Anisotropic conductive sheet
    1.
    发明授权
    Anisotropic conductive sheet 有权
    各向异性导电片

    公开(公告)号:US06849335B2

    公开(公告)日:2005-02-01

    申请号:US10333135

    申请日:2001-08-08

    IPC分类号: H01B1/20 H01R13/24 B32B5/16

    摘要: Disclosed herein is an anisotropically conductive sheet capable of holding charge in its surfaces under an unpressurised state, and moving the charge held in the surface in a thickness-wise direction thereof in a state pressurised in the thickness-wise direction, thereby controlling the quantity of the charge at the surface.This anisotropically conductive sheet comprises a sheet base composed of an elastomer and conductive particles exhibiting magnetism contained in the sheet base in a state oriented so as to arrange in rows in a thickness-wise direction of the sheet base, and dispersed in a plane direction thereof. Supposing that a volume resistivity in the thickness-wise direction under an unpressurised state is R0, and a volume resistivity in the thickness-wise direction in a state pressurised under a pressure of 1 g/mm2 in the thickness-wise direction is R1, the volume resistivity R1 is 1×107 to 1×1012 Ω·m, and a ratio (R0/R1) of the volume resistivity R0 to the volume resistivity R1 is 1×101 to 1×104.

    摘要翻译: 本发明公开了一种能够在非加压状态下在其表面保持电荷的各向异性导电片,并且以在厚度方向上加压的状态沿其厚度方向移动保持在表面中的电荷,从而控制 该各向异性导电片包括由弹性体构成的片状基材和表现为片状基体中的磁性的导电性粒子,其状态为在片状基材的厚度方向排列成行, 分散在其平面方向。 假设在非加压状态下的厚度方向上的体积电阻率为R0,并且在厚度方向上以1g / mm 2的压力加压的状态下的厚度方向上的体积电阻率为 R1,体积电阻率R1为1×10 7〜1×10 12Ω·m,体积电阻率R0与体积电阻率R1的比(R0 / R1)为1×10 -1〜1×10 4。

    Anisotropic conductivity connector, conductive paste composition, probe member, and wafer inspection device, and wafer inspecting method
    2.
    发明授权
    Anisotropic conductivity connector, conductive paste composition, probe member, and wafer inspection device, and wafer inspecting method 有权
    各向异性导电连接器,导电膏组合物,探针构件和晶片检查装置以及晶片检查方法

    公开(公告)号:US07131851B2

    公开(公告)日:2006-11-07

    申请号:US10522536

    申请日:2003-08-07

    IPC分类号: H01R4/58

    摘要: Disclosed herein are an anisotropically conductive connector, by which positioning, and holding and fixing to a wafer can be conducted with ease even when the wafer has a large area of 8 inches or greater in diameter, and the pitch of electrodes to be inspected is small, and good conductivity is retained even upon repeated use, and applications thereof. The anisotropically conductive connector has a frame plate, in which a plurality of anisotropically conductive film-arranging holes have been formed correspondingly to electrode regions in all or part of integrated circuits on a wafer, and a plurality of elastic anisotropically conductive films arranged in the respective anisotropically conductive film-arranging holes. The elastic anisotropically conductive films each have a plurality of conductive parts for connection extending in a thickness-wise direction thereof and containing conductive particles, and an insulating part mutually insulating them. The conductive particles are obtained by coating core particles exhibiting magnetism with a high-conductive metal, a proportion of the high-conductive metal to the core particles is at least 15% by mass, and the following t is at least 50 nm: t=[1/(Sw·ρ)]×[N/(1−N)], wherein Sw is a BET specific surface area (m2/kg) of the core particles, ρ is a specific gravity (kg/m3) of the high-conductive metal, and N is (mass of the high-conductive metal/total mass of the conductive particles).

    摘要翻译: 这里公开的是各向异性导电连接器,即使当晶片具有8英寸或更大的直径的大面积,并且待检查的电极的间距小时,可以容易地进行对晶片的定位和保持和固定, 并且即使在重复使用时也保持良好的导电性及其应用。 各向异性导电连接器具有框架板,其中已经相应于在晶片上的集成电路的全部或一部分中的电极区域形成了多个各向异性导电膜分配孔,以及多个各向异性导电膜分配孔, 各向异性导电膜排列孔。 弹性各向异性导电膜各自具有多个导电部件,用于在其厚度方向上延伸并且包含导电颗粒的连接用导电部件和绝缘部件彼此绝缘。 通过用高导电性金属涂布表现出磁性的芯颗粒而获得导电性粒子,高介电性金属与核心粒子的比例为15质量%以下,t为50nm以上,t = [1 /(Sw.rho)] x [N /(1-N)],其中Sw是核心颗粒的BET比表面积(m 2 SUP / kg / kg),rho是特定 高导电性金属的重量(kg / m 3),N(导电性金属的质量/导电性粒子的总质量)。

    Anisotropic conductivity connector, conductive paste composition, probe member, and wafer inspection device, and wafer inspecting method
    3.
    发明授权
    Anisotropic conductivity connector, conductive paste composition, probe member, and wafer inspection device, and wafer inspecting method 有权
    各向异性导电连接器,导电糊组合物,探针构件和晶片检查装置以及晶片检查方法

    公开(公告)号:US07049836B2

    公开(公告)日:2006-05-23

    申请号:US10523195

    申请日:2003-08-07

    申请人: Ryoji Setaka

    发明人: Ryoji Setaka

    IPC分类号: G01R31/02

    摘要: Disclosed herein are an anisotropically conductive connector that conductivity of all conductive parts for connection is good, and insulating property between adjacent conductive parts for connection is surely achieved even when the pitch of electrodes as objects of connection is small, and good conductivity is retained over a long period of time even when it is used repeatedly under a high-temperature environment, and applications thereof.The above anisotropically conductive connector is a connector having an elastic anisotropically conductive film, in which a plurality of conductive parts for connection containing conductive particles and extending in a thickness-wise direction of the film have been formed, wherein supposing that the shortest width of each of the conductive parts for connection is W, and the number average particle diameter of the conductive particles is Dn, a value of a ratio W/Dn of the shortest width of the conductive part for connection to the number average particle diameter of the conductive particles falls within a range of 3 to 8, and a coefficient of variation of particle diameter of the conductive particles is at most 50%.

    摘要翻译: 本发明公开了一种各向异性导电连接器,即连接用导电部件的导电性好,即使作为连接对象的电极的间距小,也可以确保连接用导电部件之间的绝缘性, 即使在高温环境下重复使用也可长时间使用。 上述各向异性导电连接器是具有弹性各向异性导电膜的连接器,其中形成有用于连接的多个导电部件,该导电部件包含导电颗粒并且在膜的厚度方向上延伸,其中假设每个 用于连接的导电部件为W,导电粒子的数均粒径为Dn,连接用导电部件的最短宽度与导电性粒子的数均粒径的比W / Dn的值 落在3〜8的范围内,导电性粒子的粒径的变动系数为50%以下。

    Anisotropic conductivity connector, probe member, wafer inspecting device, and wafer inspecting method
    4.
    发明申请
    Anisotropic conductivity connector, probe member, wafer inspecting device, and wafer inspecting method 有权
    各向异性导电性连接器,探针部件,晶片检查装置以及晶片检查方法

    公开(公告)号:US20060043983A1

    公开(公告)日:2006-03-02

    申请号:US10522537

    申请日:2003-08-07

    IPC分类号: G01R31/02

    摘要: Disclosed herein are an anisotropically conductive connector, by which good conductivity is retained over a long period of time even when it is used repeatedly over many times or repeatedly used under a high-temperature environment, and applications thereof. The anisotropically conductive connector is an anisotropically conductive connector having an elastic anisotropically conductive film, in which a plurality of conductive parts for connection extending in a thickness-wise direction of the film have been formed. The elastic anisotropically conductive film has initial properties that supposing that the total number of the conductive parts for connection is Y, an electric resistance of the conductive part for connection in a state that a load of Y×1 g has been applied to the elastic anisotropically conductive film in a thickness-wise direction thereof is R1g, and an electric resistance of the conductive part for connection in a state that a load of Y×6 g has been applied to the elastic anisotropically conductive film in the thickness-wise direction is R6g, the number of conductive parts for connection that R1g is lower than 1 Ω is at least 90% of the total number of the conductive parts for connection, the number of conductive parts for connection that R6g is lower than 0.1 Ω is at least 95% of the total number of the conductive parts for connection, and the number of conductive parts for connection that R6g is at least 0.5 Ω is at most 1% of the total number of the conductive parts of connection.

    摘要翻译: 这里公开了各向异性导电连接器,即使在多次重复使用或在高温环境下重复使用的情况下,也能够长时间保持良好的导电性及其应用。 各向异性导电连接器是具有弹性各向异性导电膜的各向异性导电连接器,其中已经形成了用于在膜的厚度方向上延伸的连接的多个导电部件。 弹性各向异性导电膜具有初始特性,假设连接用导电部件的总数为Y,在向弹性各向异性导电膜施加了Yx1g的载荷的状态下,连接用导电部件的电阻 在其厚度方向上为R 1,并且在对厚度方向的弹性各向异性导电膜施加了Yx6g的载荷的状态下的连接用导电部的电阻, 明智的方向是R 6g,用于连接的导电部件的数量低于1Ω,是用于连接的导电部件总数的至少90% 用于连接的导电部件的数目低于0.1Ω,为用于连接的导电部件的总数的至少95%,并且用于连接的导电部件的数量为R < SUB> 6g 至少为0.5Ω 最多为连接导电部件总数的1%。

    Anisotropic conductivity connector, conductive paste composition, probe member, and wafer inspection device, and wafer inspecting method
    6.
    发明申请
    Anisotropic conductivity connector, conductive paste composition, probe member, and wafer inspection device, and wafer inspecting method 有权
    各向异性导电连接器,导电膏组合物,探针构件和晶片检查装置以及晶片检查方法

    公开(公告)号:US20050272282A1

    公开(公告)日:2005-12-08

    申请号:US10522536

    申请日:2003-08-07

    摘要: Disclosed herein are an anisotropically conductive connector, by which positioning, and holding and fixing to a wafer can be conducted with ease even when the wafer has a large area of 8 inches or greater in diameter, and the pitch of electrodes to be inspected is small, and good conductivity is retained even upon repeated use, and applications thereof. The anisotropically conductive connector has a frame plate, in which a plurality of anisotropically conductive film-arranging holes have been formed correspondingly to electrode regions in all or part of integrated circuits on a wafer, and a plurality of elastic anisotropically conductive films arranged in the respective anisotropically conductive film-arranging holes. The elastic anisotropically conductive films each have a plurality of conductive parts for connection extending in a thickness-wise direction thereof and containing conductive particles, and an insulating part mutually insulating them. The conductive particles are obtained by coating core particles exhibiting magnetism with a high-conductive metal, a proportion of the high-conductive metal to the core particles is at least 15% by mass, and the following t is at least 50 nm: t=[1/(Sw·ρ)]×[N/(1−N)], wherein Sw is a BET specific surface area (m2/kg) of the core particles, ρ is a specific gravity (kg/m3) of the high-conductive metal, and N is (mass of the high-conductive metal/total mass of the conductive particles).

    摘要翻译: 这里公开的是各向异性导电连接器,即使当晶片具有8英寸或更大的直径的大面积,并且待检查的电极的间距小时,可以容易地进行对晶片的定位和保持和固定, 并且即使在重复使用时也保持良好的导电性及其应用。 各向异性导电连接器具有框架板,其中已经相应于在晶片上的集成电路的全部或一部分中的电极区域形成了多个各向异性导电膜分配孔,以及多个各向异性导电膜分配孔, 各向异性导电膜排列孔。 弹性各向异性导电膜各自具有多个导电部件,用于在其厚度方向上延伸并且包含导电颗粒的连接用导电部件和绝缘部件彼此绝缘。 导电粒子是通过用高导电性金属涂布呈现磁性的芯粒而得到的,导电性金属与芯粒的比例为15质量%以下,t为50nm以上:t = [1 /(Sw.rho)] x [N /(1-N)],其中Sw是核心颗粒的BET比表面积(m 2 SUP / kg / kg),rho是特定 高导电性金属的重量(kg / m 3),N(导电性金属的质量/导电性粒子的总质量)。

    Anisotropic conductivity connector, conductive paste composition, probe member, and wafer inspection device, and wafer inspecting method
    7.
    发明申请
    Anisotropic conductivity connector, conductive paste composition, probe member, and wafer inspection device, and wafer inspecting method 有权
    各向异性导电连接器,导电膏组合物,探针构件和晶片检查装置以及晶片检查方法

    公开(公告)号:US20050264307A1

    公开(公告)日:2005-12-01

    申请号:US10523195

    申请日:2003-08-07

    申请人: Ryoji Setaka

    发明人: Ryoji Setaka

    摘要: Disclosed herein are an anisotropically conductive connector that conductivity of all conductive parts for connection is good, and insulating property between adjacent conductive parts for connection is surely achieved even when the pitch of electrodes as objects of connection is small, and good conductivity is retained over a long period of time even when it is used repeatedly under a high-temperature environment, and applications thereof. The above anisotropically conductive connector is a connector having an elastic anisotropically conductive film, in which a plurality of conductive parts for connection containing conductive particles and extending in a thickness-wise direction of the film have been formed, wherein supposing that the shortest width of each of the conductive parts for connection is W, and the number average particle diameter of the conductive particles is Dn, a value of a ratio W/Dn of the shortest width of the conductive part for connection to the number average particle diameter of the conductive particles falls within a range of 3 to 8, and a coefficient of variation of particle diameter of the conductive particles is at most 50%.

    摘要翻译: 本发明公开了一种各向异性导电连接器,即连接用导电部件的导电性好,即使作为连接对象的电极的间距小,也可以确保连接用导电部件之间的绝缘性, 即使在高温环境下重复使用也可长时间使用。 上述各向异性导电连接器是具有弹性各向异性导电膜的连接器,其中形成有用于连接的多个导电部件,该导电部件包含导电颗粒并且在膜的厚度方向上延伸,其中假设每个 用于连接的导电部件为W,导电粒子的数均粒径为Dn,连接用导电部件的最短宽度与导电性粒子的数均粒径的比W / Dn的值 落在3〜8的范围内,导电性粒子的粒径的变动系数为50%以下。

    Curing composition for forming a heat-conductive sheet, heat-conductive sheet, production thereof and heat sink structure
    8.
    发明授权
    Curing composition for forming a heat-conductive sheet, heat-conductive sheet, production thereof and heat sink structure 有权
    用于形成导热片的固化组合物,导热片,其制造和散热器结构

    公开(公告)号:US06517744B1

    公开(公告)日:2003-02-11

    申请号:US09711528

    申请日:2000-11-14

    IPC分类号: H01B124

    摘要: A heat-conductive sheet comprising a cured or semi-cured binder wherein a carbon fiber is orientated in the direction of the thickness of the heat-conductive sheet. This heat-conductive sheet exhibits a high anisotropic heat conductivity along the direction of the thickness thereof to thereby enable efficiently releasing heat from a heating element such as a semiconductor element or semiconductor package. Moreover, the heat-conductive sheet is excellent in not only heat resistance, durability and mechanical strength but also adherence to the heating element.

    摘要翻译: 一种导热片,其包含固化或半固化的粘合剂,其中碳纤维沿着导热片的厚度方向取向。 该导热片在其厚度方向上显示出高的各向异性热传导性,从而能够有效地从诸如半导体元件或半导体封装的加热元件释放热量。 此外,导热片不仅耐热性,耐久性和机械强度优异,而且对加热元件的粘附性优异。