Titanium target for sputtering and production method for same
    1.
    发明授权
    Titanium target for sputtering and production method for same 失效
    用于溅射的钛靶及其制造方法

    公开(公告)号:US5798005A

    公开(公告)日:1998-08-25

    申请号:US623861

    申请日:1996-03-29

    CPC分类号: H01J37/3426 C23C14/3414

    摘要: Provided are a titanium target material which can easily form a film in a narrow and deep contact hole and reduce the generation of PARTICLES. The present invention relates to a titanium target for sputtering, wherein X-ray diffraction intensity ratios on a sputtering plane are (0002)/(1011).gtoreq.0.8, (0002)/(1010).gtoreq.6; a recrystallized structure which has an average crystal grain size of 20 .mu.m or less and in which the proportion of crystal grains in which an acicular structure is present is 20% or less in terms of an area rate is formed.

    摘要翻译: 提供一种钛靶材料,其可以容易地在窄而深的接触孔中形成膜并减少PARTICLES的产生。 本发明涉及一种溅射用钛靶,溅射面上的X射线衍射强度比为(0002)/(10 + E,ovs 1 + EE 1)> = 0.8,(0002)/(10+ E,ovs 1 + EE 0)> / = 6; 形成平均结晶粒径为20μm以下,其中存在针状结构的晶粒的比例以面积率计为20%以下的再结晶结构。

    Chromium target and process for producing the same
    2.
    发明授权
    Chromium target and process for producing the same 失效
    铬靶及其制造方法

    公开(公告)号:US5718778A

    公开(公告)日:1998-02-17

    申请号:US623987

    申请日:1996-03-29

    CPC分类号: C23C14/3414

    摘要: A chromium target is disclosed for use in the formation of chromium films or sheets of reduced thickness by means of sputtering. The target has a recrystallized structure represented by the equation, A/B.ltoreq.0.6, where A is the diffraction intensity of the (110) planes as determined by X-ray diffraction of a sputtered surface, and B is the diffraction intensity as determined from the sum of the (110), (200) and (211) planes. The target preferably has a deflective strength of above 500 MPa and an average crystal grain of below 50 .mu.m. The chromium target is produced by subjecting a starting chromium material to at least one stage of plastic working at a temperature of not higher than 1,000.degree. C., and subsequently by heat-treating the resulting chromium material for recrystallization at a temperature of higher than the recrystallization temperature of the chromium material but not higher than 1,200.degree. C.

    摘要翻译: 公开了用于通过溅射形成厚度减小的铬膜或铬片的铬靶。 目标具有由等式A / B

    Sputtering target for magnetic recording medium and method of producing
the same
    3.
    发明授权
    Sputtering target for magnetic recording medium and method of producing the same 失效
    磁记录介质的溅射靶及其制造方法

    公开(公告)号:US5334267A

    公开(公告)日:1994-08-02

    申请号:US99425

    申请日:1993-07-30

    摘要: A sputtering target preferably having an average crystal-grain diameter of 300 .mu.m or less and a maximum magnetic permeability of 100 or less is formed of an alloy consisting essentially of, by atom, 5- 30% Ni, 5- 14% Cr, not more than 6% V, and balance of Co and unavoidable impurities. It is preferable for the target to keep a working-strain remaining therein to reduce the maximum magnetic permeability. A method of producing a sputtering target for magnetic recording and reproducing, in which warm working or cold working is applied to the alloy.

    摘要翻译: 优选平均晶粒直径为300μm以下,最大磁导率为100以下的溅射靶基本上由以下原料组成的合金:原子为5〜30%的Ni,5〜14%的Cr, 不超过6%V,余量为Co和不可避免的杂质。 靶材优选保持其中的工作应变以降低最大导磁率。 一种制造用于磁记录和再现的溅射靶的方法,其中对合金施加温加工或冷加工。

    Two-cycle internal combustion engine and cylinder
    4.
    发明授权
    Two-cycle internal combustion engine and cylinder 有权
    双循环内燃机和气缸

    公开(公告)号:US6142113A

    公开(公告)日:2000-11-07

    申请号:US350154

    申请日:1999-07-09

    IPC分类号: F02B25/16 F02B25/14

    CPC分类号: F02B25/14

    摘要: A loop scavenge two-cycle internal combustion engine that includes a partial wall partition disposed between a scavenging path and a cylinder bore, with a cooling port formed in the partial wall partition for enabling fresh gas in the scavenging path to contact directly with a peripheral wall of a piston in the cylinder. The fresh gas in the scavenging path directly contacts and efficiently cools the peripheral surface of the piston to prevent heat rise and distortion within the engine. The partial wall partition and cooling port maximize both cooling efficiently and cylinder strength and durability.

    摘要翻译: 一种循环清扫双循环内燃机,其包括设置在扫气路径和气缸孔之间的部分壁分隔件,其中形成在部分壁隔板中的冷却口用于使清扫路径中的新鲜气体能够直接与周壁接触 的活塞在气缸中。 清扫路径中的新鲜气体直接接触并有效地冷却活塞的周边表面,以防止发动机内的热量上升和变形。 局部壁分隔和冷却端口可以有效地最大限度地实现冷却和气缸强度和耐久性。

    Rotary bearing, rotary table device and table diameter determining method
    7.
    发明授权
    Rotary bearing, rotary table device and table diameter determining method 有权
    旋转轴承,旋转台装置和工作台直径确定方法

    公开(公告)号:US08316776B2

    公开(公告)日:2012-11-27

    申请号:US12593638

    申请日:2008-03-28

    IPC分类号: A47B85/00 F16C32/06

    摘要: A rotary table device includes a hollow motor drive source, a table rotated thereby, and a rotary bearing supporting the table. The rotary bearing is provided an outer race having an inner surface to which a rolling surface is formed, an inner race having an outer peripheral surface to which a rolling surface opposing to the rolling surface of the outer race is formed, and a plurality of rolling members disposed in a rolling passage formed by the rolling surface of the outer race and the rolling surface of the inner race, and a cooling medium passage (α, β) is formed so as to be adjacent to either one of the inner race and outer race constituting a rotational driving side. According to the structure mentioned above, a rotary bearing and a rotary table device capable of achieving suitable cooling effect can be provided.

    摘要翻译: 旋转台装置包括中空马达驱动源,由其旋转的工作台和支撑工作台的旋转轴承。 旋转轴承设置有具有形成有滚动面的内表面的外圈,具有与形成有外圈的滚动面相对的滚动面的外周面的内圈,以及多个滚动 设置在由外圈的滚动面和内圈的滚动面形成的滚动通道中的构件和冷却介质通路(α,bgr)形成为与内圈和内圈 外圈构成旋转驱动侧。 根据上述结构,可以提供能够实现合适的冷却效果的旋转轴承和旋转台装置。

    ROTARY TABLE DEVICE PROVIDED WITH COOLING STRUCTURE AND ROTARY BEARING PROVIDED WITH COOLING STRUCTURE
    8.
    发明申请
    ROTARY TABLE DEVICE PROVIDED WITH COOLING STRUCTURE AND ROTARY BEARING PROVIDED WITH COOLING STRUCTURE 失效
    具有冷却结构和旋转轴承的冷却结构提供的旋转工作台装置

    公开(公告)号:US20110001282A1

    公开(公告)日:2011-01-06

    申请号:US12919064

    申请日:2009-02-16

    IPC分类号: B23Q1/40 B23Q11/12 F16C37/00

    摘要: A rotary table device includes a cooling structure and a rotary bearing provided with a cooling structure. A rotary table device provided with a cooling structure includes a hollow motor as a drive source, a table rotated by the hollow motor, and a rotary bearing supporting rotational motion of the table, in which the rotary bearing includes an outer ring having an inner peripheral surface to which a rolling surface is formed, an inner ring having an outer peripheral surface to which a rolling surface facing the rolling surface of the outer ring is formed, and a number of rolling members in a rolling passage formed by the rolling surface of the outer ring and the rolling surface of the inner ring, and a heat sink is formed to either one of the inner and outer rings.

    摘要翻译: 旋转台装置包括冷却结构和设置有冷却结构的旋转轴承。 设置有冷却结构的旋转台装置包括作为驱动源的中空电动机,由中空电动机旋转的工作台和支撑工作台的旋转运动的旋转轴承,其中,旋转轴承包括具有内周的外圈 形成有滚动面的表面,形成有与外圈的滚动面相对的滚动面的外周面的内圈,以及由滚动面的滚动面形成的滚动体的多个滚动体 外圈和内圈的滚动表面,并且散热器形成在内圈和外圈中的任一个上。

    Rotary table device provided with cooling structure and rotary bearing provided with cooling structure
    9.
    发明授权
    Rotary table device provided with cooling structure and rotary bearing provided with cooling structure 失效
    旋转台装置设有冷却结构和带冷却结构的旋转轴承

    公开(公告)号:US08439338B2

    公开(公告)日:2013-05-14

    申请号:US12919064

    申请日:2009-02-16

    IPC分类号: B23Q1/25

    摘要: A rotary table device includes a cooling structure and a rotary bearing provided with a cooling structure. A rotary table device provided with a cooling structure includes a hollow motor as a drive source, a table rotated by the hollow motor, and a rotary bearing supporting rotational motion of the table, in which the rotary bearing includes an outer ring having an inner peripheral surface to which a rolling surface is formed, an inner ring having an outer peripheral surface to which a rolling surface facing the rolling surface of the outer ring is formed, and a number of rolling members in a rolling passage formed by the rolling surface of the outer ring and the rolling surface of the inner ring, and a heat sink is formed to either one of the inner and outer rings.

    摘要翻译: 旋转台装置包括冷却结构和设置有冷却结构的旋转轴承。 设置有冷却结构的旋转台装置包括作为驱动源的中空电动机,由中空电动机旋转的工作台和支撑工作台的旋转运动的旋转轴承,其中,旋转轴承包括具有内周的外圈 形成有滚动面的表面,形成有与外圈的滚动面相对的滚动面的外周面的内圈,以及由滚动面的滚动面形成的滚动体的多个滚动体 外圈和内圈的滚动表面,并且散热器形成在内圈和外圈中的任一个上。

    ROTARY BEARING, ROTARY TABLE DEVICE AND TABLE DIAMETER DETERMINING METHOD
    10.
    发明申请
    ROTARY BEARING, ROTARY TABLE DEVICE AND TABLE DIAMETER DETERMINING METHOD 有权
    旋转轴承,旋转台装置和表直径测定方法

    公开(公告)号:US20100102496A1

    公开(公告)日:2010-04-29

    申请号:US12593638

    申请日:2008-03-28

    IPC分类号: B23Q1/25 F16C33/38 G01B5/08

    摘要: A rotary table device includes a hollow motor drive source, a table rotated thereby, and a rotary bearing supporting the table. The rotary bearing is provided an outer race having an inner surface to which a rolling surface is formed, an inner race having an outer peripheral surface to which a rolling surface opposing to the rolling surface of the outer race is formed, and a plurality of rolling members disposed in a rolling passage formed by the rolling surface of the outer race and the rolling surface of the inner race, and a cooling medium passage (α, β) is formed so as to be adjacent to either one of the inner race and outer race constituting a rotational driving side. According to the structure mentioned above, a rotary bearing and a rotary table device capable of achieving suitable cooling effect can be provided.

    摘要翻译: 旋转台装置包括中空马达驱动源,由其旋转的工作台和支撑工作台的旋转轴承。 旋转轴承设置有具有形成有滚动面的内表面的外圈,具有与形成有外圈的滚动面相对的滚动面的外周面的内圈,以及多个滚动 设置在由外圈的滚动面和内圈的滚动面形成的滚动通道中的构件和冷却介质通路(α,bgr)形成为与内圈和内圈 外圈构成旋转驱动侧。 根据上述结构,可以提供能够实现合适的冷却效果的旋转轴承和旋转台装置。