公开(公告)号：US5764363A

公开(公告)日：1998-06-09

申请号：US672331

申请日：1996-06-28

申请人： Hiroshi Ooki ,  Yutaka Iwasaki ,  Jun Iwasaki ,  Tsuneyuki Hagiwara

发明人： Hiroshi Ooki ,  Yutaka Iwasaki ,  Jun Iwasaki ,  Tsuneyuki Hagiwara

IPC分类号： G01B11/06 ,  G01N21/956 ,  G02B27/28 ,  G03F7/20 ,  G01J4/00

CPC分类号： G03F7/70483 ,  G01B11/0608 ,  G01N21/956 ,  G02B27/28

摘要： An observation apparatus of the present comprises (i) a light source for generating light; (ii) a separating optical system which splits the light from the light source into two different polarized light beams; (iii) a condenser optical system which converges the two polarized light beams from the separating optical system so as to respectively form light spots on two different positions on a sample object; (iv) a polarization selecting means which has a predetermined analyzer angle and selects a specific polarized light component from composite light made of the two polarized light beams by way of the sample object; (v) light detecting means which detects the polarized light component selected by the polarization selecting means; and (vi) phase difference adjustment means which adjusts a phase difference between the two polarized light beams by way of the sample object and guides composite light composed of the two polarized light beams as circularly polarized light to the polarization selecting means, when the sample object does not modulate both phase and amplitude of the light incident thereon. Accordingly, this observation apparatus can detect a phase difference generated between the two light components respectively emitted from both side of a level difference on the sample object.

摘要翻译： 本发明的观察装置包括：（i）用于产生光的光源; （ii）分离光学系统，其将来自光源的光分成两个不同的偏振光束; （iii）聚光器系统，其将来自分离光学系统的两个偏振光束会聚，以分别在样本物体上的两个不同位置上形成光点; （iv）偏振选择装置，其具有预定的分析器角度，并且通过样本对象从由两个偏振光束构成的复合光中选择特定偏振光分量; （v）光检测装置，其检测由偏振选择装置选择的偏振光分量; 以及（vi）相位差调整装置，当采样物体通过采样对象调节两个偏振光束之间的相位差并将由两个偏振光组成的复合光作为圆偏振光引导到偏振选择装置时， 不调制入射到其上的光的相位和幅度。 因此，该观察装置可以检测从样本物体的水平差两侧分别发射的两个光分量之间产生的相位差。

公开(公告)号：US5694220A

公开(公告)日：1997-12-02

申请号：US540455

申请日：1995-10-10

申请人： Hiroshi Ooki ,  Yutaka Iwasaki ,  Jun Iwasaki

发明人： Hiroshi Ooki ,  Yutaka Iwasaki ,  Jun Iwasaki

IPC分类号： G01B9/04 ,  G01B11/06 ,  G01B11/22 ,  G01B11/00

CPC分类号： B82Y15/00 ,  G01B11/0608

摘要： A minute step measuring method comprises forming a laser spot on an object by condensing light from a laser light source, condensing light beams from the object on an end face of a double-mode waveguide, branching light propagating in the double-mode waveguide into two channel waveguides, detecting light beams emerging from the two channel waveguides, and measuring a minute step existing on the object, using a signal of a difference and a signal of a sum between two signals according to the two light beams detected, wherein measurement is conducted of a signal W.sub.a of the sum when the laser spot is located on one of two flat portions existing before and after the step, and of a signal W.sub.b of the sum when the laser spot is located on the other flat portion, and wherein the step is measured by correcting a difference between reflectivities of the two flat portions existing before and after the step in measuring the minute step, using the signals W.sub.a and W.sub.b.

摘要翻译： 微步测量方法包括：通过聚焦来自激光光源的光来形成激光点，将来自物体的光束聚焦在双模波导的端面上，在双模波导中传播的分支光分成两个 检测从两个通道波导出射的光束，并根据检测到的两个光束，使用差分信号和两个信号之和的信号测量物体上存在的微小步长，其中进行测量 当激光光斑位于步骤之前和之后存在的两个平坦部分中的一个上的信号Wa和当激光光斑位于另一平坦部分上时的和的信号Wb，并且其中步骤 通过使用信号Wa和Wb来校正在测量微步中步骤之前和之后存在的两个平坦部分的反射率之间的差异来测量。

公开(公告)号：US5636201A

公开(公告)日：1997-06-03

申请号：US558999

申请日：1995-11-16

申请人： Hiroshi Ooki

发明人： Hiroshi Ooki

IPC分类号： G11B7/0045 ,  G11B7/005 ,  G11B7/24 ,  G11B7/243 ,  G11B7/254 ,  G11B7/257 ,  G11B7/258 ,  G11B11/10 ,  G11B11/105 ,  G11B7/00

CPC分类号： G11B7/258 ,  G11B11/10515 ,  G11B11/10584 ,  G11B7/0051 ,  G11B7/24 ,  G11B7/243 ,  G11B7/257 ,  G11B2007/2431 ,  G11B2007/24314 ,  G11B2007/24316 ,  G11B7/0045 ,  G11B7/2585 ,  G11B7/2595

摘要： This optical disk comprises neighboring land tracks and a groove track laid therebetween. Light modulating regions are formed in said land tracks and each of the light modulating regions extends in the groove track.

摘要翻译： 该光盘包括相邻的槽脊轨道和铺设在它们之间的槽轨道。 光调制区域形成在所述槽脊轨道中，并且每个光调制区域在槽轨道中延伸。

公开(公告)号：US5621532A

公开(公告)日：1997-04-15

申请号：US381414

申请日：1995-01-31

申请人： Hiroshi Ooki ,  Tomoya Noda

发明人： Hiroshi Ooki ,  Tomoya Noda

IPC分类号： G01N21/27 ,  G02B21/00 ,  G01N21/00

CPC分类号： G02B21/002

摘要： A laser scanning microscope provided with a laser light source, an illuminating optical system for condensing the light from the laser light source to form a light spot on a specimen, a scanning device for causing relative movement of the light spot with respect to the specimen, a photodetector for measuring the amount of light transmitted or reflected by the specimen, and an optical system with positive refraction power for guiding the light beam, transmitted or reflected by the specimen, to the light-receiving plane of the photodetector, wherein the photodetector is composed of a two-dimensional image sensor provided in a position displaced from the conjugate point of the light spot by such an amount that the light beam forms a far-field diffraction pattern of the specimen on the light-receiving plane of the photodetector.

摘要翻译： 一种设置有激光光源的激光扫描显微镜，用于聚集来自激光光源的光以在样本上形成光点的照明光学系统，用于使光斑相对于样本相对移动的扫描装置， 光检测器，用于测量样本透射或反射的光量;以及具有正折射力的光学系统，用于将由样本透射或反射的光束引导到光电检测器的光接收面，其中光电检测器 由设置在从光点的共轭点偏离的位置的二维图像传感器构成，光量在光检测器的光接收面上形成样本的远场衍射图案。

公开(公告)号：US08081378B2

公开(公告)日：2011-12-20

申请号：US11887822

申请日：2006-09-22

申请人： Hisao Osawa ,  Hiroshi Ooki ,  Yumiko Ouchi ,  Yasuo Yonezawa

发明人： Hisao Osawa ,  Hiroshi Ooki ,  Yumiko Ouchi ,  Yasuo Yonezawa

IPC分类号： G02B21/06 ,  G02B21/00

CPC分类号： G02B27/58 ,  G02B21/0032 ,  G02B21/0056 ,  G02B21/0076 ,  G02B21/06 ,  G02B26/06

摘要： A microscope apparatus can generate information of a super-resolved image at high speed. For that purpose, the microscope apparatus of the present invention is equipped with an image-forming optical system for forming an intermediate image of light emitted from a specimen, a relay optical system for forming an image of the intermediate image, an illuminating optical system that jointly owns an optical path of the image-forming optical system and illuminates the specimen through the optical path of the image-forming optical system, and a spatial modulator disposed on a formation plane of the intermediate image. In this microscope apparatus, the specimen is subjected to structured illumination by an image of the spatial modulator. Light from the specimen which is modulated by the structured illumination is automatically remodulated in the spatial modulator.

摘要翻译： 显微镜装置能高速生成超分辨图像的信息。 为此目的，本发明的显微镜装置配备有用于形成从样本发射的光的中间图像的图像形成光学系统，用于形成中间图像的图像的中继光学系统，照明光学系统， 共同拥有图像形成光学系统的光路并通过图像形成光学系统的光路照射样本，以及设置在中间图像的形成平面上的空间调制器。 在该显微镜装置中，通过空间调制器的图像对样本进行结构照明。 由结构化照明调制的样本的光在空间调制器中自动重新调制。

公开(公告)号：US20100195072A1

公开(公告)日：2010-08-05

申请号：US12654590

申请日：2009-12-23

申请人： Hiroshi Ooki ,  Ayako Nakamura

发明人： Hiroshi Ooki ,  Ayako Nakamura

IPC分类号： G03B27/54 ,  G01B11/14

CPC分类号： G01M11/0264 ,  G03F1/44 ,  G03F7/70258 ,  G03F7/706 ,  G03F7/7085

摘要： There is provided an optical characteristic measuring method for measuring an optical characteristic of an optical system which forms, on a second plane, an image of an object arranged on a first plane, the optical characteristic measuring method including: arranging, on the first plane, a first area through which a measuring light passes or by which the measuring light is reflected; arranging a second area, through which the measuring light passes or by which the measuring light is reflected, on the second plane at a position corresponding to the first area; and detecting, via one of the first area and the second area, a light amount of the measuring light via the optical system and the other of the first area and the second area; wherein at least one of the first area and the second area has a shape such that a light amount, of the measuring light which passes or which is reflected via the optical system, is changed depending on the optical characteristic.

摘要翻译： 提供一种光学特性测量方法，用于测量在第二平面上形成布置在第一平面上的物体的图像的光学系统的光学特性，该光学特性测量方法包括：在第一平面上， 测量光通过的第一区域或测量光通过该区域反射; 在对应于第一区域的位置处，在第二平面上布置测量光通过的第二区域或测量光被反射的第二区域; 并且经由所述第一区域和所述第二区域中的一个区域经由所述光学系统和所述第一区域和所述第二区域中的另一个检测所述测量光的光量; 其中，所述第一区域和所述第二区域中的至少一个具有使得通过所述测量光或经由所述光学系统反射的所述测量光的光量根据所述光学特性而改变的形状。

公开(公告)号：US06500511B1

公开(公告)日：2002-12-31

申请号：US09626072

申请日：2000-07-26

申请人： Hiroshi Ooki ,  Toshiyuki Kashiwagi

发明人： Hiroshi Ooki ,  Toshiyuki Kashiwagi

IPC分类号： B32B302

CPC分类号： G11B7/26 ,  Y10T428/21

摘要： An optical disc consisting of a substrate and at least a recording layer formed on the substrate is recycled by peeling off the recording layer from the substrate; and bonding another substrate having a recording layer formed thereon to the substrate from which the recording layer has been removed, whereby a renewed optical disc is provided.

摘要翻译： 由基板和形成在基板上的至少记录层构成的光盘通过从基板上剥离记录层来再循环; 并且将其上形成有记录层的另一基板结合到已经从其去除了记录层的基板，从而提供更新的光盘。

公开(公告)号：US6081051A

公开(公告)日：2000-06-27

申请号：US212030

申请日：1998-12-15

申请人： Kazuyuki Kitazawa ,  Hiroshi Ooki ,  Yutaka Takeuchi ,  Shigeto Murata

发明人： Kazuyuki Kitazawa ,  Hiroshi Ooki ,  Yutaka Takeuchi ,  Shigeto Murata

IPC分类号： H02K7/06

CPC分类号： H02K7/06

摘要： A linear/rotary actuator capable of carrying out both linear motion and rotary motion either individually or concurrently as desired while controlling both motions as desired. A rotary driving motor includes a hollow shaft. When the rotary driving motor rotates a third nut fitted on a spline section of the rotary driving motor, an output shaft rotatably fitted on a linear shaft through bearings is rotated. The linear shaft 21 is provided thereon with a threaded section. A spline section and a first nut is threadedly fitted on the threaded section and a second nut kept stationary is fitted on the spline section. The first nut is rotated while being fixed in a hollow shaft of a linear driving motor. Rotation of the linear driving motor leads to rotation of the first nut, resulting in the linear shaft 21 being linearly moved in an axial direction thereof, so that the output shaft may be linearly moved.

摘要翻译： 一种线性/旋转致动器，其能够根据需要单独地或同时地执行线性运动和旋转运动，同时根据需要控制两个运动。 旋转驱动电动机包括中空轴。 当旋转驱动电机旋转安装在旋转驱动电机的花键部分上的第三螺母时，通过轴承可旋转地装配在直线轴上的输出轴旋转。 直线轴21设置有螺纹部。 花键部分和第一螺母螺纹地安装在螺纹部分上，并且保持静止的第二螺母安装在花键部分上。 第一螺母在固定在线性驱动电动机的中空轴中的同时旋转。 线性驱动电动机的旋转导致第一螺母的旋转，导致直线轴21沿其轴向线性移动，使得输出轴可以线性移动。

公开(公告)号：US10222293B2

公开(公告)日：2019-03-05

申请号：US12654590

申请日：2009-12-23

申请人： Hiroshi Ooki ,  Ayako Nakamura

发明人： Hiroshi Ooki ,  Ayako Nakamura

IPC分类号： G03B27/54 ,  G01M11/02 ,  G03F1/44 ,  G03F7/20

摘要： There is provided an optical characteristic measuring method for measuring an optical characteristic of an optical system which forms, on a second plane, an image of an object arranged on a first plane, the optical characteristic measuring method including: arranging, on the first plane, a first area through which a measuring light passes or by which the measuring light is reflected; arranging a second area, through which the measuring light passes or by which the measuring light is reflected, on the second plane at a position corresponding to the first area; and detecting, via one of the first area and the second area, a light amount of the measuring light via the optical system and the other of the first area and the second area; wherein at least one of the first area and the second area has a shape such that a light amount, of the measuring light which passes or which is reflected via the optical system, is changed depending on the optical characteristic.

公开(公告)号：US20090236543A1

公开(公告)日：2009-09-24

申请号：US12406000

申请日：2009-03-17

申请人： Hiroshi Ooki ,  W. Thomas Novak

发明人： Hiroshi Ooki ,  W. Thomas Novak

IPC分类号： G01N21/64

CPC分类号： G01N21/6458

摘要： A method and system is provided that takes advantage of the atmospheric transmission properties of the Hydrogen Lyman-α radiation line (121.6 nm wavelength) to illuminate a sample with high energy VUV photons at least partially in an atmospheric environment. Thus, according to the principles of the present invention, a sample is illuminated by radiation at the Hydrogen Lyman-α radiation line (121.6 nm wavelength), at least partially in an atmospheric environment, and luminescent radiation from the sample at longer wavelengths is detected. The high energy illuminating photons generate luminescent radiation from the sample at longer wavelengths, typically in the visible wavelength range, and this radiation can then be imaged, e.g. with a normal visible microscope.

摘要翻译： 提供了一种方法和系统，该方法和系统利用氢雷曼-α辐射线（121.6nm波长）的大气透射特性，以在大气环境中至少部分地用高能VUV光子照射样品。 因此，根据本发明的原理，至少部分地在大气环境中，在氢Lyman-α辐射线（121.6nm波长）处的辐射照射样品，并且检测来自较长波长的样品的发光辐射 。 高能照射光子在较长的波长（通常在可见光波长范围内）产生来自样品的发光辐射，然后可以对该辐射进行成像。 用正常的可见显微镜。