Stage device capable of moving an object to be positioned precisely to a target position
    4.
    发明授权
    Stage device capable of moving an object to be positioned precisely to a target position 失效
    舞台装置能够将被定位的物体精确地移动到目标位置

    公开(公告)号:US06538348B2

    公开(公告)日:2003-03-25

    申请号:US09788448

    申请日:2001-02-21

    IPC分类号: H02K4100

    摘要: In a state that a wafer stage is not positioned in the center of the Y-direction traveling range, thrusts Fa, Fb supplied from a pair of linear motors to a Y-direction stage are made different and the Y-direction stage is moved in the X direction so that moments Ma, Mb about the centroid of the Y-direction stage by the thrusts Fa, Fb cancel each other. Since the moments Ma, Mb about the centroid generated by the thrusts cancel each other and the thrusts do not act as forces for rotating the Y-direction stage, the Y-direction stage is not deflected in a yawing direction. Such a stage device as constructed above can prevent deflection in a yawing direction due to displacement of the centroid position of an object to be positioned or a stage and precisely move the object to be positioned to a target position.

    摘要翻译: 在晶片载片台不位于Y方向移动范围的中心的状态下,使从一对线性马达向Y方向载物台供给的推力Fa,Fb不同,Y方向台移动 X方向使马力,Mb关于Y方向台的重心由推力Fa,Fb抵消。 由于关于由推力产生的重心的力矩Ma,Mb彼此抵消,并且推力不作为旋转Y方向级的力,所以Y方向级不会在偏航方向上偏转。 这样构成的舞台装置能够防止由于要定位的物体的重心位置的移位或舞台的摆动方向的偏移,并将待定位的物体精确地移动到目标位置。

    Moving apparatus for optical systems
    6.
    发明授权
    Moving apparatus for optical systems 失效
    光学系统移动装置

    公开(公告)号:US4952011A

    公开(公告)日:1990-08-28

    申请号:US288440

    申请日:1988-12-22

    摘要: A moving apparatus for an optical system is a duplicating machine is arranged as to effect a scanning operation of document images through the movement of two units of mirror platforms respectively. One of the platform moves at a scanning speed while the other platform moves at one half scanning speed. A stator for a polyphase brushless motor is provided along the moving direction of the apparatus on both the side portions of the moving region of each mirror platform. Two sets of rotors of core-less coils operatively react with the stator to form polyphase brushless linear motors. The mirror platforms are driven by the motors at their center of gravity.

    Process and apparatus for the production of webbing take-up spindle
    10.
    发明授权
    Process and apparatus for the production of webbing take-up spindle 失效
    用于生产织带卷取轴的工艺和设备

    公开(公告)号:US5575171A

    公开(公告)日:1996-11-19

    申请号:US325653

    申请日:1994-10-18

    摘要: A process is provided for the production of a webbing take-up spindle by cold-forming of a cylindrical blank. The cylindrical blank is cold-formed into a preform having a flange-shaped disc portion and a spindle portion extending from and in continuation with said disc portion. Wedge action dies, whose pressing portions are in the form of ratchet teeth, are pressed against an upper and lower sides of an outer peripheral portion of the disc portion, respectively, so that ratchet teeth are partially formed and a thin-walled portion is also formed circumferentially along said partially-formed ratchet teeth. The thin-walled portion is then punched to fully form the ratchet teeth. A forming apparatus suitable for use in the practice of the process is also disclosed.

    摘要翻译: 提供了一种用于通过冷成型圆柱形坯料来生产织带卷取轴的方法。 圆柱形坯料被冷成型为具有法兰形盘部分的预成型件和从所述盘部分延伸并连续延伸的心轴部分。 楔形动作模具,其按压部分为棘齿形式,分别压靠在盘部分的外周部分的上侧和下侧,使得棘齿部分地形成,并且薄壁部分也是 沿着所述部分形成的棘轮齿圆周地形成。 然后将薄壁部分冲压以完全形成棘齿。 还公开了适用于实施该方法的成形装置。