摘要:
A stacked ferroelectric memory device has selection transistors including a first gate structure, a first impurity region, a second impurity region, a first insulating interlayer covering the selection transistors, bit line structures electrically connected to the first impurity regions, a second insulating interlayer covering the bit line structures, doped single crystalline silicon plugs formed through the first and the second insulating interlayers, each of which contacts the second impurity region and has a height greater than that of the bit line structures, active patterns disposed on the plugs and the second insulating interlayer, each of which contacts the plugs, and ferroelectric transistors disposed on the active patterns, each of which has a second gate structure including a ferroelectric layer pattern and a conductive pattern, a third impurity region and a fourth impurity region. The ferroelectric memory device performs a random access operation and has a high degree of integration.
摘要:
A stacked ferroelectric memory device has selection transistors including a first gate structure, a first impurity region, a second impurity region, a first insulating interlayer covering the selection transistors, bit line structures electrically connected to the first impurity regions, a second insulating interlayer covering the bit line structures, doped single crystalline silicon plugs formed through the first and the second insulating interlayers, each of which contacts the second impurity region and has a height greater than that of the bit line structures, active patterns disposed on the plugs and the second insulating interlayer, each of which contacts the plugs, and ferroelectric transistors disposed on the active patterns, each of which has a second gate structure including a ferroelectric layer pattern and a conductive pattern, a third impurity region and a fourth impurity region. The ferroelectric memory device performs a random access operation and has a high degree of integration.
摘要:
A memory cell array block has unit memory cells comprised of pairs of memory cells, each of have a memory cell and a complementary memory cell. A second unit memory cell is interleaved with the first unit memory cell, a fourth unit memory cell is interleaved with a third unit memory cell. First and second sense amplifiers are disposed over and under the array block, respectively. The first switch connects bitlines coupled to the first unit memory cell with the first sense amplifier and connects bitlines coupled to the second unit memory cell with the second sense amplifier. The second switch connects bitlines coupled to the third unit memory cell with the first sense amplifier and connects bitlines coupled to the fourth unit memory cell with the second sense amplifier. A selected unit memory cell is selectively connected with a sense amplifier, decreasing the number of sense amplifiers.
摘要:
A redundancy circuit for a semiconductor memory device. The redundancy circuit includes redundancy memory cells and a redundancy word line decoder. The redundancy word line decoder has a fuse circuit that includes fuses and an output signal. The output signal is in one of three states depending on input signals. The fuse circuit controls a cutting of the fuses in accordance with the input signals so as to replace defective normal memory cells with the redundancy memory cells depending on a type of defect experienced by the defective normal memory cells.
摘要:
A ferroelectric random access memory device including a pulse generator circuit capable of generating a pulse signal in response to an address transition. A chip enable buffer circuit activates a chip enable flag signal in response to a first transition of the pulse signal. A row selector circuit selects and drives one of the rows in response to the address. The row selector circuit also generates a flag signal indicating a selection of a plate line. A control circuit activates a plate control signal in response to the activation of a write enable signal, and deactivates the plate control signal in response to a second transition of the pulse signal. A plate line of a selected row is re-activated according to activation of the plate control signal and is deactivated according to deactivation of the plate control signal.
摘要:
A ferroelectric random access memory device of the present invention includes an access transistor having a gate connected to a word line and a current path connected between a bit line and an internal cell node. A ferroelectric capacitor is connected between the internal cell node and a plate line. A reference voltage generator for generating a reference voltage includes a linear paraelectric capacitor. Data stored in the ferroelectric capacitor is sensed by activating the word line so as to connect the ferroelectric capacitor to the bit line. The plate line is then activated and simultaneously the reference capacitor is connected to a complementary bit line. After a voltage difference between the bit line and the complementary bit line is detected, the reference capacitor is insulated from the complementary bit line.
摘要:
A semiconductor device having an MIM capacitor and a method of forming the same are provided. A lower electrode includes a plate electrode and a sidewall electrode. The plate electrode is formed by a patterning process preferably including a plasma anisotropic etching. The sidewall electrode is formed like a spacer on an inner sidewall of an opening exposing the plate electrode by a plasma entire surface anisotropic etching.
摘要:
In a node structure under a capacitor in a ferroelectric random access memory device and a method of forming the same, top surfaces of the node structures are disposed at substantially the same level as a top surface of an interlayer insulating layer surrounding the node structures, and thus crystal growth of a ferroelectric in the capacitor can be stabilized. To this end, a node insulating pattern is formed on a semiconductor substrate. A node defining pattern surrounding the node insulating pattern is disposed under the node insulating pattern. A node conductive pattern is disposed between the node defining pattern and the node insulating pattern.
摘要:
Methods for forming an electronic device can include forming a capacitor structure on a portion of a substrate with the capacitor structure including a first electrode on the substrate, a capacitor dielectric on the first electrode, a second electrode on the dielectric, and a hard mask on the second electrode. More particularly, the capacitor dielectric can be between the first and second electrodes, the first electrode and the capacitor dielectric can be between the second electrode and the substrate, and the first and second electrodes and the capacitor dielectric can be between the hard mask and the substrate. An interlayer dielectric layer can be formed on the hard mask and on portions of the substrate surrounding the capacitor structure, and portions of the interlayer dielectric layer can be removed to expose the hard mask while maintaining portions of the interlayer dielectric layer on portions of the substrate surrounding the capacitor structure. The hard mask can then be removed thereby exposing portions of the second electrode while maintaining the portions of the interlayer dielectric layer on portions of the substrate surrounding the capacitor.
摘要:
A semiconductor device having an MIM capacitor and a method of forming the same are provided. A lower electrode includes a plate electrode and a sidewall electrode. The plate electrode is formed by a patterning process preferably including a plasma anisotropic etching. The sidewall electrode is formed like a spacer on an inner sidewall of an opening exposing the plate electrode by a plasma entire surface anisotropic etching.