公开(公告)号：US20110134440A1

公开(公告)日：2011-06-09

申请号：US12959354

申请日：2010-12-02

Applicant: Hong Hocheng ,  Wei-Hsuan Hsu

Inventor： Hong Hocheng ,  Wei-Hsuan Hsu

IPC: G01B11/28 ,  G01J4/00 ,  G01B3/22 ,  G06F15/00

CPC classification number: G01B11/0625

Abstract: The monitoring apparatus for uniformity and residual thickness of nano-transfer printing process is installed at a specific location in the surrounding of a transfer printing unit, and, during any stage of the transfer printing process, performs monitoring or measuring the forming rate and forming profile of the forming material inside the transfer printing unit. The monitoring apparatus includes a detection unit, a measuring unit and an analysis unit. The detection unit emits a detection ray to the transfer printing unit. The measuring unit receives a reaction signal of the detection ray passing through the transfer printing unit. The analysis unit analyzes the reaction signal to determine transfer uniformity and the material residual thickness in the transfer print unit.

Abstract translation: 纳米转印印刷工艺的均匀性和残留厚度的监控装置安装在转印印刷单元的周围的特定位置，并且在转印印刷过程的任何阶段期间，执行监测或测量成型速率和形成轮廓 的转印印刷单元内的成形材料。 监视装置包括检测单元，测量单元和分析单元。 检测单元向转印单元发出检测光线。 测量单元接收通过转印机的检测光线的反应信号。 分析单元分析反应信号以确定转印单元中的转印均匀性和材料残留厚度。

公开(公告)号：US20110157591A1

公开(公告)日：2011-06-30

申请号：US12977053

申请日：2010-12-22

Applicant: Hong Hocheng ,  Wei-Hsuan Hsu

Inventor： Hong Hocheng ,  Wei-Hsuan Hsu

IPC: G01N21/55

CPC classification number: G01N21/553

Abstract: The monitoring apparatus for nano-transfer printing process is installed at a specific location in the surrounding of a transfer printing unit, and, during any stage of the transfer printing process, performs monitoring or measuring the filling height, filling rate and filling profile of the forming material inside the transfer printing unit. The monitoring apparatus includes a detection unit, a measuring unit and an analysis unit. The detection unit emits a detection ray to the transfer printing unit. The measuring unit receives a reaction signal of the detection ray passing through the transfer printing unit. The analysis unit analyzes the reaction signal to determine the filling height, the filling rate and filling profile of the forming material inside the transfer printing unit.

Abstract translation: 用于纳米转印印刷工艺的监控装置安装在转印印刷单元的周围的特定位置，并且在转印打印过程的任何阶段期间执行监视或测量填充高度，填充速率和填充曲线 在转印机内部形成材料。 监视装置包括检测单元，测量单元和分析单元。 检测单元向转印单元发出检测光线。 测量单元接收通过转印机的检测光线的反应信号。 分析单元分析反应信号以确定转印单元内的成形材料的填充高度，填充率和填充轮廓。

公开(公告)号：US07682552B2

公开(公告)日：2010-03-23

申请号：US10851113

申请日：2004-05-24

Applicant: Chin-Chung Nien ,  Ta-Chuan Liu ,  Hong Hocheng

Inventor： Chin-Chung Nien ,  Ta-Chuan Liu ,  Hong Hocheng

IPC: G01B11/00

CPC classification number: G03F7/0002 ,  B81C1/0046 ,  B81C99/0065 ,  B81C2201/0153 ,  B82Y10/00 ,  B82Y40/00

Abstract: The present invention relates to a capacitive measurement method and system for a nanoimprint process, which arranges a plurality of electrode plates on both the backside of the master mold and the surface of the supporting base carrying the wafer substrate to form a plurality of capacitive structures. By monitoring the capacitance variation signal caused by the continuous variations in the thickness and the material properties of the resist during the imprint process, the status of the resist can be monitored and recorded, which is used as the references for determining the timing to demold in the nanoimprint process and for maintaining the flatness of the resist. Accordingly, the nanoimprint process can be automated easier and the quality and the throughput of of the nanometer scaled imprint product can be improved.

Abstract translation: 本发明涉及一种用于纳米压印工艺的电容测量方法和系统，其在主模的背面和承载晶片衬底的支撑基体的表面上布置多个电极板以形成多个电容结构。 通过监测由压印过程中厚度的连续变化和抗蚀剂的材料特性引起的电容变化信号，可以监测和记录抗蚀剂的状态，作为确定脱模时间的参考 纳米压印工艺和用于保持抗蚀剂的平整度。 因此，纳米压印工艺可以更容易自动化，并且能够提高纳米压印产品的质量和生产量。

公开(公告)号：US08985056B2

公开(公告)日：2015-03-24

申请号：US13419090

申请日：2012-03-13

Applicant: Rong-Shun Chen ,  Jhih-Shun Yang ,  Yu-Ching Lin ,  Hung-Yin Tsai ,  Chien-Hung Lin ,  Hong Hocheng ,  Li-An Chu

Inventor： Rong-Shun Chen ,  Jhih-Shun Yang ,  Yu-Ching Lin ,  Hung-Yin Tsai ,  Chien-Hung Lin ,  Hong Hocheng ,  Li-An Chu

IPC: A01K1/03 ,  A01K67/033

CPC classification number: A01K67/033

Abstract: A detecting platform for holding a tiny insect includes a main body forming a containing space, which passes through the main body and is surrounded by side walls of the main body. A first side wall and a second side wall of the side walls are opposite to each other, and the area of the second side wall is smaller than that of the first side wall. The main body forms a first opening and a second opening passing through the first side wall and the second side wall respectively for the tiny insects entering and leaving the containing space. A bottom plate covers a first through surface of the containing space to form a bottom surface and a detecting area is configured thereon to holding the tiny insects. Accordingly, the tiny insects can stay on the detecting area so as to detect the characteristics of the tiny insects expediently.

Abstract translation: 用于保持微小昆虫的检测平台包括形成容纳空间的主体，该主体穿过主体并被主体的侧壁包围。 侧壁的第一侧壁和第二侧壁彼此相对，并且第二侧壁的面积小于第一侧壁的面积。 主体分别形成通过第一侧壁和第二侧壁的第一开口和第二开口，用于进入和离开容纳空间的微小昆虫。 底板覆盖容纳空间的第一通过表面以形成底面，并且在其上构造检测区域以保持微小的昆虫。 因此，微小的昆虫可以留在检测区域，以方便地检测微小昆虫的特征。

公开(公告)号：US20130083974A1

公开(公告)日：2013-04-04

申请号：US13419155

申请日：2012-03-13

Applicant: Hung-Yin Tsai ,  Yu-Ching Lin ,  Yu-Cheng Wu ,  Rong-Shun Chen ,  Hong Hocheng ,  Li-An Chu

Inventor： Hung-Yin Tsai ,  Yu-Ching Lin ,  Yu-Cheng Wu ,  Rong-Shun Chen ,  Hong Hocheng ,  Li-An Chu

IPC: G06K9/62

CPC classification number: G06K9/00 ,  G06K9/38 ,  G06K9/4642

Abstract: An image method for classifying insects includes the following steps: obtaining detecting images of the insects in a detecting area; obtaining a first foreground image related to the insects by background subtraction; extracting the saturation from the first foreground image and eliminating the non-characteristic objects therein to obtain a second foreground image; extracting the characteristics related to the insects from the second foreground image according to a threshold; and, determining the classifications or the sexes of the insects according to the characteristics. Accordingly, the image method for classifying insects can be used for automatically classifying the insects so as to save the manpower and time.

Abstract translation: 用于分类昆虫的图像方法包括以下步骤：在检测区域中获取昆虫的检测图像; 通过背景减法获得与昆虫相关的第一个前景图像; 从第一前景图像提取饱和度并消除其中的非特征对象以获得第二前景图像; 根据阈值从第二前景图像提取与昆虫相关的特征; 并根据特征确定昆虫的分类或性别。 因此，用于分类昆虫的图像方法可以用于昆虫的自动分类，以节省人力和时间。

公开(公告)号：US06872662B1

公开(公告)日：2005-03-29

申请号：US10695106

申请日：2003-10-27

Applicant: Hong Hocheng ,  Yun-Liang Huang

Inventor： Hong Hocheng ,  Yun-Liang Huang

IPC: B24B37/04 ,  B24B49/12 ,  B24B49/14 ,  H01L21/302 ,  H01L21/461

CPC classification number: B24B37/013 ,  B24B49/12 ,  B24B49/14 ,  Y10S438/907 ,  Y10S438/959

Abstract: A method for detecting the endpoint of a chemical mechanical polishing (CMP) process uses the slope variation of temperature difference of polishing pad. The method combines temperature measurement at polishing pad and atmosphere, and numerical analysis to figure out the curve of temperature difference variation versus polishing time. The endpoint of CMP is determined by the change of the slope of the curve. The method allows endpoint to be detected in-situ at the polishing apparatus, without stopping polishing process.

Abstract translation: 用于检测化学机械抛光（CMP）工艺的终点的方法使用抛光垫的温度差的斜率变化。 该方法结合了抛光垫的温度测量和气氛，并进行了数值分析，得出了温差变化与抛光时间的关系曲线。 CMP的终点由曲线的斜率的变化决定。 该方法允许在抛光装置处原地检测端点，而不停止抛光工艺。

公开(公告)号：US08755571B2

公开(公告)日：2014-06-17

申请号：US13419155

申请日：2012-03-13

Applicant: Hung-Yin Tsai ,  Yu-Ching Lin ,  Yu-Cheng Wu ,  Rong-Shun Chen ,  Hong Hocheng ,  Li-An Chu

Inventor： Hung-Yin Tsai ,  Yu-Ching Lin ,  Yu-Cheng Wu ,  Rong-Shun Chen ,  Hong Hocheng ,  Li-An Chu

IPC: G06K9/00

CPC classification number: G06K9/00 ,  G06K9/38 ,  G06K9/4642

Abstract: An image method for classifying insects includes the following steps: obtaining detecting images of the insects in a detecting area; obtaining a first foreground image related to the insects by background subtraction; extracting the saturation from the first foreground image and eliminating the non-characteristic objects therein to obtain a second foreground image; extracting the characteristics related to the insects from the second foreground image according to a threshold; and, determining the classifications or the sexes of the insects according to the characteristics. Accordingly, the image method for classifying insects can be used for automatically classifying the insects so as to save the manpower and time.

Abstract translation: 用于分类昆虫的图像方法包括以下步骤：在检测区域中获取昆虫的检测图像; 通过背景减法获得与昆虫相关的第一个前景图像; 从第一前景图像提取饱和度并消除其中的非特征对象以获得第二前景图像; 根据阈值从第二前景图像提取与昆虫相关的特征; 并根据特征确定昆虫的分类或性别。 因此，用于分类昆虫的图像方法可以用于昆虫的自动分类，以节省人力和时间。

公开(公告)号：US20130081572A1

公开(公告)日：2013-04-04

申请号：US13419090

申请日：2012-03-13

Applicant: Rong-Shun Chen ,  Jhih-Shun Yang ,  Yu-Ching Lin ,  Hung-Yin Tsai ,  Chien-Hung Lin ,  Hong Hocheng ,  Li-An Chu

Inventor： Rong-Shun Chen ,  Jhih-Shun Yang ,  Yu-Ching Lin ,  Hung-Yin Tsai ,  Chien-Hung Lin ,  Hong Hocheng ,  Li-An Chu

IPC: A01K29/00

CPC classification number: A01K67/033

Abstract: A detecting platform for holding a tiny insect includes a main body forming a containing space, which passes through the main body and is surrounded by side walls of the main body. A first side wall and a second side wall of the side walls are opposite to each other, and the area of the second side wall is smaller than that of the first side wall. The main body forms a first opening and a second opening passing through the first side wall and the second side wall respectively for the tiny insects entering and leaving the containing space. A bottom plate covers a first through surface of the containing space to form a bottom surface and a detecting area is configured thereon to holding the tiny insects. Accordingly, the tiny insects can stay on the detecting area so as to detect the characteristics of the tiny insects expediently.

Abstract translation: 用于保持微小昆虫的检测平台包括形成容纳空间的主体，该主体穿过主体并被主体的侧壁包围。 侧壁的第一侧壁和第二侧壁彼此相对，并且第二侧壁的面积小于第一侧壁的面积。 主体分别形成通过第一侧壁和第二侧壁的第一开口和第二开口，用于进入和离开容纳空间的微小昆虫。 底板覆盖容纳空间的第一通过表面以形成底面，并且在其上构造检测区域以保持微小的昆虫。 因此，微小的昆虫可以留在检测区域，以方便地检测微小昆虫的特征。

公开(公告)号：US20070246849A1

公开(公告)日：2007-10-25

申请号：US10791926

申请日：2004-03-02

Applicant: Hong Hocheng ,  Chin Nien

Inventor： Hong Hocheng ,  Chin Nien

IPC: B29C43/58 ,  B29C59/02

CPC classification number: B29C37/005 ,  B29C43/003 ,  B29C43/021 ,  B29C43/58 ,  B29C2043/025 ,  B29C2043/5825 ,  B29C2059/023 ,  B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  Y10S977/887

Abstract: A system for nano-imprint with mold deformation detector is disclosed for real-time monitoring of the deformation of the mold. An electrostatic plate capacitor is embedded in the mold, serving as the deformation detector. The capacitor includes two opposite metal film electrodes formed by silicon micromachining technique on opposite surfaces of the mold and connected by a metal lead. During imprinting, the mold is acted upon by an external force and deformation occurs, which induces change of distance between the metal film electrodes and thus variation of the capacitance of the capacitor. The amount of deformation of the mold can then be assessed by comparing the capacitance with a reference. Thus, real-time detection and monitoring of the deformation of the nano-imprint mold is realized. Also disclosed is a method for carrying out the real-time monitoring of the deformation of the mold.

Abstract translation: 公开了一种用于模具变形检测器的纳米压印系统，用于实时监测模具的变形。 静电板电容器嵌入模具中，用作变形检测器。 该电容器包括通过硅微加工技术在模具的相对表面上形成并通过金属引线连接的两个相对的金属膜电极。 在压印期间，模具被外力作用，发生变形，这引起金属膜电极之间的距离变化，从而导致电容器的电容变化。 然后可以通过将电容与参考值进行比较来评估模具的变形量。 因此，实现了纳米压印模具变形的实时检测和监测。 还公开了一种用于对模具变形进行实时监测的方法。

公开(公告)号：US09162294B2

公开(公告)日：2015-10-20

申请号：US13620701

申请日：2012-09-14

Applicant: Hong Hocheng ,  Chung-chen Tsao ,  Yen Chu Chen

Inventor： Hong Hocheng ,  Chung-chen Tsao ,  Yen Chu Chen

IPC: B23B41/00 ,  B23B47/00 ,  B23B35/00

CPC classification number: B23B35/005 ,  B23B2226/27 ,  Y10T408/03 ,  Y10T408/5626

Abstract: The present invention provides a drilling apparatus and a method thereof capable of providing an adjustable active backup force to a composite workpiece to effectively reduce the delamination of the workpiece during drilling such that the application of the active backup force in terms of its force magnitude and its application location on the workpiece can adjustably counter the drill thrust force to retard the onset of delamination growth and reduce delamination damage at the drill exit in the workpiece, in particular in situation where large feed rate with short cycle time is desired for drilling of composite materials. A critical drill thrust force of the drilling apparatus and the method of the present invention is advantageously obtained in relation to said active backup force and the application of the active backup force to reduce the crack propagation of the delamination occurred in the composite workpiece.

Abstract translation: 本发明提供了一种钻孔设备及其方法，其能够为复合材料工件提供可调整的主动支撑力，以有效减少钻孔过程中工件的分层，从而根据其力大小及其力大小施加主动后备力 工件上的应用位置可以可调整地抵抗钻头推力，以阻止分层生长的开始，并减少工件的钻孔出口处的分层损伤，特别是在需要用于钻孔复合材料的较短循环时间的大进给速率的情况下 。 关于所述主动支撑力和施加主动支撑力来有利地获得钻井装置的临界钻推力和本发明的方法，以减少在复合工件中发生的分层的裂纹扩展。