Apparatus for observing a surface using polarized light
    1.
    发明授权
    Apparatus for observing a surface using polarized light 失效
    使用偏振光观察表面的装置

    公开(公告)号:US5764363A

    公开(公告)日:1998-06-09

    申请号:US672331

    申请日:1996-06-28

    摘要: An observation apparatus of the present comprises (i) a light source for generating light; (ii) a separating optical system which splits the light from the light source into two different polarized light beams; (iii) a condenser optical system which converges the two polarized light beams from the separating optical system so as to respectively form light spots on two different positions on a sample object; (iv) a polarization selecting means which has a predetermined analyzer angle and selects a specific polarized light component from composite light made of the two polarized light beams by way of the sample object; (v) light detecting means which detects the polarized light component selected by the polarization selecting means; and (vi) phase difference adjustment means which adjusts a phase difference between the two polarized light beams by way of the sample object and guides composite light composed of the two polarized light beams as circularly polarized light to the polarization selecting means, when the sample object does not modulate both phase and amplitude of the light incident thereon. Accordingly, this observation apparatus can detect a phase difference generated between the two light components respectively emitted from both side of a level difference on the sample object.

    摘要翻译: 本发明的观察装置包括:(i)用于产生光的光源; (ii)分离光学系统,其将来自光源的光分成两个不同的偏振光束; (iii)聚光器系统,其将来自分离光学系统的两个偏振光束会聚,以分别在样本物体上的两个不同位置上形成光点; (iv)偏振选择装置,其具有预定的分析器角度,并且通过样本对象从由两个偏振光束构成的复合光中选择特定偏振光分量; (v)光检测装置,其检测由偏振选择装置选择的偏振光分量; 以及(vi)相位差调整装置,当采样物体通过采样对象调节两个偏振光束之间的相位差并将由两个偏振光组成的复合光作为圆偏振光引导到偏振选择装置时, 不调制入射到其上的光的相位和幅度。 因此,该观察装置可以检测从样本物体的水平差两侧分别发射的两个光分量之间产生的相位差。

    Minute step measuring method
    2.
    发明授权
    Minute step measuring method 失效
    分钟步测量方法

    公开(公告)号:US5694220A

    公开(公告)日:1997-12-02

    申请号:US540455

    申请日:1995-10-10

    CPC分类号: B82Y15/00 G01B11/0608

    摘要: A minute step measuring method comprises forming a laser spot on an object by condensing light from a laser light source, condensing light beams from the object on an end face of a double-mode waveguide, branching light propagating in the double-mode waveguide into two channel waveguides, detecting light beams emerging from the two channel waveguides, and measuring a minute step existing on the object, using a signal of a difference and a signal of a sum between two signals according to the two light beams detected, wherein measurement is conducted of a signal W.sub.a of the sum when the laser spot is located on one of two flat portions existing before and after the step, and of a signal W.sub.b of the sum when the laser spot is located on the other flat portion, and wherein the step is measured by correcting a difference between reflectivities of the two flat portions existing before and after the step in measuring the minute step, using the signals W.sub.a and W.sub.b.

    摘要翻译: 微步测量方法包括:通过聚焦来自激光光源的光来形成激光点,将来自物体的光束聚焦在双模波导的端面上,在双模波导中传播的分支光分成两个 检测从两个通道波导出射的光束,并根据检测到的两个光束,使用差分信号和两个信号之和的信号测量物体上存在的微小步长,其中进行测量 当激光光斑位于步骤之前和之后存在的两个平坦部分中的一个上的信号Wa和当激光光斑位于另一平坦部分上时的和的信号Wb,并且其中步骤 通过使用信号Wa和Wb来校正在测量微步中步骤之前和之后存在的两个平坦部分的反射率之间的差异来测量。

    Detection of phase and amplitude modulation information on optical
medium with a waveguide
    3.
    发明授权
    Detection of phase and amplitude modulation information on optical medium with a waveguide 失效
    用波导检测光介质上的相位和幅度调制信息

    公开(公告)号:US5444689A

    公开(公告)日:1995-08-22

    申请号:US109904

    申请日:1993-08-23

    摘要: An optical recording medium includes a substrate, first information for modulating a phase of read light radiated on the substrate, and second information for modulating an amplitude of the read light radiated on the substrate. The first information and the second information are arranged in parallel to each other on the substrate in a predetermined arrangement direction. A method and apparatus for performing reproduction using this medium are also disclosed. The method includes the step of radiating read light on the optical recording medium in which the first information for modulating the phase of the read light and the second information for modulating the amplitude of the read light are recorded, the step of receiving light through the optical recording medium, the detection step of independently detecting phase modulation information and amplitude modulation information of the optical recording medium using the received light, and the step of reproducing the first information and the second information from the information in the detection step.

    摘要翻译: 光记录介质包括基板,用于调制在基板上辐射的读取光的相位的第一信息,以及用于调制在基板上辐射的读取光的振幅的第二信息。 第一信息和第二信息在预定排列方向上在基板上彼此平行地布置。 还公开了使用该介质进行再现的方法和装置。 该方法包括在光记录介质上照射读取光的步骤,其中记录了用于调制读取光的相位的第一信息和用于调制读取光的振幅的第二信息,通过光学器件接收光的步骤 记录介质,使用所接收的光独立地检测所述光记录介质的相位调制信息和幅度调制信息的检测步骤,以及从所述检测步骤中的信息再现所述第一信息和所述第二信息的步骤。

    Confocal laser scanning mode interference contrast microscope, and
method of measuring minute step height and apparatus with said
microscope
    4.
    发明授权
    Confocal laser scanning mode interference contrast microscope, and method of measuring minute step height and apparatus with said microscope 失效
    共焦激光扫描模式干涉对比显微镜,以及用该显微镜测量微步高和装置的方法

    公开(公告)号:US5581345A

    公开(公告)日:1996-12-03

    申请号:US364709

    申请日:1994-12-28

    IPC分类号: G01B11/06 G02B21/00 G01B11/00

    摘要: A confocal laser scanning mode interferene contrast microscope comprises a laser source, an illuminating optical system for condensing a light beam from the laser source and forming a light spot on an object to be examined, a condensing optical system for condensing the light beam from the object to be examined on a detecting surface, a detecting device for detecting the light beam condensed on the detecting surface, the detecting device having a substrate formed with a channel waveguide and two light detecting elements, the channel waveguide having a double mode channel waveguide having an entrance end surface on the detecting surface and a waveguide fork which forks the double mode channel waveguide into two channel waveguides, the two detecting elements detecting lights propagated through the two channel waveguides, a scanning device for moving the object to be examined and the light spot relative to each other, and a signal processing device for producing differential information of the object to be examined by the detection signals of the detecting elements.

    摘要翻译: 共焦激光扫描模式干涉对比显微镜包括激光源,用于聚集来自激光源的光束并在被检体上形成光斑的照明光学系统,用于会聚来自物体的光束的聚光光学系统 在检测面上检查的检测装置,检测在检测面上聚光的光束的检测装置,检测装置具有形成有通道波导的基板和两个光检测元件,该通道波导具有双模式通道波导,其具有 检测表面上的入射端面和将双模通道波导分叉成两个通道波导的波导叉,两个检测元件检测通过两个通道波导传播的光,用于移动被检体的扫描装置和光点 相对于彼此,以及用于产生差分信息的信号处理装置 f是由检测元件的检测信号检查的物体。

    Communication apparatus, communication method, program, and communication system
    5.
    发明授权
    Communication apparatus, communication method, program, and communication system 有权
    通信设备,通信方式,程序和通信系统

    公开(公告)号:US08509766B2

    公开(公告)日:2013-08-13

    申请号:US13529552

    申请日:2012-06-21

    申请人: Jun Iwasaki

    发明人: Jun Iwasaki

    IPC分类号: H04W4/00

    CPC分类号: H04B5/02

    摘要: A communication apparatus is provided including a display unit, a storage unit capable of storing therein display condition information in which a display instruction for causing the display unit to perform display processing or a non-display instruction for not allowing the display unit to perform the display processing is set, and a short distance wireless communication control unit for controlling a connection establishment communication with a communication party by a communication system based on electric field coupling or magnetic field coupling and data communication with the communication party by the communication system. The short distance wireless communication control unit judges whether the non-display instruction is set in the display condition information stored in the storage unit, and does not make the data communication with the communication party when judging that the non-display instruction is set, the communication control unit.

    摘要翻译: 提供一种通信装置,包括:显示单元;存储单元,其能够存储显示条件信息,其中显示单元进行显示处理的显示指令或不允许显示单元执行显示的非显示指令 设置短距离无线通信控制单元,其用于通过通信系统通过通信系统基于电场耦合或磁场耦合以及与通信方的数据通信来控制与通信方的连接建立通信。 短距离无线通信控制单元判定在显示条件信息中是否设置了非显示指示,并且在判断出非显示指示被设定时不与通信对方进行数据通信, 通讯控制单元。

    Wireless communication system, data transmitter and wireless communication method
    6.
    发明授权
    Wireless communication system, data transmitter and wireless communication method 失效
    无线通信系统,数据发射机和无线通信方式

    公开(公告)号:US07804829B2

    公开(公告)日:2010-09-28

    申请号:US11328170

    申请日:2006-01-10

    申请人: Jun Iwasaki

    发明人: Jun Iwasaki

    IPC分类号: H04L12/28

    摘要: A wireless communication system includes a data transmitter, having an image pickup device, and a plurality of data receivers, for performing interactive wireless data communications between the data transmitter and each of the data receivers. The data transmitter includes a display for displaying an image of a data receiver photographed by the image pickup device, from among the plurality of data receivers, a data transmission destination recognizer, a directional antenna controller for directing a directional antenna to the data receiver recognized as a transmission destination of transmission data by the data transmission destination recognizer, a command transmitter for transmitting a communication designation command to the data receiver, and a device address storage for storing a device address of the data receiver. The data receiver includes a command receiver, and an ACK transmitter.

    摘要翻译: 无线通信系统包括具有图像拾取装置和多个数据接收器的数据发射器,用于在数据发射器和每个数据接收器之间执行交互式无线数据通信。 数据发送器包括用于显示由图像拾取装置拍摄的数据接收器的图像的显示器,来自多个数据接收器之中的数据发送目的地识别器,定向天线控制器,用于将定向天线引导到被识别为 由数据发送目的地识别器发送数据的发送目的地,用于向数据接收器发送通信指定命令的命令发送器,以及用于存储数据接收器的设备地址的设备地址存储器。 数据接收器包括命令接收器和ACK发送器。

    Wireless communication system using an impulse signal train, a wireless transmission apparatus, a wireless reception apparatus, a wireless transmission method, and a wireless reception method
    7.
    发明授权
    Wireless communication system using an impulse signal train, a wireless transmission apparatus, a wireless reception apparatus, a wireless transmission method, and a wireless reception method 有权
    使用脉冲信号串的无线通信系统,无线发送装置,无线接收装置,无线发送方法以及无线接收方法

    公开(公告)号:US07330497B2

    公开(公告)日:2008-02-12

    申请号:US11518659

    申请日:2006-09-11

    IPC分类号: H04B1/00

    摘要: A wireless communication system performs high-speed and low-speed transmission of information signals for short-distance communication and long-distance communication by using a short spread code and a long spread code, respectively. A wireless transmission unit includes an interface, a buffer, a spreading processor, a UWB wireless transmitter, a controller, a data memory, and an antenna. The controller detects the entry of information signal into the buffer, and then determines the transmission rate depending on the state of wireless linkage and indicates the determined transmission rate to the spreading processor.

    摘要翻译: 无线通信系统通过使用短扩展码和长扩展码分别进行用于短距离通信和长距离通信的信息信号的高速和低速传输。 无线传输单元包括接口,缓冲器,扩展处理器,UWB无线发射器,控制器,数据存储器和天线。 控制器检测信息信号进入缓冲器,然后根据无线链接的状态确定传输速率,并指示确定的传播速率到扩展处理器。

    Exposure mask and exposure method using the same
    8.
    发明授权
    Exposure mask and exposure method using the same 失效
    曝光掩模和曝光方法使用相同

    公开(公告)号:US06638670B1

    公开(公告)日:2003-10-28

    申请号:US09664030

    申请日:2000-09-19

    IPC分类号: G03F900

    摘要: An exposure mask for exposing a photosensitive resist layer formed on the surface of a substrate having an element so that the resist layer remains in the shape of an ABS pattern includes a mark provided within a light transmission section for exposure. The mark determines a relative position between the substrate and the light transmission section on the basis of the element. An exposure method using the exposure mask includes the steps of: determining a relative position between the substrate and the light transmission section on the basis of the element by the mark provided within the light transmission section of the exposure mask; exposing the photosensitive resist layer on the surface of the substrate through the light transmission section of the exposure mask; and developing the exposed photosensitive resist layer so that the resist layer is left in the shape of the ABS pattern.

    摘要翻译: 一种曝光掩模,用于曝光形成在具有元件的基板的表面上的光敏抗蚀剂层,使得抗蚀剂层保持为ABS图案的形状包括设置在用于曝光的光透射部分内的标记。 该标记基于该元件确定基板和光透射部分之间的相对位置。 使用曝光掩模的曝光方法包括以下步骤:基于所述元件,通过设置在曝光掩模的光透射部分内的标记来确定基板和光透射部分之间的相对位置; 通过曝光掩模的光透射部分使基片的表面上的光敏抗蚀剂层曝光; 并且使曝光的光敏抗蚀剂层显影,使得抗蚀剂层保持为ABS图案的形状。

    Optical waveguide device and optical microscope using the same
    9.
    发明授权
    Optical waveguide device and optical microscope using the same 失效
    光波导器件和光学显微镜使用相同

    公开(公告)号:US5452382A

    公开(公告)日:1995-09-19

    申请号:US232192

    申请日:1994-05-04

    摘要: An optical waveguide device formed by a material showing anisotropy for refraction index and an optical instrument using the same device. The device comprises an electro-optic single crystal substrate on which are formed a first core portion higher in refractive index than the substrate with respect to both ordinary and extraordinary rays and a second core portion higher in refractive index than the substrate with respect to extraordinary rays pnly whereby the first core portion forms a single-moded waveguide for ordinary rays, and the overlapping region of the first and second core portions forms a double-moded waveguide for extraordinary rays. This optical waveguide device is used in place of a pinhole elementin an optical system of a confocal scanning optical microscopeso as to guide illuminating light to an object to be detected and to guide the reflected light from the object into a detector. This microscope includes a polarization conversion element for converting the polarizing direction of the illuminating light to one different from that of reflected light. The optical waveguide device functions as a single-moded waveguide for the illuminating light and as a double-moded waveguide for the reflected light.

    摘要翻译: PCT No.PCT / JP93 / 01264 Sec。 371日期:1994年5月4日 102(e)日期1994年5月4日PCT 1994年7月25日PCT公布。 公开号WO94 / 06041 日期:1994年3月17日。一种由表示折射率各向异性的材料形成的光波导装置和使用该装置的光学仪器。 该器件包括电光单晶衬底,在其上形成有相对于普通和非常光线而具有比衬底更高的折射率的第一芯部分,以及相对于非常光线而言,折射率高于衬底的第二芯部分 由此第一芯部分形成用于普通光线的单模波导,并且第一和第二芯部分的重叠区域形成用于非常光线的双模波导。 该光波导装置用于代替共焦扫描光学显微镜的光学系统中的针孔元件,以将照明光引导到待检测的物体,并将来自物体的反射光引导到检测器中。 该显微镜包括用于将照明光的偏振方向转换为与反射光不同的偏振方向的偏振转换元件。 光波导器件用作用于照明光的单模波导和用作反射光的双模波导。

    BPSK demodulator using compound phase-locked loop
    10.
    发明授权
    BPSK demodulator using compound phase-locked loop 失效
    BPSK解调器采用复合锁相环

    公开(公告)号:US5347228A

    公开(公告)日:1994-09-13

    申请号:US94560

    申请日:1993-07-20

    申请人: Jun Iwasaki

    发明人: Jun Iwasaki

    CPC分类号: H04L27/2273 H04L2027/0051

    摘要: A BPSK demodulator having a compound phase locked loop, such as a Costas loop, is disclosed. An in-phase component, signal SI from a Costas loop demodulating section 10 is converted by a symmetrical binary-valued signal forming converting circuit 21 into binary-valued signals, while a quadrature signal component SQ from the demodulating section 10 is also converted by a non-symmetrical binary-valued signal forming converting circuit 22 into binary-valued signals. The outputs of the circuits 21, 22 are supplied to a flip-flop 23 as its data input and its clock input, respectively. An output of flip-flop 23 is integrated by an integrating circuit 25. A CPU 28 decides whether or not an integrated value from integrating circuit 25 exceeds a predetermined threshold value TH to decide whether or not the Costas loop demodulating section 10 is in the locked state. In this manner, the locked state can be detected by a simplified constitution, while a pseudo-locked state may also be detected.

    摘要翻译: 公开了具有复合锁相环的BPSK解调器,例如科斯塔斯(Costas)环路。 来自科斯塔斯环路解调部分10的同相分量信号SI由对称二进制值信号形成转换电路21转换为二进制值信号,而来自解调部分10的正交信号分量SQ也被转换成 非对称二进制值信号形成转换电路22变成二值信号。 电路21,22的输出分别作为其数据输入和时钟输入提供给触发器23。 触发器23的输出由积分电路25积分。CPU28判定来自积分电路25的积分值是否超过预定阈值TH,以判定科斯塔斯回路解调部分10是否处于锁定状态 州。 以这种方式,可以通过简化的结构来检测锁定状态,同时也可以检测伪锁定状态。