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公开(公告)号：US20050145614A1
公开(公告)日：2005-07-07
申请号：US10753253
申请日：2004-01-05
IPC分类号： F27B5/04 , F27B5/14 , F27B5/18 , F27B17/00 , F27D11/00 , F27D19/00 , F27D21/00 , G05D23/00 , H01L21/00
CPC分类号： H01L21/67248 , F27B5/04 , F27B5/14 , F27B5/18 , F27B17/0025 , F27D19/00 , F27D21/0014 , F27D2019/0037 , H01L21/67109
摘要： A semiconductor device manufacturing system including a processing subsystem and a compensation thermal subsystem. The processing subsystem includes a process chamber and a thermal control subsystem having a processing subsystem heating element and configured to generate a process chamber temperature profile. The compensation thermal subsystem includes a temperature sensor configured to detect the process chamber temperature profile, a compensation thermal control unit (CTCU) configured to determine variation between the process chamber temperature profile and a desired temperature profile, and a compensation heating element configured to alter the process chamber temperature profile in response to the variation detected by the CTCU.
摘要翻译： 一种包括处理子系统和补偿热子系统的半导体器件制造系统。 处理子系统包括处理室和具有处理子系统加热元件并被配置为产生处理室温度分布的热控制子系统。 补偿热子系统包括被配置为检测处理室温度分布的温度传感器，被配置为确定处理室温度分布和期望温度分布之间的变化的补偿热控制单元（CTCU），以及补偿加热元件，其被配置为改变 响应于CTCU检测到的变化，处理室温度曲线。
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公开(公告)号：US20060043029A1
公开(公告)日：2006-03-02
申请号：US10931123
申请日：2004-08-30
IPC分类号： B01D29/66
摘要： A continuous liquid delivery system which includes at least one primary filter and at least one secondary filter for alternatively receiving a liquid such as a CMP polishing slurry. A primary backwash circuit is provided in fluid communication with each primary filter for backwashing of the primary filter. At least one secondary backwash circuit is provided in fluid communication with each secondary filter for backwashing of the secondary filter. As the liquid is distributed through the primary filter or filters, the secondary filter or filters can be backwashed, and vice-versa to facilitate a continuous flow of the liquid from a source to a destination.
摘要翻译： 一种连续液体输送系统，其包括至少一个初级过滤器和至少一个辅助过滤器，用于替代地接收液体，例如CMP抛光浆料。 提供主回流电路与每个主过滤器流体连通，用于主过滤器的反冲洗。 提供至少一个二次反洗电路与每个二次过滤器流体连通，用于二次过滤器的反冲洗。 当液体通过主过滤器或过滤器分配时，二次过滤器或过滤器可以被反冲洗，反之亦然，以便于液体从源到目的地的连续流动。
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公开(公告)号：US06843264B2
公开(公告)日：2005-01-18
申请号：US10323377
申请日：2002-12-18
申请人： Chih-Tien Chang , Hsueh-Chang Wu , Sunny Wu , Chien-Ling Huang , Chin-Hsin Peng , Mei-Seng Zhou
发明人： Chih-Tien Chang , Hsueh-Chang Wu , Sunny Wu , Chien-Ling Huang , Chin-Hsin Peng , Mei-Seng Zhou
CPC分类号： F16K1/223 , C23C16/4412 , Y10T137/0396 , Y10T137/86944 , Y10T137/87378 , Y10T137/87523
摘要： A new and improved, multi-phase pressure control valve for facilitating quick and accurate attainment and stabilization of gas pressure inside a semiconductor fabrication process chamber such as an etch chamber or CVD chamber. In one embodiment, the multi-phase pressure control valve is a butterfly-type valve which includes outer and inner vanes that independently control flow of gases from a process chamber to a vacuum pump. The larger-diameter outer vane stabilizes gas pressures within a large range, whereas the inner vane stabilizes pressure within a smaller range. In another embodiment, the multi-phase pressure control valve is a gate-type valve which may include a pivoting outer vane and an inner vane slidably disposed with respect to the outer vane for exposing a central gas flow opening in the outer vane.
摘要翻译： 一种新的和改进的多相压力控制阀，用于促进半导体制造工艺室（例如蚀刻室或CVD室）内的气体压力的快速和准确的获得和稳定。 在一个实施例中，多相压力控制阀是蝶形阀，其包括独立地控制气体从处理室到真空泵的流动的外叶片和内叶片。 较大直径的外叶片将气体压力稳定在大范围内，而内叶片将压力稳定在较小的范围内。 在另一个实施例中，多相压力控制阀是门型阀，其可以包括枢转外叶片和相对于外叶片可滑动地设置的用于暴露外叶片中的中心气流开口的内叶片。
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4.发明申请Method and apparatus for controlling spatial distribution of RF power and plasma density 审中-公开用于控制RF功率和等离子体密度的空间分布的方法和装置公开(公告)号：US20050031796A1
公开(公告)日：2005-02-10
申请号：US10636154
申请日：2003-08-07
申请人： Sunny Wu , Bing-Hung Chen , Ping-Hsu Chen , Chih-Tien Chang
发明人： Sunny Wu , Bing-Hung Chen , Ping-Hsu Chen , Chih-Tien Chang
CPC分类号： H01J37/32174 , H01J37/32082 , H01J37/32935
摘要： Uniform spatial distribution of plasma over the face of a semiconductor wafer is achieved using a multi-zone electrode forming part of an electrostatic chuck used to hold the wafer in a processing chamber. The electrode includes a plurality of concentric electrode portions to which differing RF bias voltages may be applied to produce an electric field having a desired spatial distribution. Sensors are used to monitor either the spatial distribution of the plasma or the process effects of the plasma, and the sensed information is fed back to a controller that adjusts the bias voltage on the electrode portions in a manner to maintain the spatial uniformity of the plasma.
摘要翻译： 使用形成用于将晶片保持在处理室中的静电卡盘的一部分的多区电极来实现半导体晶片的表面上的等离子体的均匀空间分布。 电极包括多个同心电极部分，可以施加不同的RF偏置电压以产生具有期望的空间分布的电场。 传感器用于监测等离子体的空间分布或等离子体的过程效应，并且将感测到的信息反馈到控制器，该控制器以维持等离子体的空间均匀性的方式调节电极部分上的偏置电压 。
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公开(公告)号：US08310384B2
公开(公告)日：2012-11-13
申请号：US12956071
申请日：2010-11-30
申请人： Po Lin Yeh , Chien-Hsing Lin , Shao Ping Hung , Chih-Tien Chang , Chun-Chia Chen , Jui-Hua Yeh
发明人： Po Lin Yeh , Chien-Hsing Lin , Shao Ping Hung , Chih-Tien Chang , Chun-Chia Chen , Jui-Hua Yeh
IPC分类号： H03M1/48
CPC分类号： H03M1/12
摘要： A phase digitizing apparatus for generating a corresponding digital value in response to a phase of an input signal is provided. The phase digitizing apparatus includes a coarse phase generator, for generating a coarse phase code according to the phase of the input signal and a first time unit; a fine phase code generator, for generating a fine phase code according to the phase of the input signal and a second time unit; and a calculating unit, for generating the digital value according to the coarse phase code and the fine phase code; wherein the first time unit is greater than the second time unit.
摘要翻译： 提供一种相位数字化装置，用于响应于输入信号的相位产生相应的数字值。 相位数字化装置包括粗略相位发生器，用于根据输入信号的相位和第一时间单位产生粗略相位代码; 精细相位代码发生器，用于根据输入信号的相位和第二时间单位产生精细相位代码; 以及计算单元，用于根据粗相位代码和精细相位码产生数字值; 其中所述第一时间单位大于所述第二时间单位。
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公开(公告)号：US20110051009A1
公开(公告)日：2011-03-03
申请号：US12841442
申请日：2010-07-22
申请人： Kun-Nan Cheng , Chih-Tien Chang , Chit-Keng Huang
发明人： Kun-Nan Cheng , Chih-Tien Chang , Chit-Keng Huang
IPC分类号： H04N5/14
摘要： An auto phase detection apparatus for automatically detecting a target sampling phase is provided. The auto phase detection apparatus includes a phase decider for generating a plurality of phase control signals; a sample clock generator, coupled to the phase decider, for generating a plurality of sample clock signals according to the phase control signals; an analog-to-digital converter (ADC), coupled to the sample clock generator, for converting an analog video signal to a digital signal according to the sample clock signals; a phase detector, coupled to the ADC and the phase decider, for generating a plurality of phase detection results according to the digital signal; and a motion detector, coupled to the ADC and the phase decider, for generating a motion detection result by detecting a motion in the digital signal. The phase decider determines the target sampling phase from the phase control signals according to the phase detection results and the motion detection result.
摘要翻译： 提供了一种用于自动检测目标采样相位的自动相位检测装置。 自动相位检测装置包括用于产生多个相位控制信号的相位判定器; 耦合到相位决定器的采样时钟发生器，用于根据相位控制信号产生多个采样时钟信号; 耦合到采样时钟发生器的模数转换器（ADC），用于根据采样时钟信号将模拟视频信号转换成数字信号; 耦合到ADC和相位决定器的相位检测器，用于根据数字信号产生多个相位检测结果; 以及耦合到ADC和相位决定器的运动检测器，用于通过检测数字信号中的运动来产生运动检测结果。 相位决定器根据相位检测结果和运动检测结果根据相位控制信号确定目标采样相位。
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7.发明授权公开(公告)号：US09450583B2
公开(公告)日：2016-09-20
申请号：US13225718
申请日：2011-09-06
申请人： Yao-Zhong Zhang , Ju-Ming Chou , Chih-Tien Chang
发明人： Yao-Zhong Zhang , Ju-Ming Chou , Chih-Tien Chang
IPC分类号： H03K17/687 , H03K19/0185
CPC分类号： H03K19/018507
摘要： An input/output (IO) circuit with high voltage tolerance is provided. In an integrated circuit, the IO circuit includes a charge pump for generating a bias voltage higher than an internal operating voltage of the charge pump itself, and a switch between an external circuit and an internal circuit of the integrated circuit. When the switch conducts between the external circuit and the internal circuit, the switch provides a clamping voltage according to the bias voltage and a cross voltage of the switch, so that a voltage of the internal circuit is bounded by the clamping voltage to prevent the internal circuit from over-voltage.
摘要翻译： 提供具有高电压容差的输入/输出（IO）电路。 在集成电路中，IO电路包括用于产生高于电荷泵本身的内部工作电压的偏置电压的电荷泵以及集成电路的外部电路和内部电路之间的开关。 当开关在外部电路和内部电路之间导通时，开关根据偏置电压和开关的交叉电压提供钳位电压，使得内部电路的电压由钳位电压限制，以防止内部 电路过压。
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8.发明授权公开(公告)号：US08497853B2
公开(公告)日：2013-07-30
申请号：US11425719
申请日：2006-06-22
申请人： Sterling Smith , Chih-Tien Chang , Kuo-Feng Hsu , Cheng-Yu Lu , Song-Yi Lin , Guo-Kiang Hung
发明人： Sterling Smith , Chih-Tien Chang , Kuo-Feng Hsu , Cheng-Yu Lu , Song-Yi Lin , Guo-Kiang Hung
CPC分类号： G09G3/3406 , G09G3/20 , G09G2310/08 , G09G2320/02 , G09G2320/0233 , G09G2320/064
摘要： A flat panel display device, LCD controller and associated method is provided. The flat panel display device includes a display panel, a lamp for providing a backlight source for the display panel, a power transformation module for providing a power source for the lamp, a non-volatile storage unit for storing program code, and a display controller. The display controller includes an image processing module for processing image data and outputting processed results to the display panel, and a digital pulse width modulation module for adjusting on and off time of the power transformation module with reference to a synchronization signal.
摘要翻译： 提供了一种平板显示装置，LCD控制器及相关方法。 平板显示装置包括显示面板，用于提供用于显示面板的背光源的灯，用于提供灯的电源的功率变换模块，用于存储程序代码的非易失性存储单元和显示控制器 。 显示控制器包括用于处理图像数据并将处理结果输出到显示面板的图像处理模块，以及用于参考同步信号调整功率变换模块的接通和关断时间的数字脉宽调制模块。
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公开(公告)号：US20110187567A1
公开(公告)日：2011-08-04
申请号：US12956071
申请日：2010-11-30
申请人： Po Lin Yeh , Chien-Hsing Lin , Shao Ping Hung , Chih-Tien Chang , Chun-Chia Chen , Jui-Hua Yeh
发明人： Po Lin Yeh , Chien-Hsing Lin , Shao Ping Hung , Chih-Tien Chang , Chun-Chia Chen , Jui-Hua Yeh
IPC分类号： H03M1/12
CPC分类号： H03M1/12
摘要： A phase digitizing apparatus for generating a corresponding digital value in response to a phase of an input signal is provided. The phase digitizing apparatus includes a coarse phase generator, for generating a coarse phase code according to the phase of the input signal and a first time unit; a fine phase code generator, for generating a fine phase code according to the phase of the input signal and a second time unit; and a calculating unit, for generating the digital value according to the coarse phase code and the fine phase code; wherein the first time unit is greater than the second time unit.
摘要翻译： 提供一种相位数字化装置，用于响应于输入信号的相位产生相应的数字值。 相位数字化装置包括粗略相位发生器，用于根据输入信号的相位和第一时间单位产生粗略相位代码; 精细相位代码发生器，用于根据输入信号的相位和第二时间单位产生精细相位代码; 以及计算单元，用于根据粗相位代码和精细相位码产生数字值; 其中所述第一时间单位大于所述第二时间单位。
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10.发明申请公开(公告)号：US20070001998A1
公开(公告)日：2007-01-04
申请号：US11423149
申请日：2006-06-09
申请人： Sterling Smith , Chih-Tien Chang
发明人： Sterling Smith , Chih-Tien Chang
IPC分类号： G09G3/36
CPC分类号： G09G3/3406 , G09G3/20 , G09G2310/08 , G09G2320/02 , G09G2320/0233 , G09G2320/064
摘要： A flat panel display device, LCD controller and associated method is provided. The flat panel display device includes a display panel, a lamp for providing a backlight source for the display panel, a power transformation module for providing a power source for the lamp, a non-volatile storage unit for storing program code, and a display controller. The display controller includes an image processing module for processing image data and outputting processed results to the display panel, and a digital pulse width modulation module for adjusting on and off time of the power transformation module according to a synchronization signal.
摘要翻译： 提供了一种平板显示装置，LCD控制器及相关方法。 平板显示装置包括显示面板，用于提供用于显示面板的背光源的灯，用于提供灯的电源的功率变换模块，用于存储程序代码的非易失性存储单元和显示控制器 。 显示控制器包括用于处理图像数据并将处理结果输出到显示面板的图像处理模块，以及用于根据同步信号调整功率变换模块的开和关时间的数字脉宽调制模块。
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