摘要:
A process for forming an upper-layer fin and a lower-layer fin of a storage electrode, and a semiconductor integrated circuit device fabricated by the process. When two-layered polycrystalline silicon films are to be sequentially etched to form the upper-layer fin and the lower-layer fin by the dry-etching method using a first mask, the upper polycrystalline silicon film is patterned at first so far as to form the clearance of the upper-layer fins with the minimum working size of the memory cells of a DRAM, to form the upper-layer fin. Next, the lower-layer fin is formed by the dry-etching method using a second mask which has a pattern enlarged in self-alignment from the pattern of the first mask, so that it is given a larger horizontal size than that of the upper-layer fin.
摘要:
A semiconductor integrated circuit device is provided which includes an active region, a shallow groove isolation adjacent to the active region, and a semiconductor element formed in the active region and having a gate. The sum of a width of the active region and a width of the shallow groove isolation constitutes a minimum pitch in the direction of a gate width of the gate, and the width of the active region is set larger than one-half of the minimum pitch.
摘要:
Grooves are defined in a substrate having device isolation regions by dry etching using silicon nitride films and side wall spacers as masks. Thereafter, the side wall spacers lying on side walls of the silicon nitride films are removed and the substrate is subjected to thermal oxidation, whereby the surface of the substrate at a peripheral portion of each active region is subjected to so-called round processing so as to have a sectional shape having a convex rounded shape.
摘要:
Grooves are defined in a substrate having device isolation regions by dry etching using silicon nitride films and side wall spacers as masks. Thereafter, the side wall spacers lying on side walls of the silicon nitride films are removed and the substrate is subjected to thermal oxidation, whereby the surface of the substrate at a peripheral portion of each active region is subjected to so-called round processing so as to have a sectional shape having a convex rounded shape.
摘要:
A heat engine is provided which includes: a boiler unit including an evaporation chamber and a fluid-pool chamber, the evaporation chamber heating a working fluid by supplied heat and generating vapor of the fluid, and the fluid-pool chamber collecting the fluid supplied to the evaporation chamber; an output unit through which the vapor flows, and which converts energy of the vapor to mechanical energy; a condensation unit which condenses the vapor that has passed through the output unit, and refluxes the condensed fluid to the fluid-pool chamber; and a working fluid guide member which is disposed in the boiler unit, and which sucks the fluid in the fluid-pool chamber by using capillary force and supplies the fluid to the evaporation chamber. The evaporation chamber is separated from the fluid-pool chamber. Pressure in the evaporation chamber is higher than pressure in the fluid-pool chamber. The working fluid guide member satisfies (2σ/r)·cos θ>PH−PL.
摘要:
A connector to electrically connect a rotary body having a shaft, the connector includes a connecting terminal, electrically connected to either a power supply or ground, to contact the shaft of the rotary body either at least two points or along a line; and a posture adjuster to hold the connecting terminal to adjust the posture of one of the connecting terminal and the rotary body to maintain contact between the connecting terminal and the shaft of the rotary body.
摘要:
A technique of being capable to decrease the number of times of delivery and receipt of information on a common channel setup between a base station equipment and a base station control equipment. A communication system includes base station equipment and a base station control equipment which controls the base station equipment. The base station control equipment is capable of supplying information necessary for the common channel setup to the base station equipment, and the base station equipment produces a track-record notification signal indicating a track record of the common channel setup while performing the common channel setup on the basis of the information. The base station control equipment does not supply the information necessary for the common channel setup when receiving the track-record notification signal from the base station equipment.
摘要:
In a method of making a multilayer wiring board having a substrate and a wiring pattern formed in the substrate, base films are stacked in a predetermined direction to form a stacked film structure. Each base film includes thermoplastic resin. Pressure and heat are applied to the stacked film structure from its both sides in the stacked direction so that the base films are joined together to form the substrate. At least one of the base films is a combined film including a fiber sheet. Both sides of the fiber sheet are covered with the thermoplastic resin in such a manner that air space remains in the fiber sheet.
摘要:
Light to be measured L and sampling pulse light LSP are each split into M beams, and a time delay of 0, T, 2T, . . . , (M−1)T is given to each of the M-split sampling pulse light beams. The M-split light beams to be measured are then respectively multiplexed with M optical 90-degree hybrids, and M electrical field amplitudes per time T are determined for the light beam to be measured, based on M sets of output currents received at a balance light receiving element that receives light emitted from each of the optical 90-degree hybrids. The amplitudes of the respective wavelength optical signals contained in the light beam to be measured are calculated through Fourier transformations of the field electrical amplitudes. Pulsed light with a spectral width that covers the total frequency bandwidth of the light to be measured is used as the sampling pulse light. Where the total frequency bandwidth of the light to be measured is Δftotal, and the frequency interval of the optical signals contained in the light to be measured is Δf, T≦1/Δftotal and 1/(MT)≦Δf are set.
摘要:
Vertical MISFETs are formed over drive MISFETs and transfer MISFETs. The vertical MISFETs comprise rectangular pillar laminated bodies each formed by laminating a lower semiconductor layer (drain), an intermediate semiconductor layer, and an upper semiconductor layer (source), and gate electrodes formed on corresponding side walls of the laminated bodies with gate insulating films interposed therebetween. In each vertical MISFET, the lower semiconductor layer constitutes a drain, the intermediate semiconductor layer constitutes a substrate (channel region), and the upper semiconductor layer constitutes a source. The lower semiconductor layer, the intermediate semiconductor layer and the upper semiconductor layer are each comprised of a silicon film. The lower semiconductor layer and the upper semiconductor layer are doped with a p type and constituted of a p type silicon film.