公开(公告)号：US06872944B2

公开(公告)日：2005-03-29

申请号：US10699793

申请日：2003-11-04

申请人： Hideo Todokoro ,  Shou Takami ,  Makoto Ezumi ,  Osamu Yamada ,  Yoichi Ose ,  Tomohiro Kudo

发明人： Hideo Todokoro ,  Shou Takami ,  Makoto Ezumi ,  Osamu Yamada ,  Yoichi Ose ,  Tomohiro Kudo

IPC分类号： G01Q30/02 ,  H01J37/244 ,  H01J37/28

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/04756

摘要： The present invention relates to a scanning electron microscope employing a deceleration field forming technology (retarding), more particularly a scanning electron microscope which separates and detects secondary electrons at high efficiency.The object of the present invention is accomplished by providing an electron source, a lens for condensing the primary electron beam which is emitted from said electron source, a detector for detecting electrons which are generated by radiation of the primary electron beam onto a specimen, a first deceleration means for decelerating the primary electron beam which is radiated onto said specimen, a second deceleration means for decelerating electrons which are generated on the specimen, and a deflector for deflecting said electrons which are decelerated by said second decelerating means.

摘要翻译： 本发明涉及一种采用减速场形成技术（延迟）的扫描电子显微镜，更具体地说，涉及一种以高效率分离和检测二次电子的扫描电子显微镜。本发明的目的是提供一种电子源， 用于冷凝从所述电子源发射的一次电子束的透镜，用于检测通过将一次电子束辐射到样本上而产生的电子的检测器，用于使被辐射到所述样本上的一次电子束减速的第一减速装置 ，用于使在试样上产生的电子减速的第二减速装置和用于使由所述第二减速装置减速的所述电子偏转的偏转器。

公开(公告)号：US06667476B2

公开(公告)日：2003-12-23

申请号：US09486042

申请日：2000-02-17

申请人： Hideo Todokoro ,  Shou Takami ,  Makoto Ezumi ,  Osamu Yamada ,  Yoichi Ose ,  Tomohiro Kudo

发明人： Hideo Todokoro ,  Shou Takami ,  Makoto Ezumi ,  Osamu Yamada ,  Yoichi Ose ,  Tomohiro Kudo

IPC分类号： H01J3728

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/04756

摘要： The present invention relates to a scanning electron microscope employing a deceleration field forming technology (retarding), more particularly a scanning electron microscope which separates and detects secondary electrons at high efficiency. The object of the present invention is accomplished by providing an electron source, a lens for condensing the primary electron beam which is emitted from said electron source, a detector for detecting electrons which are generated by radiation of the primary electron beam onto a specimen, a first deceleration means for decelerating the primary electron beam which is radiated onto said specimen, a second deceleration means for decelerating electrons which are generated on the specimen, and a deflector for deflecting said electrons which are decelerated by said second decelerating means.

摘要翻译： 本发明涉及一种使用减速场形成技术（延迟）的扫描电子显微镜，更具体地说，涉及一种以高效率分离和检测二次电子的扫描电子显微镜。 本发明的目的是通过提供电子源，用于冷凝从所述电子源发射的一次电子束的透镜，用于检测通过将一次电子束辐射到样本上产生的电子的检测器， 第一减速装置，用于使被辐射到所述样本上的一次电子束减速，用于减速在所述样本上产生的电子的第二减速装置，以及用于使由所述第二减速装置减速的所述电子偏转的偏转器。

公开(公告)号：US4774460A

公开(公告)日：1988-09-27

申请号：US8253

申请日：1987-01-29

申请人： Hideo Todokoro ,  Osamu Yamada

发明人： Hideo Todokoro ,  Osamu Yamada

IPC分类号： H01L21/66 ,  G01R31/26 ,  G01R31/302 ,  H01J37/28

CPC分类号： G01R31/302

摘要： A stroboscopic type potential measurement device by which a sample is irradiated with a pulsed charged particle beam in synchronism with a periodical voltage in the sample and secondary electrons emitted by the sample irradiated with the pulsed charged particle beam are detected, while varying the phase of the pulsed charged particle beam with respect to that of the periodical voltage in the sample. At least one phase scanning cycle, forward and backward, is effected, by which the phase of the pulsed charged particle beam with respect to that of the periodical voltage is increased from 0.degree. to 360.degree. at a predetermined rate and thereafter descreased from 360.degree. to 0.degree. at substantially the same rate as the predeterming rate of increase. Outputs at each of the phases are subjected to an average processing so as to obtain one measurement result.

摘要翻译： 频闪型电位测量装置，通过该样本电位测量装置，其中样品与样品中的周期性电压同步地照射脉冲带电粒子束，并且检测由用脉冲带电粒子束照射的样品发射的二次电子，同时改变 相对于样品中的周期性电压的脉冲带电粒子束。 进行至少一个相位扫描周期，向前和向后，脉冲带电粒子束相对于周期性电压的相位以预定速率从0度增加到360度，然后从360度降低 以0％的速度与预先提高的速率基本相同。 对各相的输出进行平均处理，得到一个测定结果。

公开(公告)号：US5929439A

公开(公告)日：1999-07-27

申请号：US868650

申请日：1997-06-04

申请人： Hideo Todokoro ,  Osamu Yamada

发明人： Hideo Todokoro ,  Osamu Yamada

IPC分类号： H01J37/22 ,  G02B21/00 ,  H01J37/147 ,  H01J37/28 ,  H01J37/26

CPC分类号： H01J37/28 ,  G02B21/002 ,  H01J2237/043 ,  H01J2237/22

摘要： A scanned image to be observed or to be recorded is formed by a plurality of two-dimensional scanning times (N times), an irradiating charged particle beam or a light beam is blanked in a two-dimensional scanning unit, and the averaged irradiation intensity is adjusted by thinning a plurality (

摘要翻译： 通过多次二维扫描时间（N次）形成待观察或待记录的扫描图像，照射带电粒子束或光束在二维扫描单元中被消隐，并且平均的照射强度 通过在N次扫描中减少多个（

公开(公告)号：US5276325A

公开(公告)日：1994-01-04

申请号：US945926

申请日：1992-09-17

申请人： Hideo Todokoro ,  Tadashi Otaka ,  Osamu Yamada

发明人： Hideo Todokoro ,  Tadashi Otaka ,  Osamu Yamada

IPC分类号： H01J37/147 ,  G02B21/00 ,  H01J37/22 ,  H01J37/26 ,  H01J37/28

CPC分类号： G02B21/002 ,  H01J37/265 ,  H01J37/28

摘要： A scanning microscope, such as a scanning electron microscope, has an energy beam which is caused to scan on a sample. A detector detects the interaction of the beam with the sample and generates sample image signals which are used to generate a display image of the scanned part of the sample. The sample image signals may be stored in an image memory, and a part of those sample image signals are read to generate the display image. This permits an effective magnification to be achieved without scanning the sample with scanning lines which are too close. Alternatively, or in addition, the beam may be cut intermittently during the scanning, at least for magnification above a predetermined limit. Where scanning is in a series of frames, each formed of a series of scanning lines, such cutting may change the interval between frames, the interval between lines, or may cause intermittent cutting within a line. All these changes reduce the duration of the beam on the sample, thereby reducing the risk of excessive charge build-up.

摘要翻译： 诸如扫描电子显微镜的扫描显微镜具有能够在样品上扫描的能量束。 检测器检测光束与样本的相互作用并产生用于产生样本的扫描部分的显示图像的样本图像信号。 样本图像信号可以存储在图像存储器中，并且读取这些采样图像信号的一部分以生成显示图像。 这样可以实现有效放大倍数，而不用太近的扫描线扫描样品。 或者或另外，可以在扫描期间间歇地切割光束，至少放大超过预定极限。 在扫描是一系列帧的情况下，每一帧由一系列扫描线形成，这种切割可以改变帧之间的间隔，线之间的间隔，或者可能导致线内的间歇切割。 所有这些变化都会降低样品上光束的持续时间，从而降低过度电荷积聚的风险。

公开(公告)号：US09295261B2

公开(公告)日：2016-03-29

申请号：US12282529

申请日：2007-03-28

申请人： Shingo Fujii ,  Munehiro Suzuki ,  Osamu Yamada

发明人： Shingo Fujii ,  Munehiro Suzuki ,  Osamu Yamada

IPC分类号： A01N53/00

CPC分类号： A01N53/00 ,  A01N25/02 ,  A01N25/04 ,  A01N37/38 ,  A01N25/30 ,  A01N2300/00

摘要： The present invention relates to new aqueous microemulsions containing organic pesticide compounds of limited water-solubility and to their use for plant protection, including seed and crop protection, and protection or non-living material. The aqueous microemulsions comprise a) at least one pyrethroid compound P; b) at least one organic solvent, selected from compounds of the formula I R1—(O-Alk)m-O—C(O)R2 (I) wherein m is 1, 2 or 3, R1 is H, C1-C6-alkyl or C(O)R3, R2 is hydrogen or C1-C4-alkyl, which may be unsubstituted or substituted with OH, Alk is C2-C6-alkylene, and R3 is hydrogen or C1-C4-alkyl, which may be unsubstituted or substituted with OH; c) at least one surfactant; and d) water.

摘要翻译： 本发明涉及含有水溶性有限的有机农药化合物的新的含水微乳液及其用于植物保护的用途，包括种子和作物保护以及保护或非生物材料。 含水微乳液包含a）至少一种拟除虫菊酯化合物P; b）至少一种选自式I R1-（O-Alk）mO-C（O）R 2（I）的化合物的有机溶剂，其中m是1,2或3，R 1是H，C 1 -C 6烷基 或C（O）R 3，R 2是氢或C 1 -C 4烷基，其可以是未取代的或被OH取代，Alk是C 2 -C 6亚烷基，R 3是氢或C 1 -C 4 - 烷基，其可以是未取代的或 用OH取代; c）至少一种表面活性剂; 和d）水。

公开(公告)号：US08638026B2

公开(公告)日：2014-01-28

申请号：US13123199

申请日：2009-10-06

申请人： Masashi Shibahara ,  Mikio Tokuyama ,  Koichiro Takeuchi ,  Shigeru Haneda ,  Osamu Yamada ,  Naoki Sakamoto ,  Eiichi Hazaki ,  Akito Tanokuchi

发明人： Masashi Shibahara ,  Mikio Tokuyama ,  Koichiro Takeuchi ,  Shigeru Haneda ,  Osamu Yamada ,  Naoki Sakamoto ,  Eiichi Hazaki ,  Akito Tanokuchi

IPC分类号： H01L41/08

CPC分类号： H01J37/20 ,  H01J2237/20221 ,  H01J2237/20264 ,  H01J2237/28

摘要： A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.

摘要翻译： 平台包括用于引导可动台（4）的直线导轨（2），从动杆（12），与从动杆（12）接触的线性驱动致动器，以将驱动力传递到从动杆（12） 和用于保持从动杆（12）的相对端的平行板簧（30）。 线性驱动致动器的驱动传递表面设置成与可移动台（4）分离，这防止了定位精度的降低。 此外，平行弹簧（30）减小施加到支撑从动杆（12）的部分的变形力，并且这防止被驱动杆被损坏。 该配置使舞台高度准确和高度可靠。

公开(公告)号：US08574361B2

公开(公告)日：2013-11-05

申请号：US12524811

申请日：2008-03-05

申请人： Osamu Yamada ,  Hisashi Minemoto ,  Kouichi Hiranaka ,  Takeshi Hatakeyama ,  Takatomo Sasaki ,  Yusuke Mori ,  Fumio Kawamura ,  Yasuo Kitaoka

发明人： Osamu Yamada ,  Hisashi Minemoto ,  Kouichi Hiranaka ,  Takeshi Hatakeyama ,  Takatomo Sasaki ,  Yusuke Mori ,  Fumio Kawamura ,  Yasuo Kitaoka

IPC分类号： H01L21/322

CPC分类号： H01L31/03044 ,  C30B9/10 ,  C30B11/12 ,  C30B19/02 ,  C30B29/403 ,  C30B29/406 ,  G02B1/02

摘要： A method for producing a high-quality group-III element nitride crystal at a high crystal growth rate, and a group-III element nitride crystal are provided. The method includes the steps of placing a group-III element, an alkali metal, and a seed crystal of group-III element nitride in a crystal growth vessel, pressurizing and heating the crystal growth vessel in an atmosphere of nitrogen-containing gas, and causing the group-III element and nitrogen to react with each other in a melt of the group-III element, the alkali metal and the nitrogen so that a group-III element nitride crystal is grown using the seed crystal as a nucleus. A hydrocarbon having a boiling point higher than the melting point of the alkali metal is added before the pressurization and heating of the crystal growth vessel.

摘要翻译： 提供了以高晶体生长速度生产高质量III族元素氮化物晶体的方法和III族元素氮化物晶体。 该方法包括以下步骤：将III族元素，碱金属和III族元素氮化物的晶种放置在晶体生长容器中，在含氮气体的气氛中加压和加热晶体生长容器， 导致III族元素和氮在III族元素，碱金属和氮的熔体中彼此反应，从而使用晶种作为核生长III族元素氮化物晶体。 在晶体生长容器的加压和加热之前，加入沸点高于碱金属的熔点的烃。

公开(公告)号：US08329056B2

公开(公告)日：2012-12-11

申请号：US12853601

申请日：2010-08-10

申请人： Fumitoshi Yamashita ,  Osamu Yamada ,  Shiho Ohya

发明人： Fumitoshi Yamashita ,  Osamu Yamada ,  Shiho Ohya

IPC分类号： H01F1/08

CPC分类号： H01F1/0578 ,  H01F1/059 ,  H01F7/02 ,  H01F41/0266 ,  H01F41/028

摘要： Anisotropic rare earth-iron based resin bonded magnet comprises: [1] a continuous phase including: (1) a spherical Sm2Fe17N3 based magnetic material covered with epoxy oligomer where its average particle size is 1 to 10 μm, its average aspect ratio ARave is 0.8 or more, and mechanical milling is not applied after Sm—Fe alloy is nitrided; (2) a linear polymer with active hydrogen group reacting to the oligomer; and (3) additive; and [2] a discontinuous phase being an Nd2Fe14B based magnetic material coated with the epoxy oligomer where its average particle size is 50 to 150 μm, and its average aspect ratio ARave is 0.65 or more, further satisfying: [3] the air-gap ratio of a granular compound on the phases is 5% or less; and [4] a composition where crosslinking agent with 10 μm or less is adhered on the granular compound is formed at 50 MPa or less.

摘要翻译： 各向异性稀土 - 铁基树脂粘结磁铁包括：[1]连续相，包括：（1）用环氧低聚物覆盖的球形Sm2Fe17N3系磁性材料，其平均粒径为1〜10μm，平均长径比ARave为0.8 或以上，并且在Sm-Fe合金被氮化之后不施加机械研磨; （2）具有与低聚物反应的活性氢基团的直链聚合物; 和（3）添加剂; 和[2]不连续相是涂覆有环氧低聚物的Nd 2 Fe 14 B基磁性材料，其平均粒度为50〜150μm，其平均长径比Arave为0.65以上，进一步满足：[3]气隙 相上的粒状化合物的比例为5％以下; 和[4]在该粒状化合物上附着有10μm以下的交联剂的组合物形成为50MPa以下。

公开(公告)号：US07735708B2

公开(公告)日：2010-06-15

申请号：US11778842

申请日：2007-07-17

申请人： Osamu Yamada

发明人： Osamu Yamada

IPC分类号： B23K37/00

CPC分类号： H05K3/3494 ,  B23K1/008 ,  H05K2203/081

摘要： In a second horizontal plate (18a) bottoming an atmosphere recovery box (18), there are formed circular holes (21) between blowout pipes (20) adjacent to each other. Each of partition walls (2) positioned above a conveyor (5) includes an upper portion formed from a heat-insulating wall (2a) including a heat-insulative material having a thickness of T, and a lower portion formed from a metallic-plate wall (2b) extending downward from the heat-insulating wall (2a) toward the conveyor (5). The pitch P2 of the blowout pipes (20) across the metallic-plate wall (2b) is substantially same as the pitch P1 (12 mm) of the blowout pipes (20) disposed inside each of the chambers (R1 to R5) and adjacent to each other.

摘要翻译： 在气氛回收箱（18）底部的第二水平板（18a）中，在彼此相邻的吹出管（20）之间形成有圆形孔（21）。 位于输送机（5）上方的每个分隔壁（2）包括由绝热壁（2a）形成的上部，该隔热壁包括厚度为T的绝热材料和由金属板形成的下部 壁（2b）从隔热壁（2a）朝向输送机（5）向下延伸。 穿过金属板壁（2b）的吹出管（20）的间距P2与布置在每个室（R1至R5）内的喷出管（20）的间距P1（12mm）大致相同 对彼此。