Ceramic device
    3.
    发明授权
    Ceramic device 失效
    陶瓷装置

    公开(公告)号:US5449545A

    公开(公告)日:1995-09-12

    申请号:US006856

    申请日:1993-01-21

    摘要: A ceramic device is disclosed that has a silicon base plate, a first ceramic film formed on a first surface of the silicon base plate, a second ceramic film formed on a second surface of the silicon base plate opposite to the first surface, and an operation opening formed in the silicon base plate between the first and second surfaces. A surface portion of the first ceramic film exposed to the operation opening Is a mirror surface having 0.05 micrometers or less of center line average height Ra. A mirror surface keeping film can be formed between the first surface of the silicon base plate and the first ceramic film for keeping a mirror surface in an etching step to etch the silicon base plate, and the silicon base plate can be reduced partially in the etching step for forming an operation opening thereby exposing a corresponding portion of the mirror surface keeping film to the operation opening.

    摘要翻译: 公开了一种陶瓷器件,其具有硅基板,形成在硅基板的第一表面上的第一陶瓷膜,形成在与第一表面相对的硅基板的第二表面上的第二陶瓷膜,以及操作 开口形成在第一和第二表面之间的硅基板中。 暴露于操作开口的第一陶瓷膜的表面部分是具有0.05微米或更小的中心线平均高度Ra的镜面。 在蚀刻步骤中,在硅基板的第一表面和第一陶瓷膜之间可以形成镜面保持膜,用于在蚀刻步骤中保持镜面,以蚀刻硅基板,并且可以在蚀刻中部分地减少硅基板 用于形成操作开口的步骤,从而将镜面保持膜的相应部分暴露于操作开口。

    Thin sheet type heat pipe
    5.
    发明授权
    Thin sheet type heat pipe 有权
    薄板式热管

    公开(公告)号:US07278469B2

    公开(公告)日:2007-10-09

    申请号:US10430923

    申请日:2003-05-07

    IPC分类号: H05K7/20

    摘要: The present invention has proposed a thin sheet type heat pipe comprising: a hermetically sealed container which is formed of foil sheets opposed and jointed at peripheral portions; at least one spacer which is movably housed in said container and has a fluid path to exert a capillary force; at least one spacer which is movably housed in said container and has no fluid path; and a working fluid enclosed in said container.

    摘要翻译: 本发明提出了一种薄板式热管,其特征在于,包括:密封容器,其由在周边部分相对并接合的箔片形成; 至少一个间隔件,其可移动地容纳在所述容器中并且具有施加毛细管力的流体路径; 至少一个可移动地容纳在所述容器中并且没有流体路径的间隔件; 以及封闭在所述容器中的工作流体。

    Electrolysis apparatus
    10.
    发明授权
    Electrolysis apparatus 失效
    电解装置

    公开(公告)号:US5076902A

    公开(公告)日:1991-12-31

    申请号:US291592

    申请日:1988-12-29

    IPC分类号: C03B32/00 C03C23/00 C30B35/00

    摘要: An electrolysis apparatus has a furnace for setting a silica glass component such as a process tube or crucible, a heater for heating the component, a sensor for measuring a temperature of an inside portion of the furnace, an anode and an cathode for applying a voltage across the component so as to electrolyze the component, a tube for holding the anode, a device for supplying an inert gas into a space between the anode and the holding tube, and a DC power source connected to the anode and the cathode.

    摘要翻译: 电解装置具有用于设置诸如处理管或坩埚的二氧化硅玻璃部件的炉,用于加热部件的加热器,用于测量炉内部温度的传感器,用于施加电压的阳极和阴极 横跨该部件以电解部件,用于保持阳极的管,用于将惰性气体供应到阳极和保持管之间的空间的装置,以及连接到阳极和阴极的直流电源。