2007-02-22
申请号：US11506517
申请日：2006-08-18
申请人： Hirokazu Nakayama , Akihiko Okubora , Yoichi Oya , Hirohito Miyazaki , Kris Baert , Ingrid De Wolf , Piet De Moor , Eric Beyne
发明人： Hirokazu Nakayama , Akihiko Okubora , Yoichi Oya , Hirohito Miyazaki , Kris Baert , Ingrid De Wolf , Piet De Moor , Eric Beyne
CPC分类号： B81B7/007 , B81B7/0041 , B81C2203/019 , H01L2224/05568 , H01L2224/05573 , H01L2224/16225 , H01L2224/48091 , H01L2924/00014 , H01L2924/15311 , H01L2224/05599
摘要： To provide a semiconductor device configured that a micro device having a device substrate, a function element provided on the device substrate and having an oscillator or a movable part, first lands provided on a surface of the device substrate by being arranged on its outer circumference portion of the function element, and bumps provided to the first lands is mounted on the circuit board having second lands formed to correspond to the bumps, from the bump formation surface side, so that the bumps and the second lands are electrically connected; on which a sealing resin layer is formed to go round the outer circumference portion of the function element to fix connection portions of the bumps and the second lands, and to seal a clearance between the device substrate and the circuit board; and a cavity portion is formed between the function element and the circuit board.
摘要翻译： 为了提供一种半导体器件，其被配置为具有器件基板的微器件，设置在器件基板上并具有振荡器或可移动部件的功能元件，首先通过布置在其外周部分上而设置在器件基板的表面上 所述凸起和所述第二焊盘电连接，所述凸起和所述第二焊盘被电连接，所述凸起和所述第二焊盘被电连接到所述电路板上，所述电路板具有形成为与所述凸块相对应的第二焊盘， 在其上形成密封树脂层以绕着功能元件的外周部分固定以固定凸块和第二焊盘的连接部分，并且密封装置基板和电路板之间的间隙; 并且在功能元件和电路板之间形成空腔部分。
-
公开(公告)号：US20120279837A1
公开(公告)日：2012-11-08
申请号：US12415937
申请日：2009-03-31
CPC分类号： B81B3/0008 , B81B2201/016 , H01G5/16 , H01H59/0009 , H01H2059/0018
摘要： An electrostatically actuatable micro electromechanical device is provided with enhanced reliability and lifetime. The electrostatically actuatable micro electromechanical device comprises: a substrate, a first conductor fixed to the top layer of the substrate, forming a fixed electrode, a second conductor fixed to the top layer of the substrate, and a substrate area. The second conductor is electrically isolated from the first conductor and comprises a moveable portion, suspended at a predetermined distance above the first conductor, the moveable portion forming a moveable electrode which approaches the fixed electrode upon applying an actuation voltage between the first and second conductors. The selected substrate surface area is defined as the orthogonal projection of the moveable portion on the substrate between the first and second conductors. In the substrate surface area at least one recess is provided in at least the top layer of the substrate.
摘要翻译： 提供了一种可静电驱动的微机电装置，具有更高的可靠性和寿命。 静电致动微机电装置包括：基板，固定到基板的顶层的第一导体，形成固定电极，固定到基板的顶层的第二导体和基板区域。 所述第二导体与所述第一导体电隔离并且包括悬挂在所述第一导体上方预定距离处的可移动部分，所述可移动部分形成在所述第一和第二导体之间施加致动电压时接近所述固定电极的可移动电极。 所选择的基板表面积被定义为在第一和第二导体之间的基板上的可移动部分的正交投影。 在基板表面区域中，至少一个凹部设置在基板的至少顶层中。
-
公开(公告)号：US6043882A
公开(公告)日：2000-03-28
申请号：US166011
申请日：1998-10-02
申请人： Ingrid De Wolf , Mahmoud Rasras
发明人： Ingrid De Wolf , Mahmoud Rasras
CPC分类号： G01J3/2803 , G01J3/14 , G01J3/443
摘要： A photon-emission microscope method and system are described which allow both emission spot localization and continuous spectral analysis of the emited light from the emission spot of a biased electronic circuit. The system includes an emission microscope, a detector and an in-line, direct vision, chromatically dispersing prismatic device. The microscope system advantageously uses only one detector which does not need to be moved to be able to detect both the localization and spectral images. In a particular embodiment, localization of emission spots may be performed using monochromatic light which allows sharp images of the electronic circuit despite the fact that the electronic circuit is viewed through the dispersing device. Further, an improved procedure is described for overcoming errors caused by saturation of the detector at high sensitivities.
摘要翻译： 描述了允许来自偏置电子电路的发射点的发射光的发射点定位和连续光谱分析的光子发射显微镜方法和系统。 该系统包括放射显微镜，检测器和直列视觉，色度分散棱镜装置。 显微镜系统有利地仅使用一个不需要移动以便能够检测定位和光谱图像的检测器。 在特定实施例中，发射点的定位可以使用单色光进行，其允许电子电路的清晰图像，尽管事实上通过分散装置观察电子电路。 此外，描述了用于克服由高灵敏度的检测器的饱和引起的误差的改进方法。
-
-
-
-
搜索结果
5 条记录 (耗时 0.022 秒)
