Linear motor with reduced cogging
    3.
    发明授权
    Linear motor with reduced cogging 失效
    线性电机齿槽减少

    公开(公告)号:US5214323A

    公开(公告)日:1993-05-25

    申请号:US637282

    申请日:1991-01-03

    IPC分类号: H02K41/03

    CPC分类号: H02K41/03

    摘要: A linear motor is capable of reducing cogging which may be present in the motor. Cogging is an obstruction in realizing constant speed control or high accuracy of position control. The reduction of cogging is accomplished, for example, by pole location or specific detailed shapping of pole iron plates.

    摘要翻译: 线性电动机能够减少可能存在于电动机中的齿槽。 Cogging是实现恒速控制或位置控制精度高的障碍。 例如,通过极位置或极铁板的具体详细成型来实现齿槽的减少。

    Stage device capable of moving an object to be positioned precisely to a target position
    4.
    发明授权
    Stage device capable of moving an object to be positioned precisely to a target position 失效
    舞台装置能够将被定位的物体精确地移动到目标位置

    公开(公告)号:US06538348B2

    公开(公告)日:2003-03-25

    申请号:US09788448

    申请日:2001-02-21

    IPC分类号: H02K4100

    摘要: In a state that a wafer stage is not positioned in the center of the Y-direction traveling range, thrusts Fa, Fb supplied from a pair of linear motors to a Y-direction stage are made different and the Y-direction stage is moved in the X direction so that moments Ma, Mb about the centroid of the Y-direction stage by the thrusts Fa, Fb cancel each other. Since the moments Ma, Mb about the centroid generated by the thrusts cancel each other and the thrusts do not act as forces for rotating the Y-direction stage, the Y-direction stage is not deflected in a yawing direction. Such a stage device as constructed above can prevent deflection in a yawing direction due to displacement of the centroid position of an object to be positioned or a stage and precisely move the object to be positioned to a target position.

    摘要翻译: 在晶片载片台不位于Y方向移动范围的中心的状态下,使从一对线性马达向Y方向载物台供给的推力Fa,Fb不同,Y方向台移动 X方向使马力,Mb关于Y方向台的重心由推力Fa,Fb抵消。 由于关于由推力产生的重心的力矩Ma,Mb彼此抵消,并且推力不作为旋转Y方向级的力,所以Y方向级不会在偏航方向上偏转。 这样构成的舞台装置能够防止由于要定位的物体的重心位置的移位或舞台的摆动方向的偏移,并将待定位的物体精确地移动到目标位置。

    Moving apparatus for optical systems
    5.
    发明授权
    Moving apparatus for optical systems 失效
    光学系统移动装置

    公开(公告)号:US4952011A

    公开(公告)日:1990-08-28

    申请号:US288440

    申请日:1988-12-22

    摘要: A moving apparatus for an optical system is a duplicating machine is arranged as to effect a scanning operation of document images through the movement of two units of mirror platforms respectively. One of the platform moves at a scanning speed while the other platform moves at one half scanning speed. A stator for a polyphase brushless motor is provided along the moving direction of the apparatus on both the side portions of the moving region of each mirror platform. Two sets of rotors of core-less coils operatively react with the stator to form polyphase brushless linear motors. The mirror platforms are driven by the motors at their center of gravity.

    Phase locked loop speed control circuit for controlling speeds and
relative positions of objects
    7.
    发明授权
    Phase locked loop speed control circuit for controlling speeds and relative positions of objects 失效
    用于控制速度的相位锁定环路速度控制电路和对象的相对位置

    公开(公告)号:US5115172A

    公开(公告)日:1992-05-19

    申请号:US523432

    申请日:1990-05-15

    摘要: The invention concerns a phase locked loop speed control circuit for controlling the speeds of two or more objects. It includes pulse generators for generating reference pulses, first counters for counting each of these reference pulses, encoders for detecting relative travelling distances of the objects, second counters for counting encoder pulses from the encoders, first subtracters for subtracting the outputs of the second counters from those of the first counters, second subtractors for subtracting the encoder pulses from the reference pulses, corrector sections for correcting the differences output by the first and the second subtractors, and adjusting sections for adjusting the movements of the objects based on the corrected differences.