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公开(公告)号：US10134558B2
公开(公告)日：2018-11-20
申请号：US15123828
申请日：2015-02-04
Applicant: Hitachi High-Technologies Corporation
Inventor： Yasunari Sohda , Takeyoshi Ohashi , Takafumi Miwa , Noritsugu Takahashi , Hajime Kawano
Abstract: A scanning electron microscope according to the present invention includes: an electron source that produces an electron beam; a trajectory dispersion unit that disperses the trajectory of an electron beam of electrons with a different energy value; a selection slit plate having a selection slit that selects the energy range of the dispersed electron beam; and a transmittance monitoring unit that monitors the transmittance of an electron beam, which is being transmitted through the selection slit. Accordingly, there can be provided a scanning electron microscope equipped with an energy filter that implements a stable reduction in energy distribution.
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2.发明授权Electronic microscope, setting method of observation condition of electronic microscope, and observation method using electronic microscope 有权电子显微镜，电子显微镜的观察条件的设定方法以及使用电子显微镜的观察方法公开(公告)号：US09236220B2
公开(公告)日：2016-01-12
申请号：US14390409
申请日：2013-04-03
Applicant: Hitachi High-Technologies Corporation
Inventor： Natsuki Tsuno , Hideyuki Kazumi , Takafumi Miwa , Yoshinobu Kimura , Hajime Kawano
IPC: H01J37/26 , H01J37/244 , H01J37/28 , H01J37/21
CPC classification number: H01J37/261 , H01J37/21 , H01J37/244 , H01J37/28 , H01J2237/2806 , H01J2237/2809 , H01J2237/2817 , H01J2237/30472
Abstract: An automatic setting method of an observation condition to facilitate analysis of an image and a sample observation method by automatic setting in an observation method of a structure of a sample by the electronic microscope and an electronic microscope having an automatic setting function are provided. The method includes a step of irradiating a fixed position in an observation region with an intermittent pulsed electron beam; a step of detecting a time change of an emission electron from the sample by the intermittent electron beam; and a step of setting the observation condition of the electronic microscope from the time change of the emission electron.
Abstract translation: 提供了一种利用电子显微镜和具有自动设置功能的电子显微镜的样品结构的观察方法中通过自动设定自动设定图像分析的观察条件和样本观察方法的自动设定方法。 该方法包括用间歇脉冲电子束照射观察区域中的固定位置的步骤; 通过间歇电子束检测来自样品的发射电子的时间变化的步骤; 以及从发射电子的时间变化来设定电子显微镜的观察条件的步骤。
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3.发明申请OBSERVATION SPECIMEN FOR USE IN ELECTRON MICROSCOPY, ELECTRON MICROSCOPY, ELECTRON MICROSCOPE, AND DEVICE FOR PRODUCING OBSERVATION SPECIMEN 有权用于电子显微镜，电子显微镜，电子显微镜和用于生产观察样本的装置的观察样本公开(公告)号：US20140264018A1
公开(公告)日：2014-09-18
申请号：US14354917
申请日：2012-10-16
Applicant: Hitachi High-Technologies Corporation
Inventor： Takafumi Miwa , Yoichi Ose , Eiko Nakazawa , Mami Konomi , Shunya Watanabe , Yoshinobu Kimura , Natsuki Tsuno
CPC classification number: H01J37/261 , G01B15/02 , G01N23/00 , H01J37/026 , H01J37/28 , H01J2237/0044 , Y10T428/24331 , Y10T428/261
Abstract: The electrical charging by a primary electronic is inhibited to produce a clear edge contrast from an observation specimen (i.e., a specimen to be observed), whereby the shape of the surface of a sample can be measured with high accuracy. An observation specimen in which a liquid medium comprising an ionic liquid is formed in a thin-film-like or a webbing-film-like form on a sample is used. An electron microscopy using the observation specimen comprises: a step of measuring the thickness of a liquid medium comprising an ionic liquid on a sample; a step of controlling the conditions for irradiation with a primary electron on the basis of the thickness of the liquid medium comprising the ionic liquid; and a step of irradiating the sample with the primary electron under the above-mentioned primary electron irradiation conditions to form an image of the shape of the sample.
Abstract translation: 一次电子的充电被抑制，从观察样本（即待观察的样本）产生清晰的边缘对比度，从而可以高精度地测量样品的表面形状。 使用其中在样品上以薄膜状或织带膜状形成包含离子液体的液体介质的观察样本。 使用观察样品的电子显微镜包括：测量在样品上包含离子液体的液体介质的厚度的步骤; 基于包含离子液体的液体介质的厚度控制用一次电子照射的条件的步骤; 以及在上述一次电子照射条件下用一次电子照射样品以形成样品形状的步骤。
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Patent Agency Ranking
公开(公告)号：US09543053B2
公开(公告)日：2017-01-10
申请号：US14445056
申请日：2014-07-29
Applicant: Hitachi High-Technologies Corporation
Inventor： Yasunari Sohda , Takeyoshi Ohashi , Takafumi Miwa , Hajime Kawano
CPC classification number: G21K1/093 , H01J37/28 , H01J2237/12 , H01J2237/14 , H01J2237/1534
Abstract: To improve the efficiency of generation of chromatic aberrations of an energy filter for reducing energy distribution. Mounted are an energy filter for primary electrons, the energy filter having a beam slit and a pair of a magnetic deflector and an electrostatic deflector that are superimposed with each other. An electron lens is arranged between the beam slit and the pair of the magnetic deflector and the electrostatic deflector.
Abstract translation: 提高能量过滤器的色差产生效率，以减少能量分布。 安装有用于一次电子的能量过滤器，能量过滤器具有光束狭缝和彼此重叠的一对磁偏转器和静电偏转器。 电子透镜设置在光束狭缝和一对磁偏转器和静电偏转器之间。
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5.发明申请ELECTRONIC MICROSCOPE, SETTING METHOD OF OBSERVATION CONDITION OF ELECTRONIC MICROSCOPE, AND OBSERVATION METHOD USING ELECTRONIC MICROSCOPE 有权电子显微镜，电子显微镜的观察条件的设定方法和使用电子显微镜的观察方法公开(公告)号：US20150041644A1
公开(公告)日：2015-02-12
申请号：US14390409
申请日：2013-04-03
Applicant: Hitachi High-Technologies Corporation
Inventor： Natsuki Tsuno , Hideyuki Kazumi , Takafumi Miwa , Yoshinobu Kimura , Hajime Kawano
CPC classification number: H01J37/261 , H01J37/21 , H01J37/244 , H01J37/28 , H01J2237/2806 , H01J2237/2809 , H01J2237/2817 , H01J2237/30472
Abstract: An automatic setting method of an observation condition to facilitate analysis of an image and a sample observation method by automatic setting in an observation method of a structure of a sample by the electronic microscope and an electronic microscope having an automatic setting function are provided. The method includes a step of irradiating a fixed position in an observation region with an intermittent pulsed electron beam; a step of detecting a time change of an emission electron from the sample by the intermittent electron beam; and a step of setting the observation condition of the electronic microscope from the time change of the emission electron.
Abstract translation: 提供了一种利用电子显微镜和具有自动设置功能的电子显微镜的样品结构的观察方法中通过自动设定自动设定图像分析的观察条件和样本观察方法的自动设定方法。 该方法包括用间歇脉冲电子束照射观察区域中的固定位置的步骤; 通过间歇电子束检测来自样品的发射电子的时间变化的步骤; 以及从发射电子的时间变化来设定电子显微镜的观察条件的步骤。
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6.发明授权Observation specimen for use in electron microscopy, electron microscopy, electron microscope, and device for producing observation specimen 有权用于电子显微镜，电子显微镜，电子显微镜和观察样品生产装置的观察标本公开(公告)号：US09202668B2
公开(公告)日：2015-12-01
申请号：US14354917
申请日：2012-10-16
Applicant: Hitachi High-Technologies Corporation
Inventor： Takafumi Miwa , Yoichi Ose , Eiko Nakazawa , Mami Konomi , Shunya Watanabe , Yoshinobu Kimura , Natsuki Tsuno
CPC classification number: H01J37/261 , G01B15/02 , G01N23/00 , H01J37/026 , H01J37/28 , H01J2237/0044 , Y10T428/24331 , Y10T428/261
Abstract: The electrical charging by a primary electronic is inhibited to produce a clear edge contrast from an observation specimen (i.e., a specimen to be observed), whereby the shape of the surface of a sample can be measured with high accuracy. An observation specimen in which a liquid medium comprising an ionic liquid is formed in a thin-film-like or a webbing-film-like form on a sample is used. An electron microscopy using the observation specimen comprises: a step of measuring the thickness of a liquid medium comprising an ionic liquid on a sample; a step of controlling the conditions for irradiation with a primary electron on the basis of the thickness of the liquid medium comprising the ionic liquid; and a step of irradiating the sample with the primary electron under the above-mentioned primary electron irradiation conditions to form an image of the shape of the sample.
Abstract translation: 一次电子的充电被抑制，从观察样本（即待观察的样本）产生清晰的边缘对比度，从而可以高精度地测量样品的表面形状。 使用其中在样品上以薄膜状或织带膜状形成包含离子液体的液体介质的观察样本。 使用观察样品的电子显微镜包括：测量在样品上包含离子液体的液体介质的厚度的步骤; 基于包含离子液体的液体介质的厚度控制用一次电子照射的条件的步骤; 以及在上述一次电子照射条件下用一次电子照射样品以形成样品形状的步骤。
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公开(公告)号：US09799486B2
公开(公告)日：2017-10-24
申请号：US14796113
申请日：2015-07-10
Applicant: Hitachi High-Technologies Corporation
Inventor： Seiichiro Kanno , Yasushi Ebizuka , Go Miya , Takafumi Miwa
CPC classification number: H01J37/21 , H01J2237/0044 , H01J2237/2007
Abstract: In a charged particle beam apparatus that applies a retarding voltage to a sample through a contact terminal and executes measurement or inspection of a surface of the sample, potential variation of the sample when changing the retarding voltage applied to the contact terminal is measured by a surface potential meter, a time constant of the potential variation of the sample is obtained, and it is determined whether execution of measurement or inspection by a charged particle beam continues or stops based on the time constant, or a conduction ensuring process between the sample and the contact terminal is executed.
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公开(公告)号：US20150034836A1
公开(公告)日：2015-02-05
申请号：US14445056
申请日：2014-07-29
Applicant: Hitachi High-Technologies Corporation
Inventor： Yasunari Sohda , Takeyoshi Ohashi , Takafumi Miwa , Hajime Kawano
CPC classification number: G21K1/093 , H01J37/28 , H01J2237/12 , H01J2237/14 , H01J2237/1534
Abstract: To improve the efficiency of generation of chromatic aberrations of an energy filter for reducing energy distribution. Mounted are an energy filter for primary electrons, the energy filter having a beam slit and a pair of a magnetic deflector and an electrostatic deflector that are superimposed with each other. An electron lens is arranged between the beam slit and the pair of the magnetic deflector and the electrostatic deflector.
Abstract translation: 提高能量过滤器的色差产生效率，以减少能量分布。 安装有用于一次电子的能量过滤器，能量过滤器具有光束狭缝和彼此重叠的一对磁偏转器和静电偏转器。 电子透镜设置在光束狭缝和一对磁偏转器和静电偏转器之间。
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