摘要:
The motor driver having a plurality of output circuits each having two switching elements connected in series includes: a phase switch circuit for putting a switching element on one side of one output circuit among the plurality of output circuits in the ON state during a time period corresponding to a predetermined electrical angle, and performing switching operation for switching elements on the other side of plural output circuits among the remaining output circuits; and a conduction period control section. The conduction period control section generates a signal for controlling the switching operation. Specifically, when the number of times of switching operation performed during the time period corresponding to the predetermined electrical angle is equal to or less than a predetermined value, a switching element corresponding to a phase, for which the magnitude of the current should be decreased, is turned OFF in the time period corresponding to the next predetermined electrical angle.
摘要:
A compound shown by the following formula (1) can be used as a material for a radiation-sensitive composition capable of forming a resist film which effectively responds to electron beams or the like, exhibits low roughness, and can form a high precision minute pattern in a stable manner.
摘要:
A radiation-sensitive composition includes a photoacid generator shown by a general formula (0-1a). Each of R0 individually represents a substituted or unsubstituted organic group which includes a carbon atom, a hydrogen atom, and an oxygen atom, and which includes at least one ester bond, and M+ represents a monovalent onium cation. A compound is shown by a general formula (0). R represents a substituted or unsubstituted organic group which includes a carbon atom, a hydrogen atom, and an oxygen atom, and which includes at least one ester bond, and M+ represents a monovalent onium cation.
摘要翻译:辐射敏感性组合物包括通式(0-1a)所示的光致酸产生剂。 R 0各自独立地表示取代或未取代的包含碳原子,氢原子和氧原子的有机基团,其包含至少一个酯键,M +表示一价鎓阳离子。 化合物由通式(0)表示。 R表示取代或未取代的包含碳原子,氢原子和氧原子的有机基团,其包含至少一个酯键,M +表示一价鎓阳离子。
摘要:
A radiation-sensitive resin composition includes a compound represented by a following formula (1), and a first polymer that serves as a base resin. R1 represents a monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms, or the like. The M+ represents a monovalent cation. The first polymer (B) is preferably insoluble or hardly soluble in alkali, the polymer including a structure unit represented by a formula (5) or a structure unit represented by a formula (6), and a structure unit represented by a formula (7).
摘要翻译:辐射敏感性树脂组合物包含由下式(1)表示的化合物和作为基础树脂的第一聚合物。 R1表示碳原子数3〜20的一价脂环式烃基等。 M +表示一价阳离子。 第一聚合物(B)优选不溶于或几乎不溶于碱,该聚合物包括由式(5)表示的结构单元或由式(6)表示的结构单元,和由式(7)表示的结构单元 )。
摘要:
A method for forming a resist pattern includes providing a resist film. A protective film is provided on the resist film using a composition for forming the protective film. The composition includes a polymer and an organic solvent. The resist film on which the protective film is provided is exposed to irradiation with EUV light or an electron beam. The exposed resist film is developed.
摘要:
The present invention inexpensively controls a turn-on and turn-off switching speed for MOS transistors made in accordance with various specifications. According to the present invention, during an output voltage rise period for a turn-on operation of the MOS transistor, a fixed current determined by a first clip circuit and a resistor is input to a gate terminal of the MOS transistor to obtain a linear rise slew rate. During an output voltage drop period for a turn-off operation of the MOS transistor, a fixed current determined by a second clip circuit 38 and a resistor is input to the gate terminal of the MOS transistor to obtain a linear drop slew rate.
摘要:
A radiation-sensitive resin composition includes an acid-dissociable group-containing resin, and a compound shown by the following general formula (1). wherein Z− represents a monovalent anion shown by a general formula (2), M+ represents a monovalent onium cation, R1 represents a linear or branched alkyl group having 1 to 12 carbon atoms substituted or unsubstantiated with a fluorine atom, or a linear or branched alkoxy group having 1 to 12 carbon atoms, and n is 1 or 2.
摘要:
A compound shown by the following formula (1) can be used as a material for a radiation-sensitive composition capable of forming a resist film which effectively responds to electron beams or the like, exhibits low roughness, and can form a high precision minute pattern in a stable manner.
摘要:
A liquid immersion lithography upper-layer film-forming composition includes (A) a polymer that includes a structural unit (I) shown by the following formula (1), and (S) a solvent. R1 in the formula (1) represents a hydrogen atom, a methyl group, or a trifluoromethyl group. The polymer (A) preferably further includes a structural unit (II) that includes a sulfo group. The polymer (A) preferably further includes a structural unit (III) shown by the following formula (3). R2 in the formula (3) represents a hydrogen atom, a methyl group, or a trifluoromethyl group. R3 represents a linear or branched monovalent hydrocarbon group having 1 to 12 carbon atoms or a monovalent alicyclic group having 3 to 20 carbon atoms, provided that at least one hydrogen atom of the hydrocarbon group or the alicyclic group is substituted with a fluorine atom.
摘要翻译:液浸光刻上层成膜组合物包含(A)包含下式(1)所示的结构单元(I)的聚合物和(S)溶剂。 式(1)中的R 1表示氢原子,甲基或三氟甲基。 聚合物(A)优选还包括包含磺基的结构单元(II)。 聚合物(A)优选还包含由下式(3)表示的结构单元(III)。 式(3)中的R 2表示氢原子,甲基或三氟甲基。 R 3表示碳原子数1〜12的直链或支链一价烃基或碳原子数3〜20的一价脂环式基,其中烃基或脂环族基中的至少一个氢原子被氟原子取代。