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    Charged particle beam apparatus
    1.
    发明授权
    Charged particle beam apparatus 失效
    带电粒子束装置

    公开(公告)号：US08629395B2

    公开(公告)日：2014-01-14

    申请号：US13521273

    申请日：2011-01-12

    申请人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

    发明人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

    IPC分类号： H01J37/28 ,  H01J37/244 ,  G01N23/22

    CPC分类号： H01J49/067 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/28

    摘要： In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each of the energy bands using the signals, the charged particle beam apparatus has a charged particle source (12-1); an aperture (16) that limits the diameter of the charged particle beam (4); optics (14, 17, 19) for the charged particle beam; a specimen holder (21); a charged particle detector (40) that detects secondary charged particles and reflected charged particles from a specimen; and signal calculation unit that processes the output signal from the charged particle detector. The charged particle detector (40) is provided with a first small detector (51) having a first detection sensitivity and a second small detector (52) having a second detection sensitivity, and makes the detection solid angle viewed from a position on the specimen, to which the charged particle beam (4) is to be radiated, to be the same for the first small detector (51) and the second small detector (52).

    摘要翻译： 为了提供一种带电粒子束装置，其能够将鉴别中的带电粒子束信号检测为多个能带，并且使用该信号获得每个能带的高分辨率图像，带电粒子束装置具有带电粒子 来源（12-1）; 限制带电粒子束（4）的直径的孔（16）; 用于带电粒子束的光学器件（14,17,19） 样品架（21）; 检测来自试样的二次带电粒子和反射带电粒子的带电粒子检测器（40） 以及处理来自带电粒子检测器的输出信号的信号计算单元。 带电粒子检测器（40）具有第一检测灵敏度的第一小检测器（51）和具有第二检测灵敏度的第二小检测器（52），并从检体上的位置观察检测立体角， 对于第一小型检测器（51）和第二小型检测器（52），带电粒子束（4）将被照射到其上。

    Charged Particle Beam Apparatus
    2.
    发明申请
    Charged Particle Beam Apparatus 失效
    带电粒子束装置

    公开(公告)号：US20120298864A1

    公开(公告)日：2012-11-29

    申请号：US13521273

    申请日：2011-01-12

    申请人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

    发明人： Hideo Morishita ,  Michio Hatano ,  Takashi Ohshima ,  Mitsugu Sato ,  Tetsuya Sawahata ,  Sukehiro Ito ,  Yasuko Aoki

    IPC分类号： H01J37/26

    CPC分类号： H01J49/067 ,  H01J37/244 ,  H01J2237/2441 ,  H01J2237/24465 ,  H01J2237/2448 ,  H01J2237/28

    摘要： In order to provide a charged particle beam apparatus that can detect charged particle beam signals in discrimination into a plurality of energy bands, and obtain high-resolution images for each of the energy bands using the signals, the charged particle beam apparatus has a charged particle source (12-1); an aperture (16) that limits the diameter of the charged particle beam (4); optics (14, 17, 19) for the charged particle beam; a specimen holder (21); a charged particle detector (40) that detects secondary charged particles and reflected charged particles from a specimen; and signal calculation unit that processes the output signal from the charged particle detector. The charged particle detector (40) is provided with a first small detector (51) having a first detection sensitivity and a second small detector (52) having a second detection sensitivity, and makes the detection solid angle viewed from a position on the specimen, to which the charged particle beam (4) is to be radiated, to be the same for the first small detector (51) and the second small detector (52).

    摘要翻译： 为了提供一种带电粒子束装置，其能够将鉴别中的带电粒子束信号检测为多个能带，并且使用该信号获得每个能带的高分辨率图像，带电粒子束装置具有带电粒子 来源（12-1）; 限制带电粒子束（4）的直径的孔（16）; 用于带电粒子束的光学器件（14,17,19） 样品架（21）; 检测来自试样的二次带电粒子和反射带电粒子的带电粒子检测器（40） 以及处理来自带电粒子检测器的输出信号的信号计算单元。 带电粒子检测器（40）具有第一检测灵敏度的第一小检测器（51）和具有第二检测灵敏度的第二小检测器（52），并从检体上的位置观察检测立体角， 对于第一小型检测器（51）和第二小型检测器（52），带电粒子束（4）将被照射到其上。

    Charged particle radiation device with bandpass detection
    3.
    发明授权
    Charged particle radiation device with bandpass detection 有权
    带通滤波器的带电粒子辐射装置

    公开(公告)号：US09202667B2

    公开(公告)日：2015-12-01

    申请号：US13521092

    申请日：2010-08-11

    申请人： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

    发明人： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

    IPC分类号： H01J37/28 ,  H01J37/244

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2448

    摘要： Disclosed is a charged particle radiation device having a charged particle source which generates a charged particle as a probe, a charged particle optical system, a sample stage, a vacuum discharge system, an aperture which restricts a probe, a conductive film, and a charged particle detector, wherein the conductive film is provided at a position excluding the optical axis of the optical system between the sample stage and the aperture; and the distance between the sensing surface of the surface of the charged particle detector and the sample stage is larger than the distance between the sample stage and the conductive film, so that the surface of the conductive film and the sensing surface of the detector are inclined.

    摘要翻译： 公开了一种具有带电粒子源的带电粒子辐射装置，其产生作为探针的带电粒子，带电粒子光学系统，样品台，真空放电系统，限制探针的孔，导电膜和带电粒子 粒子检测器，其中所述导电膜设置在除了所述样品台和所述孔之间的所述光学系统的光轴之外的位置处; 并且带电粒子检测器的表面的感测表面与样品台之间的距离大于样品台和导电膜之间的距离，使得导电膜的表面和检测器的感测表面倾斜 。

    CHARGED PARTICLE RADIATION DEVICE
    4.
    发明申请
    CHARGED PARTICLE RADIATION DEVICE 有权
    充电颗粒辐射装置

    公开(公告)号：US20130043388A1

    公开(公告)日：2013-02-21

    申请号：US13521092

    申请日：2010-08-11

    申请人： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

    发明人： Michio Hatano ,  Tetsuya Sawahata ,  Yasuko Watanabe ,  Mitsugu Sato ,  Sukehiro Ito ,  Takashi Ohshima ,  Hiroyuki Honda

    IPC分类号： H01J37/26

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/2448

    摘要： Disclosed is a charged particle radiation device having a charged particle source which generates a charged particle as a probe, a charged particle optical system, a sample stage, a vacuum discharge system, an aperture which restricts a probe, a conductive film, and a charged particle detector, wherein the conductive film is provided at a position excluding the optical axis of the optical system between the sample stage and the aperture; and the distance between the sensing surface of the surface of the charged particle detector and the sample stage is larger than the distance between the sample stage and the conductive film, so that the surface of the conductive film and the sensing surface of the detector are inclined.

    摘要翻译： 公开了一种具有带电粒子源的带电粒子辐射装置，其产生作为探针的带电粒子，带电粒子光学系统，样品台，真空放电系统，限制探针的孔，导电膜和带电粒子 粒子检测器，其中所述导电膜设置在除了所述样品台和所述孔之间的所述光学系统的光轴之外的位置处; 并且带电粒子检测器的表面的感测表面与样品台之间的距离大于样品台和导电膜之间的距离，使得导电膜的表面和检测器的感测表面倾斜 。

    Scanning electron microscope
    5.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US09029766B2

    公开(公告)日：2015-05-12

    申请号：US14241121

    申请日：2012-05-28

    申请人： Hideo Morishita ,  Takashi Ohshima ,  Michio Hatano ,  Sukehiro Ito

    发明人： Hideo Morishita ,  Takashi Ohshima ,  Michio Hatano ,  Sukehiro Ito

    IPC分类号： H01J37/244 ,  H01J37/28 ,  H01J37/04

    CPC分类号： H01J37/28 ,  H01J37/04 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2444 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2804 ,  H01J2237/2806

    摘要： To provide a low acceleration scanning electron microscope that can discriminate and detect reflected electrons and secondary electrons even with a low probe current, this scanning electron microscope is provided with an electron gun (29), an aperture (26), a sample table (3), an electron optical system (4-1) for making an electron beam (31) converge on a sample (2), a deflection means (10), a secondary electron detector (8), a reflected electron detector (9), and a cylindrical electron transport means (5) in a position between the electron gun (29) and sample (2). The reflected electron detector (9) is provided within the electron transport means (5) and on a side further away from the electron gun (29) than the secondary electron detector (8) and the deflection means (10). The reception surface (9-1) of the reflected electron detector (9) is electrically wired so as to have the same potential as the electron transport means (5).

    摘要翻译： 为了提供即使在低探针电流下能够区分和检测反射电子和二次电子的低加速度扫描电子显微镜，该扫描电子显微镜设置有电子枪（29），孔（26），样品台（3 ），用于使电子束（31）会聚在样品（2）上的电子光学系统（4-1），偏转装置（10），二次电子检测器（8），反射电子检测器（9） 以及在电子枪（29）和样品（2）之间的位置的圆柱形电子传输装置（5）。 反射电子检测器（9）设置在电子传输装置（5）内并且比二次电子检测器（8）和偏转装置（10）更远离电子枪（29）的一侧。 反射电子检测器（9）的接收表面（9-1）被电连接以具有与电子传输装置（5）相同的电位。

    SCANNING ELECTRON MICROSCOPE
    6.
    发明申请
    SCANNING ELECTRON MICROSCOPE 有权
    扫描电子显微镜

    公开(公告)号：US20140361167A1

    公开(公告)日：2014-12-11

    申请号：US14241121

    申请日：2012-05-28

    申请人： Hideo Morishita ,  Takashi Ohshima ,  Micho Hatano ,  Sukehiro Ito

    发明人： Hideo Morishita ,  Takashi Ohshima ,  Micho Hatano ,  Sukehiro Ito

    IPC分类号： H01J37/28 ,  H01J37/04 ,  H01J37/244

    CPC分类号： H01J37/28 ,  H01J37/04 ,  H01J37/244 ,  H01J2237/2443 ,  H01J2237/2444 ,  H01J2237/24475 ,  H01J2237/2448 ,  H01J2237/2804 ,  H01J2237/2806

    摘要： To provide a low acceleration scanning electron microscope that can discriminate and detect reflected electrons and secondary electrons even with a low probe current, this scanning electron microscope is provided with an electron gun (29), an aperture (26), a sample table (3), an electron optical system (4-1) for making an electron beam (31) converge on a sample (2), a deflection means (10), a secondary electron detector (8), a reflected electron detector (9), and a cylindrical electron transport means (5) in a position between the electron gun (29) and sample (2). The reflected electron detector (9) is provided within the electron transport means (5) and on a side further away from the electron gun (29) than the secondary electron detector (8) and the deflection means (10). The reception surface (9-1) of the reflected electron detector (9) is electrically wired so as to have the same potential as the electron transport means (5).

    摘要翻译： 为了提供即使在低探针电流下能够区分和检测反射电子和二次电子的低加速度扫描电子显微镜，该扫描电子显微镜设置有电子枪（29），孔（26），样品台（3 ），用于使电子束（31）会聚在样品（2）上的电子光学系统（4-1），偏转装置（10），二次电子检测器（8），反射电子检测器（9） 以及在电子枪（29）和样品（2）之间的位置的圆柱形电子传输装置（5）。 反射电子检测器（9）设置在电子传输装置（5）内并且比二次电子检测器（8）和偏转装置（10）更远离电子枪（29）的一侧。 反射电子检测器（9）的接收表面（9-1）被电连接以具有与电子传输装置（5）相同的电位。

    SCANNING ELECTRON MICROSCOPE
    8.
    发明申请
    SCANNING ELECTRON MICROSCOPE 有权
    扫描电子显微镜

    公开(公告)号：US20090230304A1

    公开(公告)日：2009-09-17

    申请号：US12396593

    申请日：2009-03-03

    申请人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

    发明人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

    IPC分类号： G01N23/00

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24445 ,  H01J2237/24465 ,  H01J2237/2605

    摘要： In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.

    摘要翻译： 在使用在低真空样品室内引起的气体倍增并使用检测正位移电流的方法的VP-SEM中，用于高速响应的VP-SEM的二次电子检测器，其可以获取TV扫描 提供了节省空间的低成本的速率图像。 通过蚀刻方法在诸如聚酰亚胺膜等的柔性薄膜型基板上形成电子供给电极和检测电极来形成二次电子检测器。 由此，可以节省空间，同时由于批量生产而实现低成本。 此外，检测相对于二次电子检测器的表面水平移动的离子，并且未检测到返回到样品架的垂直方向的离子移动，使得可以实现高速响应。

    Scanning electron microscope
    10.
    发明授权
    Scanning electron microscope 有权
    扫描电子显微镜

    公开(公告)号：US08097848B2

    公开(公告)日：2012-01-17

    申请号：US12396593

    申请日：2009-03-03

    申请人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

    发明人： Michio Hatano ,  Sukehiro Ito ,  Nagahide Ishida ,  Shinichi Tomita ,  Wataru Kotake

    IPC分类号： H01J37/28

    CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/24445 ,  H01J2237/24465 ,  H01J2237/2605

    摘要： In a VP-SEM that uses gas multiplication induced within a low-vacuum sample chamber and uses a method of detecting a positive displacement current, a secondary electron detector for the VP-SEM that responds at high speed, which can acquire a TV-Scan rate image at a low cost while saving a space is provided. A secondary electron detector is formed by forming the electron supplying electrode and the detection electrode on the flexible thin film type substrate such as a polyimide film, etc., by an etching method. Thereby, the space can be saved while realizing low cost due to mass production. Further, the ion horizontally moving with respect to the surface of the secondary electron detector is detected and the ion moving in a vertical direction returned to the sample holder is not detected, making it possible to realize a high-speed response.

    摘要翻译： 在使用在低真空样品室内引起的气体倍增并使用检测正位移电流的方法的VP-SEM中，用于高速响应的VP-SEM的二次电子检测器，其可以获取TV扫描 提供了节省空间的低成本的速率图像。 通过蚀刻方法在诸如聚酰亚胺膜等的柔性薄膜型基板上形成电子供给电极和检测电极来形成二次电子检测器。 由此，可以节省空间，同时由于批量生产而实现低成本。 此外，检测相对于二次电子检测器的表面水平移动的离子，并且未检测到返回到样品架的垂直方向的离子移动，使得可以实现高速响应。