Non-volatile semiconductor storage device and manufacturing method thereof
    1.
    发明授权
    Non-volatile semiconductor storage device and manufacturing method thereof 失效
    非易失性半导体存储装置及其制造方法

    公开(公告)号:US07777227B2

    公开(公告)日:2010-08-17

    申请号:US11834886

    申请日:2007-08-07

    IPC分类号: H01L29/04

    摘要: A non-volatile semiconductor storage device includes a substrate, a first insulating layer formed on the substrate, a semiconductor layer formed of polysilicon on the first insulating layer, a pair of conductor regions formed on the first insulating layer to pass through the semiconductor layer and to sandwich a part of the semiconductor layer, and formed of a metal or a silicide, a tunnel layer formed on the part of the semiconductor layer sandwiched between the pair of conductor regions, a charge storage layer formed on the tunnel layer, a second insulating layer formed on the charge storage layer, and a control gate formed on the second insulating layer.

    摘要翻译: 非易失性半导体存储装置包括基板,形成在基板上的第一绝缘层,在第一绝缘层上由多晶硅形成的半导体层,形成在第一绝缘层上以穿过半导体层的一对导体区域,以及 夹在半导体层的一部分上,由金属或硅化物形成,形成在夹在一对导体区域之间的半导体层的一部分上的隧道层,形成在隧道层上的电荷存储层,第二绝缘层 形成在电荷存储层上的层,以及形成在第二绝缘层上的控制栅极。

    NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
    2.
    发明申请
    NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME 失效
    非易失性半导体存储器件及其制造方法

    公开(公告)号:US20080111178A1

    公开(公告)日:2008-05-15

    申请号:US11835694

    申请日:2007-08-08

    IPC分类号: H01L29/788 H01L21/336

    摘要: It is made possible to provide a memory device that can be made very small in size and have a high capacity while being able to effectively suppress short-channel effects. A nonvolatile semiconductor memory device includes: a first insulating film formed on a semiconductor substrate; a semiconductor layer formed above the semiconductor substrate so that the first insulating film is interposed between the semiconductor layer and the semiconductor substrate; a NAND cell having a plurality of memory cell transistors connected in series, each of the memory cell transistors having a gate insulating film formed on the semiconductor layer, a floating gate formed on the gate insulating film, a second insulating film formed on the floating gate, and a control gate formed on the second insulating film; a source region having an impurity diffusion layer formed in one side of the NAND cell; and a drain region having a metal electrode formed in the other side of the NAND cell.

    摘要翻译: 可以提供一种可以制造尺寸非常小并且具有高容量的存储器件,同时能够有效地抑制短沟道效应。 非易失性半导体存储器件包括:形成在半导体衬底上的第一绝缘膜; 半导体层,其形成在所述半导体衬底上方,使得所述第一绝缘膜插入在所述半导体层和所述半导体衬底之间; 具有串联连接的多个存储单元晶体管的NAND单元,每个存储单元晶体管具有形成在所述半导体层上的栅极绝缘膜,形成在所述栅极绝缘膜上的浮置栅极,形成在所述浮动栅极上的第二绝缘膜 以及形成在所述第二绝缘膜上的控制栅极; 源区,其具有形成在NAND单元的一侧的杂质扩散层; 以及在NAND单元的另一侧形成有金属电极的漏极区域。

    Nonvolatile semiconductor memory device and method for manufacturing the same
    5.
    发明授权
    Nonvolatile semiconductor memory device and method for manufacturing the same 有权
    非易失性半导体存储器件及其制造方法

    公开(公告)号:US08710573B2

    公开(公告)日:2014-04-29

    申请号:US12831323

    申请日:2010-07-07

    IPC分类号: H01L29/788

    摘要: It is made possible to provide a memory device that can be made very small in size and have a high capacity while being able to effectively suppress short-channel effects. A nonvolatile semiconductor memory device includes: a first insulating film formed on a semiconductor substrate; a semiconductor layer formed above the semiconductor substrate so that the first insulating film is interposed between the semiconductor layer and the semiconductor substrate; a NAND cell having a plurality of memory cell transistors connected in series, each of the memory cell transistors having a gate insulating film formed on the semiconductor layer, a floating gate formed on the gate insulating film, a second insulating film formed on the floating gate, and a control gate formed on the second insulating film; a source region having an impurity diffusion layer formed in one side of the NAND cell; and a drain region having a metal electrode formed in the other side of the NAND cell.

    摘要翻译: 可以提供一种可以制造尺寸非常小并且具有高容量的存储器件,同时能够有效地抑制短沟道效应。 非易失性半导体存储器件包括:形成在半导体衬底上的第一绝缘膜; 半导体层,其形成在所述半导体衬底上方,使得所述第一绝缘膜插入在所述半导体层和所述半导体衬底之间; 具有串联连接的多个存储单元晶体管的NAND单元,每个存储单元晶体管具有形成在所述半导体层上的栅极绝缘膜,形成在所述栅极绝缘膜上的浮置栅极,形成在所述浮动栅极上的第二绝缘膜 以及形成在所述第二绝缘膜上的控制栅极; 源区,其具有形成在NAND单元的一侧的杂质扩散层; 以及在NAND单元的另一侧形成有金属电极的漏极区域。

    NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME
    6.
    发明申请
    NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING THE SAME 有权
    非易失性半导体存储器件及其制造方法

    公开(公告)号:US20100270607A1

    公开(公告)日:2010-10-28

    申请号:US12831323

    申请日:2010-07-07

    IPC分类号: H01L29/788

    摘要: It is made possible to provide a memory device that can be made very small in size and have a high capacity while being able to effectively suppress short-channel effects. A nonvolatile semiconductor memory device includes: a first insulating film formed on a semiconductor substrate; a semiconductor layer formed above the semiconductor substrate so that the first insulating film is interposed between the semiconductor layer and the semiconductor substrate; a NAND cell having a plurality of memory cell transistors connected in series, each of the memory cell transistors having a gate insulating film formed on the semiconductor layer, a floating gate formed on the gate insulating film, a second insulating film formed on the floating gate, and a control gate formed on the second insulating film; a source region having an impurity diffusion layer formed in one side of the NAND cell; and a drain region having a metal electrode formed in the other side of the NAND cell.

    摘要翻译: 可以提供一种可以制造尺寸非常小并且具有高容量的存储器件,同时能够有效地抑制短沟道效应。 非易失性半导体存储器件包括:形成在半导体衬底上的第一绝缘膜; 半导体层,其形成在所述半导体衬底上方,使得所述第一绝缘膜插入在所述半导体层和所述半导体衬底之间; 具有串联连接的多个存储单元晶体管的NAND单元,每个存储单元晶体管具有形成在所述半导体层上的栅极绝缘膜,形成在所述栅极绝缘膜上的浮置栅极,形成在所述浮动栅极上的第二绝缘膜 以及形成在所述第二绝缘膜上的控制栅极; 源区,其具有形成在NAND单元的一侧的杂质扩散层; 以及在NAND单元的另一侧形成有金属电极的漏极区域。

    Nonvolatile semiconductor memory device and method for manufacturing the same
    7.
    发明授权
    Nonvolatile semiconductor memory device and method for manufacturing the same 失效
    非易失性半导体存储器件及其制造方法

    公开(公告)号:US07777270B2

    公开(公告)日:2010-08-17

    申请号:US11835694

    申请日:2007-08-08

    IPC分类号: H01L29/788

    摘要: It is made possible to provide a memory device that can be made very small in size and have a high capacity while being able to effectively suppress short-channel effects. A nonvolatile semiconductor memory device includes: a first insulating film formed on a semiconductor substrate; a semiconductor layer formed above the semiconductor substrate so that the first insulating film is interposed between the semiconductor layer and the semiconductor substrate; a NAND cell having a plurality of memory cell transistors connected in series, each of the memory cell transistors having a gate insulating film formed on the semiconductor layer, a floating gate formed on the gate insulating film, a second insulating film formed on the floating gate, and a control gate formed on the second insulating film; a source region having an impurity diffusion layer formed in one side of the NAND cell; and a drain region having a metal electrode formed in the other side of the NAND cell.

    摘要翻译: 可以提供一种可以制造尺寸非常小并且具有高容量的存储器件,同时能够有效地抑制短沟道效应。 非易失性半导体存储器件包括:形成在半导体衬底上的第一绝缘膜; 半导体层,其形成在所述半导体衬底上方,使得所述第一绝缘膜插入在所述半导体层和所述半导体衬底之间; 具有串联连接的多个存储单元晶体管的NAND单元,每个存储单元晶体管具有形成在所述半导体层上的栅极绝缘膜,形成在所述栅极绝缘膜上的浮置栅极,形成在所述浮动栅极上的第二绝缘膜 以及形成在所述第二绝缘膜上的控制栅极; 源区,其具有形成在NAND单元的一侧的杂质扩散层; 以及在NAND单元的另一侧形成有金属电极的漏极区域。

    NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD THEREOF
    8.
    发明申请
    NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD THEREOF 失效
    非挥发性半导体存储器件及其制造方法

    公开(公告)号:US20080283839A1

    公开(公告)日:2008-11-20

    申请号:US11834886

    申请日:2007-08-07

    IPC分类号: H01L29/04 H01L21/336

    摘要: A non-volatile semiconductor storage device includes a substrate, a first insulating layer formed on the substrate, a semiconductor layer formed of polysilicon on the first insulating layer, a pair of conductor regions formed on the first insulating layer to pass through the semiconductor layer and to sandwich a part of the semiconductor layer, and formed of a metal or a silicide, a tunnel layer formed on the part of the semiconductor layer sandwiched between the pair of conductor regions, a charge storage layer formed on the tunnel layer, a second insulating layer formed on the charge storage layer, and a control gate formed on the second insulating layer.

    摘要翻译: 非易失性半导体存储装置包括基板,形成在基板上的第一绝缘层,在第一绝缘层上由多晶硅形成的半导体层,形成在第一绝缘层上以穿过半导体层的一对导体区域,以及 夹在半导体层的一部分上,由金属或硅化物形成,形成在夹在一对导体区域之间的半导体层的一部分上的隧道层,形成在隧道层上的电荷存储层,第二绝缘层 形成在电荷存储层上的层,以及形成在第二绝缘层上的控制栅极。