利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

74 条记录 (耗时 0.043 秒)

    Scanning microscope and a method of operating such a scanning microscope
    1.
    发明授权
    Scanning microscope and a method of operating such a scanning microscope 失效
    扫描显微镜和操作这种扫描显微镜的方法

    公开(公告)号：US5276325A

    公开(公告)日：1994-01-04

    申请号：US945926

    申请日：1992-09-17

    申请人： Hideo Todokoro ,  Tadashi Otaka ,  Osamu Yamada

    发明人： Hideo Todokoro ,  Tadashi Otaka ,  Osamu Yamada

    IPC分类号： H01J37/147 ,  G02B21/00 ,  H01J37/22 ,  H01J37/26 ,  H01J37/28

    CPC分类号： G02B21/002 ,  H01J37/265 ,  H01J37/28

    摘要： A scanning microscope, such as a scanning electron microscope, has an energy beam which is caused to scan on a sample. A detector detects the interaction of the beam with the sample and generates sample image signals which are used to generate a display image of the scanned part of the sample. The sample image signals may be stored in an image memory, and a part of those sample image signals are read to generate the display image. This permits an effective magnification to be achieved without scanning the sample with scanning lines which are too close. Alternatively, or in addition, the beam may be cut intermittently during the scanning, at least for magnification above a predetermined limit. Where scanning is in a series of frames, each formed of a series of scanning lines, such cutting may change the interval between frames, the interval between lines, or may cause intermittent cutting within a line. All these changes reduce the duration of the beam on the sample, thereby reducing the risk of excessive charge build-up.

    摘要翻译： 诸如扫描电子显微镜的扫描显微镜具有能够在样品上扫描的能量束。 检测器检测光束与样本的相互作用并产生用于产生样本的扫描部分的显示图像的样本图像信号。 样本图像信号可以存储在图像存储器中，并且读取这些采样图像信号的一部分以生成显示图像。 这样可以实现有效放大倍数，而不用太近的扫描线扫描样品。 或者或另外，可以在扫描期间间歇地切割光束，至少放大超过预定极限。 在扫描是一系列帧的情况下，每一帧由一系列扫描线形成，这种切割可以改变帧之间的间隔，线之间的间隔，或者可能导致线内的间歇切割。 所有这些变化都会降低样品上光束的持续时间，从而降低过度电荷积聚的风险。

    Monochromator and scanning electron microscope using the same
    2.
    发明授权
    Monochromator and scanning electron microscope using the same 失效

    公开(公告)号：US07022983B2

    公开(公告)日：2006-04-04

    申请号：US10751907

    申请日：2004-01-07

    申请人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

    发明人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

    IPC分类号： H01J37/05

    CPC分类号： H01J37/05 ,  H01J37/153 ,  H01J37/28

    摘要： An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.

    Electron beam apparatus
    5.
    发明授权
    Electron beam apparatus 失效
    电子束装置

    公开(公告)号：US5598002A

    公开(公告)日：1997-01-28

    申请号：US632664

    申请日：1996-03-28

    申请人： Hideo Todokoro ,  Tadashi Otaka ,  Tatsuya Maeda ,  Katsuhiro Sasada

    发明人： Hideo Todokoro ,  Tadashi Otaka ,  Tatsuya Maeda ,  Katsuhiro Sasada

    IPC分类号： H01J37/141 ,  H01J37/20 ,  H01J37/21 ,  H01L21/027 ,  G02B21/18

    CPC分类号： H01J37/21 ,  H01J2237/216 ,  H01J2237/2482

    摘要： An electron beam apparatus focusses an electron beam onto a specimen by means of an objective magnetic lens. In order to detect changes in the height of the specimen, a laser light beam from a laser source is incident on the specimen and the reflected laser beam is detected by a light detector. Any change in the height of the specimen changes the path of the laser beam to the detector. Therefore, by monitoring the detector, the focussing of the electron beam on the specimen can be controlled by varying the current to an excitation coil of the objective magnetic lens or by moving the specimen via a mounting stage. At least one of the pole pieces of the objective lens is on the opposite side of the path of the laser beam to the source of the electron beam, so that the objective magnetic lens may be close to the specimen, permitting a short focal length. Thus, the laser beam may pass between the pole pieces. An optical microscope may also be provided to permit the specimen to be viewed. The viewing path of the optical microscope extends through an opening in one or both of the pole pieces of the objective magnetic lens.

    摘要翻译： 电子束装置通过物镜磁性透镜将电子束聚焦在样本上。 为了检测样品的高度变化，来自激光源的激光束入射到样品上，并且通过光检测器检测反射的激光束。 样品高度的任何变化会改变激光束到检测器的路径。 因此，通过监视检测器，可以通过改变到物镜磁性透镜的激励线圈的电流或通过安装级移动样本来控制电子束在样本上的聚焦。 物镜的极片中的至少一个位于激光束到电子束源的路径的相对侧，使得物镜磁性透镜可能靠近样本，允许短焦距。 因此，激光束可以在极片之间通过。 还可以提供光学显微镜以允许观察样品。 光学显微镜的观察路径延伸穿过物镜磁性透镜的一个或两个极片中的开口。

    Image evaluation method and microscope
    7.
    发明授权
    Image evaluation method and microscope 失效
    图像评估方法和显微镜

    公开(公告)号：US07340111B2

    公开(公告)日：2008-03-04

    申请号：US11124252

    申请日：2005-05-09

    申请人： Tohru Ishitani ,  Mitsugu Sato ,  Hideo Todokoro ,  Tadashi Otaka ,  Takashi Iizumi ,  Atsushi Takane

    发明人： Tohru Ishitani ,  Mitsugu Sato ,  Hideo Todokoro ,  Tadashi Otaka ,  Takashi Iizumi ,  Atsushi Takane

    IPC分类号： G06K9/32

    CPC分类号： H01J37/28 ,  H01J37/222 ,  H01J37/263 ,  H01J2237/2823

    摘要： Image evaluation method capable of objectively evaluating the image resolution of a microscope image. An image resolution method is characterized in that resolution in partial regions of an image is obtained over an entire area of the image or a portion of the image, averaging is performed over the entire area of the image or the portion of the image, and the averaged value is established as the resolution evaluation value of the entire area of the image or the portion of the image. This method eliminates the subjective impressions of the evaluator from evaluation of microscope image resolution, so image resolution evaluation values of high accuracy and good repeatability can be obtained.

    摘要翻译： 能够客观评价显微镜图像的图像分辨率的图像评价方法。 图像分辨方法的特征在于，在图像的整个区域或图像的一部分上获得图像的部分区域中的分辨率，在图像的整个区域或图像的整个区域上进行平均化， 建立平均值作为图像的整个区域或图像的部分的分辨率评估值。 该方法消除了评估者对显微镜图像分辨率评估的主观印象，因此可以获得高精度和良好重复性的图像分辨率评估值。

    Method of forming a sample image and charged particle beam apparatus
    8.
    发明申请
    Method of forming a sample image and charged particle beam apparatus 失效
    形成样品图像和带电粒子束装置的方法

    公开(公告)号：US20070029478A1

    公开(公告)日：2007-02-08

    申请号：US11501229

    申请日：2006-08-09

    申请人： Mitsugu Sato ,  Atsushi Takane ,  Takashi Iizumi ,  Tadashi Otaka ,  Hideo Todokoro ,  Satoru Yamaguchi ,  Kazutaka Nimura

    发明人： Mitsugu Sato ,  Atsushi Takane ,  Takashi Iizumi ,  Tadashi Otaka ,  Hideo Todokoro ,  Satoru Yamaguchi ,  Kazutaka Nimura

    IPC分类号： G21K7/00

    CPC分类号： H01J37/28 ,  G06T5/50 ,  G06T7/30 ,  G06T2207/10056 ,  H01J37/222 ,  H01J2237/221 ,  H01J2237/226

    摘要： An object of the present invention is to provide a sample image forming method and a charged particle beam apparatus which are suitable for realizing suppressing of the view area displacement with high accuracy while the influence of charging due to irradiation of the charged particle beam is being suppressed. In order to attain the above object, the present invention provide a method of forming a sample image by scanning a charged particle beam on a sample and forming an image based on secondary signals emitted from the sample, the method comprising the steps of forming a plurality of composite images by superposing a plurality of images obtained by a plurality of scanning times; and forming a further composite image by correcting positional displacements among the plurality of composite images and superposing the plurality of composite images, and a charged particle beam apparatus for realizing the above method.

    摘要翻译： 本发明的目的是提供一种在抑制由于带电粒子束的照射引起的充电的影响被抑制的情况下，能够高精度地实现视区域位移的抑制的样本图像形成方法和带电粒子束装置 。 为了实现上述目的，本发明提供一种通过在样品上扫描带电粒子束并基于从样品发射的二次信号形成图像来形成样品图像的方法，该方法包括以下步骤：形成多个 通过叠加通过多个扫描时间获得的多个图像的合成图像; 以及通过校正多个合成图像之间的位置偏移并叠加多个合成图像来形成另一个合成图像，以及用于实现上述方法的带电粒子束装置。

    Monochromator and scanning electron microscope using the same
    9.
    发明申请
    Monochromator and scanning electron microscope using the same 有权
    单色器和扫描电子显微镜使用相同

    公开(公告)号：US20060219910A1

    公开(公告)日：2006-10-05

    申请号：US11344529

    申请日：2006-02-01

    申请人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

    发明人： Yoichi Ose ,  Shunroku Taya ,  Hideo Todokoro ,  Tadashi Otaka ,  Mitsugu Sato ,  Makoto Ezumi

    IPC分类号： G21K7/00 ,  G01N23/00

    CPC分类号： H01J37/05 ,  H01J37/153 ,  H01J37/28

    摘要： An invention providing a scanning electron microscope composed of a monochromator capable of high resolution, monochromatizing the energy and reducing chromatic aberrations without significantly lowering the electrical current strength of the primary electron beam. A scanning electron microscope is installed with a pair of sectorial magnetic and electrical fields having opposite deflection directions to focus the electron beam and then limit the energy width by means of slits, and another pair of sectorial magnetic and electrical fields of the same shape is installed at a position forming a symmetrical mirror versus the surface containing the slits. This structure acts to cancel out energy dispersion at the object point and symmetrical mirror positions, and by spatially contracting the point-converged spot beam with a converging lens system, improves the image resolution of the scanning electron microscope.

    摘要翻译： 本发明提供一种扫描电子显微镜，该扫描电子显微镜由能够高分辨率，单色化能量和降低色差的单色仪组成，而不会显着降低一次电子束的电流强度。 扫描电子显微镜安装有一对具有相反偏转方向的扇形磁场和电场，以聚焦电子束，然后通过狭缝限制能量宽度，并且安装相同形状的另一对扇形磁场和电场 在与包含狭缝的表面形成对称镜的位置处。 该结构用于抵消物点和对称镜位置的能量分散，并通过会聚透镜系统空间收缩点聚光点光束，提高扫描电子显微镜的图像分辨率。