摘要:
Provided are a titanium target material which can easily form a film in a narrow and deep contact hole and reduce the generation of PARTICLES. The present invention relates to a titanium target for sputtering, wherein X-ray diffraction intensity ratios on a sputtering plane are (0002)/(1011).gtoreq.0.8, (0002)/(1010).gtoreq.6; a recrystallized structure which has an average crystal grain size of 20 .mu.m or less and in which the proportion of crystal grains in which an acicular structure is present is 20% or less in terms of an area rate is formed.
摘要翻译:提供一种钛靶材料,其可以容易地在窄而深的接触孔中形成膜并减少PARTICLES的产生。 本发明涉及一种溅射用钛靶,溅射面上的X射线衍射强度比为(0002)/(10 + E,ovs 1 + EE 1)> = 0.8,(0002)/(10+ E,ovs 1 + EE 0)> / = 6; 形成平均结晶粒径为20μm以下,其中存在针状结构的晶粒的比例以面积率计为20%以下的再结晶结构。
摘要:
A chromium target is disclosed for use in the formation of chromium films or sheets of reduced thickness by means of sputtering. The target has a recrystallized structure represented by the equation, A/B.ltoreq.0.6, where A is the diffraction intensity of the (110) planes as determined by X-ray diffraction of a sputtered surface, and B is the diffraction intensity as determined from the sum of the (110), (200) and (211) planes. The target preferably has a deflective strength of above 500 MPa and an average crystal grain of below 50 .mu.m. The chromium target is produced by subjecting a starting chromium material to at least one stage of plastic working at a temperature of not higher than 1,000.degree. C., and subsequently by heat-treating the resulting chromium material for recrystallization at a temperature of higher than the recrystallization temperature of the chromium material but not higher than 1,200.degree. C.
摘要翻译:公开了用于通过溅射形成厚度减小的铬膜或铬片的铬靶。 目标具有由等式A / B = 0.6表示的再结晶结构,其中A是通过溅射表面的X射线衍射测定的(110)面的衍射强度,B是衍射强度 由(110),(200)和(211)平面的总和确定。 目标优选具有高于500MPa的偏转强度和低于50μm的平均晶粒。 铬靶是通过使起始铬材料在不高于1000℃的温度下进行塑性加工的至少一个阶段,然后在所述铬靶材的高于 铬材料的重结晶温度不高于1200℃
摘要:
A sputtering target preferably having an average crystal-grain diameter of 300 .mu.m or less and a maximum magnetic permeability of 100 or less is formed of an alloy consisting essentially of, by atom, 5- 30% Ni, 5- 14% Cr, not more than 6% V, and balance of Co and unavoidable impurities. It is preferable for the target to keep a working-strain remaining therein to reduce the maximum magnetic permeability. A method of producing a sputtering target for magnetic recording and reproducing, in which warm working or cold working is applied to the alloy.
摘要:
A loop scavenge two-cycle internal combustion engine that includes a partial wall partition disposed between a scavenging path and a cylinder bore, with a cooling port formed in the partial wall partition for enabling fresh gas in the scavenging path to contact directly with a peripheral wall of a piston in the cylinder. The fresh gas in the scavenging path directly contacts and efficiently cools the peripheral surface of the piston to prevent heat rise and distortion within the engine. The partial wall partition and cooling port maximize both cooling efficiently and cylinder strength and durability.
摘要:
To provide a liquid feed pump, a filter housing, a valve and a spray nozzle and a spray apparatus incorporating these components that can suppress contamination of the liquid being fed. A liquid feed pump 10 includes: a cylinder 12 having a substantially cylindrical shape; and a piston 14 fitted into the cylinder. The liquid feed pressure of the liquid feed pump 10 is equal to or higher than 1 MPa and equal to or lower than 50 MPa, and substantially the whole surface of a liquid contacting part of the liquid feed pump is made of a resin material or a ceramic material.
摘要:
A gelled composition was provided by adding a gelling component to a carrier for adsorption. Not only was the taste of the carrier for adsorption significantly reduced in this composition, but the dosage was also decreased so that the composition could be easily taken by a patient.
摘要:
A rotary table device includes a hollow motor drive source, a table rotated thereby, and a rotary bearing supporting the table. The rotary bearing is provided an outer race having an inner surface to which a rolling surface is formed, an inner race having an outer peripheral surface to which a rolling surface opposing to the rolling surface of the outer race is formed, and a plurality of rolling members disposed in a rolling passage formed by the rolling surface of the outer race and the rolling surface of the inner race, and a cooling medium passage (α, β) is formed so as to be adjacent to either one of the inner race and outer race constituting a rotational driving side. According to the structure mentioned above, a rotary bearing and a rotary table device capable of achieving suitable cooling effect can be provided.
摘要:
A rotary table device includes a cooling structure and a rotary bearing provided with a cooling structure. A rotary table device provided with a cooling structure includes a hollow motor as a drive source, a table rotated by the hollow motor, and a rotary bearing supporting rotational motion of the table, in which the rotary bearing includes an outer ring having an inner peripheral surface to which a rolling surface is formed, an inner ring having an outer peripheral surface to which a rolling surface facing the rolling surface of the outer ring is formed, and a number of rolling members in a rolling passage formed by the rolling surface of the outer ring and the rolling surface of the inner ring, and a heat sink is formed to either one of the inner and outer rings.
摘要:
A rotary table device includes a cooling structure and a rotary bearing provided with a cooling structure. A rotary table device provided with a cooling structure includes a hollow motor as a drive source, a table rotated by the hollow motor, and a rotary bearing supporting rotational motion of the table, in which the rotary bearing includes an outer ring having an inner peripheral surface to which a rolling surface is formed, an inner ring having an outer peripheral surface to which a rolling surface facing the rolling surface of the outer ring is formed, and a number of rolling members in a rolling passage formed by the rolling surface of the outer ring and the rolling surface of the inner ring, and a heat sink is formed to either one of the inner and outer rings.
摘要:
A rotary table device includes a hollow motor drive source, a table rotated thereby, and a rotary bearing supporting the table. The rotary bearing is provided an outer race having an inner surface to which a rolling surface is formed, an inner race having an outer peripheral surface to which a rolling surface opposing to the rolling surface of the outer race is formed, and a plurality of rolling members disposed in a rolling passage formed by the rolling surface of the outer race and the rolling surface of the inner race, and a cooling medium passage (α, β) is formed so as to be adjacent to either one of the inner race and outer race constituting a rotational driving side. According to the structure mentioned above, a rotary bearing and a rotary table device capable of achieving suitable cooling effect can be provided.