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    Alignment method and exposure apparatus using the same
    1.
    发明授权
    Alignment method and exposure apparatus using the same 失效
    对准方法和使用其的曝光装置

    公开(公告)号：US06636311B1

    公开(公告)日：2003-10-21

    申请号：US09450682

    申请日：1999-11-30

    申请人： Hideki Ina ,  Minoru Yoshii ,  Masanobu Hasegawa ,  Takashi Satoh

    发明人： Hideki Ina ,  Minoru Yoshii ,  Masanobu Hasegawa ,  Takashi Satoh

    IPC分类号： G01B1100

    CPC分类号： G03F9/7061 ,  B82Y10/00 ,  G03F9/7076 ,  G03F9/7084 ,  G03F9/7092

    摘要： An alignment method for aligning first and second objects, in an exposure apparatus for transferring a pattern of the first object onto the second object as being coated with a resist, includes a process of producing an alignment offset value related to an alignment mark forming region on the second object, after formation of the resist coating thereon, and a process of aligning the first object with the second object as being coated with the resist, in the exposure apparatus, on the basis of the offset value as produced.

    摘要翻译： 一种用于对准第一和第二物体的对准方法，在用于将第一物体的图案转印到第二物体上的涂布抗蚀剂的曝光装置中，包括产生与对准标记形成区域相关的取向偏移值的处理 第二个目的是在其上形成抗蚀剂涂层之后，以及在曝光装置中，基于产生的偏移值，将第一物体与第二物体对准被涂覆有抗蚀剂的处理。

    POSITION DETECTING SYSTEM AND EXPOSURE APPARATUS USING THE SAME
    2.
    发明申请
    POSITION DETECTING SYSTEM AND EXPOSURE APPARATUS USING THE SAME 失效
    位置检测系统和曝光装置

    公开(公告)号：US20050195405A1

    公开(公告)日：2005-09-08

    申请号：US11115366

    申请日：2005-04-27

    申请人： Hideki Ina ,  Minoru Yoshii ,  Masanobu Hasegawa ,  Takashi Satoh

    发明人： Hideki Ina ,  Minoru Yoshii ,  Masanobu Hasegawa ,  Takashi Satoh

    IPC分类号： H01L21/027 ,  G03F7/20 ,  G03F9/00 ,  G01B11/00

    CPC分类号： G03F7/70633 ,  G03F9/7049 ,  G03F9/7069 ,  G03F9/7088

    摘要： A position detecting system includes a light source device for providing coherent light, an incoherence-transforming device for transforming the coherent light from the light source device, into incoherent light, an optical system for dividing the incoherent light from the incoherence-transforming device into divided light, wherein one of the divided light beams produces an intermediate image, and light from the intermediate image is directed to illuminate a target upon a surface of an object while another of divided light beams is directed to be reflected by a surface which is optically conjugate with the intermediate image, and wherein light from the target and light reflected by the conjugate surface are re-combined, an image pickup device for producing an imagewise signal corresponding to the target on the basis of the light re-combined by the optical system, wherein positional information related to a position of the target with respect to a direction along the surface of the object can be produced on the basis of the imagewise signal, and an image contrast adjusting device for adjusting image contrast of an image of a portion close to the target, as picked up by the image pickup device.

    摘要翻译： 位置检测系统包括用于提供相干光的光源装置，用于将来自光源装置的相干光变换成非相干光的非相干变换装置，用于将来自不相干变换装置的非相干光分成分为 光，其中所述分割光束中的一个产生中间图像，并且来自所述中间图像的光被引导以在对象的表面上照射目标，而另一个分割光束被指向由光学共轭的表面反射 并且其中来自所述目标的光和由所述共轭表面反射的光被重新组合，用于根据由所述光学系统重新组合的光产生对应于所述目标的成像信号的图像拾取装置， 其中与所述目标相对于沿着所述表面的方向的位置相关的位置信息 可以基于图像信号产生ct，以及用于调整由图像拾取装置拾取的靠近目标的部分的图像的图像对比度的图像对比度调整装置。

    Position detecting system and exposure apparatus using the same
    3.
    发明授权
    Position detecting system and exposure apparatus using the same 失效

    公开(公告)号：US06972847B2

    公开(公告)日：2005-12-06

    申请号：US11115366

    申请日：2005-04-27

    申请人： Hideki Ina ,  Minoru Yoshii ,  Masanobu Hasegawa ,  Takashi Satoh

    发明人： Hideki Ina ,  Minoru Yoshii ,  Masanobu Hasegawa ,  Takashi Satoh

    IPC分类号： H01L21/027 ,  G03F7/20 ,  G03F9/00 ,  G01B11/02

    CPC分类号： G03F7/70633 ,  G03F9/7049 ,  G03F9/7069 ,  G03F9/7088

    摘要： A position detecting system includes a light source device for providing coherent light, an incoherence-transforming device for transforming the coherent light from the light source device, into incoherent light, an optical system for dividing the incoherent light from the incoherence-transforming device into divided light, wherein one of the divided light beams produces an intermediate image, and light from the intermediate image is directed to illuminate a target upon a surface of an object while another of divided light beams is directed to be reflected by a surface which is optically conjugate with the intermediate image, and wherein light from the target and light reflected by the conjugate surface are re-combined, an image pickup device for producing an imagewise signal corresponding to the target on the basis of the light re-combined by the optical system, wherein positional information related to a position of the target with respect to a direction along the surface of the object can be produced on the basis of the imagewise signal, and an image contrast adjusting device for adjusting image contrast of an image of a portion close to the target, as picked up by the image pickup device.

    Position detecting system and exposure apparatus using the same
    4.
    发明授权
    Position detecting system and exposure apparatus using the same 失效
    位置检测系统及使用其的曝光装置

    公开(公告)号：US06906805B1

    公开(公告)日：2005-06-14

    申请号：US09428490

    申请日：1999-10-28

    申请人： Hideki Ina ,  Minoru Yoshii ,  Masanobu Hasegawa ,  Takashi Satoh

    发明人： Hideki Ina ,  Minoru Yoshii ,  Masanobu Hasegawa ,  Takashi Satoh

    IPC分类号： H01L21/027 ,  G03F7/20 ,  G03F9/00 ,  G01B9/02

    CPC分类号： G03F7/70633 ,  G03F9/7049 ,  G03F9/7069 ,  G03F9/7088

    摘要： A position detecting system includes a light source device for providing coherent light, an incoherence-transforming device for transforming the coherent light from the light source device, into incoherent light, an optical system for dividing the incoherent light from the incoherence-transforming device into divided light, wherein one of the divided light beams produces an intermediate image, and light from the intermediate image is directed to illuminate a target upon a surface of an object while another of divided light beams is directed to be reflected by a surface which is optically conjugate with the intermediate image, and wherein light from the target and light reflected by the conjugate surface are re-combined, an image pickup device for producing an imagewise signal corresponding to the target on the basis of the light re-combined by the optical system, wherein positional information related to a position of the target with respect to a direction along the surface of the object can be produced on the basis of the imagewise signal, and an image contrast adjusting device for adjusting image contrast of an image of a portion close to the target, as picked up by the image pickup device.

    摘要翻译： 位置检测系统包括用于提供相干光的光源装置，用于将来自光源装置的相干光变换成非相干光的非相干变换装置，用于将来自不相干变换装置的非相干光分成分为 光，其中所述分割光束中的一个产生中间图像，并且来自所述中间图像的光被引导以在对象的表面上照射目标，而另一个分割光束被指向由光学共轭的表面反射 并且其中来自所述目标的光和由所述共轭表面反射的光被重新组合，用于根据由所述光学系统重新组合的光产生对应于所述目标的成像信号的图像拾取装置， 其中与所述目标相对于沿着所述表面的方向的位置相关的位置信息 可以基于图像信号产生ct，以及用于调整由图像拾取装置拾取的靠近目标的部分的图像的图像对比度的图像对比度调整装置。

    ENGINE AUTOMATIC STOP AND RESTART CONTROL APPARATUS
    6.
    发明申请
    ENGINE AUTOMATIC STOP AND RESTART CONTROL APPARATUS 有权
    发动机自动停止和重启控制装置

    公开(公告)号：US20120022773A1

    公开(公告)日：2012-01-26

    申请号：US13185628

    申请日：2011-07-19

    申请人： Yosuke OHMORI ,  Masayoshi Takeda ,  Tatsuya Saito ,  Takashi Satoh

    发明人： Yosuke OHMORI ,  Masayoshi Takeda ,  Tatsuya Saito ,  Takashi Satoh

    IPC分类号： F02D28/00

    CPC分类号： B60T13/662 ,  B60T7/122 ,  F02N11/0818

    摘要： An engine automatic stop and restart control apparatus is provided. The apparatus includes a control unit which stops and restarts an engine, an actual axle torque change speed calculation unit which calculates change speed in actual axle torque that is actually generated when the engine is restarted, an ideal axle torque change speed calculation unit which calculates change speed in ideal axle torque that corresponds to engine torque generated by the engine, a change speed difference calculation unit which calculates a change speed difference that is a difference between the change speed in actual axle torque and the change speed in ideal axle torque, and a vibration suppression control unit which executes a vibration suppression control for applying braking torque based on the change speed difference.

    摘要翻译： 提供一种发动机自动停止和重启控制装置。 该装置包括：停止再起动发动机的控制单元，计算发动机重起时实际产生的实际转矩的变化速度的实际车轴转矩变化速度计算单元，计算变更时的理想轴转矩变化速度运算单元 对应于由发动机产生的发动机扭矩的理想轴转矩的速度;变化速度差计算单元，其计算作为实际车轴转矩的变化速度与理想轴转矩的变化速度之间的差的变化速度差，以及 振动抑制控制单元，其基于变化速度差执行用于施加制动转矩的振动抑制控制。

    Reflective liquid crystal display device and reflective liquid crystal display device incorporating touch panel arranged therefrom
    8.
    发明授权
    Reflective liquid crystal display device and reflective liquid crystal display device incorporating touch panel arranged therefrom 有权
    反射型液晶显示装置和配置有触摸面板的反射型液晶显示装置

    公开(公告)号：US07023510B2

    公开(公告)日：2006-04-04

    申请号：US10967216

    申请日：2004-10-19

    申请人： Masayuki Okamoto ,  Seiichi Mitsui ,  Takashi Satoh

    发明人： Masayuki Okamoto ,  Seiichi Mitsui ,  Takashi Satoh

    IPC分类号： G02F1/1335

    CPC分类号： G02F1/13363 ,  G02F1/133528 ,  G02F1/133553 ,  G02F1/133602 ,  G02F1/133634 ,  G02F1/1396 ,  G02F2001/133531 ,  G02F2001/1398 ,  G02F2202/40 ,  G02F2413/03 ,  G02F2413/07 ,  G02F2413/08 ,  G02F2413/10

    摘要： A reflective color liquid crystal display device with a liquid crystal layer sandwiched between a first substrate having a light reflectibility and a second substrate having a light transmissibility. The liquid crystal layer being composed of twist-aligned nematic liquid crystal having a positive dielectric anisotropy. A circularly polarizing unit, including a single linear polarizer plate, selectively passes either right handed or left handed circularly polarized light out of natural light. The circularly polarizing unit is disposed so that a major surface of the circularly polarizing unit is on a liquid crystal layer side, the circularly polarized light exiting the circularly polarizing unit through the major surface when natural light enters the circularly polarizing unit. Various parameters of the liquid crystal layer are optimized for a liquid crystal layer having a twist angle in the range of 0° to 100°.

    摘要翻译： 一种反射彩色液晶显示装置，其具有夹在具有光反射性的第一基板和具有透光性的第二基板之间的液晶层。 液晶层由具有正介电各向异性的扭曲向列型液晶构成。 包括单个线性偏振片的圆偏振单元选择性地从自然光中通过右旋或左旋圆偏振光。 圆偏振单元被设置为使得圆偏振单元的主表面在液晶层侧，当自然光进入圆偏振单元时，通过主表面离开圆偏振单元的圆偏振光。 针对扭转角在0°至100°范围内的液晶层，优化了液晶层的各种参数。