Electric discharge method and apparatus
    1.
    发明授权
    Electric discharge method and apparatus 失效
    放电方法和装置

    公开(公告)号:US5777867A

    公开(公告)日:1998-07-07

    申请号:US694494

    申请日:1996-08-07

    IPC分类号: F02P23/04 G02B6/255 H02M7/538

    摘要: Herein disclosed are a method and an apparatus for supplying an electrical energy to a pair of discharge electrodes spaced apart from each other to cause an electric discharge in a gap between the discharge electrodes. There are firstly provided an alternating voltage generator for generating, as the electrical energy, an alternating voltage having a frequency, and a capacitor connected to the discharge electrodes in series. The alternating voltage generator has a series resonant frequency. The alternating voltage of the alternating voltage generator is applied to the discharge electrodes through the capacitor. The frequency of the alternating voltage is set approximately to the series resonant frequency of the alternating voltage generator to cause a dielectric breakdown in and allow an electric discharge current to flow through the gap between the discharge electrodes. Alternatively, the frequency of the alternating voltage may be approximated to the series resonant frequency of the alternating voltage generator, for example, from a frequency higher than the series resonant frequency.

    摘要翻译: 这里公开了一种用于向彼此间隔开的一对放电电极提供电能以在放电电极之间的间隙中放电的方法和装置。 首先提供一种交流电压发生器,用于产生具有频率的交流电压和连接到放电电极的电容器作为电能。 交流电压发生器具有串联谐振频率。 交流电压发生器的交流电压通过电容器施加到放电电极。 交流电压的频率大致设定为交流电压发生器的串联谐振频率,导致电介质击穿,并允许放电电流流过放电电极之间的间隙。 或者,交流电压的频率可以例如从高于串联谐振频率的频率近似为交流发电机的串联谐振频率。

    Mask storing mechanism
    3.
    发明授权
    Mask storing mechanism 失效
    面具存储机制

    公开(公告)号:US4757355A

    公开(公告)日:1988-07-12

    申请号:US923856

    申请日:1986-10-28

    IPC分类号: G03B23/00 G03F7/20 G03B27/62

    摘要: A device for supplying masks to be used in a chamber having a wall, comprises an opening formed in the wall of the chamber, and a rotatable shelf disposed in the opening and for carrying thereon the masks. The rotatable shelf is coupled, by way of a rotational shaft, to a portion of the wall adjacent to the opening and the rotational shelf has a mask carrying portion which is rotationally movable, about the rotational shaft, through the opening to and from the inside of the chamber and from and to the outside of the chamber.

    摘要翻译: 一种用于提供在具有壁的腔室中使用的掩模的装置,包括形成在腔室的壁中的开口以及设置在开口中并用于在其上承载掩模的可旋转搁架。 旋转架通过旋转轴连接到与开口相邻的壁的一部分,并且旋转架具有掩模承载部分,该面罩承载部分可围绕旋转轴旋转移动,穿过开口至内部 的室和从室的外部。

    Optical fiber fusion splicer
    4.
    发明申请
    Optical fiber fusion splicer 有权
    光纤熔接机

    公开(公告)号:US20050041938A1

    公开(公告)日:2005-02-24

    申请号:US10854794

    申请日:2004-05-27

    IPC分类号: G02B6/255

    CPC分类号: G02B6/2551

    摘要: The optical fiber fusion-splice device comprises a pair of electric discharge electrodes provided opposed to each other along a predetermined axis, a conductor electrode disposed on one side with respect to a plane with the predetermined axis contained therein, and section for generating electrostatic attraction in the direction tending from the above-described plane toward the one side, between the conductor electrode and the electric discharge path produced between the electric discharge electrodes. The means for generating electrostatic attraction is connected to the conductor electrode. This fusion splicer fusion-splices together the end portions of optical fibers disposed on the other side with respect to the above plane by electric discharge produced between the electric discharge electrodes.

    摘要翻译: 光纤熔接装置包括沿预定轴线彼此相对设置的一对放电电极,相对于其中包含预定轴线的平面设置在一侧的导体电极和用于产生静电吸引的部分 导体电极与放电电极之间产生的放电路径之间从上述平面向一侧倾斜的方向。 用于产生静电吸引的装置连接到导体电极。 这种熔接机通过在放电电极之间产生的放电而将布置在另一侧的光纤的端部熔接在一起。

    Insert rotary cutter
    5.
    发明授权
    Insert rotary cutter 失效
    插入旋转切割机

    公开(公告)号:US4714383A

    公开(公告)日:1987-12-22

    申请号:US887626

    申请日:1986-07-21

    IPC分类号: B23C5/08 B23C5/22 B23C5/20

    摘要: An insert rotary cutter for processing a metal workpiece includes a cutter body of a generally circular cross-section having an axis of rotation therethrough. The cutter includes one or more cutter inserts releasably mounted on a periphery of the cutter body. The insert includes a generally quadrilateral plate defined by a front face, a rear face disposed generally parallel to the front face and four side faces. The insert has a pair of main cutting edges defined by the front face and one pair of the opposite side faces. The pair of opposite side faces serve as respective rake surfaces for the main cutting edges. Each of the rake surfaces is convexly curved in such a manner that the width of the insert between the rake surfaces is larger at a central portion of each main cutting edge than at opposite ends of the main cutting edge.

    摘要翻译: 用于处理金属工件的插入式旋转切割器包括具有通过其旋转的轴线的大致圆形横截面的刀具本体。 切割器包括可释放地安装在切割器主体的周边上的一个或多个切割器刀片。 插入件包括由前表面限定的大致四边形板,大体上平行于前表面设置的后表面和四个侧面。 刀片具有由前表面和一对相对侧面限定的一对主切削刃。 一对相对的侧面用作主切削刃的相应的前刀面。 每个前刀面以这样的方式凸出地弯曲,使得前刀面之间的刀片的宽度在每个主切削刃的中心部分比在主切削刃的相对端处更大。

    Projection exposure apparatus
    6.
    发明授权
    Projection exposure apparatus 失效
    投影曝光装置

    公开(公告)号:US07158210B2

    公开(公告)日:2007-01-02

    申请号:US10762481

    申请日:2004-01-23

    IPC分类号: G03B27/42 G03B27/32

    摘要: A projection exposure apparatus with a small size and low cost suitable for repeated pattern exposure. The apparatus includes an illumination system which irradiates light to a mask including plural columns of a mask pattern for repeated exposure to a member to form plural columns of an exposure pattern, a projection system which projects light from the mask onto the member, an exposure stage which moves the member, and a mask stage which moves the mask. The light irradiation and step driving of the exposure stage for moving the member by a movement amount equal to n times a pitch of the columns of the exposure pattern are alternately performed. The mask is moved by a movement amount equal to n times a pitch of the columns of the mask pattern with step driving of the exposure stage in early and later phases of the repeated exposure.

    摘要翻译: 具有小尺寸和低成本的投影曝光装置,适用于重复图案曝光。 该装置包括照射系统,其将光照射到包括多个掩模图案列的掩模,用于反复暴露于构件以形成多列曝光图案;投影系统,其将来自掩模的光投射到构件上;曝光台 移动该构件,以及移动面罩的掩模台。 交替执行用于使构件移动移动量等于曝光图案的列的间距的n倍的曝光台的光照射和阶跃驱动。 通过在反复曝光的早期阶段和稍后阶段中曝光阶段的步进驱动,将掩模移动等于掩模图案的列的间距的n倍的移动量。

    Projection exposure mask, projection exposure apparatus, and projection exposure method
    7.
    发明授权
    Projection exposure mask, projection exposure apparatus, and projection exposure method 失效
    投影曝光掩模,投影曝光装置和投影曝光方法

    公开(公告)号:US07030962B2

    公开(公告)日:2006-04-18

    申请号:US10762468

    申请日:2004-01-23

    IPC分类号: G03B27/42 G03B27/32 G03F9/00

    摘要: A projection exposure apparatus includes a projection exposure mask. The projection exposure mask includes a first mask pattern for exposing a member to form a continuous pattern thereon and a second mask pattern for exposing the member to form a discontinuous pattern thereon, one of the first and second mask patterns being a reflecting type mask and the other mask pattern being a transmitting type mask pattern, a projection system which projects light from the reflecting type mask pattern and light from the transmitting type mask pattern onto the member, a first illumination system which irradiates light to the reflecting type mask pattern from one side of the projection exposure mask, a second illumination system which irradiates light to the transmitting type mask pattern from the opposite side of the one side of the projection exposure mask, and a substrate stage which moves the member in a direction substantially orthogonal to a projection light axis of the projection system.

    摘要翻译: 投影曝光装置包括投影曝光掩模。 投影曝光掩模包括用于曝光构件以形成其上的连续图案的第一掩模图案和用于使构件暴露以在其上形成不连续图案的第二掩模图案,第一和第二掩模图案中的一个是反射型掩模, 其他掩模图案是透射型掩模图案,将来自反射型掩模图案的光和来自透射型掩模图案的光投射到构件上的投影系统,从一侧向反射​​型掩模图案照射光的第一照明系统 投影曝光掩模的第二照明系统,从投影曝光掩模的一侧的相对侧向发射型掩模图案照射光的第二照明系统;以及基板台,该基板台沿与投影光线大致正交的方向移动 投影系统的轴。

    Wafer polishing apparatus and wafer manufacturing method
    8.
    发明授权
    Wafer polishing apparatus and wafer manufacturing method 有权
    晶圆抛光装置及晶圆制造方法

    公开(公告)号:US06280306B1

    公开(公告)日:2001-08-28

    申请号:US09497854

    申请日:2000-02-04

    IPC分类号: B24B2900

    CPC分类号: B24B37/30 B24B37/32

    摘要: The invention provides a wafer polishing apparatus and a wafer manufacturing method which can improve uniformity in polishing wafer surfaces. A wafer holding head comprises a head body; a diaphragm stretched inside the head body; a carrier fixed to the diaphragm to be displaceable in the direction of a head axis while holding the wafer; a retainer ring disposed around the carrier in concentric relation and fixed to the diaphragm to be displaceable in the direction of the head axis; and a thin plate disposed so as to project from the head body along a surface of the diaphragm. With the provision of the thin plate, an excessive pressing force acting upon the retainer ring from the diaphragm is suppressed, and the wafer surface can be prevented from being excessively polished at an outer peripheral edge.

    摘要翻译: 本发明提供一种可以提高抛光晶片表面的均匀性的晶片抛光装置和晶片制造方法。 晶片保持头包括头体; 头部主体内部的隔膜; 固定在所述隔膜上的载体,以便在保持所述晶片的同时在头轴线的方向上移动; 保持环,其以同心关系设置在所述载体周围,并且固定到所述隔膜以能够沿所述头部轴线的方向移位; 以及薄板,其设置成沿着所述隔膜的表面从所述头本体突出。 通过设置薄板,可以抑制从隔膜作用在保持环上的过大的按压力,并且可以防止晶片表面在外周缘处被过度抛光。

    Insert rotary cutter
    9.
    发明授权
    Insert rotary cutter 失效
    插入旋转切割机

    公开(公告)号:US4699549A

    公开(公告)日:1987-10-13

    申请号:US871117

    申请日:1986-06-05

    摘要: An insert rotary cutter for processing a metal workpiece includes a cutter body having an axis of rotation therethrough. The cutter includes at least one cutter insert releasably mounted on an outer periphery of the body. The insert is of a generally polygonal shape having a curved front face. The front face has a pair of opposed marginal ridges serving as respective main cutting edges. The front face has marginal portions disposed adjacent and extending along the main cutting edges, and the marginal portions serve as respective rake surfaces for the main cutting edges. Each of the rake surface is convexly curved as viewed from a respective one of the main cutting edges and is concavely curved as viewed along a respective one of the main cutting edges.

    摘要翻译: 用于处理金属工件的插入式旋转切割器包括具有穿过其中的旋转轴线的切割器主体。 切割器包括可释放地安装在主体的外周上的至少一个切削刀片。 插入件具有大致多边形的形状,具有弯曲的正面。 前表面具有一对相对的边缘脊,用作相应的主切削刃。 前表面具有邻近并沿着主切削刃延伸的边缘部分,并且边缘部分用作主切削刃的相应的前刀面。 每个前刀面从相应的一个主切削刃观察时呈凸形弯曲,并且沿相应的一个主切削刃观察时呈凹形弯曲。

    Flat non-aqueous electrolyte secondary cell
    10.
    发明申请
    Flat non-aqueous electrolyte secondary cell 有权
    扁平非水电解质二次电池

    公开(公告)号:US20050271938A1

    公开(公告)日:2005-12-08

    申请号:US11176400

    申请日:2005-07-08

    摘要: In a flat non-aqueous electrolyte secondary cell comprising an electricity-generating element including at least a cathode, a separator and an anode and a non-aqueous electrolyte in the inside of a cathode case, a plurality of electrode units each consisting of the cathode and the anode opposite to each another via the separator are laminated to form an electrode group, or an electrode unit in a sheet form consisting of the cathode and the anode opposite to each another via the separator is wound to form an electrode group, or a sheet-shape cathode is wrapped with the separator except for a part contacting at inner face of cathode case and a sheet-shaped anode is set on the sheet-shaped cathode in a right angled position each other and then these cathode and anode are bent alternately to form an electrode group, and the total sum of the areas of the opposing cathode and anode in this electrode group is larger than the area of the opening of an insulating gasket in a sealed portion in the cathode case or than the area of an opening in a sealed plate in a sealed portion in the cathode case, whereby the discharge capacity upon heavy-loading discharge is significantly increased as compared with the conventional cells. Accordingly, while the size of the cell is small, the discharge capacity is increased as described above, and thus it is possible to provide a highly utilizable flat non-aqueous electrolyte secondary cell. Further, in said flat non-aqueous electrolyte secondary cell, problems which may be caused by the increased discharge capacity in the cell can be solved by improving the solvent and supporting electrolyte for the electrolyte or by various improvements in the cathode and anode cases.

    摘要翻译: 在包括在阴极壳体的内部至少包括阴极,隔膜和阳极以及非水电解质的发电元件的扁平非水电解质二次电池中,多个电极单元由阴极 并且通过隔板彼此相对的阳极被层压以形成电极组,或者通过隔板将彼此相对的由阴极和阳极组成的片状的电极单元卷绕形成电极组,或 除了与阴极壳体的内表面接触的部分之外,用隔膜包裹片状阴极,并且在片状阴极上将片状阳极设置成彼此成直角的位置,然后这些阴极和阳极交替弯曲 形成电极组,并且该电极组中​​的相对的阴极和阳极的面积的总和大于t中的密封部分中的绝缘垫圈的开口面积 与阴极壳体的密封部分中的密封板中的开口面积相比,与常规电池相比,重负载放电时的放电容量显着增加。 因此,在电池尺寸小的情况下,如上所述,放电容量增加,因此可以提供高可利用的扁平非水电解质二次电池。 此外,在所述平坦的非水电解质二次电池中,可以通过改善溶剂和支持电解质的电解质或通过阴极和阳极壳体的各种改进来解决电池中放电容量增加可能引起的问题。