摘要:
An apparatus, for forming a film, includes an ink jet head having a plurality of nozzles for discharging a liquid, a rotating device for rotating about a rotary axis a coating-object substrate onto which liquid discharged from the ink jet head is deposited, a relatively moving device for moving the ink jet head and the coating-object substrate relatively to each other between a nearby region of the coating-object substrate near the rotary axis and a separate region of the coating-object substrate separate from the rotary axis, and a relative movement control device for controlling the relatively moving device so that an angular velocity of rotation by the rotating device is reduced responsively as a relative position of the ink jet head and the coating-object substrate therebetween makes relative movement from the nearby region toward the separate region, and an angular velocity of rotation by the rotating device is reduced responsively as the relative position of the ink jet head and the coating-object substrate therebetween moves relatively from the nearby region toward the separate region.
摘要:
The present invention provides an apparatus which is capable of discharging a process liquid to a rotating substrate at a very constant rate irrespective of variations in the state of the process liquid. A process liquid is discharged toward a rotating substrate by nozzles which are moved from inner to outer radius sides of the rotating substrate. The present invention further provides a method in which film thickness control conditions are determined based on a simulation of a behavior of a process liquid on a substrate.
摘要:
A sinusoidal waveform generation circuit is configured to continuously control a voltage applied to a gate of a MOSFET to change an output current in the form of a sinusoidal wave by utilizing, as an electric characteristic specific to the MOSFET, a characteristic between a voltage applied to a gate of a MOSFET and an output current. The waveform of the sinusoidal wave generated by the sinusoidal waveform generation circuit is not a combination of a plurality of linear lines but is continuous and smooth. As a result, noises generated by the sinusoidal waveform generation circuit can be reduced.
摘要:
An electret condenser includes a fixed film 110 including a conductive film 118 to be an upper electrode, a vibrating film 112 including a lower electrode 104 and a silicon oxide film 105 to be an electret film, and a silicon oxide film 108 provided between the fixed film 110 and the vibrating film 112 and including an air gap 109. Respective parts of the fixed film 110 and the vibrating film 112 exposed in the air gap 109 are formed of silicon nitride films 106 and 114.
摘要:
An electric condenser includes a fixed film 110 including a conductive film 118 to be an upper electrode, a vibrating film 112 including a lower electrode 104 and a silicon oxide film 105 to be an electric film, and a silicon oxide film 108 provided between the fixed film 110 and the vibrating film 112 and including an air gap 109. Respective parts of the fixed film 110 and the vibrating film 112 exposed in the air gap 109 are formed of silicon nitride films 106 and 114.
摘要:
An excavation support database 40 includes a display table 47 and a display specifics table 48, which serve as storage means dedicated for display. The state of a working region per mesh is stored in the display table 47, and a discriminative display method (display color) is stored in the display specifics table 48 corresponding to the state per mesh. Reference is made to the display specifics table 48 on the basis of the state (height) per mesh, which is stored in the display table 47, to read the corresponding display color from the display specifics table 48, thereby displaying the state of the working region in a color-coded manner. Operation support and management realized with this system can easily be employed in different types of working machines in common and can inexpensively be performed with ease.
摘要:
An electret condenser microphone includes: a substrate 13 in which an opening 25 is formed; an electret condenser 50 connected to one face of the substrate 13 so as to close the opening 25 and having an acoustic hole 12 and a cavity 2; a drive circuit element 15 connected to the one face of the substrate 13; and a case 17 mounted over the substrate 13 so as to cover the electret condenser 50 and the drive circuit element 15. Electric contact is established at a joint part between the electret condenser 50 and the substrate 13. The acoustic hole 12 communicates with an external space through the opening 25. The cavity 2 and an internal region of the case 17 serve as a back air chamber for the electret condenser 50.
摘要:
Exhaust passage control valve 10 may comprise housing 30, valve member 20, and helical torsion spring 40. Housing 30 has an exhaust passage. Exhaust gas from an internal combustion engine flows through the exhaust passage of the housing 30. Valve member 20 opens and closes the exhaust passage of the housing. Helical torsion spring 40 may be disposed at the opposite side of the valve member from the housing side thereof. Helical torsion spring 40 comprises a coil part wherein spring wires have been wound in a coil shape, and arms formed at both ends of the coil part. The coil part may be disposed at approximately the center of the valve member. When the arms bend with respect to the coil part, the counter-force of this bending energizes the valve member towards a closing side. The spring mounting member may be arranged and constructed to adjust a position in which the spring mounting member is mounted on the housing such that a rotation angle of the arms can be changed.
摘要:
An electric condenser includes a fixed film 110 including a conductive film 118 to be an upper electrode, a vibrating film 112 including a lower electrode 104 and a silicon oxide film 105 to be an electric film, and a silicon oxide film 108 provided between the fixed film 110 and the vibrating film 112 and including an air gap 109. Respective parts of the fixed film 110 and the vibrating film 112 exposed in the air gap 109 are formed of silicon nitride films 106 and 114.
摘要:
A rectangular penetration hole is formed opening in the opposite two main surfaces of a first dielectric substrate. Conductors for grounding are respectively formed on the main surfaces, to cover the openings of the penetration hole. A conductor layer is formed on opposite inner walls in the penetration hole of the dielectric substrate. A waveguide is structured by a space surrounded by the conductors and the conductor layers. The waveguide is magnetically coupled with an input/output line on a second dielectric substrate through a coupling slot. Because a waveguide has walls made continuous in the dielectric substrate, a low-loss waveguide can be realized. Hence, a high-performance radio frequency module can be realized.