公开(公告)号：US20090173888A1

公开(公告)日：2009-07-09

申请号：US12318583

申请日：2008-12-31

申请人： Hiroyasu SHICHI ,  Shinichi MATSUBARA ,  Takashi OHSHIMA ,  Satoshi TOMIMATSU ,  Tomihiro HASHIZUME ,  Tohru ISHITANI

发明人： Hiroyasu SHICHI ,  Shinichi MATSUBARA ,  Takashi OHSHIMA ,  Satoshi TOMIMATSU ,  Tomihiro HASHIZUME ,  Tohru ISHITANI

IPC分类号： H01J3/14 ,  H01J27/02

CPC分类号： H01J27/26 ,  H01J37/08 ,  H01J2237/0805 ,  H01J2237/0807 ,  H01J2237/182

摘要： A gas field ion source that can simultaneously increase a conductance during rough vacuuming and reduce an extraction electrode aperture diameter from the viewpoint of the increase of ion current. The gas field ion source has a mechanism to change a conductance in vacuuming a gas molecule ionization chamber. That is, the conductance in vacuuming a gas molecule ionization chamber is changed in accordance with whether or not an ion beam is extracted from the gas molecule ionization chamber. By forming lids as parts of the members constituting the mechanism to change the conductance with a bimetal alloy, the conductance can be changed in accordance with the temperature of the gas molecule ionization chamber, for example the conductance is changed to a relatively small conductance at a relatively low temperature and to a relatively large conductance at a relatively high temperature.

摘要翻译： 一种气体离子源，其可以在粗吸真空中同时增加电导，并且从离子电流的增加的角度降低提取电极的孔直径。 气体离子源具有改变真空气体分子离子化室中的电导的机理。 也就是说，根据是否从气体分子离子化室抽出离子束，改变对气体分子离子化室进行抽真空的电导。 通过将盖子形成为构成用双金属合金改变电导的机构的部件的部分，可以根据气体分子离子化室的温度来改变电导率，例如，电导率变为相对小的电导率 相对较低的温度和相对高的温度下的相对较大的电导率。

公开(公告)号：US20090101817A1

公开(公告)日：2009-04-23

申请号：US12252862

申请日：2008-10-16

申请人： Takashi OHSHIMA ,  Michio Hatano ,  Hideyuki Nagaishi ,  Mitsugu Sato ,  Muneyuki Fukuda

发明人： Takashi OHSHIMA ,  Michio Hatano ,  Hideyuki Nagaishi ,  Mitsugu Sato ,  Muneyuki Fukuda

IPC分类号： G01N23/00

CPC分类号： H01J37/244 ,  H01J37/28 ,  H01J37/3056 ,  H01J2237/2441 ,  H01J2237/2443 ,  H01J2237/2444 ,  H01J2237/2445 ,  H01J2237/2482

摘要： The present invention provides a highly sensitive, thin detector useful for observing low-voltage, high-resolution SEM images, and provides a charged particle beam application apparatus based on such a detector. The charged particle beam application apparatus includes a charged particle irradiation source, a charged particle optics for irradiating a sample with a charged particle beam emitted from the charged particle irradiation source, and an electron detection section for detecting electrons that are secondarily generated from the sample. The electron detection section includes a diode device that is a combination of a phosphor layer, which converts the electrons to an optical signal, and a device for converting the optical signal to electrons and subjecting the electrons to avalanche multiplication, or includes a diode device having an electron absorption region that is composed of at least a wide-gap semiconductor substrate with a bandgap greater than 2 eV.

摘要翻译： 本发明提供了一种用于观察低电压，高分辨率SEM图像的高灵敏度，薄的检测器，并提供了基于这种检测器的带电粒子束施加装置。 带电粒子束施加装置包括带电粒子照射源，用于从带电粒子照射源发射的带电粒子束照射样品的带电粒子光学器件和用于检测从样品二次产生的电子的电子检测部分。 电子检测部分包括二极管器件，其是将电子转换成光信号的荧光体层的组合，以及用于将光信号转换为电子并使电子进行雪崩倍增的器件，或包括具有 至少由带隙大于2eV的宽间隙半导体衬底构成的电子吸收区域。

公开(公告)号：US20130063029A1

公开(公告)日：2013-03-14

申请号：US13666119

申请日：2012-11-01

申请人： Keigo KASUYA ,  Takashi OHSHIMA ,  Souichi KATAGIRI ,  Shigeru KOKUBO ,  Hideo TODOKORO

发明人： Keigo KASUYA ,  Takashi OHSHIMA ,  Souichi KATAGIRI ,  Shigeru KOKUBO ,  Hideo TODOKORO

IPC分类号： H01J19/70 ,  H01J19/82

CPC分类号： H01J1/304 ,  H01J37/073 ,  H01J37/265 ,  H01J2237/022 ,  H01J2237/06325 ,  H01J2237/0653 ,  H01J2237/0656

摘要： Provided is a charged particle beam apparatus, which can emit a stable electron beam, having high brightness and a narrow energy width. The charged particle beam apparatus comprises a field emission electron source, electrodes for applying an electric field to the field emission electron source, and a vacuum exhaust unit for keeping the pressure around the field emission electron source at 1×10−8 Pa or less. The apparatus is so constituted as to use such one of the electron beams emitted as has an electron-beam-center radiation angle of 1×10−2sr or less, and to use the electric current thereof, the second order differentiation of which is negative or zero with respect to the time, and which reduces at a rate of 10% or less per hour. The charged particle beam apparatus further comprises a heating unit for the field emission electron source, and a detection unit for the electric current of the electron beam. The field emission electron source is repeatedly heated to keep the electric current of the electron beam to be emitted, at a predetermined value or higher.

摘要翻译： 提供一种带电粒子束装置，其能够发射具有高亮度和窄能量宽度的稳定电子束。 带电粒子束装置包括场发射电子源，用于向场发射电子源施加电场的电极和用于将场致发射电子源周围的压力保持在1×10 -8 Pa以下的真空排气单元。 该装置构成为使用发射的电子束中心辐射角为1×10-2sr以下的电子束，并使用其电流，其二阶微分为负 或相对于时间为零，并以每小时10％或更少的速率减少。 带电粒子束装置还包括用于场发射电子源的加热单元和用于电子束电流的检测单元。 重复加热场致发射电子源以使电子束的电流保持在规定值以上。