公开(公告)号：US08629395B2

公开(公告)日：2014-01-14

申请号：US13521273

申请日：2011-01-12

申请人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

发明人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

IPC分类号： H01J37/28 ,  H01J37/244 ,  G01N23/22

CPC分类号： H01J49/067 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/28

摘要： In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each of the energy bands using the signals, the charged particle beam apparatus has a charged particle source (12-1); an aperture (16) that limits the diameter of the charged particle beam (4); optics (14, 17, 19) for the charged particle beam; a specimen holder (21); a charged particle detector (40) that detects secondary charged particles and reflected charged particles from a specimen; and signal calculation unit that processes the output signal from the charged particle detector. The charged particle detector (40) is provided with a first small detector (51) having a first detection sensitivity and a second small detector (52) having a second detection sensitivity, and makes the detection solid angle viewed from a position on the specimen, to which the charged particle beam (4) is to be radiated, to be the same for the first small detector (51) and the second small detector (52).

摘要翻译： 为了提供一种带电粒子束装置，其能够将鉴别中的带电粒子束信号检测为多个能带，并且使用该信号获得每个能带的高分辨率图像，带电粒子束装置具有带电粒子 来源（12-1）; 限制带电粒子束（4）的直径的孔（16）; 用于带电粒子束的光学器件（14,17,19） 样品架（21）; 检测来自试样的二次带电粒子和反射带电粒子的带电粒子检测器（40） 以及处理来自带电粒子检测器的输出信号的信号计算单元。 带电粒子检测器（40）具有第一检测灵敏度的第一小检测器（51）和具有第二检测灵敏度的第二小检测器（52），并从检体上的位置观察检测立体角， 对于第一小型检测器（51）和第二小型检测器（52），带电粒子束（4）将被照射到其上。

公开(公告)号：US20120298864A1

公开(公告)日：2012-11-29

申请号：US13521273

申请日：2011-01-12

申请人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

发明人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

IPC分类号： H01J37/26

CPC分类号： H01J49/067 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/28

摘要： In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each of the energy bands using the signals, the charged particle beam apparatus has a charged particle source (12-1); an aperture (16) that limits the diameter of the charged particle beam (4); optics (14, 17, 19) for the charged particle beam; a specimen holder (21); a charged particle detector (40) that detects secondary charged particles and reflected charged particles from a specimen; and signal calculation unit that processes the output signal from the charged particle detector. The charged particle detector (40) is provided with a first small detector (51) having a first detection sensitivity and a second small detector (52) having a second detection sensitivity, and makes the detection solid angle viewed from a position on the specimen, to which the charged particle beam (4) is to be radiated, to be the same for the first small detector (51) and the second small detector (52).

摘要翻译： 为了提供一种带电粒子束装置，其能够将鉴别中的带电粒子束信号检测为多个能带，并且使用该信号获得每个能带的高分辨率图像，带电粒子束装置具有带电粒子 来源（12-1）; 限制带电粒子束（4）的直径的孔（16）; 用于带电粒子束的光学器件（14,17,19） 样品架（21）; 检测来自试样的二次带电粒子和反射带电粒子的带电粒子检测器（40） 以及处理来自带电粒子检测器的输出信号的信号计算单元。 带电粒子检测器（40）具有第一检测灵敏度的第一小检测器（51）和具有第二检测灵敏度的第二小检测器（52），并从检体上的位置观察检测立体角， 对于第一小型检测器（51）和第二小型检测器（52），带电粒子束（4）将被照射到其上。

公开(公告)号：US09202667B2

公开(公告)日：2015-12-01

申请号：US13521092

申请日：2010-08-11

申请人： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

发明人： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

IPC分类号： H01J37/28 ,  H01J37/244

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2448

摘要： Disclosed is a charged particle radiation device having a charged particle source which generates a charged particle as a probe, a charged particle optical system, a sample stage, a vacuum discharge system, an aperture which restricts a probe, a conductive film, and a charged particle detector, wherein the conductive film is provided at a position excluding the optical axis of the optical system between the sample stage and the aperture; and the distance between the sensing surface of the surface of the charged particle detector and the sample stage is larger than the distance between the sample stage and the conductive film, so that the surface of the conductive film and the sensing surface of the detector are inclined.

摘要翻译： 公开了一种具有带电粒子源的带电粒子辐射装置，其产生作为探针的带电粒子，带电粒子光学系统，样品台，真空放电系统，限制探针的孔，导电膜和带电粒子 粒子检测器，其中所述导电膜设置在除了所述样品台和所述孔之间的所述光学系统的光轴之外的位置处; 并且带电粒子检测器的表面的感测表面与样品台之间的距离大于样品台和导电膜之间的距离，使得导电膜的表面和检测器的感测表面倾斜 。

公开(公告)号：US20130043388A1

公开(公告)日：2013-02-21

申请号：US13521092

申请日：2010-08-11

申请人： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

发明人： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

IPC分类号： H01J37/26

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2448

摘要： Disclosed is a charged particle radiation device having a charged particle source which generates a charged particle as a probe, a charged particle optical system, a sample stage, a vacuum discharge system, an aperture which restricts a probe, a conductive film, and a charged particle detector, wherein the conductive film is provided at a position excluding the optical axis of the optical system between the sample stage and the aperture; and the distance between the sensing surface of the surface of the charged particle detector and the sample stage is larger than the distance between the sample stage and the conductive film, so that the surface of the conductive film and the sensing surface of the detector are inclined.

摘要翻译： 公开了一种具有带电粒子源的带电粒子辐射装置，其产生作为探针的带电粒子，带电粒子光学系统，样品台，真空放电系统，限制探针的孔，导电膜和带电粒子 粒子检测器，其中所述导电膜设置在除了所述样品台和所述孔之间的所述光学系统的光轴之外的位置处; 并且带电粒子检测器的表面的感测表面与样品台之间的距离大于样品台和导电膜之间的距离，使得导电膜的表面和检测器的感测表面倾斜 。

公开(公告)号：US07705302B2

公开(公告)日：2010-04-27

申请号：US12021810

申请日：2008-01-29

申请人： Yasuko Aoki ,  Tetsuya Sawahata ,  Mine Araki ,  Atsushi Muto ,  Shuichi Takeuchi

发明人： Yasuko Aoki ,  Tetsuya Sawahata ,  Mine Araki ,  Atsushi Muto ,  Shuichi Takeuchi

IPC分类号： H01J37/28 ,  H01J37/26 ,  G01N23/00

CPC分类号： G01N23/203 ,  G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24495

摘要： An object of the present invention is to provide a scanning electron microscope including decelerating-electric-field forming means for decreasing the energy of a beam of electrons reaching a sample, and being capable of selectively detecting BSEs with high efficiency. To this end, the scanning electron microscope including the decelerating-electric-field forming means has a detector for detecting electrons. The detector includes a part for receiving the electrons at a position which is positioned outside trajectories of SEs accelerated by the decelerating-electric-field forming means, and which is further away from the optical axis of the beam of electrons than the trajectories of the SEs.

摘要翻译： 本发明的目的是提供一种扫描电子显微镜，其包括用于降低到达样品的电子束的能量的减速电场形成装置，并且能够以高效率选择性地检测BSE。 为此，包括减速电场形成装置的扫描电子显微镜具有用于检测电子的检测器。 检测器包括用于在位于由减速电场形成装置加速的SE的轨迹外的位置处接收电子的部分，并且远离SE的轨迹远离电子束的光轴 。

公开(公告)号：US20080191135A1

公开(公告)日：2008-08-14

申请号：US12021810

申请日：2008-01-29

申请人： Yasuko Aoki ,  Tetsuya Sawahata ,  Mine Araki ,  Atsushi Muto ,  Shuichi Takeuchi

发明人： Yasuko Aoki ,  Tetsuya Sawahata ,  Mine Araki ,  Atsushi Muto ,  Shuichi Takeuchi

IPC分类号： G01N23/00

CPC分类号： G01N23/203 ,  G01N23/225 ,  H01J37/244 ,  H01J37/28 ,  H01J2237/24465 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/24495

摘要： An object of the present invention is to provide a scanning electron microscope including decelerating-electric-field forming means for decreasing the energy of a beam of electrons reaching a sample, and being capable of selectively detecting BSEs with high efficiency. To this end, the scanning electron microscope including the decelerating-electric-field forming means has a detector for detecting electrons. The detector includes a part for receiving the electrons at a position which is positioned outside trajectories of SEs accelerated by the decelerating-electric-field forming means, and which is further away from the optical axis of the beam of electrons than the trajectories of the SEs.

摘要翻译： 本发明的目的是提供一种扫描电子显微镜，其包括用于降低到达样品的电子束的能量的减速电场形成装置，并且能够以高效率选择性地检测BSE。 为此，包括减速电场形成装置的扫描电子显微镜具有用于检测电子的检测器。 检测器包括用于在位于由减速电场形成装置加速的SE的轨迹外的位置处接收电子的部分，并且远离SE的轨迹远离电子束的光轴 。

公开(公告)号：US06740877B2

公开(公告)日：2004-05-25

申请号：US10406455

申请日：2003-04-04

申请人： Tetsuya Sawahata ,  Mitsugu Sato

发明人： Tetsuya Sawahata ,  Mitsugu Sato

IPC分类号： G01N2300

CPC分类号： H01J37/256 ,  G01N23/2252 ,  H01J37/141 ,  H01J2237/2561

摘要： According to the present invention, there are newly provided in a scanning electron microscope with an in-lens system a first low-magnification mode that sets the current of the object lens to be zero or in a weak excitation state, and a second low-magnification mode that sets the current of the object lens to be a value that changes in proportion to the square root of the accelerating voltage. The scanning electron microscope has a configuration wherein normal sample image (secondary electron image) observation is performed in the first low-magnification mode, and it switches the first low-magnification mode to the second low-magnification mode when X-ray analysis is performed. As a result, both sample image (secondary electron image) observation and X-ray analysis can be performed in low-magnification mode.

公开(公告)号：US06555816B1

公开(公告)日：2003-04-29

申请号：US09656836

申请日：2000-09-07

申请人： Tetsuya Sawahata ,  Mitsugu Sato

发明人： Tetsuya Sawahata ,  Mitsugu Sato

IPC分类号： G01N2300

CPC分类号： H01J37/256 ,  G01N23/2252 ,  H01J37/141 ,  H01J2237/2561

摘要： According to the present invention, there are newly provided in a scanning electron microscope with an in-lens system a first low-magnification mode that sets the current of the object lens to be zero or in a weak excitation state, and a second low-magnification mode that sets the current of the object lens to be a value that changes in proportion to the square root of the accelerating voltage. The scanning electron microscope has a configuration wherein normal sample image (secondary electron image) observation is performed in the first low-magnification mode, and it switches the first low-magnification mode to the second low-magnification mode when X-ray analysis is performed. As a result, both sample image (secondary electron image) observation and X-ray analysis can be performed in low-magnification mode.

公开(公告)号：US06501077B1

公开(公告)日：2002-12-31

申请号：US09462769

申请日：2000-01-13

申请人： Tetsuya Sawahata ,  Mitsugu Sato ,  Yoichi Ose

发明人： Tetsuya Sawahata ,  Mitsugu Sato ,  Yoichi Ose

IPC分类号： H01J37141

CPC分类号： H01J37/244 ,  H01J37/28

摘要： A scanning electron microscope which obtains a two-dimensional scan image of a sample includes an electron source and a scan deflector for scanning a primary electron ray generated from said electron source onto the sample. An objective lens forms a focusing magnetic field onto the sample, such as to surround the sample, the focusing magnetic field focusing the primary electron ray. A secondary signal detector for deflecting and detecting a secondary signal generated from the sample by irradiation of the primary electron ray obtains secondary electrons from a secondary electron conversion electrode for generating secondary electrons by collision of electrons, which is disposed between the objective lens and the detector at a location that is closer to the electron source than the objective lens is and at a location that is closer to the sample than the secondary signal detector is.

摘要翻译： 获得样品的二维扫描图像的扫描电子显微镜包括用于将从所述电子源产生的一次电子束扫描到样品上的电子源和扫描偏转器。 物镜在样品上形成聚焦磁场，例如围绕样品，聚焦磁场聚焦初级电子。 用于偏转和检测从样品通过一次电子射线照射产生的二次信号的二次信号检测器从二次电子转换电极获得二次电子，用于通过电子碰撞产生二次电子，该电子被设置在物镜和检测器之间 在比物镜更靠近电子源的位置处，并且位于比次级信号检测器更靠近样品的位置处。

公开(公告)号：US06855931B2

公开(公告)日：2005-02-15

申请号：US10815817

申请日：2004-04-02

申请人： Tetsuya Sawahata ,  Mitsugu Sato

发明人： Tetsuya Sawahata ,  Mitsugu Sato

IPC分类号： H01J37/22 ,  G01N23/225 ,  G01Q30/02 ,  G01Q30/20 ,  G21K7/00 ,  H01J37/141 ,  H01J37/21 ,  H01J37/256 ,  G01N23/00 ,  H01J37/28

CPC分类号： H01J37/256 ,  G01N23/2252 ,  H01J37/141 ,  H01J2237/2561

摘要： According to the present invention, there are newly provided in a scanning electron microscope with an in-lens system a first low-magnification mode that sets the current of the object lens to be zero or in a weak excitation state, and a second low-magnification mode that sets the current of the object lens to be a value that changes in proportion to the square root of the accelerating voltage. The scanning electron microscope has a configuration wherein normal sample image (secondary electron image) observation is performed in the first low-magnification mode, and it switches the first low-magnification mode to the second low-magnification mode when X-ray analysis is performed. As a result, both sample image (secondary electron image) observation and X-ray analysis can be performed in low-magnification mode.

摘要翻译： 根据本发明，在具有透镜系统的扫描电子显微镜中，新提供将物镜的电流设定为零或弱激励状态的第一低倍率模式， 将物镜的电流设定为与加速电压的平方根成比例地变化的值的倍率模式。 扫描电子显微镜具有在第一低倍率模式下进行正常的样本图像（二次电子图像）观察的结构，并且当执行X射线分析时，将第一低倍率模式切换到第二低倍率模式 。 结果，可以以低倍率模式进行样本图像（二次电子图像）观察和X射线分析。