Multi-layer ceramic/metal type gas sensor and manufacturing method of the same

    公开(公告)号:US11193908B2

    公开(公告)日:2021-12-07

    申请号:US15749257

    申请日:2016-07-22

    摘要: The present invention relates to a gas sensor and a manufacturing method thereof. A sensor body of the gas sensor is formed by cutting a multi-layered ceramic/metal platform where a plurality of sequential layer structures of a ceramic dielectric material and metal are layered in a layering direction. The sensor body includes at least one layered body wherein a ceramic dielectric material, a first internal electrode, a ceramic dielectric material, and a second internal electrode are sequentially layered. The first internal electrode and the second internal electrode are exposed through a cut surface by cutting. The first internal electrode is electrically connected to a first electrode terminal disposed on a first side of the sensor body, and the second internal electrode is electrically connected to a second electrode terminal disposed on a second side of the sensor body facing the first side. The first and the second internal electrode are exposed to form a sensing surface on at least one side of the sensor body excluding a side where the first and the second electrode terminal are installed. A gas sensing material layer for gas detection is formed on a portion or an entire upper portion of the sensing surface, or a metal film whose contact resistance with the gas sensing material layer is lower than the first and the second internal electrode is formed on upper portions of the first and the second internal electrode which are exposed and a gas sensing material layer for gas detection is formed on a portion or an entire upper portion of the sensing surface where the metal film is formed.

    Multi-Layer Ceramic/Metal Type Gas Sensor And Manufacturing Method Of The Same

    公开(公告)号:US20180224391A1

    公开(公告)日:2018-08-09

    申请号:US15749257

    申请日:2016-07-22

    IPC分类号: G01N27/409 B82B3/00 B82B1/00

    摘要: The present invention relates to a gas sensor and a manufacturing method thereof. A sensor body of the gas sensor is formed by cutting a multi-layered ceramic/metal platform where a plurality of sequential layer structures of a ceramic dielectric material and metal are layered in a layering direction. The sensor body includes at least one layered body wherein a ceramic dielectric material, a first internal electrode, a ceramic dielectric material, and a second internal electrode are sequentially layered. The first internal electrode and the second internal electrode are exposed through a cut surface by cutting. The first internal electrode is electrically connected to a first electrode terminal disposed on a first side of the sensor body, and the second internal electrode is electrically connected to a second electrode terminal disposed on a second side of the sensor body facing the first side. The first and the second internal electrode are exposed to form a sensing surface on at least one side of the sensor body excluding a side where the first and the second electrode terminal are installed. A gas sensing material layer for gas detection is formed on a portion or an entire upper portion of the sensing surface, or a metal film whose contact resistance with the gas sensing material layer is lower than the first and the second internal electrode is formed on upper portions of the first and the second internal electrode which are exposed and a gas sensing material layer for gas detection is formed on a portion or an entire upper portion of the sensing surface where the metal film is formed.

    THERMOCHEMICAL GAS SENSOR USING CHALCOGENIDE-BASED NANOWIRES AND METHOD FOR MANUFACTURING THE SAME
    10.
    发明申请
    THERMOCHEMICAL GAS SENSOR USING CHALCOGENIDE-BASED NANOWIRES AND METHOD FOR MANUFACTURING THE SAME 审中-公开
    使用基于氯醛的纳米管的热化学气体传感器及其制造方法

    公开(公告)号:US20160013389A1

    公开(公告)日:2016-01-14

    申请号:US14770921

    申请日:2014-02-26

    摘要: The present invention relates to a thermochemical gas sensor using chalcogenide-based nanowires and a method for same, comprising: a porous alumina template comprising a front surface, a rear surface, and side surfaces and provided with a plurality of pores which penetrate the front surface and the rear surface; a seed layer provided on the rear surface of the porous alumina template for covering the plurality of pores and having electric conductivity; a plurality of chalcogenide-based nanowires provided inside the plurality of pores and coming into contact with the seed layer, which is exposed through the plurality of pores; an electrode provided on the front surface of the porous alumina template and coming into contact with the chalcogenide-based nanowires; an electrode wire for electrically connecting with the electrode; and a porous white gold-alumina composite or a porous palladium-alumina composite provided above the electrode for causing a heat-emitting reaction by coming into contact with a gas to be detected, wherein the chalcogenide-based nanowires comprise BixTey(1.5≦x≦2.5, 2.4≦y≦3.6), SbxTey(1.5≦x≦2.5, 2.4≦y≦3.6) or (Bi1-xSbx)Te3(0

    摘要翻译: 本发明涉及一种使用硫族化物基纳米线的热化学气体传感器及其方法,包括:多孔氧化铝模板,包括前表面,后表面和侧表面,并且具有穿过前表面的多个孔 和后表面; 种子层,设置在所述多孔氧化铝模板的后表面上,用于覆盖所述多个孔并具有导电性; 多个硫属元素化物系的纳米线设置在多个孔内,与通过多个孔露出的种子层接触; 设置在多孔氧化铝模板的前表面上并与硫族化物基纳米线接触的电极; 用于与电极电连接的电极线; 以及设置在电极上方的多孔白金 - 氧化铝复合物或多孔钯 - 氧化铝复合物,用于通过与要检测的气体接触而引起发热反应,其中硫族化物基纳米线包括BixTey(1.5& NlE; x& (2.5,2.4≦̸ y≦̸ 3.6),Sb x Tey(1.5≦̸ x≦̸ 2.5,2.4和nlE; y≦̸ 3.6)或(Bi1-xSbx)Te3(0