公开(公告)号：US20110260558A1

公开(公告)日：2011-10-27

申请号：US13123199

申请日：2009-10-06

申请人： Masashi Shibahara ,  Mikio Tokuyama ,  Koichiro Takeuchi ,  Shigeru Haneda ,  Osamu Yamada ,  Naoki Sakamoto ,  Eiichi Hazaki ,  Akito Tanokuchi

发明人： Masashi Shibahara ,  Mikio Tokuyama ,  Koichiro Takeuchi ,  Shigeru Haneda ,  Osamu Yamada ,  Naoki Sakamoto ,  Eiichi Hazaki ,  Akito Tanokuchi

IPC分类号： H02K41/02 ,  B23P11/00

CPC分类号： H01J37/20 ,  H01J2237/20221 ,  H01J2237/20264 ,  H01J2237/28

摘要： A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.

摘要翻译： 平台包括用于引导可动台（4）的直线导轨（2），从动杆（12），与从动杆（12）接触的线性驱动致动器，以将驱动力传递到从动杆（12） 和用于保持从动杆（12）的相对端的平行板簧（30）。 线性驱动致动器的驱动传递表面设置成与可移动台（4）分离，这防止定位精度降低。 此外，平行弹簧（30）减小施加到支撑从动杆（12）的部分的变形力，并且这防止被驱动杆被损坏。 该配置使舞台高度准确和高度可靠。

公开(公告)号：US08638026B2

公开(公告)日：2014-01-28

申请号：US13123199

申请日：2009-10-06

申请人： Masashi Shibahara ,  Mikio Tokuyama ,  Koichiro Takeuchi ,  Shigeru Haneda ,  Osamu Yamada ,  Naoki Sakamoto ,  Eiichi Hazaki ,  Akito Tanokuchi

发明人： Masashi Shibahara ,  Mikio Tokuyama ,  Koichiro Takeuchi ,  Shigeru Haneda ,  Osamu Yamada ,  Naoki Sakamoto ,  Eiichi Hazaki ,  Akito Tanokuchi

IPC分类号： H01L41/08

CPC分类号： H01J37/20 ,  H01J2237/20221 ,  H01J2237/20264 ,  H01J2237/28

摘要： A stage comprises a linear guide rail (2) for guiding a movable table (4), a driven bar (12), a linear drive actuator in contact with the driven bar (12) to transmit driving force to the driven bar (12), and parallel plate springs (30) for holding opposite ends of the driven bar (12). A drive transmitting surface of the linear drive actuator is provided so as to be separated from the movable table (4), and this prevents the accuracy of positioning from being reduced. Also, the parallel springs (30) reduce deforming forces applied to sections supporting the driven bar (12), and this prevents the driven bar from being damaged. The configuration makes the stage highly accurate and highly reliable.

摘要翻译： 平台包括用于引导可动台（4）的直线导轨（2），从动杆（12），与从动杆（12）接触的线性驱动致动器，以将驱动力传递到从动杆（12） 和用于保持从动杆（12）的相对端的平行板簧（30）。 线性驱动致动器的驱动传递表面设置成与可移动台（4）分离，这防止了定位精度的降低。 此外，平行弹簧（30）减小施加到支撑从动杆（12）的部分的变形力，并且这防止被驱动杆被损坏。 该配置使舞台高度准确和高度可靠。

公开(公告)号：US07129727B2

公开(公告)日：2006-10-31

申请号：US11258041

申请日：2005-10-26

申请人： Tsutomu Saito ,  Osamu Yamada ,  Eiichi Hazaki ,  Yasuhiko Nara ,  Hirofumi Sato ,  Yoshikazu Inada ,  Yoshinori Numata

发明人： Tsutomu Saito ,  Osamu Yamada ,  Eiichi Hazaki ,  Yasuhiko Nara ,  Hirofumi Sato ,  Yoshikazu Inada ,  Yoshinori Numata

IPC分类号： G01R31/02 ,  G01R31/00

CPC分类号： G01R31/307 ,  G01R31/2891

摘要： A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.

摘要翻译： 用于测量包括精细布线图案的样品的电特性的多个探针与带电粒子束单元组合的缺陷检查装置包括简单地控制多个探针的图形用户界面（GUI）。 该装置包括：探针图像处理单元，用于在显示器上显示多个探针; 选择单元，从显示器上显示的探针中选择要被操作的探针; 以及显示单元，用于同时显示探针选择单元和指示所选择的探针是可操作探针的信息，或探针处于未选择状态。

公开(公告)号：US20080048699A1

公开(公告)日：2008-02-28

申请号：US11976238

申请日：2007-10-23

申请人： Eiichi Hazaki ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

发明人： Eiichi Hazaki ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

IPC分类号： G01R31/02

CPC分类号： G01R31/2891 ,  G01N23/225 ,  G01R31/2887 ,  H01J37/20 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/20221 ,  H01J2237/204 ,  H01J2237/24564 ,  H01J2237/2482

摘要： For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.

摘要翻译： 为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量 在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和 探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且在第二位置处的测量精度优于 第一名

公开(公告)号：US5393977A

公开(公告)日：1995-02-28

申请号：US69573

申请日：1993-06-01

申请人： Akimitsu Okura ,  Mitsugu Sato ,  Osamu Yamada ,  Yasushi Nakaizumi ,  Eiichi Hazaki

发明人： Akimitsu Okura ,  Mitsugu Sato ,  Osamu Yamada ,  Yasushi Nakaizumi ,  Eiichi Hazaki

IPC分类号： H01J37/22 ,  G01Q30/02 ,  G01Q30/04 ,  G01Q60/10 ,  H01J37/252 ,  H01J37/26 ,  H01J37/28

CPC分类号： H01J37/265

摘要： A specimen is scanned with an electron beam so as to generate a signal characteristic of the specimen to thereby produce an image thereof on the basis of the generated signal. A memory is provided for storing operating conditions of a scanning electron microscope which are associated with identification information for specifying the specimen. The identification information is designated so that thereby at least one operating condition corresponding to the designated identification information is read out from the memory, and the read out operating condition is automatically set so that the scanning electron microscope is operated under the set operating condition.

摘要翻译： 用电子束扫描样本，以产生样本的信号特征，从而根据产生的信号产生图像。 提供了一种存储器，用于存储与用于指定样本的识别信息相关联的扫描电子显微镜的操作条件。 指定识别信息，从而从存储器读出与指定的识别信息相对应的至少一个操作条件，并且自动设置读出操作条件，使得扫描电子显微镜在设定的操作条件下操作。

公开(公告)号：US08074293B2

公开(公告)日：2011-12-06

申请号：US12471907

申请日：2009-05-26

申请人： Eiichi Hazaki ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

发明人： Eiichi Hazaki ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

IPC分类号： H01J37/20 ,  G01N13/16

CPC分类号： G01R31/2891 ,  G01N23/225 ,  G01R31/2887 ,  H01J37/20 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/20221 ,  H01J2237/204 ,  H01J2237/24564 ,  H01J2237/2482

摘要： For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.

摘要翻译： 为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量 在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和 探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且第二位置处的测量精度优于 第一名

公开(公告)号：US20060087330A1

公开(公告)日：2006-04-27

申请号：US11258041

申请日：2005-10-26

申请人： Tsutomu Saito ,  Osamu Yamada ,  Eiichi Hazaki ,  Yasuhiko Nara ,  Hirofumi Sato ,  Yoshikazu Inada ,  Yoshinori Numata

发明人： Tsutomu Saito ,  Osamu Yamada ,  Eiichi Hazaki ,  Yasuhiko Nara ,  Hirofumi Sato ,  Yoshikazu Inada ,  Yoshinori Numata

IPC分类号： G01R31/302

CPC分类号： G01R31/307 ,  G01R31/2891

摘要： A defect inspecting apparatus in which a plurality of probes to measure electric characteristics of a sample including a fine wiring pattern are combined with a charged-particle beam unit includes graphic user interfaces (GUI) to simply control the plural probes. The apparatus includes a probe image processing unit to display the plural probes on a display; a selecting unit to select, from the probes displayed on the display, a probe to be operated; and a display unit to simultaneously display the probe selecting unit and information indicating that the selected probe is an operable probe, or the probe is in a non-selected state.

公开(公告)号：US5256876A

公开(公告)日：1993-10-26

申请号：US696787

申请日：1991-05-07

申请人： Eiichi Hazaki ,  Osamu Yamada ,  Yasushi Nakaizumi ,  Shigeyuki Hosoki ,  Sumio Hosaka ,  Akira Hashimoto

发明人： Eiichi Hazaki ,  Osamu Yamada ,  Yasushi Nakaizumi ,  Shigeyuki Hosoki ,  Sumio Hosaka ,  Akira Hashimoto

IPC分类号： G01B7/34 ,  G01N27/00 ,  G01N37/00 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q30/02 ,  G01Q60/10 ,  H01J37/20 ,  H01J37/28

CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q30/02 ,  Y10S977/861

摘要： A scanning tunnel microscope comprising: a SEM stage provided in a specimen chamber of a SEM and having a mechanism for moving in a two dimensional manner along a surface perpendicular to an electron beam; a specimen stage provided on the SEM stage and provided with a mechanism for holding a specimen so that a surface of the specimen makes an angle of 45.degree. with the electron beam and for moving the specimen in a two dimensional manner in directions of the specimen surface; an STM scanning mechanism provided on the SEM stage and provided with a probe held perpendicularly to the specimen surface, a coarse movement mechanism for making the probe approach to a position at a desired distance from the specimen surface, and a probe fine movement mechanism for making the probe scan along the specimen surface; and a display unit for displaying an image by the SEM together with an image of the probe on the basis of signal obtained from a secondary electron detector provided in a specimen chamber and for displaying an image by the STM on the basis of signals from the probe fine movement mechanism.

公开(公告)号：US5081353A

公开(公告)日：1992-01-14

申请号：US653245

申请日：1991-02-11

申请人： Osamu Yamada ,  Yasushi Nakaizumi ,  Eiichi Hazaki

发明人： Osamu Yamada ,  Yasushi Nakaizumi ,  Eiichi Hazaki

IPC分类号： G01B7/34 ,  G01N37/00 ,  G01Q10/00 ,  G01Q30/02 ,  G01Q60/10 ,  H01J37/28

CPC分类号： G01Q30/02 ,  B82Y35/00 ,  G01Q10/06 ,  G01Q30/04 ,  G01Q60/16 ,  H01J37/28 ,  Y10S977/861

摘要： A sample is mounted on a support table adjacent a probe of a scanning tunnelling microscope, the support table permitting the sample to move relative to the probe. The probe is also movable in a direction generally perpendicular to the sample surface, between a withdrawn position and a scanning separation. A scanning electron microscope is located adjacent the sample and probe, and its electron beam scans both the sample and the probe and generates an image on a display from electrons from the sample detected by a detector. In order that that operator can position the probe on a target of a sample, for scanning by the probe, a marker is generated on the display by a graphics display unit, which marker indicates the probe-to-sample separation and preferably indicates the probe-to-sample approach point and the direction of movement of the probe towards the sample. The graphics display unit may alternatively, or in addition, generate a marker representing the scan area of the probe when it is moved to a scanning separation from the sample.

公开(公告)号：US07553334B2

公开(公告)日：2009-06-30

申请号：US11976238

申请日：2007-10-23

申请人： Eiichi Hazaki ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

发明人： Eiichi Hazaki ,  Yasuhiro Mitsui ,  Takashi Furukawa ,  Hiroshi Yanagita ,  Susumu Kato ,  Osamu Satou ,  Osamu Yamada ,  Yoshikazu Inada

IPC分类号： G01N13/10

CPC分类号： G01R31/2891 ,  G01N23/225 ,  G01R31/2887 ,  H01J37/20 ,  H01J37/226 ,  H01J37/28 ,  H01J2237/2007 ,  H01J2237/2008 ,  H01J2237/20221 ,  H01J2237/204 ,  H01J2237/24564 ,  H01J2237/2482

摘要： For adjusting a positional relationship between a specimen and a probe to measure an electric characteristic of the specimen through a contact therebetween, a base table holding a specimen table holding the specimen and a probe holder holding the probe is positioned at a first position to measure the positional relationship between the probe and the specimen at the first position, and subsequently positioned at a second position to measure the positional relationship therebetween at the second position so that the probe and the specimen are contact each other at the second position, the specimen table and the probe holder are movable with respect to each other on the base table at each of the first and second positions to adjust the positional relationship between the probe and the specimen, and a measuring accuracy at the second position is superior to a measuring accuracy at the first position.

摘要翻译： 为了调整试样与探针之间的位置关系，通过它们之间的接触测量试样的电特性，将保持试样的试样台的基台和保持探针的探针架固定在第一位置，以测量 在第一位置处的探针和样本之间的位置关系，并且随后位于第二位置以测量其在第二位置处的位置关系，使得探针和样本在第二位置彼此接触，样本台和 探针支架能够在基台上在第一和第二位置中的每一个处相对于彼此移动，以调节探针与样本之间的位置关系，并且第二位置处的测量精度优于 第一名