Apparatus and method for forming films
    4.
    发明授权
    Apparatus and method for forming films 失效
    用于形成薄膜的装置和方法

    公开(公告)号:US5935331A

    公开(公告)日:1999-08-10

    申请号:US524823

    申请日:1995-09-07

    Abstract: An apparatus, for forming a film, includes an ink jet head having a plurality of nozzles for discharging a liquid, a rotating device for rotating about a rotary axis a coating-object substrate onto which liquid discharged from the ink jet head is deposited, a relatively moving device for moving the ink jet head and the coating-object substrate relatively to each other between a nearby region of the coating-object substrate near the rotary axis and a separate region of the coating-object substrate separate from the rotary axis, and a relative movement control device for controlling the relatively moving device so that an angular velocity of rotation by the rotating device is reduced responsively as a relative position of the ink jet head and the coating-object substrate therebetween makes relative movement from the nearby region toward the separate region, and an angular velocity of rotation by the rotating device is reduced responsively as the relative position of the ink jet head and the coating-object substrate therebetween moves relatively from the nearby region toward the separate region.

    Abstract translation: 一种用于形成薄膜的设备包括具有用于排出液体的多个喷嘴的喷墨头,用于围绕旋转轴线旋转的旋转装置,涂布物体基底上沉积有从喷墨头排出的液体, 相对移动的装置,其用于使喷墨头和涂覆对象基板相对于涂覆物基板的靠近旋转轴线的附近区域和与旋转轴线分离的涂覆对象基板的分离区域彼此相对移动;以及 相对运动控制装置,用于控制相对移动的装置,使得旋转装置的旋转角度速度响应性地降低,因为喷墨头和涂覆对象基板之间的相对位置使得从附近区域朝向 并且旋转装置的旋转角速度作为喷墨头的相对位置响应地降低 其间的涂覆物体基板相对地从附近区域移向分离区域。

    Heat treatment method
    5.
    发明授权
    Heat treatment method 失效
    热处理方法

    公开(公告)号:US5379228A

    公开(公告)日:1995-01-03

    申请号:US957790

    申请日:1992-10-08

    Abstract: In a method of minimizing the temperature difference on a large area plate in a sintering step of manufacturing a solar cell and using a cover for making the heat equal, a cover with the hole pitch and the hole location being set in it is used in an analysis to quantitatively determine the cover shape for realizing the equal-heat heating, whereby the heat equalizing operation of the plate can be realized.

    Abstract translation: 在制造太阳能电池的烧结步骤中使大面积板上的温度差最小化的方法中,并且使用用于使热量相等的盖子,在其中设置具有孔间距和孔位置的盖子 分析以定量确定实现等热加热的盖形状,由此能够实现板的热均衡操作。

    CLEAN ROOM
    7.
    发明申请
    CLEAN ROOM 失效
    整理房间

    公开(公告)号:US20100022179A1

    公开(公告)日:2010-01-28

    申请号:US12529399

    申请日:2008-10-20

    CPC classification number: F24F3/161 H01L21/67115

    Abstract: A dust-exhaust acceleration face of a dust-exhaust assistant member is disposed so as to face a top face of a heat radiating member of a production facility or the like so that a gap between the top face of the heat radiating member and the dust-exhaust acceleration face of the dust-exhaust assistant member is occupied by ascending air flows, each having a falling velocity (terminal velocity) that is not accelerated beyond a fixed velocity, to form a balanced state between the size of an object, such as a dust particulate or a chemical substance particulate, and air resistance when the object is freely falling in the air; thus, the object, such as a dust particulate and a chemical substance particulate, is prevented from falling onto the heat radiating member.

    Abstract translation: 排尘辅助部件的排气加速面设置成与制造设备等的散热构件的顶面相对,使得散热构件的顶面与灰尘之间的间隙 排气辅助构件的排气加速面被上升空气流占据,每个空气流都具有不超过固定速度的下降速度(终点速度),以在物体的尺寸之间形成平衡状态,例如 灰尘颗粒或化学物质颗粒,当物体自由落入空气中时具有空气阻力; 因此,防止了诸如灰尘颗粒和化学物质颗粒的物体落入散热构件。

    Laser drilling machine and method for collecting dust
    8.
    发明授权
    Laser drilling machine and method for collecting dust 失效
    激光钻孔机及粉尘收集方法

    公开(公告)号:US06507000B2

    公开(公告)日:2003-01-14

    申请号:US09853008

    申请日:2001-05-10

    CPC classification number: B23K26/382 B23K26/142 B23K26/1462

    Abstract: A dust collector for a laser drilling machine is provided between a lens table and a workpiece to be processed and includes an upper inlet port and a lower inlet port arranged on one side of a space defined by four side walls, and an exhaust port arranged opposite the inlet ports. The total amount of air supplied from the two inlet ports is 30 to 70% of the exhaust rate. The lower inlet port has an air supply capacity 1.5 to 4.5 times that of the upper inlet port.

    Abstract translation: 用于激光钻孔机的集尘器设置在透镜台和要处理的工件之间,并且包括设置在由四个侧壁限定的空间的一侧上的上入口和下入口以及相对布置的排气口 进口端口。 从两个入口端口供应的空气总量为排气速率的30-70%。 下部入口的供气量为上部入口的1.5至4.5倍。

    Clean room
    10.
    发明授权
    Clean room 失效
    整理房间

    公开(公告)号:US08545296B2

    公开(公告)日:2013-10-01

    申请号:US12529399

    申请日:2008-10-20

    CPC classification number: F24F3/161 H01L21/67115

    Abstract: A dust-exhaust acceleration face of a dust-exhaust assistant member is disposed so as to face a top face of a heat radiating member of a production facility or the like so that a gap between the top face of the heat radiating member and the dust-exhaust acceleration face of the dust-exhaust assistant member is occupied by ascending air flows, each having a falling velocity (terminal velocity) that is not accelerated beyond a fixed velocity, to form a balanced state between the size of an object, such as a dust particulate or a chemical substance particulate, and air resistance when the object is freely falling in the air; thus, the object, such as a dust particulate and a chemical substance particulate, is prevented from falling onto the heat radiating member.

    Abstract translation: 排尘辅助部件的排气加速面设置成与制造设备等的散热构件的顶面相对,使得散热构件的顶面与灰尘之间的间隙 排气辅助构件的排气加速面被上升空气流占据,每个空气流都具有不超过固定速度的下降速度(终点速度),以在物体的尺寸之间形成平衡状态,例如 灰尘颗粒或化学物质颗粒,当物体自由落入空气中时具有空气阻力; 因此,防止了诸如灰尘颗粒和化学物质颗粒的物体落入散热构件。

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