公开(公告)号：US06849335B2

公开(公告)日：2005-02-01

申请号：US10333135

申请日：2001-08-08

申请人： Hisao Igarashi ,  Kazuo Inoue ,  Ryoji Setaka

发明人： Hisao Igarashi ,  Kazuo Inoue ,  Ryoji Setaka

IPC分类号： H01B1/20 ,  H01R13/24 ,  B32B5/16

CPC分类号： H01R13/2414 ,  H01B1/20 ,  Y10T428/254 ,  Y10T428/2991 ,  Y10T428/2998 ,  Y10T428/32

摘要： Disclosed herein is an anisotropically conductive sheet capable of holding charge in its surfaces under an unpressurised state, and moving the charge held in the surface in a thickness-wise direction thereof in a state pressurised in the thickness-wise direction, thereby controlling the quantity of the charge at the surface.This anisotropically conductive sheet comprises a sheet base composed of an elastomer and conductive particles exhibiting magnetism contained in the sheet base in a state oriented so as to arrange in rows in a thickness-wise direction of the sheet base, and dispersed in a plane direction thereof. Supposing that a volume resistivity in the thickness-wise direction under an unpressurised state is R0, and a volume resistivity in the thickness-wise direction in a state pressurised under a pressure of 1 g/mm2 in the thickness-wise direction is R1, the volume resistivity R1 is 1×107 to 1×1012 Ω·m, and a ratio (R0/R1) of the volume resistivity R0 to the volume resistivity R1 is 1×101 to 1×104.

摘要翻译： 本发明公开了一种能够在非加压状态下在其表面保持电荷的各向异性导电片，并且以在厚度方向上加压的状态沿其厚度方向移动保持在表面中的电荷，从而控制 该各向异性导电片包括由弹性体构成的片状基材和表现为片状基体中的磁性的导电性粒子，其状态为在片状基材的厚度方向排列成行， 分散在其平面方向。 假设在非加压状态下的厚度方向上的体积电阻率为R0，并且在厚度方向上以1g / mm 2的压力加压的状态下的厚度方向上的体积电阻率为 R1，体积电阻率R1为1×10 7〜1×10 12Ω·m，体积电阻率R0与体积电阻率R1的比（R0 / R1）为1×10 -1〜1×10 4。

公开(公告)号：US07446544B2

公开(公告)日：2008-11-04

申请号：US10593830

申请日：2005-03-30

申请人： Hisao Igarashi ,  Katsumi Sato ,  Kazuo Inoue

发明人： Hisao Igarashi ,  Katsumi Sato ,  Kazuo Inoue

IPC分类号： G01R31/02

CPC分类号： G01R1/07364 ,  G01R1/07314 ,  G01R1/07371 ,  G01R1/07378

摘要： A probe device including a circuit board for inspection having a great number of inspection electrodes, a probe card having a circuit board for connection having a great number of terminal electrodes and a contact member, an anisotropically conductive connector arranged between the circuit board for inspection and the circuit board for connection and electrically connecting the respective inspection electrodes to the respective terminal electrodes, and a parallelism adjusting mechanism for adjusting a parallelism of the circuit board for inspection and the circuit board for connection to the wafer. The parallelism adjusting mechanism includes a location-varying mechanism, which relatively displaces the circuit board for inspection or the circuit board for connection in the thickness-wise direction of the anisotropically conductive connector. A wafer inspection apparatus can include the probe device.

摘要翻译： 一种探针装置，包括具有大量检查电极的用于检查的电路板，具有多个端子电极的连接用电路板的探针卡和接触构件，配置在检查用电路基板之间的各向异性导电性连接器， 用于将各个检查电极连接到各个端子电极的电路板，以及用于调整用于检查的电路板的平行度的平行度调节机构和用于连接到晶片的电路板。 平行度调节机构包括相对位移用于检查的电路板或用于在各向异性导电连接器的厚度方向上连接的电路板的位置变化机构。 晶片检查装置可以包括探针装置。

公开(公告)号：US20070178727A1

公开(公告)日：2007-08-02

申请号：US10593830

申请日：2005-03-30

申请人： Hisao Igarashi ,  Katsumi Sato ,  Kazuo Inoue

发明人： Hisao Igarashi ,  Katsumi Sato ,  Kazuo Inoue

IPC分类号： H01R4/58

CPC分类号： G01R1/07364 ,  G01R1/07314 ,  G01R1/07371 ,  G01R1/07378

摘要： A probe device including a circuit board for inspection having a great number of inspection electrodes, a probe card having a circuit board for connection having a great number of terminal electrodes and a contact member, an anisotropically conductive connector arranged between the circuit board for inspection and the circuit board for connection and electrically connecting the respective inspection electrodes to the respective terminal electrodes, and a parallelism adjusting mechanism for adjusting a parallelism of the circuit board for inspection and the circuit board for connection to the wafer. The parallelism adjusting mechanism includes a location-varying mechanism, which relatively displaces the circuit board for inspection or the circuit board for connection in the thickness-wise direction of the anisotropically conductive connector. A wafer inspection apparatus can include the probe device.

摘要翻译： 一种探针装置，包括具有大量检查电极的用于检查的电路板，具有多个端子电极的连接用电路板的探针卡和接触构件，配置在检查用电路基板之间的各向异性导电性连接器， 用于将各个检查电极连接到各个端子电极的电路板，以及用于调整用于检查的电路板的平行度的平行度调节机构和用于连接到晶片的电路板。 平行度调节机构包括相对位移用于检查的电路板或用于在各向异性导电连接器的厚度方向上连接的电路板的位置变化机构。 晶片检查装置可以包括探针装置。

公开(公告)号：US20060211280A1

公开(公告)日：2006-09-21

申请号：US10548832

申请日：2004-03-23

申请人： Hisao Igarashi ,  Katsumi Sato ,  Kazuo Inoue

发明人： Hisao Igarashi ,  Katsumi Sato ,  Kazuo Inoue

IPC分类号： H01R4/58

CPC分类号： G01R1/0735 ,  H01L23/49827 ,  H01L2924/0002 ,  H01R13/2414 ,  H01L2924/00

摘要： Disclosed herein are an anisotropically conductive connector, by which good conductivity is retained over a long period of time even when it is used in electrical inspection of a plurality of integrated circuits formed on a wafer repeatedly over a great number of times, and thus high durability and long service life are achieved, and applications thereof. The anisotropically conductive connector of the invention comprises elastic anisotropically conductive films, in each of which a plurality of conductive parts for connection containing conductive particles and extending in a thickness-wise direction of the film have been formed. The conductive particles contained in the conductive parts for connection in the anisotropically conductive connector are obtained by laminating surfaces of core particles exhibiting magnetism with a coating layer formed of a high-conductive metal, and the coating layer is a coating layer having a high hardness.

摘要翻译： 这里公开了各向异性导电连接器，即使在多次重复地形成在晶片上的多个集成电路的电气检查中，长时间保持良好的导电性，因此具有高耐久性 使用寿命长，使用寿命长。 本发明的各向异性导电连接器包括弹性各向异性导电膜，其中每个导电膜已形成多个用于连接的导电部件，其中包含导电颗粒并在膜的厚度方向上延伸。 包含在各向异性导电连接器中用于连接的导电部件中的导电颗粒通过将表现出磁性的芯颗粒的表面与由高导电性金属形成的涂层层压而获得，并且涂层是具有高硬度的涂层。

公开(公告)号：US07671609B2

公开(公告)日：2010-03-02

申请号：US11587485

申请日：2005-04-26

申请人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

发明人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

IPC分类号： G01R31/02

CPC分类号： A63H29/22 ,  A63H30/04 ,  A63H31/00 ,  F16H48/08 ,  G01R1/06711 ,  G01R1/0735 ,  G01R3/00 ,  H01L51/5012 ,  H05B33/14 ,  Y10T29/49155

摘要： A sheet-like probe has a porous film. In the sheet-like probe, a contact film is penetratingly supported at each position of through-holes formed in the porous film, and a peripheral edge of the contact film and the porous film are integrated such that a flexible resin insulation layer is included in a fine hole of the porous film. Electrode structure bodies are supported in a penetrating manner in the insulation layer. Each electrode structure body includes a surface electrode section exposed to the front surface of the insulation layer and projecting from the front surface of the insulation layer, a back surface electrode section exposed to the back surface of the insulation layer, a short-circuit section continuously extending from the base end of the front surface electrode section, penetrating the insulation layer in its thickness direction, and connected to the back surface electrode section, a holding section extending outward, along the front surface of the insulation layer, from the base end section of the front surface electrode section, and a supporting body supporting the insulation layer.

摘要翻译： 片状探针具有多孔膜。 在片状探针中，在形成于多孔膜的贯通孔的各位置上，充分地将接触膜支撑在接触膜的周缘和多孔膜的一体，使得柔性树脂绝缘层包含在 多孔膜的细孔。 电极结构体以穿透方式被支撑在绝缘层中。 每个电极结构体包括暴露于绝缘层的前表面并从绝缘层的前表面突出的表面电极部分，暴露于绝缘层的背面的背面电极部分，连续的短路部分 从前表面电极部分的基端部延伸穿过绝缘层的厚度方向，并与背面电极部分连接，沿着绝缘层的前表面向外延伸的保持部分从基端部分 和支撑绝缘层的支撑体。

公开(公告)号：US07384279B2

公开(公告)日：2008-06-10

申请号：US10559846

申请日：2004-06-01

申请人： Hisao Igarashi ,  Katsumi Sato ,  Kazuo Inoue

发明人： Hisao Igarashi ,  Katsumi Sato ,  Kazuo Inoue

IPC分类号： H01R4/58

CPC分类号： G01R1/0735 ,  G01R1/07378 ,  H01R4/04 ,  H01R12/52

摘要： An anisotropically conductive connector suitable for use in a wafer inspection apparatus, and a wafer inspection apparatus comprising the anisotropically conductive connector, which anisotropically conductive connector comprises an elastic anisotropically conductive film composed of a plurality of conductive parts for connection and an insulating part formed among these conductive parts for connection, and a frame plate for supporting this film, which plate is formed of a metallic material having a coefficient of linear thermal expansion of 3×10−6 to 2×10−5K−1, the conductive parts for connection are obtained by filling conductive particles having a number average particle diameter of 20 to 80 μm and exhibiting magnetism in an elastic polymeric substance at a high density, the conductive particles have, on a surface of which, a coating layer composed of a noble metal and having a thickness of at least 20 nm, each of the conductive parts for connection has a durometer hardness of 10 to 35, and an electric resistance between the conductive parts for connection is at least 10 MΩ.

摘要翻译： 适用于晶片检查装置的各向异性导电连接器以及包括各向异性导电连接器的晶片检查装置，各向异性导电连接器包括由多个用于连接的导电部件构成的弹性各向异性导电膜和在其间形成的绝缘部件 用于连接的导电部件和用于支撑该膜的框架板，该板由具有3×10 -6至2×10 -5的线性热膨胀系数的金属材料形成 用于连接的导电部件是通过以高密度填充数均粒径为20〜80μm的导电性粒子，并且在高弹性聚合物质中显现出磁性的，导电性粒子 在其表面上具有由贵金属构成的厚度为至少20nm的涂层，每个用于连接的导电部件 具有10至35的硬度计硬度，并且用于连接的导电部件之间的电阻至少为10 MOmega。

公开(公告)号：US06870385B2

公开(公告)日：2005-03-22

申请号：US10432606

申请日：2001-12-05

申请人： Kazuo Inoue ,  Hisao Igarashi

发明人： Kazuo Inoue ,  Hisao Igarashi

IPC分类号： G01R1/067 ,  G01R1/073 ,  G01R31/26 ,  G01R31/02 ,  H01R12/00

CPC分类号： G01R1/06755 ,  G01R1/07314 ,  G01R1/0735 ,  Y10T428/256 ,  Y10T428/26

摘要： Disclosed herein are a wafer inspection apparatus which is small in size, prevented from shortening the service life of its circuit board for inspection, can collectively perform inspection as to a great number of electrodes to be inspected, has good electrical properties and can perform electrical inspection of high functional integrated circuits, and an anisotropically conductive sheet suitable for use in this wafer inspection apparatus. The anisotropically conductive sheet is composed of an insulating sheet body, in which a through-hole has been formed, and an elastic anisotropically conductive film arranged in the through-hole. The insulating sheet body is formed of a material having a modulus of elasticity of 1×108 to 1×1010 Pa, a coefficient of linear thermal expansion of 3×10−6 to 3×10−5 K−1 and a saturation magnetization lower than 0.1 wb/m2, the elastic anisotropically conductive film is composed of a plurality of conductive path-forming portions and insulating portions formed among these conductive path-forming portions, the conductive path-forming portions are obtained by filling conductive particles having a number average particle diameter of 30 to 150 μm, a coating layer composed of a noble metal and having a thickness of at least 20 nm is formed on surfaces of the conductive particles, each of the conductive path-forming portions has a durometer hardness of 15 to 45, and an electric resistance between conductive path-forming portions is at least 10 MΩ.

摘要翻译： 这里公开了一种晶片检查装置，其尺寸小，防止其电路板的使用寿命缩短以供检查，可以共同对大量待检查的电极进行检查，具有良好的电气性能并且可以进行电气检查 的高功能集成电路，以及适用于该晶片检查装置的各向异性导电片。 各向异性导电片由其中形成有通孔的绝缘片体和布置在通孔中的弹性各向异性导电膜构成。 绝缘片体由弹性模量为1×10 8〜1×10 10 Pa，线性热膨胀系数为3×10 -6〜3×10 -5 K -1的材料形成， 饱和磁化强度低于0.1wb / m 2，弹性各向异性导电膜由多个导电路径形成部分和形成在这些导电路径形成部分之间的绝缘部分组成，导电路径形成部分由 填充数均粒径为30〜150μm的导电性粒子，在贵金属构成的厚度为20nm以上的被覆层形成在导电性粒子的表面上，各导电路径形成部具有 硬度计硬度为15至45，并且导电路径形成部分之间的电阻至少为10微米。

公开(公告)号：US07737707B2

公开(公告)日：2010-06-15

申请号：US11587401

申请日：2005-04-26

申请人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

发明人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

IPC分类号： G01R1/073 ,  H05K3/02

CPC分类号： A63H29/22 ,  A63H30/04 ,  A63H31/00 ,  F16H48/08 ,  G01R1/06711 ,  G01R1/0735 ,  G01R3/00 ,  H01L51/5012 ,  H05B33/14 ,  Y10T29/49155

摘要： A sheet-like probe and a method of producing the probe. In the probe electrode structure bodies do not come out from an insulation film and achieve high durability, and in a burn-in test for a wafer having a large area and for a circuit device having to-be-inspected electrodes with small intervals, positional displacement, caused by temperature variation, between the electrode structure bodies and the to-be-inspected electrode can be reliably prevented for stable connection conditions. The sheet-like probe includes an insulation layer and a contact film provided with electrode structure bodies arranged on the insulation layer to be apart from each other in the surface direction of the insulation layer and penetratingly extend in the thickness direction of the insulation layer. The electrode structure bodies each are composed of a surface electrode section exposed to the front surface of the insulation layer.

摘要翻译： 片状探针及其制造方法。 在探针电极结构体中，绝缘膜不会脱出并达到高耐久性，在具有大面积的晶片的老化试验以及具有小间隔的被检查电极的电路装置中，位置 为了稳定的连接条件，可以可靠地防止电极结构体和被检查电极之间的温度变化引起的位移。 片状探针包括绝缘层和接触膜，该接触膜具有设置在绝缘层上的电极结构体，以在绝缘层的表面方向上彼此分开，并且在绝缘层的厚度方向上贯通地延伸。 电极结构体各自由暴露于绝缘层的前表面的表面电极部分构成。

公开(公告)号：US20070205783A1

公开(公告)日：2007-09-06

申请号：US11587401

申请日：2005-04-26

申请人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

发明人： Katsumi Sato ,  Kazuo Inoue ,  Hitoshi Fujiyama ,  Mutsuhiko Yoshioka ,  Hisao Igarashi

IPC分类号： G01R31/02

CPC分类号： A63H29/22 ,  A63H30/04 ,  A63H31/00 ,  F16H48/08 ,  G01R1/06711 ,  G01R1/0735 ,  G01R3/00 ,  H01L51/5012 ,  H05B33/14 ,  Y10T29/49155

摘要： A sheet-like probe and a method of producing the probe. In the probe electrode structure bodies do not come out from an insulation film and achieve high durability, and in a burn-in test for a wafer having a large area and for a circuit device having to-be-inspected electrodes with small intervals, positional displacement, caused by temperature variation, between the electrode structure bodies and the to-be-inspected electrode can be reliably prevented for stable connection conditions. The sheet-like probe includes an insulation layer and a contact film provided with electrode structure bodies arranged on the insulation layer to be apart from each other in the surface direction of the insulation layer and penetratingly extend in the thickness direction of the insulation layer. The electrode structure bodies each are composed of a surface electrode section exposed to the front surface of the insulation layer.

摘要翻译： 片状探针及其制造方法。 在探针电极结构体中，绝缘膜不会脱出并达到高耐久性，在具有大面积的晶片的老化试验以及具有小间隔的被检查电极的电路装置中，位置 为了稳定的连接条件，可以可靠地防止电极结构体和被检查电极之间的温度变化引起的位移。 片状探针包括绝缘层和接触膜，该接触膜具有设置在绝缘层上的电极结构体，以在绝缘层的表面方向上彼此分开，并且在绝缘层的厚度方向上贯通地延伸。 电极结构体各自由暴露于绝缘层的前表面的表面电极部分构成。

公开(公告)号：US07311531B2

公开(公告)日：2007-12-25

申请号：US10548832

申请日：2004-03-23

申请人： Hisao Igarashi ,  Katsumi Sato ,  Kazuo Inoue

发明人： Hisao Igarashi ,  Katsumi Sato ,  Kazuo Inoue

IPC分类号： H01R4/58

CPC分类号： G01R1/0735 ,  H01L23/49827 ,  H01L2924/0002 ,  H01R13/2414 ,  H01L2924/00

摘要： An anisotropically conductive connector, and applications thereof, by which good conductivity is retained over a long period of time even when it is used in electrical inspection of a plurality of integrated circuits formed on a wafer repeatedly over a great number of times, and thus high durability and long service life are achieved. The anisotropically conductive connector includes elastic anisotropically conductive films, in each of which a plurality of conductive parts for connection containing conductive particles and extending in a thickness-wise direction of the film are formed. The conductive particles contained in the conductive parts for connection in the anisotropically conductive connector are obtained by laminating surfaces of core particles exhibiting magnetism with a coating layer formed of a high-conductive metal, and the coating layer is a coating layer having a high hardness.

摘要翻译： 各向异性导电连接器及其应用，即使在多次重复地形成在晶片上的多个集成电路的电气检查中，长时间保持良好的导电性，因此高 实现了耐久性和长使用寿命。 各向异性导电连接器包括弹性各向异性导电膜，其中形成有用于连接的多个导电部件，其中包含导电颗粒并且在膜的厚度方向上延伸。 包含在各向异性导电连接器中用于连接的导电部件中的导电颗粒通过将表现出磁性的芯颗粒的表面与由高导电性金属形成的涂层层压而获得，并且涂层是具有高硬度的涂层。