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    3-DIMENSIONAL GRAPHENE STRUCTURE AND PROCESS FOR PREPARING AND TRANSFERRING THE SAME
    1.
    发明申请
    3-DIMENSIONAL GRAPHENE STRUCTURE AND PROCESS FOR PREPARING AND TRANSFERRING THE SAME 有权
    三维石墨结构及其制备和转移的方法

    公开(公告)号：US20120248401A1

    公开(公告)日：2012-10-04

    申请号：US13437140

    申请日：2012-04-02

    申请人： Hyeon-jin Shin ,  Jae-young Choi ,  Ji-hoon Park ,  Joung-real Ahn

    发明人： Hyeon-jin Shin ,  Jae-young Choi ,  Ji-hoon Park ,  Joung-real Ahn

    IPC分类号： H01L29/02 ,  H01L21/20 ,  H01L21/762 ,  B82Y99/00 ,  B82Y40/00

    CPC分类号： H01L21/02587 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/188 ,  H01L21/0237 ,  H01L21/02378 ,  H01L21/0243 ,  H01L21/02491 ,  H01L21/02527 ,  H01L21/02612 ,  H01L21/02658 ,  H01L29/0657 ,  H01L29/1606

    摘要： A three-dimensional graphene structure, and methods of manufacturing and transferring the same including forming at least one layer of graphene having a periodically repeated three-dimensional shape. The three-dimensional graphene structure is formed by forming a pattern having a three-dimensional shape on a surface of a substrate, and forming the three-dimensional graphene structure having the three-dimensional shape of the pattern by growing graphene on the substrate on which the pattern is formed. The three-dimensional graphene structure is transferred by injecting a gas between the three-dimensional graphene structure and the substrate, separating the three-dimensional graphene structure from the substrate by bonding the three-dimensional graphene structure to an adhesive support, combining the three-dimensional graphene structure with an insulating substrate, and removing the adhesive support.

    摘要翻译： 三维石墨烯结构，以及制造和转移三维石墨烯结构的方法，包括形成具有周期性重复的三维形状的至少一层石墨烯。 三维石墨烯结构通过在基板的表面上形成具有三维形状的图案而形成，并且通过在基板上生长石墨烯来形成具有图案的三维形状的三维石墨烯结构， 形成图案。 通过在三维石墨烯结构和衬底之间注入气体来转移三维石墨烯结构，通过将三维石墨烯结构粘合到粘合剂支持体上，将三维石墨烯结构与基底分离， 具有绝缘基底的三维石墨烯结构，以及去除粘合剂支撑。

    3-dimensional graphene structure and process for preparing and transferring the same
    2.
    发明授权
    3-dimensional graphene structure and process for preparing and transferring the same 有权
    三维石墨烯结构及其制备和转移过程

    公开(公告)号：US08921824B2

    公开(公告)日：2014-12-30

    申请号：US13437140

    申请日：2012-04-02

    申请人： Hyeon-jin Shin ,  Jae-young Choi ,  Ji-hoon Park ,  Joung-real Ahn

    发明人： Hyeon-jin Shin ,  Jae-young Choi ,  Ji-hoon Park ,  Joung-real Ahn

    IPC分类号： H01L29/06 ,  H01L21/02 ,  C01B31/04 ,  H01L29/16 ,  B82Y40/00 ,  B82Y30/00

    CPC分类号： H01L21/02587 ,  B82Y30/00 ,  B82Y40/00 ,  C01B32/188 ,  H01L21/0237 ,  H01L21/02378 ,  H01L21/0243 ,  H01L21/02491 ,  H01L21/02527 ,  H01L21/02612 ,  H01L21/02658 ,  H01L29/0657 ,  H01L29/1606

    摘要： A three-dimensional graphene structure, and methods of manufacturing and transferring the same including forming at least one layer of graphene having a periodically repeated three-dimensional shape. The three-dimensional graphene structure is formed by forming a pattern having a three-dimensional shape on a surface of a substrate, and forming the three-dimensional graphene structure having the three-dimensional shape of the pattern by growing graphene on the substrate on which the pattern is formed. The three-dimensional graphene structure is transferred by injecting a gas between the three-dimensional graphene structure and the substrate, separating the three-dimensional graphene structure from the substrate by bonding the three-dimensional graphene structure to an adhesive support, combining the three-dimensional graphene structure with an insulating substrate, and removing the adhesive support.

    摘要翻译： 三维石墨烯结构，以及制造和转移三维石墨烯结构的方法，包括形成具有周期性重复的三维形状的至少一层石墨烯。 三维石墨烯结构通过在基板的表面上形成具有三维形状的图案而形成，并且通过在基板上生长石墨烯来形成具有图案的三维形状的三维石墨烯结构， 形成图案。 通过在三维石墨烯结构和衬底之间注入气体来转移三维石墨烯结构，通过将三维石墨烯结构粘合到粘合剂支持体上，将三维石墨烯结构与基底分离， 具有绝缘基底的三维石墨烯结构，以及去除粘合剂支撑。